CN116568872A - 单晶制造装置 - Google Patents

单晶制造装置 Download PDF

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Publication number
CN116568872A
CN116568872A CN202180080412.9A CN202180080412A CN116568872A CN 116568872 A CN116568872 A CN 116568872A CN 202180080412 A CN202180080412 A CN 202180080412A CN 116568872 A CN116568872 A CN 116568872A
Authority
CN
China
Prior art keywords
single crystal
cylinder
cooling
rectifying
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180080412.9A
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English (en)
Chinese (zh)
Inventor
三原佳祐
柳濑和也
三田村伸晃
高野清隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority claimed from PCT/JP2021/040259 external-priority patent/WO2022123957A1/ja
Publication of CN116568872A publication Critical patent/CN116568872A/zh
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
CN202180080412.9A 2020-12-10 2021-11-01 单晶制造装置 Pending CN116568872A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2020-205275 2020-12-10
JP2020205275A JP7501340B2 (ja) 2020-12-10 2020-12-10 単結晶製造装置
JP2020-205263 2020-12-10
PCT/JP2021/040259 WO2022123957A1 (ja) 2020-12-10 2021-11-01 単結晶製造装置

Publications (1)

Publication Number Publication Date
CN116568872A true CN116568872A (zh) 2023-08-08

Family

ID=82068129

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180080412.9A Pending CN116568872A (zh) 2020-12-10 2021-11-01 单晶制造装置

Country Status (2)

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JP (1) JP7501340B2 (ja)
CN (1) CN116568872A (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008285351A (ja) 2007-05-16 2008-11-27 Sumco Corp 原料供給装置及びこれを備えた単結晶引上げ装置、並びに原料供給方法
JP5092940B2 (ja) 2008-07-01 2012-12-05 信越半導体株式会社 単結晶製造装置及び単結晶の製造方法
JP5409215B2 (ja) 2009-09-07 2014-02-05 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 単結晶引上装置
JP5399212B2 (ja) 2009-11-16 2014-01-29 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 シリコン単結晶の製造方法
JP5741528B2 (ja) 2012-06-13 2015-07-01 信越半導体株式会社 原料充填方法及び単結晶の製造方法
JP6760128B2 (ja) 2017-02-24 2020-09-23 株式会社Sumco シリコン単結晶の製造方法、整流部材、および、単結晶引き上げ装置
JP6614380B1 (ja) 2019-03-20 2019-12-04 信越半導体株式会社 単結晶製造装置

Also Published As

Publication number Publication date
JP2022092450A (ja) 2022-06-22
JP7501340B2 (ja) 2024-06-18

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