CN115992380A

CN115992380A - Horizontal electroplating device

Info

Publication number: CN115992380A
Application number: CN202310029058.8A
Authority: CN
Inventors: 余丞博; 卞和平; 黄建; 胥勇; 刘余晖
Original assignee: KUNSHAN HULI MICROELECTRONICS CO Ltd; Kunshan Dongwei Technology Co Ltd
Current assignee: KUNSHAN HULI MICROELECTRONICS CO Ltd; Kunshan Dongwei Technology Co Ltd
Priority date: 2023-01-09
Filing date: 2023-01-09
Publication date: 2023-04-21

Abstract

The invention relates to the technical field of electroplating devices, in particular to a horizontal electroplating device. Comprises an upper anode box, a lower anode box, an electroplating bath and an external circulation component. The upper anode box is internally provided with a first anode component. A second anode component is arranged in the lower anode box, and a second liquid inlet and a second liquid outlet are formed in the lower anode box. The outer circulation assembly comprises a liquid inlet pipe, a liquid outlet pipe and a water pump, the water pump is communicated with the liquid inlet pipe and the liquid outlet pipe, the liquid inlet pipe is communicated with a second liquid inlet, and the liquid outlet pipe is communicated with a second liquid outlet, so that the water pump can drive liquid medicine in the liquid inlet pipe to drain bubbles in the lower anode box. The horizontal electroplating device can drain bubbles in the lower anode box, avoid the bubbles from shielding the anode electrolytic reaction, and improve the uniformity and the product yield of plate coating.

Description

Horizontal electroplating device

Technical Field

The invention relates to the technical field of electroplating devices, in particular to a horizontal electroplating device.

Background

At present, an anode of an electroplating device is set as an insoluble anode under most conditions, in the electroplating process, as the insoluble anode is used, liquid medicine in an anode region is electrolyzed to separate out oxygen, oxygen bubbles are formed in electroplating liquid, the bubbles slowly grow along with the time, the oxygen bubbles can move to a cathode region, the surface coating of a plate in the cathode region is easily caused to generate a cavity, and then the phenomenon of uneven electroplating is caused, so that the quality and the yield of a product to be electroplated are influenced.

In the prior art, bubbles are gradually floated and burst through natural pressure difference under normal atmospheric pressure, so that the burst rate of the bubbles is slow and the efficiency is low, and the uniformity of the electroplated product is affected.

Therefore, there is a need to design a horizontal electroplating device to solve the above technical problems.

Disclosure of Invention

The invention aims to provide a horizontal electroplating device which is simple in structure, can drain and separate bubbles in an upper anode box and a lower anode box, avoids the blocking of anode electrolysis reaction by the bubbles, and improves the uniformity of plate coating and the product yield.

To achieve the purpose, the invention adopts the following technical scheme:

the present invention provides a horizontal electroplating device, comprising:

an upper anode box, wherein a first anode assembly is arranged in the upper anode box;

the lower anode box is internally provided with a second anode assembly, and a second liquid inlet and a second liquid outlet are formed in the lower anode box;

the electroplating bath is internally provided with a liquid medicine, the upper anode box and the lower anode box are both arranged in the electroplating bath, a containing space for containing a plate material is formed between the upper anode box and the lower anode box, and the plate material can move in the containing space;

the outer circulation assembly comprises a liquid inlet pipe, a liquid outlet pipe and a water pump, wherein the water pump is communicated with the liquid inlet pipe and the liquid outlet pipe, the liquid inlet pipe is communicated with the second liquid inlet, and the liquid outlet pipe is communicated with the second liquid outlet, so that the water pump can drive liquid medicine in the liquid inlet pipe to drain bubbles in the lower anode box.

As an alternative technical scheme of the horizontal electroplating device, a first liquid inlet and a first liquid outlet are formed in the upper anode box; the liquid inlet pipe is further communicated with the first liquid inlet, and the liquid outlet pipe is further communicated with the first liquid outlet, so that the water pump can drive liquid medicine in the liquid inlet pipe to drain bubbles in the upper anode box.

As an alternative technical scheme of the horizontal electroplating device, the section of the upper anode box is rectangular, and the first liquid inlet and the first liquid outlet are arranged at equal heights; the section of the lower anode box is in a wedge shape, and the height of the second liquid inlet is lower than that of the second liquid outlet; or alternatively, the first and second heat exchangers may be,

the upper anode box and the lower anode box are arranged in a wedge shape, and the upper anode box and the lower anode box are symmetrically arranged relative to the axis of the accommodating space.

As an alternative technical scheme of horizontal electroplating device, the feed liquor pipe includes first feed liquor pipe, the drain pipe includes first drain pipe, the water pump includes first water pump, the one end of first feed liquor pipe communicate in first inlet, the other end communicate in the exit end of first water pump, the one end of first drain pipe communicate in first liquid outlet, the other end communicate in the entrance point of first water pump.

As an alternative technical scheme of horizontal electroplating device, the feed liquor pipe includes the second feed liquor pipe, the drain pipe includes the second drain pipe, the water pump includes the second water pump, the one end of second feed liquor pipe communicate in the second inlet, the other end communicate in the exit end of second water pump, the one end of second drain pipe communicate in the second liquid outlet, the other end communicate in the entrance point of second water pump.

As an alternative technical scheme of the horizontal electroplating device, the liquid inlet pipe is communicated with a defoaming device, and the defoaming device is used for eliminating bubbles in the liquid medicine.

As an alternative solution of the horizontal electroplating device, the first anode assembly includes a first ionic membrane and a first insoluble anode, the first ionic membrane is disposed directly below the first insoluble anode, and the first ionic membrane is used for penetrating metal ions.

As an alternative technical scheme of the horizontal electroplating device, the first anode assembly further comprises a first shielding plate, a plurality of first through holes are formed in the first shielding plate, and the first shielding plate is arranged right below the first ion membrane.

As an alternative solution of the horizontal electroplating device, at least one of the upper anode box and the lower anode box is provided with an inclined plane, a second anode assembly is arranged in the lower anode box, and at least one of a part of the first anode assembly or a part of the second anode assembly is arranged along the inclined plane in an inclined manner.

As an alternative technical scheme of the horizontal electroplating device, the horizontal electroplating device further comprises a first spray pipe and a second spray pipe, wherein the first spray pipe and the second spray pipe are respectively arranged on two sides of a plate material, and the first spray pipe and the second spray pipe are symmetrically arranged relative to the plate material.

The beneficial effects of the invention at least comprise:

the invention provides a horizontal electroplating device which mainly comprises an upper anode box, a lower anode box, an electroplating bath and an external circulation assembly. Wherein, be provided with first positive pole subassembly in the last positive pole box, and offered first inlet and first liquid outlet on the last positive pole box. A second anode component is arranged in the lower anode box, and a second liquid inlet and a second liquid outlet are formed in the lower anode box. The electroplating bath is internally provided with a liquid medicine, the upper anode box and the lower anode box are both arranged in the electroplating bath, a containing space for containing the plate is formed between the upper anode box and the lower anode box, and the plate can move in the containing space. The outer circulation assembly comprises a liquid inlet pipe, a liquid outlet pipe and a water pump, wherein the water pump is communicated with the liquid inlet pipe and the liquid outlet pipe, the liquid inlet pipe is simultaneously communicated with a first liquid inlet and a second liquid inlet, and the liquid outlet pipe is simultaneously communicated with the first liquid outlet and the second liquid outlet, so that the water pump can drive liquid medicine in the liquid inlet pipe to drain bubbles in the upper anode box and the lower anode box. The liquid medicine in the liquid inlet pipe can uniformly enter the upper anode box through the water pump, the flowing direction of the liquid medicine is parallel to the surface of the first anode assembly, so that the liquid medicine can drain bubbles generated on the surface of the first anode assembly to the first liquid outlet, and the bubbles flow into the first liquid outlet pipe and then flow through the first water pump, the liquid medicine with the bubbles is driven into the defoaming device by the first water pump to be defoamed, and the defoamed liquid medicine flows into the upper anode box through the first liquid inlet pipe again to complete the circulation of the liquid medicine. Therefore, bubbles on the first anode assembly are drained, so that bubbles in the upper anode box can be separated from the liquid level of the liquid medicine in an accelerating way, the uniformity of electroplating products is improved, and the product yield is improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly explain the drawings needed in the description of the embodiments of the present invention, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the contents of the embodiments of the present invention and these drawings without inventive effort for those skilled in the art.

