CN117555106A - Large-stroke high-precision micro-displacement actuating device - Google Patents

Large-stroke high-precision micro-displacement actuating device Download PDF

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Publication number
CN117555106A
CN117555106A CN202410043220.6A CN202410043220A CN117555106A CN 117555106 A CN117555106 A CN 117555106A CN 202410043220 A CN202410043220 A CN 202410043220A CN 117555106 A CN117555106 A CN 117555106A
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China
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amplifying
primary
top plate
reduction gearbox
micro
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CN202410043220.6A
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CN117555106B (en
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王浩
郭疆
朱磊
刘宝军
孙继明
齐洪宇
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/198Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Transmission Devices (AREA)

Abstract

The invention relates to the technical field of space remote sensing, in particular to a large-stroke high-precision micro-displacement actuating device, which comprises a first base component, a large-stroke mechanism, a micro-displacement actuating mechanism and a second base component; the large-stroke mechanism comprises a ball screw, a reduction gearbox and a clearance elimination structure, and the ball screw is matched with the reduction gearbox to enable the reduction gearbox to conduct linear motion along the ball screw; the micro-displacement actuating mechanism comprises a linear motion assembly, a primary amplifying mechanism and a secondary amplifying mechanism; the linear motion assembly is vertically fixed on the reduction gearbox, the bottom end of the primary amplification mechanism is fixed on the linear motion assembly, the top end of the primary amplification mechanism is connected with the secondary amplification mechanism, the primary amplification mechanism is driven by the linear motion assembly to drive the secondary amplification mechanism to adjust motion in different directions, the adjusting motion is jointly converted into adjustment in the vertical direction, and large-stroke and nano-scale motion precision can be achieved through the multi-stage scaling mechanism.

Description

Large-stroke high-precision micro-displacement actuating device
Technical Field
The invention relates to the technical field of space remote sensing, in particular to a large-stroke high-precision micro-displacement actuating device.
Background
With the development of technology, the caliber requirement of the telescope on the main reflector is larger and larger, and the single reflector cannot meet the use requirement due to various factors, on one hand, the caliber of the space telescope is limited by the diameter of the carrier rocket, and on the other hand, the current manufacturing capability is limited; the spliced reflecting mirror formed by the plurality of sub-mirrors is provided to solve the problems well, the spliced reflecting mirror not only can realize the folding function to meet the space requirement of the carrier rocket, but also has smaller caliber so that the preparation difficulty of the reflecting mirror is reduced. However, the problem that follows is how to adjust the correct posture of the sub-mirror to ensure the optical performance of the reflecting mirror, and the micro-displacement driving technology can solve the problem as a key technology of the spliced mirror, and the posture adjustment of the sub-mirror is generally completed through a high-precision micro-displacement actuating device. In order to realize high-precision splicing of the sub-mirrors, the micro-displacement actuating device is generally required to achieve nano-scale adjustment precision, and meanwhile, the requirement of large-stroke adjustment is met.
Disclosure of Invention
The invention aims to solve the problems and provide a large-stroke high-precision micro-displacement actuating device which has the functions of large-stroke and high-precision movement. The multi-stage scaling mechanism can realize large-stroke and nano-scale motion precision, and the gap elimination structure is designed to realize the gap elimination of the large-stroke mechanism.
The invention provides a large-stroke high-precision micro-displacement actuating device, which comprises a first base assembly, a large-stroke mechanism, a micro-displacement actuating mechanism and a second base assembly; the micro-displacement actuating mechanism is fixed on the large-stroke mechanism through a screw, so that the large-stroke mechanism drives the micro-displacement actuating mechanism to perform micro-displacement adjustment; the first base component is fixed at one end of the large-stroke mechanism far away from the micro-displacement actuating mechanism through a screw; the second base component is fixed at one end, far away from the large-stroke mechanism, of the micro-displacement actuating mechanism through a screw; the large-stroke mechanism comprises a ball screw, a reduction gearbox and a clearance elimination structure; one end of the ball screw is connected with the first base assembly through a clearance eliminating structure, the other end of the ball screw is fixed at the top end of the reduction gearbox sleeve through a pre-tightening nut, and the ball screw is matched with the reduction gearbox to enable the reduction gearbox to conduct linear motion along the ball screw; the micro-displacement actuating mechanism comprises a linear motion assembly, a primary amplifying mechanism and a secondary amplifying mechanism; the linear motion assembly is vertically fixed on the reduction gearbox, the second-stage amplification mechanism is of a symmetrical square door structure, the bottom end of the second-stage amplification mechanism is connected with the gap elimination structure through a screw, and the second base assembly is fixed at the top end of the second-stage amplification mechanism through a screw; the first-stage amplifying mechanism is of a symmetrical trapezoid door structure, the bottom end of the first-stage amplifying mechanism is fixed on the linear motion assembly, the top end of the first-stage amplifying mechanism is connected with the second-stage amplifying mechanism, and the first-stage amplifying mechanism is driven by the linear motion assembly to drive the second-stage amplifying mechanism to finish micro-displacement adjustment.
Further, the speed reducing box comprises a speed reducing box body, a stepping motor, a worm wheel, a worm, a bearing and a pre-tightening nut. The reduction gearbox body is of a hollow cylinder structure with an installation table. The bearings are embedded into the top plate and the bottom plate of the reduction box body, so that the ball screw penetrates through the reduction box body through the bearings and is fixed in the top plate of the reduction box body through the pre-tightening nuts. The worm wheel is embedded into the reduction gearbox along the tangential direction and is positioned between the two bearings. The stepping motor is fixed on the outer wall of the reduction gearbox body, and a worm in the stepping motor penetrates through the side wall of the reduction gearbox body to be meshed with the worm wheel, and the stepping motor drives the worm, so that the worm wheel and the worm are matched to realize the reduction adjustment of the reduction gearbox.
Further, the primary amplifying mechanism comprises a primary amplifying top plate and two primary amplifying supporting arms, and the primary amplifying top plate is supported by the primary amplifying supporting arms through flexible hinges. The primary amplifying support arm comprises a primary amplifying side plate and a primary amplifying bottom primary amplifying side plate which are connected with a primary amplifying bottom plate through a flexible hinge, and the primary amplifying bottom plate is connected with the linear motion assembly through a screw, so that the linear motion assembly drives the primary amplifying bottom plate to do linear motion, and the primary amplifying top plate is pulled by the flexible hinge to do longitudinal motion.
Further, the secondary amplifying mechanism comprises a secondary amplifying top plate, a secondary amplifying supporting arm, a secondary amplifying connecting plate and a secondary amplifying connecting arm; the two-stage amplifying supporting arms and the two-stage amplifying connecting arms are two in number, and the two-stage amplifying supporting arms are connected with the two-stage amplifying top plate through flexible hinges, so that the two-stage amplifying top plate is supported by the two-stage amplifying supporting arms;
the second-stage amplification supporting arm comprises a second-stage amplification base, a second-stage amplification lower arm, a second-stage amplification connecting block and a second-stage amplification upper arm; one end of the second-stage amplification upper arm and one end of the second-stage amplification lower arm are connected with the second-stage amplification connecting block through flexible hinges, and the other end of the second-stage amplification upper arm is connected with the second-stage amplification top plate through flexible hinges; the other end of the secondary amplification lower arm is connected with the secondary amplification base through a flexible hinge; the second-stage amplification base is fixed on the top plate of the reduction gearbox body through screws;
one end of the secondary amplification connecting arm is connected with the secondary amplification connecting plate through a flexible hinge, and the other end of the secondary amplification connecting arm is connected with the secondary amplification connecting block on the same side through a screw, so that the secondary amplification connecting arm installs the secondary amplification connecting plate below the secondary amplification top plate;
the secondary amplification connecting plate is connected with the primary amplification top plate through a screw, so that the primary amplification top plate drives the secondary amplification connecting plate to longitudinally move, and the secondary amplification top plate is pulled by the flexible hinge to longitudinally move.
Further, the gap eliminating structure is a symmetrical structure and comprises a fixed seat, a gap eliminating sheet, a gap eliminating supporting arm and a gap eliminating bottom plate; the fixed seat and the gap eliminating support arm are two in number, one ends of the fixed seat and the gap eliminating support arm are connected through a flexible hinge, and the other ends of the gap eliminating support arm are fixed on the gap eliminating bottom plate; the gap eliminating sheet is fixed at the center of the gap eliminating bottom plate; the fixing seat corresponds to the secondary amplifying base and is fixed below the top plate of the reduction gearbox body through screws.
