CN115684864A - Test circuit and test method suitable for switch time test and threshold voltage test - Google Patents
Test circuit and test method suitable for switch time test and threshold voltage test Download PDFInfo
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Abstract
The invention relates to the technical field of semiconductors, in particular to a test circuit and a test method suitable for a switching time test and a threshold voltage test, wherein the test circuit comprises: the threshold voltage testing circuit comprises a first power supply, a first switch, a second switch and a third switch, the power circuit comprises a first capacitor, the first power supply is connected with a collector of a tested device through the first switch, the first power supply is connected with an emitter through the second switch, the first power supply is connected with a base through the third switch, when the first switch and the second switch are closed, the first power supply charges the first capacitor, and when the third switch is closed, the threshold voltage testing circuit is used for testing the threshold voltage of the tested device; the switching time test circuit is connected with the power loop to carry out switching time test. According to the invention, the first capacitor is charged firstly by switching on and off the switch; then testing the threshold voltage of the tested device; the test time for the threshold voltage can be reduced.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a test circuit and a test method suitable for a switching time test and a threshold voltage test.
Background
At present, third generation semiconductor material devices on the market, such as GaN (gallium nitride), siC (silicon carbide), etc., have too high switching speed (di/dt current rise (rate) and dv/dt voltage rise (rate)), and parasitic parameters in a test circuit can cause serious influence on a test result, so that a relay or a switch is not generally connected in a high-power loop during a switching time test.
However, since the high-power loop has a large capacitance and has no relay or switch to be turned off, when measuring the value of the VTH (threshold voltage) of the device, the measurement result of the threshold voltage and the measurement time are greatly affected. For example, currently, a customer needs to measure the VTH value of a device using a constant current of 0.25mA, and if the VTH value of the device is 6V and the capacitance used in a high power loop is 33uF, the measurement time is according to the formula:
calculated time of day
About 800ms, if the VTH of the device is larger, or the capacitance in the power loop is larger, the required measurement time is longer, and the time cannot meet the requirement of mass production of customers. And, if the upper limit of the measurement is 10V, in case of the device damage open circuit, a constant current of 0.25mA is used to measure the VTH value of the device, it takes 1.32s to determine the device damage.
Disclosure of Invention
In view of this, the present invention provides a test circuit and a test method suitable for a switching time test and a threshold voltage test, so as to solve the technical problem in the prior art that the test circuit for measuring the switching time of a semiconductor device has a long test time when testing the threshold voltage.
The technical scheme provided by the invention is as follows:
a first aspect of the invention provides a test circuit adapted for a switching time test and a threshold voltage test, comprising: the threshold voltage testing circuit comprises a first power supply, a first switch, a second switch and a third switch, the power circuit comprises a tested device and a first capacitor, the first power supply is connected with a collector of the tested device through the first switch, is connected with an emitter of the tested device through the second switch, and is connected with a base of the tested device through the third switch, when the first switch and the second switch are closed, the first power supply charges the first capacitor, and when the third switch is closed, the threshold voltage testing circuit is used for testing the threshold voltage of the tested device; the switch time test circuit is connected with the power loop to carry out switch time test on the tested device.
Optionally, the test circuit adapted for the switching time test and the threshold voltage test further includes: and the charge release circuit is connected with two ends of the first capacitor and used for releasing the charge in the first capacitor after the switching time test and the threshold voltage test are carried out.
Optionally, the power circuit further comprises: the first diode is connected between a device to be tested and the first capacitor, and the load loop is connected to two ends of the first diode; the first diode is used for preventing current in the first capacitor from flowing back when a threshold voltage test is carried out; the load circuit is used for being connected to two ends of the first diode when the switching time test is carried out, and the first diode is also used as a freewheeling diode of the load circuit when the switching time test is carried out.
Optionally, the first power supply includes a low voltage isolation power supply and a constant current source, and the threshold voltage test circuit further includes: the low-voltage isolation power supply is used for charging the constant current source, the sampling chip and the operational amplifier; the constant current source is used for providing constant current output during threshold voltage test; the sampling chip and the operational amplifier are used for acquiring the threshold voltage of the device to be tested.