FIG. 1 is a schematic diagram of a horizontal electroplating apparatus according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a horizontal electroplating device according to an embodiment of the invention.

Reference numerals

100. An upper anode box; 110. a first anode assembly; 130. a first insoluble anode; 140. a first ionic membrane; 150. a first shutter; 1501. a first through hole;

200. a lower anode box; 210. a second anode assembly; 230. a second insoluble anode; 240. a second ionic membrane; 250. a second shutter; 2501. a second through hole; 260. an inclined surface;

300. plate material;

400. an external circulation assembly; 410. a first liquid inlet pipe; 420. a first liquid outlet pipe; 430. a first water pump; 440. a first defoaming device;

500. a first nozzle; 510. a first branch pipe; 600. a second nozzle; 610. a second branch pipe; 700. a clamp;

800. a liquid medicine; 810. and (5) air bubbles.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the invention more clear, the technical scheme of the invention is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present invention, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the invention. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

As shown in fig. 1-2, the present embodiment provides a horizontal electroplating apparatus, which mainly includes an upper anode box 100, a lower anode box 200, an electroplating tank, and an external circulation assembly 400. The upper anode box 100 is provided with a first anode assembly 110, and the upper anode box 100 is provided with a first liquid inlet and a first liquid outlet. The lower anode box 200 is provided with a second anode assembly 210, and the lower anode box 200 is provided with a second liquid inlet and a second liquid outlet. The electroplating bath is internally provided with a liquid medicine 800, the upper anode box 100 and the lower anode box 200 are both arranged in the electroplating bath, a containing space for containing the plate 300 is formed between the upper anode box 100 and the lower anode box 200, and the plate 300 can move in the containing space. The external circulation assembly 400 comprises a liquid inlet pipe, a liquid outlet pipe and a water pump, wherein the water pump is communicated with the liquid inlet pipe and the liquid outlet pipe, the liquid inlet pipe is simultaneously communicated with a first liquid inlet and a second liquid inlet, and the liquid outlet pipe is simultaneously communicated with the first liquid outlet and the second liquid outlet, so that the water pump can drive the liquid medicine 800 in the liquid inlet pipe to drain the bubbles 810 in the upper anode box 100 and the lower anode box 200.

Further, the liquid inlet pipe comprises a first liquid inlet pipe 410 and a second liquid inlet pipe, the liquid outlet pipe comprises a first liquid outlet pipe 420 and a second liquid outlet pipe, the water pump comprises a first water pump 430 and a second water pump, one end of the first liquid inlet pipe 410 is communicated with the first liquid inlet, the other end of the first liquid inlet pipe is communicated with the outlet end of the first water pump 430, one end of the first liquid outlet pipe 420 is communicated with the first liquid outlet, and the other end of the first liquid outlet pipe is communicated with the inlet end of the first water pump 430. One end of the second liquid inlet pipe is communicated with the second liquid inlet, the other end of the second liquid inlet pipe is communicated with the outlet end of the second water pump, one end of the second liquid outlet pipe is communicated with the second liquid outlet, and the other end of the second liquid outlet pipe is communicated with the inlet end of the second water pump.

The liquid inlet pipe in this embodiment is communicated with a defoaming device, and the defoaming device is used for eliminating bubbles 810 in the liquid medicine 800. Specifically, the first liquid inlet pipe 410 and the second liquid inlet pipe are respectively communicated with two defoaming devices, and the defoaming devices are respectively used for eliminating bubbles 810 in the upper anode box 100 and the lower anode box 200.