Further, the first base component and the second base component are consistent in structure and comprise a base and a cross flexible hinge; wherein, the cross flexible hinge is connected with the base through a screw; the cross flexible hinge in the first base component is connected with the gap eliminating sheet, and the cross flexible hinge in the second base component is connected with the secondary amplifying top plate through a screw.
Compared with the prior art, the invention has the following beneficial effects:
1) The invention adopts a multistage scaling mechanism to realize large-stroke and nano-scale motion precision;
2) Different adjusting directions in the primary amplifying mechanism and the secondary amplifying mechanism are jointly converted into vertical adjustment;
3) And the gap elimination structure is designed to realize the gap elimination of the large-stroke mechanism.
Drawings
FIG. 1 is a front view of a large stroke high precision micro-displacement actuator provided in accordance with an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a large stroke high precision micro-displacement actuator provided in accordance with an embodiment of the present invention;
FIG. 3 is a cross-sectional block diagram of a reduction gearbox provided in accordance with an embodiment of the present invention;
fig. 4 is an external structural view of a reduction gearbox provided according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a primary amplifying mechanism provided according to an embodiment of the present invention;
fig. 6 is a schematic structural view of a two-stage amplifying mechanism according to an embodiment of the present invention;
FIG. 7 is a schematic structural view of a gap elimination structure provided according to an embodiment of the invention;
fig. 8 is a schematic diagram of a large-stroke high-precision micro-displacement actuator provided according to an embodiment of the present invention.
Reference numerals: the device comprises a base 1, a cross flexible hinge 2, a ball screw 3, a reduction box 4, a stepping motor 5, a worm wheel 6, a worm 7, a bearing 8, a pre-tightening nut 9, a linear motion assembly 10, a primary amplifying mechanism 11, a primary amplifying top plate 11_1, a primary amplifying side plate 11_2, a primary amplifying bottom plate 11_3, a secondary amplifying mechanism 12, a secondary amplifying top plate 12_1, a secondary amplifying connecting plate 12_2, a secondary amplifying upper arm 12_3, a secondary amplifying connecting block 12_4, a secondary amplifying lower arm 12_5, a secondary amplifying base 12_6, a secondary amplifying connecting arm 12_7, a gap eliminating structure 13, a fixed seat 13_1, a gap eliminating supporting arm 13_2, a gap eliminating sheet 13_3, a gap eliminating bottom plate 13_4, a flexible hinge 14 and a rotating hinge 15.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention.
The large-stroke high-precision micro-displacement actuating device provided by the invention has the functions of large-stroke and high-precision movement. The device adopts a multistage scaling mechanism to convert the adjustment in different directions into longitudinal unidirectional adjustment, can realize large-stroke and nanoscale motion precision, and designs a gap elimination structure to realize gap elimination of the large-stroke mechanism.
Fig. 1 and 2 show a front view structure and a cross-sectional structure, respectively, of a large-stroke high-precision micro-displacement actuator provided according to an embodiment of the present invention.
As shown in fig. 1 and 2, the large-stroke high-precision micro-displacement actuating device provided by the embodiment of the invention comprises a first base assembly, a large-stroke mechanism, a micro-displacement actuating mechanism and a second base assembly. The micro-displacement actuating mechanism is fixed on the large-stroke mechanism through a screw, so that the large-stroke mechanism drives the micro-displacement actuating mechanism to perform micro-displacement adjustment; the first base component is fixed at one end of the large-stroke mechanism far away from the micro-displacement actuating mechanism through a screw; the second base component is fixed at one end of the micro-displacement actuating mechanism far away from the large-stroke mechanism through a screw.
The first base component and the second base component are identical in structure and comprise a base 1 and a cross flexible hinge 2.
The large-stroke mechanism comprises a ball screw 3, a reduction gearbox and a clearance eliminating structure 13. One end of the ball screw 3 is connected with the first base assembly through a clearance eliminating structure 13, the other end of the ball screw 3 is fixed at the top end of the reduction gearbox sleeve through a pre-tightening nut 9, and the ball screw 3 is matched with the reduction gearbox to enable the reduction gearbox to conduct linear motion along the ball screw 3.
Fig. 3 and 4 show a sectional structure and an external structure of a reduction gearbox provided according to an embodiment of the present invention, respectively.
