CN111983776B - Micro-displacement actuator - Google Patents

Micro-displacement actuator Download PDF

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Publication number
CN111983776B
CN111983776B CN202010996484.5A CN202010996484A CN111983776B CN 111983776 B CN111983776 B CN 111983776B CN 202010996484 A CN202010996484 A CN 202010996484A CN 111983776 B CN111983776 B CN 111983776B
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guide
micro
output shaft
displacement actuator
driving device
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CN111983776A (en
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杨飞
刘炎森
郭鹏
姜海波
张景旭
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/183Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators

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  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Astronomy & Astrophysics (AREA)
  • Sustainable Development (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Transmission Devices (AREA)

Abstract

The invention discloses a micro-displacement actuator, which comprises a guide mechanism, a fine adjustment mechanism and a gravity unloading device, and comprises: the linear bearing comprises a bearing seat and a guide rod, the bearing seat is fixed on the upper end face of the shell, the guide rod is connected with the bearing seat in a sliding mode, and two ends of the guide rod are respectively connected with the two guide discs. The guide disc provides radial restraint for the output shaft, and the guide disc can allow the output shaft to perform micro axial displacement due to the elasticity of the guide disc. When the first linear driving device drives the output shaft to move up and down, if the linear bearing is blocked due to friction, the output shaft can be supported to continue to move to a target position through the axial deformation of the guide disc, and further the working precision of the micro-displacement actuator is ensured.

