CN116490767A - 缺陷检查装置 - Google Patents

缺陷检查装置 Download PDF

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Publication number
CN116490767A
CN116490767A CN202180063141.6A CN202180063141A CN116490767A CN 116490767 A CN116490767 A CN 116490767A CN 202180063141 A CN202180063141 A CN 202180063141A CN 116490767 A CN116490767 A CN 116490767A
Authority
CN
China
Prior art keywords
image
inspection
defect
control unit
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180063141.6A
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English (en)
Chinese (zh)
Inventor
三品尚登
冈本弘文
田中隆志
杉本贤
早川昌志
畠堀贵秀
堀川浩司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN116490767A publication Critical patent/CN116490767A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20212—Image combination
    • G06T2207/20221—Image fusion; Image merging
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30136—Metal
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30204—Marker

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
CN202180063141.6A 2020-09-18 2021-09-15 缺陷检查装置 Pending CN116490767A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020157140 2020-09-18
JP2020-157140 2020-09-18
PCT/JP2021/033951 WO2022059710A1 (ja) 2020-09-18 2021-09-15 欠陥検査装置

Publications (1)

Publication Number Publication Date
CN116490767A true CN116490767A (zh) 2023-07-25

Family

ID=80776719

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180063141.6A Pending CN116490767A (zh) 2020-09-18 2021-09-15 缺陷检查装置

Country Status (4)

Country Link
US (1) US12482086B2 (https=)
JP (2) JPWO2022059710A1 (https=)
CN (1) CN116490767A (https=)
WO (1) WO2022059710A1 (https=)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN116862914A (zh) * 2023-09-04 2023-10-10 深圳长盛高精密五金有限公司 基于深度学习的金属轴表面缺陷识别方法及系统

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JP7248144B2 (ja) * 2019-10-25 2023-03-29 日本電気株式会社 欠陥位置判定システム、外観検査方法およびプログラム
US20240225415A1 (en) * 2021-05-25 2024-07-11 C. R. Bard, Inc. Endoscope Imaging System
JP7757854B2 (ja) 2022-03-28 2025-10-22 株式会社島津製作所 欠陥検出装置
CN116030015B (zh) * 2023-01-08 2025-09-09 北京交通大学 紧固件松动状态人工智能监测方法和巡检设备

Citations (7)

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JP2013171026A (ja) * 2012-02-23 2013-09-02 Keyence Corp 検査領域表示装置及び検査領域表示方法
US20160011152A1 (en) * 2014-07-11 2016-01-14 The Boeing Company Nondestructive Inspection Using Acousto-Optics
KR101935932B1 (ko) * 2018-09-21 2019-04-03 선문대학교 산학협력단 실린더 형상에 대한 iet 기법을 이용한 동탄성 측정방법
CN109708861A (zh) * 2018-12-29 2019-05-03 东南大学 一种汽车排气管热振动检测方法及检测系统、计算机程序
WO2019239618A1 (ja) * 2018-06-11 2019-12-19 株式会社島津製作所 欠陥検出方法及び装置
WO2020003917A1 (ja) * 2018-06-29 2020-01-02 富士フイルム株式会社 欠陥表示装置及び方法
WO2020129209A1 (ja) * 2018-12-20 2020-06-25 株式会社島津製作所 欠陥検査装置および欠陥検査方法

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JPH07301623A (ja) * 1994-05-02 1995-11-14 Olympus Optical Co Ltd 超音波画像形成装置
JPH0891543A (ja) * 1994-09-28 1996-04-09 Omron Corp 画像処理方法およびその装置
US7480037B2 (en) 2005-12-02 2009-01-20 The Boeing Company System for projecting flaws and inspection locations and associated method
JP4982213B2 (ja) * 2007-03-12 2012-07-25 株式会社日立ハイテクノロジーズ 欠陥検査装置及び欠陥検査方法
JP6002413B2 (ja) * 2012-03-29 2016-10-05 日新製鋼株式会社 表面検査装置の調整方法
JP2016075554A (ja) * 2014-10-06 2016-05-12 株式会社ディスコ ウエーハ検査方法及びウエーハ検査装置
JP6451695B2 (ja) 2016-06-02 2019-01-16 株式会社島津製作所 欠陥検査方法及び欠陥検査装置
JP6805930B2 (ja) 2017-03-29 2020-12-23 株式会社島津製作所 振動測定装置
JP6300999B1 (ja) * 2017-10-30 2018-03-28 三菱日立パワーシステムズ検査株式会社 超音波探傷データ処理プログラム、超音波探傷データ処理装置及び被検体の評価方法
US11138748B2 (en) * 2018-09-20 2021-10-05 Zebra Technologies Corporation Method and apparatus for classifying depth scans
KR102171773B1 (ko) * 2018-10-22 2020-10-29 주식회사 고영테크놀러지 검사 영역 결정 방법 및 이를 이용하는 외관 검사 장치
JP7095751B2 (ja) 2018-11-27 2022-07-05 株式会社島津製作所 欠陥検査装置および欠陥検査方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013171026A (ja) * 2012-02-23 2013-09-02 Keyence Corp 検査領域表示装置及び検査領域表示方法
US20160011152A1 (en) * 2014-07-11 2016-01-14 The Boeing Company Nondestructive Inspection Using Acousto-Optics
WO2019239618A1 (ja) * 2018-06-11 2019-12-19 株式会社島津製作所 欠陥検出方法及び装置
WO2020003917A1 (ja) * 2018-06-29 2020-01-02 富士フイルム株式会社 欠陥表示装置及び方法
KR101935932B1 (ko) * 2018-09-21 2019-04-03 선문대학교 산학협력단 실린더 형상에 대한 iet 기법을 이용한 동탄성 측정방법
WO2020129209A1 (ja) * 2018-12-20 2020-06-25 株式会社島津製作所 欠陥検査装置および欠陥検査方法
CN109708861A (zh) * 2018-12-29 2019-05-03 东南大学 一种汽车排气管热振动检测方法及检测系统、计算机程序

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116862914A (zh) * 2023-09-04 2023-10-10 深圳长盛高精密五金有限公司 基于深度学习的金属轴表面缺陷识别方法及系统
CN116862914B (zh) * 2023-09-04 2023-12-26 深圳长盛高精密五金有限公司 基于深度学习的金属轴表面缺陷识别方法及系统

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Publication number Publication date
US20230401688A1 (en) 2023-12-14
US12482086B2 (en) 2025-11-25
JPWO2022059710A1 (https=) 2022-03-24
JP7803369B2 (ja) 2026-01-21
JP2024123175A (ja) 2024-09-10
WO2022059710A1 (ja) 2022-03-24

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