As shown in fig. 3, the reduction gearbox comprises a reduction gearbox body 4, a stepping motor 5, a worm wheel 6, a worm 7, a bearing 8 and a pre-tightening nut 9. The reduction gearbox body 4 is of a hollow cylinder structure with an installation table. The bearings 8 are embedded in the top and bottom plates of the reduction gearbox 4, so that the ball screw 3 passes through the reduction gearbox 4 via the bearings 8 and is fixed in the top plate of the reduction gearbox 4 via the pretensioning nut 9. The worm wheel 6 is embedded in the reduction gearbox 4 in the tangential direction and is located between two bearings 8.
As shown in fig. 3 and 4, the stepper motor 5 is fixed on the outer wall of the reduction gearbox 4, and a worm 7 in the stepper motor 5 penetrates through the side wall of the reduction gearbox 4 to be meshed with the worm wheel 6, and the stepper motor 5 drives the worm 7, so that the worm wheel 6 and the worm 7 are matched to realize the reduction regulation of the reduction gearbox.
As shown in fig. 2, the micro-displacement actuating mechanism comprises a linear motion assembly 10, a primary amplifying mechanism 11 and a secondary amplifying mechanism 12; the linear motion assembly 10 is vertically fixed on an installation table of the reduction gearbox body 4, the secondary amplification mechanism 12 is of a symmetrical square door structure, the bottom end of the secondary amplification mechanism 12 is connected with the gap eliminating structure 13 through a screw, and the second base assembly is fixed at the top end of the secondary amplification mechanism 12 through a screw; the primary amplifying mechanism 11 is of a symmetrical trapezoid door structure, the bottom end of the primary amplifying mechanism 11 is fixed on the linear motion assembly 10, the top end of the primary amplifying mechanism 11 is connected with the secondary amplifying mechanism 12, and the primary amplifying mechanism 11 is driven by the linear motion assembly 10 to drive the secondary amplifying mechanism 12 to finish micro-displacement adjustment.
Fig. 5 shows the structure of a one-stage amplification mechanism provided according to an embodiment of the present invention.
As shown in fig. 5, the primary amplifying mechanism 11 includes a primary amplifying top plate 11_1 and two primary amplifying support arms that support the primary amplifying top plate 11_1 by a flexible hinge 14.
The primary amplifying support arm comprises a primary amplifying side plate 11_2 and a primary amplifying bottom plate 11_3, the primary amplifying side plate 11_2 and the primary amplifying bottom plate 11_3 are connected through a flexible hinge 14, the primary amplifying bottom plate 11_3 is connected with the linear motion assembly 10 through a screw, the linear motion assembly 10 drives the primary amplifying bottom plate 11_3 to do linear motion, and the primary amplifying top plate 11_1 is pulled by the flexible hinge 14 to do longitudinal motion.
Fig. 6 shows a structure of a two-stage amplifying mechanism provided according to an embodiment of the present invention.
As shown in fig. 6, the secondary amplifying mechanism 12 includes a secondary amplifying top plate 12_1, a secondary amplifying support arm, a secondary amplifying connecting plate 12_2, and a secondary amplifying connecting arm 12_7. The two secondary amplifying supporting arms and the two secondary amplifying connecting arms 12_7 are respectively connected with the secondary amplifying top plate 12_1 through flexible hinges 14, so that the secondary amplifying top plate 12_1 is supported by the secondary amplifying supporting arms.
The secondary amplifying support arm comprises a secondary amplifying upper arm 12_3, a secondary amplifying connecting block 12_4, a secondary amplifying lower arm 12_5 and a secondary amplifying base 12_6; one end of the secondary amplification upper arm 12_3 and one end of the secondary amplification lower arm 12_5 are connected with the secondary amplification connecting block 12_4 through a flexible hinge 14, and the other end of the secondary amplification upper arm 12_3 is connected with the secondary amplification top plate 12_1 through the flexible hinge 14; the other end of the secondary amplifying lower arm 12_5 is connected with the secondary amplifying base 12_6 through a flexible hinge 14; the secondary amplifying base 12_6 is fixed on the top plate of the reduction gearbox 4 through screws.
One end of the secondary amplification connecting arm 12_7 is connected with the secondary amplification connecting plate 12_2 through a flexible hinge 14, and the other end of the secondary amplification connecting arm 12_7 is connected with the secondary amplification connecting block 12_4 on the same side through a screw, so that the secondary amplification connecting arm 12_7 installs the secondary amplification connecting plate 12_2 below the secondary amplification top plate 12_1.
The secondary amplification connecting plate 12_2 is connected with the primary amplification top plate 11_1 through screws, so that the primary amplification top plate 11_1 drives the secondary amplification connecting plate 12_2 to longitudinally move, and the secondary amplification top plate 12_1 is pulled by the flexible hinge 14 to longitudinally move.
Fig. 7 shows a structure of a gap elimination structure provided according to an embodiment of the invention.
As shown in fig. 7, the gap eliminating structure 13 is a symmetrical structure and comprises a fixed seat 13_1, a gap eliminating supporting arm 13_2, a gap eliminating sheet 13_3 and a gap eliminating bottom plate 13_4; the number of the fixed seats 13_1 and the gap eliminating support arms 13_2 is two, one ends of the fixed seats 13_1 and the gap eliminating support arms 13_2 are connected through flexible hinges 14, and the other ends of the gap eliminating support arms 13_2 are fixed on the gap eliminating bottom plate 13_4; the gap eliminating sheet 13_3 is fixed at the center of the gap eliminating base plate 13_4; the fixed seat 13_1 corresponds to the secondary amplifying base 12_6 and is fixed below the top plate of the reduction gearbox 4 through screws.
The cross flexible hinge 2 is connected with the base 1 through a screw; the cross flexible hinge 2 in the first base assembly is connected with the gap eliminating sheet 13_3, and the cross flexible hinge 2 in the second base assembly is connected with the secondary amplifying top plate 12_1 through screws.
Fig. 8 shows the principle of the large-stroke high-precision micro-displacement actuating device according to the embodiment of the present invention, wherein fig. 8 (a) is a projection of the vertical direction of fig. 8 (b), and the movement direction of the primary amplifying bottom plate 11_3 and the movement direction of the secondary amplifying top plate 12_1 are perpendicular to each other. As shown in fig. 8 (a), when the primary amplifying bottom plate 11_3 drives the primary amplifying side plate 11_2 to form an angle with the central axisWhen the position of the first-stage amplifying top plate 11_1 moves towards the center, the second-stage amplifying connecting plate 12_2 is driven to move upwards by the first-stage amplifying top plate. As shown in FIG. 8 (b), the secondary amplifying connecting plate 12_2 drives the secondary amplifying connecting arm 12_7 to lift up +.>The angle, and then the secondary amplification connecting block 12_4 is abducted, so that the secondary amplification upper arm 12_3 drives the secondary amplification top plate 12_1 to move downwards, and the opening angle of the secondary amplification upper arm 12_3 is +.>. The total scaling ratio of the primary amplifying mechanism 11 and the secondary amplifying mechanism 12 is finally obtained as follows
In the embodiment of the invention, the stepping angle of the stepping motor 5 is 1.8 degrees, the reduction ratio of the worm wheel 6 and the worm 7 is 1/25, the lead of the ball screw 3 is 2mm, and the repeated positioning precision can reach 2 mu m, so that the resolution of large-stroke movement can reach 0.4 mu m, and the repeated positioning precision can reach 2 mu m.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.

Claims (6)

1. The large-stroke high-precision micro-displacement actuating device is characterized by comprising a first base assembly, a large-stroke mechanism, a micro-displacement actuating mechanism and a second base assembly; the micro-displacement actuating mechanism is fixed on the large-stroke mechanism through a screw, so that the large-stroke mechanism drives the micro-displacement actuating mechanism to perform micro-displacement adjustment; the first base component is fixed at one end, far away from the micro-displacement actuating mechanism, of the large-stroke mechanism through a screw; the second base component is fixed at one end, far away from the large-stroke mechanism, of the micro-displacement actuating mechanism through a screw; wherein,
the large-stroke mechanism comprises a ball screw, a reduction gearbox and a clearance elimination structure; one end of the ball screw is connected with the first base assembly through the clearance eliminating structure, the other end of the ball screw is fixed at the top end of the reduction gearbox sleeve through a pre-tightening nut, and the ball screw is matched with the reduction gearbox to enable the reduction gearbox to conduct linear motion along the ball screw;
the micro-displacement actuating mechanism comprises a linear motion assembly, a primary amplifying mechanism and a secondary amplifying mechanism; the linear motion assembly is vertically fixed on the reduction gearbox, the secondary amplification mechanism is of a symmetrical square door structure, the bottom end of the secondary amplification mechanism is connected with the gap eliminating structure through a screw, and the second base assembly is fixed at the top end of the secondary amplification mechanism through a screw; the primary amplifying mechanism is of a symmetrical trapezoid door structure, the bottom end of the primary amplifying mechanism is fixed on the linear motion assembly, the top end of the primary amplifying mechanism is connected with the secondary amplifying mechanism, so that the primary amplifying mechanism is driven by the linear motion assembly to drive the secondary amplifying mechanism to finish micro-displacement adjustment.