Description

Micro-displacement actuator
Technical Field
The invention relates to the field of optical telescopes, in particular to a micro-displacement actuator.
Background
The micro-displacement actuator is a key component of a sub-mirror supporting system of the large-scale spliced mirror optical telescope, and plays a role in supporting and adjusting the pose of the sub-mirror. Three actuators are typically arranged behind each sub-mirror to control the movement of the sub-mirrors in the normal direction of the mirror surface (defocus) and the deflection of the opposing mirror surface to achieve confocal and co-phasing of the sub-mirrors.
In order to meet the imaging requirements of a telescope, the micro-displacement actuator needs to achieve the nanometer resolution, the millimeter stroke and the load capacity of dozens of kilograms. With the increasing of the aperture of the telescope, the deformation of the structure is larger due to the influence of gravity, wind load and the like, and the stroke of the required actuator is higher.
The guide mechanism of the existing micro-displacement actuator causes the precision of the micro-displacement actuator to be reduced due to phenomena such as hysteresis caused by friction.
In addition, some pitching angles of the telescope in the observation process can cause the actuator to bear tensile force, and for a sub-mirror with the diameter of 0.5 meter, the existing actuator can only bear positive pressure and cannot be suitable for all working conditions, and for a telescope with a larger caliber, the existing actuator cannot reach the required stroke.
Therefore, how to provide a micro-displacement actuator to improve the adjustment accuracy and the adaptability to the working conditions is a technical problem that needs to be solved urgently by those skilled in the art.
Disclosure of Invention
The invention aims to provide a micro-displacement actuator which can effectively solve the problem of low adjustment precision of the existing actuator.
In order to solve the technical problems, the invention provides the following technical scheme:
a micro-displacement actuator comprising: the linear bearing comprises a bearing seat and a guide rod, the bearing seat is fixed on the upper end face of the shell, the guide rod is in sliding connection with the bearing seat, two ends of the guide rod are respectively connected with the two guide discs, the first linear driving device is used for driving the output shaft to move up and down, and the guide discs are used for generating axial deformation when receiving axial force.
Preferably, the automatic transmission mechanism further comprises a sleeve, a push plate, an upper end spring, a lower end spring and a second linear driving device, wherein the upper end of the sleeve is connected with the output shaft, two ends of the upper end spring are respectively connected with the inner top surface of the sleeve and the upper end surface of the push plate, two ends of the lower end spring are respectively connected with the inner bottom surface of the sleeve and the lower end surface of the push plate, and the second linear driving device is used for controlling the push plate to move along the axial direction of the output shaft.
Preferably, the second linear driving device comprises a nut guide, a screw rod and a motor, the nut guide is connected with the push plate, the nut guide is in threaded connection with the screw rod, and the motor is used for controlling the screw rod to rotate so that the nut guide moves along the axial direction of the screw rod and further drives the push plate to move.
Preferably, first linear drive is voice coil motor, voice coil motor is including removing end, stiff end and support frame, remove the end with output shaft, the stiff end with the support frame is connected, the support frame is fixed on the interior bottom surface of casing.
Preferably, the upper end spring is sleeved outside the fixed end, and the support frame sequentially penetrates through the push plate and the sleeve from top to bottom and is fixed on the inner bottom surface of the shell.
Preferably, the nut guide is slidably coupled to the support bracket.
Preferably, a plurality of threaded holes are formed in the nut guide along the circumferential direction of the nut guide, and the second linear driving device comprises a plurality of lead screws in one-to-one correspondence with the threaded holes.
Preferably, the support frame is provided with a plurality of guide grooves corresponding to the lead screws one to one, the nut guide piece is provided with a guide block connected with the guide grooves in a sliding manner, and the guide block is provided with the threaded holes.
Preferably, the periphery of the bottom of the support frame is provided with a limiting part, and the limiting part is used for limiting the downward movement of the sleeve.
Preferably, a plurality of linear bearings are arranged between the two guide discs and are uniformly distributed along the circumferential direction of the guide discs.
Compared with the prior art, the technical scheme has the following advantages:
the invention provides a micro-displacement actuator, which comprises a guide mechanism, a fine adjustment mechanism and a gravity unloading device, and comprises: the linear bearing comprises a bearing seat and a guide rod, the bearing seat is fixed on the upper end face of the shell, the guide rod is connected with the bearing seat in a sliding mode, and two ends of the guide rod are respectively connected with the two guide discs. The guide disc provides radial restraint for the output shaft, and the guide disc can allow the output shaft to perform micro axial displacement due to the elasticity of the guide disc. When the first linear driving device drives the output shaft to move up and down, if the linear bearing is blocked due to friction, the output shaft can be supported to continue to move to a target position through the axial deformation of the guide disc, and further the working precision of the micro-displacement actuator is ensured.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a micro-displacement actuator according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a micro-displacement actuator according to an embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view of FIG. 1;
FIG. 4 is a schematic view of a guide mechanism;
fig. 5 is a schematic view of a gravity unloading mechanism.
The reference numbers are as follows:
the device comprises an output shaft 1, a guide disc 2, a linear bearing 3, a shell 4, a voice coil motor 5, a support frame 6, a push plate 7, a sleeve 8, an upper end spring 9, a nut guide 10, a lower end spring 11 and a stepping motor 12.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
In the following description, specific details are set forth in order to provide a thorough understanding of the present invention. The invention can be implemented in a number of ways different from those described herein and similar generalizations can be made by those skilled in the art without departing from the spirit of the invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.
Referring to fig. 1 to 5, fig. 1 is a schematic structural diagram of a micro-displacement actuator according to an embodiment of the present invention; FIG. 2 is a schematic diagram of a micro-displacement actuator according to an embodiment of the present invention; FIG. 3 is a schematic cross-sectional view of FIG. 1; FIG. 4 is a schematic view of a guide mechanism; fig. 5 is a schematic view of a gravity unloading mechanism.
One embodiment of the present invention provides a micro-displacement actuator with a large stroke, high precision and high load for a sub-mirror with a diameter of about 0.5 m, comprising a guiding mechanism, a fine-tuning mechanism and a gravity unloading device, wherein the guiding mechanism comprises: the axial displacement of the output shaft 1 can be controlled by a first linear driving device, wherein two guide discs 2 are respectively fixed at two ends of the output shaft 1, the linear bearing 3 comprises a bearing seat and a guide rod, the bearing seat is fixed on the upper end surface of the shell 4, the guide rod is connected with the bearing seat in a sliding manner, and two ends of the guide rod are respectively connected with the two guide discs 2. Wherein the guide mechanism is an important part for ensuring the stroke and precision of the actuator, the guide disc 2 provides radial restraint for the output shaft 1, and the output shaft 1 can be allowed to perform micro axial displacement due to the elasticity of the guide disc 2. When the first linear driving device drives the output shaft 1 to move up and down, if the linear bearing 3 is blocked due to friction, the output shaft 1 can be supported to continue to move to a target position through the axial deformation of the guide disc 2, and further the working precision of the micro-displacement actuator is ensured.
In order to further ensure the stability of the axial displacement of the output shaft 1, a plurality of linear bearings 3 are arranged between the two guide discs 2, the plurality of linear bearings 3 are uniformly distributed along the circumferential direction of the guide discs 2, the output shaft 1 is positioned in the middle of the guide discs 2, and the plurality of linear bearings 3 are arranged around the output shaft 1.
Specifically, the gravity unloading device comprises a sleeve 8, a push plate 7, an upper end spring 9, a lower end spring 11 and a second linear driving device, the upper end of the sleeve 8 is connected with the output shaft 1, two ends of the upper end spring 9 are respectively connected with the inner top surface of the sleeve 8 and the upper end surface of the push plate 7, two ends of the lower end spring 11 are respectively connected with the inner bottom surface of the sleeve 8 and the lower end surface of the push plate 7, and the second linear driving device is used for controlling the push plate 7 to move along the axial direction of the output shaft 1. Therefore, the push plate 7 compresses the upper spring and the lower spring respectively, the output shaft 1 can bear positive load and negative load, the stroke of +/-10 mm can be provided under the external force of-50 to 200 newtons, and the problem that a product cannot bear negative pressure under the same load condition is solved.
The second linear driving device comprises a nut guide 10, a screw rod and a motor, the motor preferably selects a stepping motor 12, the nut guide 10 is connected with the push plate 7, the nut guide 10 is in threaded connection with the screw rod, and the motor is used for controlling the screw rod to rotate so that the nut guide 10 moves along the axial direction of the screw rod and further drives the push plate 7 to move.
Specifically, the fine adjustment mechanism, that is, the first linear driving device is preferably a voice coil motor 5, the voice coil motor 5 includes a moving end, a fixed end and a support frame 6, the moving end is connected to the output shaft 1, the fixed end is connected to the support frame 6, and the support frame 6 is fixed on the inner bottom surface of the housing 4, wherein the moving end is a voice coil motor coil, the fixed end is a voice coil motor magnet, and the voice coil motor magnet is kept in a stationary state relative to the housing 4, thereby avoiding the voice coil motor 5 from generating offset or shaking in operation.
The upper end spring 9 is sleeved outside the fixed end, and the support frame 6 sequentially penetrates through the push plate 7 and the sleeve 8 from top to bottom to be fixed on the inner bottom surface of the shell 4, namely the voice coil motor 5 is positioned in the sleeve 8, so that the volume of the micro-displacement actuator can be reduced.
Specifically, the nut guide 10 is slidably connected to the support frame 6, that is, the nut guide 10 can move up and down relative to the support frame 6, wherein the lead screw and the nut guide 10 can be disposed inside the lower end spring 11, which can further achieve the purpose of reducing the volume.
In order to improve the stability of the push plate 7 moving up and down, a plurality of threaded holes are formed in the nut guide 10 along the circumferential direction of the nut guide, the second linear driving device comprises a plurality of lead screws in one-to-one correspondence with the threaded holes, and the lead screws are uniformly distributed along the circumferential direction of the push plate 7.
Specifically, the support frame 6 is provided with a plurality of guide grooves corresponding to the lead screws one to one, the nut guide 10 is provided with a guide block slidably connected with the guide grooves, and the guide block is provided with a threaded hole.
In order to limit the downward movement distance of the sleeve 8 from being too large, the outer periphery of the bottom of the support frame 6 is provided with a limit part, and the limit part is preferably a step surface arranged on the outer periphery of the bottom of the sleeve 8.
It is further noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (9)

