CN117099030A - 光波导的制作方法及光波导 - Google Patents

光波导的制作方法及光波导 Download PDF

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Publication number
CN117099030A
CN117099030A CN202280025195.8A CN202280025195A CN117099030A CN 117099030 A CN117099030 A CN 117099030A CN 202280025195 A CN202280025195 A CN 202280025195A CN 117099030 A CN117099030 A CN 117099030A
Authority
CN
China
Prior art keywords
refractive index
substrate
optical waveguide
glass
femtosecond laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280025195.8A
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English (en)
Chinese (zh)
Inventor
中西哲也
塩崎学
长能重博
荒生肇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of CN117099030A publication Critical patent/CN117099030A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing
    • G02B2006/12171—Annealing using a laser beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
CN202280025195.8A 2021-05-31 2022-05-27 光波导的制作方法及光波导 Pending CN117099030A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021091826 2021-05-31
JP2021-091826 2021-05-31
PCT/JP2022/021776 WO2022255261A1 (ja) 2021-05-31 2022-05-27 光導波路の作製方法、及び光導波路

Publications (1)

Publication Number Publication Date
CN117099030A true CN117099030A (zh) 2023-11-21

Family

ID=84324164

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280025195.8A Pending CN117099030A (zh) 2021-05-31 2022-05-27 光波导的制作方法及光波导

Country Status (4)

Country Link
US (1) US20240168222A1 (https=)
JP (1) JPWO2022255261A1 (https=)
CN (1) CN117099030A (https=)
WO (1) WO2022255261A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024154680A1 (ja) * 2023-01-16 2024-07-25 住友電気工業株式会社 光導波路デバイス
CN120712503A (zh) * 2023-02-22 2025-09-26 住友电气工业株式会社 光连接部件和光连接部件的制造方法
JPWO2024176839A1 (https=) * 2023-02-22 2024-08-29

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JPH09311238A (ja) * 1996-05-22 1997-12-02 Sumitomo Electric Ind Ltd 光導波路型回折格子の作成方法
JP3426154B2 (ja) * 1999-02-26 2003-07-14 科学技術振興事業団 グレーティング付き光導波路の製造方法
GB2385941B (en) * 1999-03-05 2003-10-22 Nanovis Llc Non-linear optical loop miror with aperiodic grating
JP2000256029A (ja) * 1999-03-09 2000-09-19 Shin Etsu Chem Co Ltd 光ファイバ母材の製造方法
US6573026B1 (en) * 1999-07-29 2003-06-03 Corning Incorporated Femtosecond laser writing of glass, including borosilicate, sulfide, and lead glasses
JP3531738B2 (ja) * 2000-02-22 2004-05-31 日本電気株式会社 屈折率の修正方法、屈折率の修正装置、及び光導波路デバイス
JP2001324634A (ja) * 2000-05-17 2001-11-22 Nippon Sheet Glass Co Ltd グレーティング付き光導波路の製造方法
DE60039600D1 (de) * 2000-08-25 2008-09-04 Draka Comteq Bv Verfahren zur Verringerung der Wasserstoffempfindlichkeit von Glasfasern bei 1380-1410 nm
JP2002098848A (ja) * 2000-09-22 2002-04-05 Nippon Sheet Glass Co Ltd 光導波路型ブラッグ回折格子およびその製造方法
US7568365B2 (en) * 2001-05-04 2009-08-04 President & Fellows Of Harvard College Method and apparatus for micromachining bulk transparent materials using localized heating by nonlinearly absorbed laser radiation, and devices fabricated thereby
US6768850B2 (en) * 2001-08-16 2004-07-27 Translume, Inc. Method of index trimming a waveguide and apparatus formed of the same
US20030099452A1 (en) * 2001-11-28 2003-05-29 Borrelli Nicholas F. Manipulating the size of waveguides written into substrates using femtosecond laser pulses
JP3925209B2 (ja) * 2002-01-21 2007-06-06 日立電線株式会社 導波路の製造方法
US6950591B2 (en) * 2002-05-16 2005-09-27 Corning Incorporated Laser-written cladding for waveguide formations in glass
US7294454B1 (en) * 2002-09-30 2007-11-13 Translume, Inc. Waveguide fabrication methods and devices
JP2004138680A (ja) * 2002-10-15 2004-05-13 Ntt Advanced Technology Corp 光デバイス
US7515792B2 (en) * 2003-03-21 2009-04-07 Her Majesty The Queen In Right Of Canada As Represented By The Minister Of Industry, Through The Communications Research Centre Canada Method of increasing photosensitivity of glasses to ultrafast infrared laser radiation using hydrogen or deuterium
JP4115883B2 (ja) * 2003-05-14 2008-07-09 株式会社フジクラ 光導波路部品の加工方法、グレーティングの製造方法
JP2005221530A (ja) * 2004-02-03 2005-08-18 Matsushita Electric Ind Co Ltd グレーティングデバイスの製造装置及び製造方法
JP2005257719A (ja) * 2004-03-09 2005-09-22 Nippon Telegr & Teleph Corp <Ntt> 導波路作製方法
JP2005338502A (ja) * 2004-05-27 2005-12-08 Showa Electric Wire & Cable Co Ltd 光導波路の製造方法
JP2014031303A (ja) * 2012-08-06 2014-02-20 Sumitomo Electric Ind Ltd 光ファイバ母材製造方法および光ファイバ
JP2019203915A (ja) * 2018-05-21 2019-11-28 日本電信電話株式会社 光集積デバイスおよびその製造方法
WO2019239968A1 (ja) * 2018-06-12 2019-12-19 住友電気工業株式会社 光デバイスの製造方法
JP2020112626A (ja) * 2019-01-09 2020-07-27 住友電気工業株式会社 波長変換光デバイスおよびその製造方法

Also Published As

Publication number Publication date
WO2022255261A1 (ja) 2022-12-08
US20240168222A1 (en) 2024-05-23
JPWO2022255261A1 (https=) 2022-12-08

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