2. The large stroke high precision micro-displacement actuator of claim 1, wherein the reduction gearbox comprises a reduction gearbox body, a stepper motor, a worm gear, a worm, a bearing and a pre-tightening nut; the bearing is embedded into the top plate and the bottom plate of the speed reduction box body, so that the ball screw penetrates through the speed reduction box body through the bearing and is fixed in the top plate of the speed reduction box body through the pre-tightening nut; the worm wheel is embedded into the reduction gearbox body along the tangential direction and is positioned between the two bearings; the stepping motor is fixed on the outer wall of the reduction gearbox body, a worm in the stepping motor penetrates through the side wall of the reduction gearbox body to be meshed with the worm wheel, and the stepping motor drives the worm, so that the worm wheel and the worm are matched to achieve reduction adjustment of the reduction gearbox.
3. The large-stroke high-precision micro-displacement actuating device according to claim 1, wherein the primary amplifying mechanism comprises a primary amplifying top plate and two primary amplifying support arms, wherein the primary amplifying support arms support the primary amplifying top plate through flexible hinges; the primary amplifying support arm comprises a primary amplifying side plate and a primary amplifying bottom plate, the primary amplifying side plate is connected with the primary amplifying bottom plate through a flexible hinge, and the primary amplifying bottom plate is connected with the linear motion assembly through a screw, so that the linear motion assembly drives the primary amplifying bottom plate to do linear motion, and the primary amplifying top plate is pulled by the flexible hinge to do longitudinal motion.
4. The large-stroke high-precision micro-displacement actuating device according to claim 3, wherein the secondary amplifying mechanism comprises a secondary amplifying top plate, a secondary amplifying supporting arm, a secondary amplifying connecting plate and a secondary amplifying connecting arm; the two-stage amplifying supporting arms and the two-stage amplifying connecting arms are two in number, and the two-stage amplifying supporting arms are connected with the two-stage amplifying top plate through flexible hinges so that the two-stage amplifying top plate is supported by the two-stage amplifying supporting arms;
the secondary amplifying supporting arm comprises a secondary amplifying base, a secondary amplifying lower arm, a secondary amplifying connecting block and a secondary amplifying upper arm; one end of the secondary amplification upper arm and one end of the secondary amplification lower arm are connected with the secondary amplification connecting block through flexible hinges, and the other end of the secondary amplification upper arm is connected with the secondary amplification top plate through flexible hinges; the other end of the secondary amplification lower arm is connected with the secondary amplification base through a flexible hinge; the secondary amplification base is fixed on the top plate of the reduction gearbox body through screws;
one end of the secondary amplification connecting arm is connected with the secondary amplification connecting plate through a flexible hinge, and the other end of the secondary amplification connecting arm is connected with a secondary amplification connecting block on the same side through a screw, so that the secondary amplification connecting arm installs the secondary amplification connecting plate below the secondary amplification top plate;
the secondary amplification connecting plate is connected with the primary amplification top plate through a screw, so that the primary amplification top plate drives the secondary amplification connecting plate to longitudinally move, and the secondary amplification top plate is pulled by the flexible hinge to longitudinally move.
5. The large-stroke high-precision micro-displacement actuating device according to claim 4, wherein the gap eliminating structure is a symmetrical structure and comprises a fixed seat, a gap eliminating sheet, a gap eliminating supporting arm and a gap eliminating bottom plate; the fixed seat and the gap eliminating support arm are two in number, one ends of the fixed seat and the gap eliminating support arm are connected through a flexible hinge, and the other end of the gap eliminating support arm is fixed on the gap eliminating bottom plate; the gap eliminating sheet is fixed at the center of the gap eliminating bottom plate; the fixed seat corresponds to the secondary amplification base and is fixed below the top plate of the reduction gearbox body through screws.
6. The high-travel, high-precision micro-displacement actuator of claim 5, wherein the first base assembly and the second base assembly are structurally identical, each comprising a base and a cross-shaped flexible hinge; wherein the cross flexible hinge is connected with the base through a screw; the cross flexible hinge in the first base assembly is connected with the gap eliminating sheet, and the cross flexible hinge in the second base assembly is connected with the secondary amplifying top plate through a screw.