1. A micro-displacement actuator, comprising: the output shaft, the first linear driving device, the shell and the linear bearing, wherein two ends of the output shaft are respectively fixed with a guide disc, the linear bearing comprises a bearing seat and a guide rod, the bearing seat is fixed on the upper end surface of the shell, the guide rod is connected with the bearing seat in a sliding way, two ends of the guide rod are respectively connected with the two guide discs, the first linear driving device is used for driving the output shaft to move up and down, the guide discs are used for generating axial deformation when being subjected to axial force, the output shaft further comprises a sleeve, a push plate, an upper end spring, a lower end spring and a second linear driving device, the upper end of the sleeve is connected with the output shaft, two ends of the upper end spring are respectively connected with the inner top surface of the sleeve and the upper end surface of the push plate, and two ends of the lower end spring are respectively connected with the inner bottom surface of the sleeve and the, the second linear driving device is used for controlling the push plate to move along the axial direction of the output shaft.
2. The micro-displacement actuator according to claim 1, wherein the second linear driving device comprises a nut guide, a lead screw and a motor, the nut guide is connected to the push plate, the nut guide is in threaded connection with the lead screw, and the motor is configured to control the lead screw to rotate, so that the nut guide moves along an axial direction of the lead screw, and the push plate is driven to move.
3. The micro-displacement actuator of claim 2, wherein the first linear driving device is a voice coil motor, the voice coil motor comprises a moving end, a fixed end and a supporting frame, the moving end is connected to the output shaft, the fixed end is connected to the supporting frame, and the supporting frame is fixed on the inner bottom surface of the housing.
4. The micro-displacement actuator as claimed in claim 3, wherein the upper end spring is sleeved outside the fixed end, and the supporting frame sequentially passes through the push plate and the sleeve from top to bottom and is fixed on the inner bottom surface of the housing.
5. The micro-displacement actuator of claim 4, wherein the nut guide is slidably coupled to the support bracket.
6. The micro-displacement actuator according to claim 5, wherein the nut guide has a plurality of threaded holes formed along a circumferential direction thereof, and the second linear driving device includes a plurality of lead screws corresponding to the plurality of threaded holes one by one.
7. The micro-displacement actuator as claimed in claim 6, wherein the supporting frame has a plurality of guiding slots corresponding to the lead screws one to one, the nut guiding member has a guiding block slidably connected to the guiding slots, and the guiding block has the threaded holes.
8. The micro-displacement actuator of claim 7, wherein the bottom of the support frame is provided with a limiting portion at its periphery, and the limiting portion is used for limiting the downward movement of the sleeve.
9. A micro-displacement actuator as claimed in any one of claims 1 to 8, wherein a plurality of linear bearings are disposed between two guide discs, and the linear bearings are uniformly distributed along the circumferential direction of the guide discs.
CN202010996484.5A 2020-09-21 2020-09-21 Micro-displacement actuator Active CN111983776B (en)

