CN117296140A - 基板收纳容器 - Google Patents
基板收纳容器 Download PDFInfo
- Publication number
- CN117296140A CN117296140A CN202180097767.9A CN202180097767A CN117296140A CN 117296140 A CN117296140 A CN 117296140A CN 202180097767 A CN202180097767 A CN 202180097767A CN 117296140 A CN117296140 A CN 117296140A
- Authority
- CN
- China
- Prior art keywords
- gas
- chamber
- substrate
- container body
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1911—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
- H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/023474 WO2022269718A1 (ja) | 2021-06-21 | 2021-06-21 | 基板収納容器 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117296140A true CN117296140A (zh) | 2023-12-26 |
Family
ID=84545304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202180097767.9A Pending CN117296140A (zh) | 2021-06-21 | 2021-06-21 | 基板收纳容器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12374573B2 (https=) |
| JP (1) | JP7721643B2 (https=) |
| KR (1) | KR102798614B1 (https=) |
| CN (1) | CN117296140A (https=) |
| TW (1) | TW202301528A (https=) |
| WO (1) | WO2022269718A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12424472B2 (en) * | 2021-03-29 | 2025-09-23 | Miraial Co., Ltd. | Substrate storing container |
| US12347711B2 (en) | 2021-08-17 | 2025-07-01 | Gudeng Precision Industrial Co., Ltd. | Gas diffusion device, and wafer container including the same |
| TWI858804B (zh) * | 2022-12-01 | 2024-10-11 | 家登精密工業股份有限公司 | 晶圓載具量測裝置 |
| TWI897695B (zh) * | 2024-02-20 | 2025-09-11 | 中勤實業股份有限公司 | 具有供流體進入之氣體擴散裝置的基板容器 |
| WO2026009428A1 (ja) * | 2024-07-05 | 2026-01-08 | ミライアル株式会社 | 基板収納容器及び気体噴出ノズル部 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5879458A (en) * | 1996-09-13 | 1999-03-09 | Semifab Incorporated | Molecular contamination control system |
| EP2272088B1 (en) | 2008-03-13 | 2016-12-07 | Entegris, Inc. | Wafer container with tubular environmental control components |
| TWI515159B (zh) | 2009-12-10 | 2016-01-01 | 安堤格里斯公司 | 用於微環境之可供滌洗氣穿透之多孔壁 |
| SG11201602916VA (en) | 2013-10-14 | 2016-05-30 | Entegris Inc | Towers for substrate carriers |
| TWM489155U (en) * | 2014-06-09 | 2014-11-01 | Gudeng Precision Industrial Co Ltd | Gas diffusion device of wafer pod |
| JP6265844B2 (ja) | 2014-06-18 | 2018-01-24 | 信越ポリマー株式会社 | 基板収納容器 |
| JP6424728B2 (ja) | 2014-07-03 | 2018-11-21 | Tdk株式会社 | 半導体磁器組成物およびｐｔｃサーミスタ |
| KR101637498B1 (ko) | 2015-03-24 | 2016-07-07 | 피코앤테라(주) | 웨이퍼 수납용기 |
| JP6400534B2 (ja) | 2015-07-06 | 2018-10-03 | 信越ポリマー株式会社 | 基板収納容器 |
| SG11201901884RA (en) * | 2016-09-06 | 2019-04-29 | Shin Etsu Polymer Co Ltd | Substrate Storage Container and Gas Replacement Unit |
| SG11201908168WA (en) * | 2017-03-27 | 2019-10-30 | Shin Etsu Polymer Co Ltd | Substrate storage container |
| WO2018203384A1 (ja) * | 2017-05-02 | 2018-11-08 | ミライアル株式会社 | 基板収納容器 |
| US10937677B2 (en) * | 2018-04-02 | 2021-03-02 | Bum Je WOO | Wafer storage container |
| US11948821B2 (en) * | 2018-04-25 | 2024-04-02 | Miraial Co., Ltd. | Substrate storing container |
| KR20200011290A (ko) | 2018-07-24 | 2020-02-03 | 세메스 주식회사 | 기판 처리 장치 |
| US10879099B2 (en) * | 2018-08-15 | 2020-12-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Humidity control in storage device |
| CN112289718A (zh) | 2019-07-13 | 2021-01-29 | 家登精密工业股份有限公司 | 基板载具及其气体扩散模块 |
| WO2021014653A1 (ja) | 2019-07-25 | 2021-01-28 | ミライアル株式会社 | 基板収納容器 |
| US11820575B2 (en) * | 2020-10-23 | 2023-11-21 | Miraial Co., Ltd. | Substrate storing container, method for manufacturing the same, and filter unit |
-
2021
- 2021-06-21 CN CN202180097767.9A patent/CN117296140A/zh active Pending
- 2021-06-21 US US18/573,927 patent/US12374573B2/en active Active
- 2021-06-21 WO PCT/JP2021/023474 patent/WO2022269718A1/ja not_active Ceased
- 2021-06-21 KR KR1020237038160A patent/KR102798614B1/ko active Active
- 2021-06-21 JP JP2023529244A patent/JP7721643B2/ja active Active
-
2022
- 2022-06-15 TW TW111122156A patent/TW202301528A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP7721643B2 (ja) | 2025-08-12 |
| WO2022269718A1 (ja) | 2022-12-29 |
| US20240145284A1 (en) | 2024-05-02 |
| TW202301528A (zh) | 2023-01-01 |
| KR102798614B1 (ko) | 2025-04-18 |
| US12374573B2 (en) | 2025-07-29 |
| JPWO2022269718A1 (https=) | 2022-12-29 |
| KR20240024780A (ko) | 2024-02-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |