CN116426330A - 一种水性硅片金刚线切割液 - Google Patents
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 37
- 239000010703 silicon Substances 0.000 title claims abstract description 37
- 239000002173 cutting fluid Substances 0.000 title claims abstract description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 28
- 239000010432 diamond Substances 0.000 title claims abstract description 28
- 239000004094 surface-active agent Substances 0.000 claims abstract description 25
- 239000012752 auxiliary agent Substances 0.000 claims abstract description 13
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000002270 dispersing agent Substances 0.000 claims abstract description 12
- 239000000080 wetting agent Substances 0.000 claims abstract description 12
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 claims abstract description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- -1 polyoxypropylene stearate Polymers 0.000 claims description 16
- 239000008367 deionised water Substances 0.000 claims description 15
- 229910021641 deionized water Inorganic materials 0.000 claims description 15
- GLDOVTGHNKAZLK-UHFFFAOYSA-N octadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCO GLDOVTGHNKAZLK-UHFFFAOYSA-N 0.000 claims description 10
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 9
- BXWNKGSJHAJOGX-UHFFFAOYSA-N hexadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCO BXWNKGSJHAJOGX-UHFFFAOYSA-N 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 7
- 238000003756 stirring Methods 0.000 claims description 7
- GOQYKNQRPGWPLP-UHFFFAOYSA-N n-heptadecyl alcohol Natural products CCCCCCCCCCCCCCCCCO GOQYKNQRPGWPLP-UHFFFAOYSA-N 0.000 claims description 5
- 239000003960 organic solvent Substances 0.000 claims description 5
- 229960000541 cetyl alcohol Drugs 0.000 claims description 4
- 125000003158 alcohol group Chemical group 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 abstract description 17
- 238000001816 cooling Methods 0.000 abstract description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 3
- 238000002360 preparation method Methods 0.000 abstract description 2
- 230000001050 lubricating effect Effects 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 6
- UWJJYHHHVWZFEP-UHFFFAOYSA-N pentane-1,1-diol Chemical compound CCCCC(O)O UWJJYHHHVWZFEP-UHFFFAOYSA-N 0.000 description 5
- 239000011863 silicon-based powder Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 239000013049 sediment Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000002671 adjuvant Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M173/00—Lubricating compositions containing more than 10% water
- C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/02—Hydroxy compounds
- C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
- C10M2207/042—Epoxides
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/04—Detergent property or dispersant property