Optionally, the switching time test circuit includes: a power supply circuit and a drive circuit; the power supply circuit is connected with the power loop and used for providing voltage for the tested device; the driving circuit is connected with the tested device and used for controlling the tested device to be switched on or switched off.
Optionally, the power circuit includes a second power supply, a second capacitor, and a first switching tube, where the second power supply and the second capacitor are connected to two ends of the first capacitor through the first switching tube; the driving circuit comprises a first driving signal source, a second driving signal source, a third diode, a fourth diode, a first variable resistor array, a second variable resistor array and a fourth switch, one end of the fourth switch is connected with the device to be tested, the other end of the fourth switch is connected with one end of the first variable resistor array and one end of the second variable resistor array, the other end of the first variable resistor array is connected with the cathode of the third diode, the anode of the third diode is connected with the first driving signal source, the other end of the second variable resistor array is connected with the anode of the fourth diode, and the cathode of the fourth diode is connected with the second driving signal source.
Optionally, the charge releasing circuit includes a first resistor and a second switch tube, and the first resistor and the second switch tube are connected in series and then connected in parallel to two ends of the first capacitor.
A second aspect of the present invention provides a test method for a test circuit suitable for a switching time test and a threshold voltage test, which is applied to the test circuit suitable for a switching time test and a threshold voltage test according to the first aspect of the present invention, the test method including a threshold voltage test, the threshold voltage test including: controlling the first switch and the second switch to be closed, and charging the first capacitor for a first preset time by adopting a first current; controlling the third switch to be closed, controlling the tested device to work by adopting a second current, and acquiring a threshold voltage after a second preset time; and disconnecting the first switch, the second switch and the third switch, closing the second switch tube, and releasing the charges in the first capacitor by adopting a charge release circuit.
Optionally, the test method for the test circuit suitable for the switching time test and the threshold voltage test includes a switching time test, and the switching time test includes: closing the first switch tube, and charging the first capacitor by adopting a power supply circuit; closing the fourth switch, and controlling the tested device to be cut off after the tested device is controlled to be switched on for a third preset time by adopting the driving circuit; after the fourth preset time, the driving circuit is adopted again to control the conduction of the tested device and control the cut-off of the tested device; and opening the first switch tube, closing the second switch tube, and releasing the charges in the first capacitor by using the charge release circuit.
Optionally, the test method of the test circuit suitable for the switching time test and the threshold voltage test includes: controlling the tested device to carry out the threshold voltage test; judging whether the threshold voltage test result is in a preset range or not; when the switching time is within a preset range, controlling the tested device to carry out the switching time test; controlling the tested device to carry out the threshold voltage test again; and judging whether the tested device is damaged or not according to the threshold voltage test result.
The technical scheme of the invention has the following advantages:
the invention provides a test circuit and a test method suitable for a switch time test and a threshold voltage test, wherein the threshold voltage test circuit is arranged on the basis of the switch time test, three switches are arranged in the threshold voltage test circuit, and a first capacitor is charged firstly by switching on and switching off the switches; then testing the threshold voltage of the tested device; the test time of the threshold voltage can be reduced; meanwhile, through the arrangement of the threshold voltage test circuit and the switching time test circuit, a relay or a switch is not required to be arranged in a power loop, and the testing of the switching time is not influenced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a block diagram of a test circuit suitable for a switch time test and a threshold voltage test according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a test circuit suitable for testing switching time and threshold voltage according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a test circuit for performing a switching time test according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a test circuit for performing threshold voltage test according to an embodiment of the present invention;
FIG. 5 is a flowchart of a threshold voltage test according to an embodiment of the present invention;
FIG. 6 is a timing diagram illustrating the measurement of threshold voltage testing according to an embodiment of the present invention;
FIG. 7 is a flow chart of a switch time test in an embodiment of the present invention;
FIG. 8 is a timing diagram illustrating the measurement of the switching time test according to an embodiment of the present invention;
FIG. 9 is a flowchart of a method for testing a test circuit suitable for a switching time test and a threshold voltage test according to an embodiment of the present invention.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meanings of the above terms in the present invention can be understood in a specific case to those of ordinary skill in the art.