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Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101435690A (en) * 2008-12-03 2009-05-20 中国科学院合肥物质科学研究院 Strain type micro-nano-scale micro-nano displacement sensor
CN103170966A (en) * 2013-04-02 2013-06-26 西安电子科技大学 Full flexible micro displacement magnifying mechanism
CN106685262A (en) * 2017-01-12 2017-05-17 广东工业大学 Full-flexible micro-displacement amplification mechanism
CN108931841A (en) * 2017-05-26 2018-12-04 爱威科技股份有限公司 A kind of objective lens device and microscope
CN109951100A (en) * 2019-03-25 2019-06-28 中国科学院长春光学精密机械与物理研究所 A kind of big travel displacement driving device and its control method
KR102055425B1 (en) * 2018-10-29 2019-12-12 국방과학연구소 Focus adjustment device for small satellite and focus adjustment method using the same
WO2021022803A1 (en) * 2019-08-05 2021-02-11 包头稀土研究院 Micro-displacement amplification mechanism, and amplification method for same
CN112799208A (en) * 2020-12-29 2021-05-14 中国科学院国家天文台南京天文光学技术研究所 High-precision micro-displacement actuator for adjusting mirror surface position of astronomical telescope
CN113050250A (en) * 2021-03-22 2021-06-29 中国科学院国家天文台南京天文光学技术研究所 High-precision micro-displacement actuator utilizing threaded parallel structure
CN113726217A (en) * 2021-09-07 2021-11-30 河南理工大学 Two-dimensional large-stroke high-load decoupling deflection device
CN115055984A (en) * 2022-08-16 2022-09-16 山东大学 Electro-hydraulic micro-displacement platform, micro-displacement system, precision compensation system and method
CN115194194A (en) * 2022-05-17 2022-10-18 吉林大学 Double-drive type double-freedom-degree large-stroke fast tool servo device
CN115549522A (en) * 2022-10-27 2022-12-30 华侨大学 Bidirectional-driven multistage micro-displacement amplifying device
CN115755492A (en) * 2022-12-09 2023-03-07 中国科学院光电技术研究所 High-precision space camera focusing mechanism adopting flexible connection

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101435690A (en) * 2008-12-03 2009-05-20 中国科学院合肥物质科学研究院 Strain type micro-nano-scale micro-nano displacement sensor
CN103170966A (en) * 2013-04-02 2013-06-26 西安电子科技大学 Full flexible micro displacement magnifying mechanism
CN106685262A (en) * 2017-01-12 2017-05-17 广东工业大学 Full-flexible micro-displacement amplification mechanism
CN108931841A (en) * 2017-05-26 2018-12-04 爱威科技股份有限公司 A kind of objective lens device and microscope
KR102055425B1 (en) * 2018-10-29 2019-12-12 국방과학연구소 Focus adjustment device for small satellite and focus adjustment method using the same
CN109951100A (en) * 2019-03-25 2019-06-28 中国科学院长春光学精密机械与物理研究所 A kind of big travel displacement driving device and its control method
WO2021022803A1 (en) * 2019-08-05 2021-02-11 包头稀土研究院 Micro-displacement amplification mechanism, and amplification method for same
CN112799208A (en) * 2020-12-29 2021-05-14 中国科学院国家天文台南京天文光学技术研究所 High-precision micro-displacement actuator for adjusting mirror surface position of astronomical telescope
CN113050250A (en) * 2021-03-22 2021-06-29 中国科学院国家天文台南京天文光学技术研究所 High-precision micro-displacement actuator utilizing threaded parallel structure
CN113726217A (en) * 2021-09-07 2021-11-30 河南理工大学 Two-dimensional large-stroke high-load decoupling deflection device
CN115194194A (en) * 2022-05-17 2022-10-18 吉林大学 Double-drive type double-freedom-degree large-stroke fast tool servo device
CN115055984A (en) * 2022-08-16 2022-09-16 山东大学 Electro-hydraulic micro-displacement platform, micro-displacement system, precision compensation system and method
CN115549522A (en) * 2022-10-27 2022-12-30 华侨大学 Bidirectional-driven multistage micro-displacement amplifying device
CN115755492A (en) * 2022-12-09 2023-03-07 中国科学院光电技术研究所 High-precision space camera focusing mechanism adopting flexible connection

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