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/06—Oiliness; Film-strength; Anti-wear; Resistance to extreme pressure
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
本发明属于单晶硅切割技术领域，具体涉及一种水性硅片金刚线切割液，包括由环氧己烷和环氧丙烷组成的表面活性剂、润湿剂、分散剂、醇醚类助剂以及水。本发明的水性硅片金刚线切割液具有良好的润滑、分散、冷却及除屑性能，且制备方法简单，成本低廉，适合推广应用。
Description
技术领域
本发明属于单晶硅切割领域，特别涉及一种水性硅片金刚线切割液。
背景技术
金刚线切割工艺，因其线耗低，时间快，成本低，已被广泛应用于单晶/多晶硅片行业。然而金刚线外层镀有的金刚石与硅片摩擦产生的摩擦力远比砂浆悬浮液高，切割时产生瞬间更强的高温，冷却效果下降、硅粉沉降性不好，这导致了切割后的硅片表面会存在不易清洗的固体硅细粉末，从而使产品光滑度下降、良率低。切割液的性能是影响硅片切割效率及质量的关键因素之一。
目前的硅片切割液切割后的硅片表面TTV大，有线痕，由于硅片在切割过程中会发生脆性崩裂或划痕，影响了硅片表面的粗糙度和翘曲度，使得所加工的硅片总厚度存在误差。此外，现有的金刚线切割液质量良莠不齐，存在切割过程中泡沫过多，以及不利于切割后清洗，影响金刚砂线使用寿命等问题。
发明内容
基于上述技术问题，本发明的目的是提供一种水性硅片金刚线切割液，其具有良好的润滑、分散、冷却及除屑作用。
为达上述目的，本发明采用的技术方案是：
一种水性硅片金刚线切割液，其组分按质量百分比为：
表面活性剂30％
润湿剂10％
分散剂10％
助剂5％
去离子水45％。
其中，表面活性剂为环氧己烷和环氧丙烷按质量比为0.5～1.5:1组成；润湿剂为聚氧丙烯硬脂酸酯；分散剂为聚氧乙烯十六烷基醇、聚氧乙烯十八醇中的任意一种；助剂为醇、醚类有机溶剂，所述醇、醚类有机溶剂是水溶性的，其闪点≥65℃。
本发明还提供了一种水性硅片金刚线切割液的制备方法，在去离子水中加入表面活性剂、润湿剂、分散剂和助剂，搅拌混合均匀，即得水性硅片金刚线切割液。
与现有技术相比，本发明的有益效果为：本发明的水性硅片金刚线切割液，采用按一定质量配比的环氧己烷和环氧丙烷作为表面活性剂，其HLB介于10～14之间，具有良好的润湿洗涤效果，本发明的金刚线切割液具有良好的润滑、分散、冷却及除屑性能。
具体实施方式
下面通过具体实施方式来进一步说明本发明的技术方案。本领域技术人员应该知道，所述实施例仅仅是帮助理解本发明，不应视为对本发明的限制。
实施例1
表面活性剂30份
聚氧丙烯硬脂酸酯10份
聚氧乙烯十六烷基醇10份
戊二醇5份
去离子水45份
其中，表面活性剂为环氧己烷15份+环氧丙烷15份，
将上述表面活性剂、润湿剂、分散剂和助剂加入去离子水中，搅拌混合均匀，即得水性硅片金刚线切割液。
实施例2
表面活性剂30份
聚氧丙烯硬脂酸酯10份
聚氧乙烯十八醇10份
戊二醇5份
去离子水45份
其中，表面活性剂为环氧己烷15份+环氧丙烷15份，
将上述表面活性剂、润湿剂、分散剂和助剂加入去离子水中，搅拌混合均匀，即得水性硅片金刚线切割液。
实施例3
表面活性剂30份
聚氧丙烯硬脂酸酯10份
聚氧乙烯十八醇10份
戊二醇5份
去离子水45份
其中，表面活性剂为环氧己烷12份+环氧丙烷18份，
将上述表面活性剂、润湿剂、分散剂和助剂加入去离子水中，搅拌混合均匀，即得水性硅片金刚线切割液。
实施例4
表面活性剂30份
聚氧丙烯硬脂酸酯10份
聚氧乙烯十六烷基醇10份
戊二醇5份
去离子水45份
其中，表面活性剂为环氧己烷18份+环氧丙烷12份，
将上述表面活性剂、润湿剂、分散剂和助剂加入去离子水中，搅拌混合均匀，即得水性硅片金刚线切割液。
实施例5
表面活性剂30份
聚氧丙烯硬脂酸酯10份
聚氧乙烯十八醇10份
戊二醇5份
去离子水45份
其中，表面活性剂为环氧己烷18份+环氧丙烷12份，
将上述表面活性剂、润湿剂、分散剂和助剂加入去离子水中，搅拌混合均匀，即得水性硅片金刚线切割液。
对比例1
本对比例与实施例1的区别为不添加表面活性剂和助剂。
分别将上述各实施例、对比例中的切割液用去离子水稀释350倍后，对同样规格的硅棒进行金刚石砂线切割，切割后对硅片产品进行常规清洗(各实施例、对比例中，切割工艺、清洗工艺均一致)，采用实施例1～5中的切割液，耐磨性能好，冷却性能好，硅片的切割成品率≥98％，硅片易清洗。
观察切割后切割液底部，实施例1～5中的切割液底部可见一沉降物薄层，即硅颗粒团聚沉降；而对比例1中的切割液底部未观察到沉降物。可见实施例1～5中因加入了表面活性剂和助剂，在一定程度上能够降低出刀阶段硅粉在切割面堆积而影响切割环境，局部区域切割液中硅粉含量不会增加；对于硅片切割过程中出现的硅粉能够及时进行分散，硅片表面的残留物难以附着。结果见下表：
| 崩边％ | 污片％ | 清洗后表面粗糙度μm | |
| 实施例1 | 1.5 | 0.67 | 5.5 |
| 实施例2 | 1.7 | 0.75 | 5.2 |
| 实施例3 | 1.8 | 0.89 | 5.2 |
| 实施例4 | 1.5 | 0.62 | 5.3 |
| 实施例5 | 1.6 | 0.85 | 5.5 |
| 对比例1 | 3.2 | 1.12 | 8.3 |
Claims (6)
1.一种水性硅片金刚线切割液，其特征在于，包括如下组分按质量百分比为：
表面活性剂30％
润湿剂10％
分散剂10％
助剂5％
去离子水45％。
2.根据权利要求1所述的水性硅片金刚线切割液，其特征在于，所述表面活性剂为环氧己烷和环氧丙烷按质量比为0.5～1.5:1组成。
3.根据权利要求1所述的水性硅片金刚线切割液，其特征在于，所述润湿剂为聚氧丙烯硬脂酸酯。
4.根据权利要求1所述的水性硅片金刚线切割液，其特征在于，所述分散剂为聚氧乙烯十六烷基醇、聚氧乙烯十八醇中一种。
5.根据权利要求1所述的水性硅片金刚线切割液，其特征在于，所述助剂为醇、醚类有机溶剂，所述醇、醚类有机溶剂是水溶性的，其闪点≥65℃。
6.一种如权利要求1所述的水性硅片金刚线切割液的制备方法，其特征在于，在去离子水中加入表面活性剂、润湿剂、分散剂和助剂，搅拌混合均匀，即得水性硅片金刚线切割液。
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| 汪建红等: "《精细化学品实验》", 30 September 2022, 武汉大学出版社, pages: 5 - 6 * |
| 魏泽英: "《物理化学》", 31 January 2021, 华中科技大学出版社, pages: 203 - 215 * |
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