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CN113687489A (en) * 2021-09-16 2021-11-23 中国科学院国家天文台南京天文光学技术研究所 Flexible displacement actuator for large optical infrared telescope splicing mirror surface
CN116509625B (en) * 2023-06-06 2023-11-07 广东麦特维逊医学研究发展有限公司 Displacement actuating device and working method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100782793B1 (en) * 2006-08-24 2007-12-05 삼성전기주식회사 Lens transfer device of vcm type
CN102519355A (en) * 2011-11-25 2012-06-27 中国科学院光电技术研究所 One-dimensional micro-translation mechanism
CN105572861A (en) * 2015-12-22 2016-05-11 中国科学院长春光学精密机械与物理研究所 Deformable rapid control integrated reflector device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107991901B (en) * 2017-12-04 2020-12-25 中国科学院国家天文台南京天文光学技术研究所 Voice coil motor displacement actuator simulation platform
CN208272794U (en) * 2018-05-04 2018-12-21 深圳市盛泰奇科技有限公司 A kind of high-precision Z-axis structure of voice coil motor driving

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100782793B1 (en) * 2006-08-24 2007-12-05 삼성전기주식회사 Lens transfer device of vcm type
CN102519355A (en) * 2011-11-25 2012-06-27 中国科学院光电技术研究所 One-dimensional micro-translation mechanism
CN105572861A (en) * 2015-12-22 2016-05-11 中国科学院长春光学精密机械与物理研究所 Deformable rapid control integrated reflector device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
400mm薄镜面主动光学实验系统;李宏壮 等;《光学精密工程》;20090930;第17卷(第9期);说明书第2076-2082页 *
主动光学系统力促动器的设计和测试;张丽敏 等;《光学精密工程》;20120131;第20卷(第1期);说明书第38-44页 *

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