Based on the above design, the liquid medicine 800 in the first liquid inlet pipe 410 can uniformly enter the upper anode box 100 through the first water pump 430, and the flow direction of the liquid medicine 800 is parallel to the surface of the first anode assembly 110, so that the liquid medicine 800 can drain the bubbles 810 generated on the surface of the first anode assembly 110 to the first liquid outlet, and flow into the first liquid outlet pipe 420 to flow through the first water pump 430, the liquid medicine 800 with the bubbles 810 is driven into the defoaming device by the first water pump 430 to be defoamed, and the defoamed liquid medicine 800 flows into the upper anode box 100 through the first liquid inlet pipe 410 again, so that the circulation of the liquid medicine 800 is completed. Therefore, by conducting drainage on the bubbles 810 on the first anode assembly 110, the bubbles 810 in the upper anode box 100 can be separated from the liquid level of the liquid medicine 800 in an accelerating way, the uniformity of electroplating products is improved, and the product yield is improved.

As shown in fig. 1-2, in the present embodiment, the first anode assembly 110 further includes a first ion membrane 140 and a first insoluble anode 130, the first ion membrane 140 is disposed directly under the first insoluble anode 130, the second anode assembly 210 includes a second ion membrane 240, the second ion membrane 240 is disposed above the second insoluble anode 230, and both the first ion membrane 140 and the second ion membrane 240 are used to permeate metal ions so that the metal ions can reach the cathode region where the sheet 300 is located, and are electroplated and attached on the surface of the sheet 300.

Further, the first anode assembly 110 further includes a first shielding plate 150, a plurality of first through holes 1501 are formed in the first shielding plate 150, and the first shielding plate 150 is disposed directly under the first ion membrane 140. The second anode assembly 210 further includes a second shielding plate 250, wherein a plurality of second through holes 2501 are formed in the second shielding plate 250, and the second shielding plate 250 is disposed directly under the second ion membrane 240. Metal ions in the liquid medicine 800 can penetrate through the first ionic membrane 140 and pass through the first through hole 1501 to reach the cathode region and be electroplated on the upper surface of the plate 300; the metal ions in the chemical solution 800 can also pass through the second ion membrane 240 and pass through the second through hole 2501 to reach the cathode region and be plated to the lower surface of the sheet material 300. The arrangement of the first shutter 150 and the second shutter 250 may prevent the bubbles 810 in the upper anode casing 100 and the lower anode casing 200 from moving to the cathode region.

It should be noted that, during the electroplating process, bubbles 810 are generated on the upper and lower surfaces of the first insoluble anode 130 and the upper and lower surfaces of the second insoluble anode 230, and the bubbles 810 move upward, so that the first ionic membrane 140 in the upper anode box 100 is located below the first insoluble anode 130, and the bubbles 810 only float upward and do not sink, so that an operator can selectively communicate the outer circulation assembly 400 with the upper anode box 100 according to practical situations. That is, the worker may communicate only the lower anode cartridge 200 with the outer circulation assembly 400, thereby accomplishing drainage of the air bubbles 810 in the lower anode cartridge 200. Of course, in order to avoid excessive air bubbles 810 in the upper anode casing 100, the air bubbles 810 overflow the upper anode casing 100 to flow to the cathode region where the plate 300 is located, and thus, in order to avoid the problem of overflow of the air bubbles 810, the operator may also communicate the outer circulation assembly 400 with the upper anode casing 100.

As shown in fig. 1 to 2, in the present embodiment, at least one of the upper anode cartridge 100 and the lower anode cartridge 200 is provided with an inclined surface 260, and at least one of a portion of the first anode assembly 110 or a portion of the second anode assembly 210 is disposed obliquely along the inclined surface 260. For example, in the present embodiment, the lower anode case 200 is provided with the inclined surface 260, and the second ion membrane 240 and the second shutter 250 are provided obliquely as an example, so that the bubbles 810 generated in the lower anode case 200 can float and collect on one side of the inclined surface 260, i.e., the upper left corner of the inclined surface 260 in fig. 2, and thus the phenomenon that the bubbles 810 clog the second ion membrane 240 can be prevented from occurring.

Preferably, the cross section of the upper anode box 100 is rectangular, and the first liquid inlet and the first liquid outlet are arranged at equal heights; the cross section of the lower anode box 200 is wedge-shaped, and the height of the second liquid inlet is lower than that of the second liquid outlet.

Alternatively, in the present embodiment, the upper anode casing 100 and the lower anode casing 200 may also each be provided in a wedge shape, and the upper anode casing 100 and the lower anode casing 200 are symmetrically provided about the axis of the accommodating space. That is, the first shielding plate 150 and the first ion membrane 140 in the upper anode box 100 are disposed at a certain inclination angle, and the second shielding plate 250 and the second ion membrane 240 in the lower anode box 200 are disposed at a certain inclination angle, so that the air bubbles 810 are convenient to converge toward one direction of the upper anode box 100 and the lower anode box 200, so as to avoid blocking the first ion membrane 140 and the second ion membrane 240.

With continued reference to fig. 2, in the present embodiment, the horizontal plating apparatus further includes a first nozzle 500 and a second nozzle 600, where the first nozzle 500 and the second nozzle 600 are disposed on two sides of the sheet 300, respectively, and the first nozzle 500 and the second nozzle 600 are symmetrically disposed with respect to the sheet 300. The above arrangement can realize that when the plate 300 is electroplated, the spray pipes are continuously arranged on two surfaces of the plate to spray the liquid medicine 800, the spraying of the liquid medicine 800 also improves the circulation replacement of the liquid medicine 800 in the cathode area, the situation that the liquid medicine 800 near the plate 300 has fewer metal cations is avoided, and then the electroplating quality and efficiency can be improved.

Specifically, the first nozzles 500 in the present embodiment are provided with a plurality of first branch pipes 510 at equal intervals, the second nozzles 600 are provided with a plurality of second branch pipes 610 at equal intervals, and the first branch pipes 510 and the second branch pipes 610 are both disposed toward the slab 300. Thereby enabling the medical fluid 800 in the first nozzle 500 to be sprayed toward the upper surface of the slab 300 by the plurality of first branch pipes 510, and the medical fluid 800 in the second nozzle 600 to be sprayed toward the lower surface of the slab 300 by the plurality of second branch pipes 610.

As shown in fig. 2, the horizontal plating apparatus further includes a clamp 700, and the clamp 700 is used to clamp the plate 300. The clamp 700 clamps the plate 300 and can drive the plate 300 to penetrate through the cathode region, namely, the plate 300 is clamped by the clamp 700 and then placed in the cathode region along with the clamp 700, and can be taken out along with the clamp 700 after electroplating is completed, so that convenience and rapidness are realized.

Specifically, the horizontal electroplating device further comprises a driving member, and the driving member is in driving connection with the fixture 700, so that the plate 300 can enter the horizontal electroplating device and reach the corresponding cathode region for electroplating, and then come out of the horizontal electroplating device to complete electroplating, thereby realizing automation of electroplating of the horizontal electroplating device.

Optionally, the fixture 700 and the driving member are respectively provided with a plurality of corresponding devices, so that the horizontal electroplating device can electroplate a plurality of plates 300 at one time, thereby saving electroplating time and improving the working efficiency of the horizontal electroplating device.

Alternatively, the driving member in this embodiment may be provided by a motor-driven steel belt.

It is to be understood that the foregoing is only illustrative of the presently preferred embodiments of the invention and the technical principles that have been developed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.

Note that in the description of this specification, a description of reference to the terms "some embodiments," "other embodiments," and the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Claims

1. A horizontal plating apparatus, comprising:

an upper anode box (100), wherein a first anode assembly (110) is arranged in the upper anode box (100);

the lower anode box (200) is internally provided with a second anode assembly (210), and the lower anode box (200) is provided with a second liquid inlet and a second liquid outlet;

the electroplating bath comprises an electroplating bath body, wherein a liquid medicine (800) is contained in the electroplating bath body, the upper anode box (100) and the lower anode box (200) are both placed in the electroplating bath body, a containing space for containing a plate material (300) is formed between the upper anode box (100) and the lower anode box (200), and the plate material (300) can move in the containing space;

the outer circulation assembly (400), outer circulation assembly (400) include feed liquor pipe, drain pipe and water pump, the water pump with the feed liquor pipe with the drain pipe all communicates, the feed liquor pipe communicate in the second inlet, the drain pipe communicate in the second liquid outlet, so that the water pump can drive liquid medicine (800) in the feed liquor pipe is right bubble (810) in lower positive pole box (200) are conducted the drainage.

2. The horizontal electroplating device according to claim 1, wherein the upper anode box (100) is provided with a first liquid inlet and a first liquid outlet; the liquid inlet pipe is further communicated with the first liquid inlet, and the liquid outlet pipe is further communicated with the first liquid outlet, so that the water pump can drive liquid medicine (800) in the liquid inlet pipe to drain bubbles (810) in the upper anode box (100).

3. The horizontal plating apparatus according to claim 2, wherein the upper anode box (100) has a rectangular cross section, and the first liquid inlet and the first liquid outlet are provided at equal heights; the section of the lower anode box (200) is in a wedge-shaped arrangement, and the height of the second liquid inlet is lower than that of the second liquid outlet; or alternatively, the first and second heat exchangers may be,

the upper anode box (100) and the lower anode box (200) are arranged in a wedge shape, and the upper anode box (100) and the lower anode box (200) are symmetrically arranged about the axis of the accommodating space.

4. The horizontal plating apparatus according to claim 2, wherein the liquid inlet pipe includes a first liquid inlet pipe (410), the liquid outlet pipe includes a first liquid outlet pipe (420), the water pump includes a first water pump (430), one end of the first liquid inlet pipe (410) is communicated with the first liquid inlet, the other end is communicated with an outlet end of the first water pump (430), one end of the first liquid outlet pipe (420) is communicated with the first liquid outlet, and the other end is communicated with an inlet end of the first water pump (430).

5. The horizontal plating apparatus of claim 2, wherein the liquid inlet pipe comprises a second liquid inlet pipe, the liquid outlet pipe comprises a second liquid outlet pipe, the water pump comprises a second water pump, one end of the second liquid inlet pipe is communicated with the second liquid inlet, the other end of the second liquid inlet pipe is communicated with the outlet end of the second water pump, one end of the second liquid outlet pipe is communicated with the second liquid outlet, and the other end of the second liquid outlet pipe is communicated with the inlet end of the second water pump.

6. The horizontal electroplating device according to claim 1, wherein the liquid inlet pipe is communicated with a defoaming device, and the defoaming device is used for eliminating bubbles (810) in the liquid medicine (800).

7. The horizontal electroplating device according to claim 1, wherein the first anode assembly (110) comprises a first ionic membrane (140) and a first insoluble anode (130), the first ionic membrane (140) being disposed directly below the first insoluble anode (130), the first ionic membrane (140) being for permeation of metal ions.

8. The horizontal plating apparatus according to claim 7, wherein the first anode assembly (110) further comprises a first shielding plate (150), a plurality of first through holes (1501) are formed in the first shielding plate (150), and the first shielding plate (150) is disposed directly under the first ion membrane (140).

9. The horizontal plating apparatus according to claim 1, wherein an inclined surface (260) is provided on at least one of the upper anode cartridge (100) and the lower anode cartridge (200), a second anode assembly (210) is provided in the lower anode cartridge (200), and at least one of a part of the first anode assembly (110) or a part of the second anode assembly (210) is arranged obliquely along the inclined surface (260).

10. The horizontal plating apparatus according to claim 1, further comprising a first nozzle (500) and a second nozzle (600), the first nozzle (500) and the second nozzle (600) being disposed on both sides of a sheet metal (300), respectively, and the first nozzle (500) and the second nozzle (600) being disposed symmetrically with respect to the sheet metal (300).