Furthermore, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
An embodiment of the present invention provides a test circuit suitable for a switching time test and a threshold voltage test, as shown in fig. 1 and 2, including: a power loop 10, a switch time test circuit 20 and a threshold voltage test circuit 30, wherein the threshold voltage test circuit 30 includes a first power supply, a first switch K1, a second switch K2 and a third switch K3, the power loop 10 includes a device under test DUT, a first capacitor C1, the first power supply is connected to a collector of the device under test DUT via the first switch K1, an emitter of the device under test DUT is connected via the second switch K2, and a base of the device under test DUT is connected via the third switch K3, the first power supply charges the first capacitor C1 when the first switch K1 and the second switch K2 are closed, and the threshold voltage test circuit 30 is used for testing a threshold voltage of the device under test DUT when the third switch K3 is closed; the switch time test circuit 20 is connected to the power loop 10 for performing a switch time test of the device under test.
According to the test circuit suitable for the switch time test and the threshold voltage test, the threshold voltage test circuit is arranged on the basis of the switch time test, three switches are arranged in the threshold voltage test circuit, and the first capacitor is charged firstly by switching on and off the switches; then testing the threshold voltage of the tested device; the test time of the threshold voltage can be reduced; meanwhile, through the arrangement of the threshold voltage test circuit and the switching time test circuit, a relay or a switch is not required to be arranged in a power loop, and the testing of the switching time is not influenced.
In one embodiment, as shown in fig. 2, the power circuit 10 further includes: a first diode D1 and a load loop, the first diode D1 being connected between a device under test DUT and the first capacitor C1, the load loop being connected across the first diode D1; the first diode D1 is used for preventing current backflow in the first capacitor C1 when a threshold voltage test is carried out; the load circuit is used for being connected to two ends of the first diode D1 when the switching time test is carried out, and the first diode D1 is also used as a freewheeling diode of the load circuit when the switching time test is carried out. The load loop comprises a fifth switch K5 and a power inductor L which are connected in series. When the switching time test is carried out, the fifth switch K5 is closed, and the power inductor L is used as the series inductance load of the tested device. Specifically, a current sensor ICE is connected in series in the power loop, and the collector and emitter of the device under test and the current sensor are also connected to an oscilloscope measurement channel AD/OSC for measuring the corresponding switching time waveform.
Specifically, as shown in fig. 2, the collector and the emitter of the device under test are further connected with a collector FORCE line (CF), a collector SENSE line (CS), an emitter FORCE line (EF), and an emitter SENSE line (ES), respectively; wherein the FORCE line is the line on the circuit that provides the stimulus and the SENSE line is the line on the circuit that takes the measurement.
In one embodiment, as shown in fig. 3, a circuit configuration for performing a switching time test is provided. The switching time test circuit includes: a power supply circuit and a drive circuit; the power supply circuit is connected with the power loop and used for providing voltage for the tested device; the driving circuit is connected with the device to be tested and used for controlling the device to be tested to be switched on or switched off.
The POWER supply circuit comprises a second POWER supply HV _ POWER, a second capacitor C2 and a first switch tube S1, wherein the second POWER supply HV _ POWER and the second capacitor C2 are connected to two ends of the first capacitor C1 through the first switch tube S1. Wherein the second POWER supply HV _ POWER can adopt a high-POWER programmable POWER supply.
The driving circuit comprises a first driving signal source DriverP, a second driving signal source DriverN, a third diode D3, a fourth diode D4, a first variable resistor array GF, a second variable resistor array GS and a fourth switch K4, one end of the fourth switch K4 is connected with the device to be tested, the other end of the fourth switch K4 is connected with one end of the first variable resistor array GF and one end of the second variable resistor array GS, the other end of the first variable resistor array GF is connected with the cathode of the third diode D3, the anode of the third diode D3 is connected with the first driving signal source DriverP, the other end of the second variable resistor array GS is connected with the anode of the fourth diode D4, and the cathode of the fourth diode D4 is connected with the second driving signal source DriverN.
Specifically, when a switching time test is carried out, the fourth switch K4 and the first switching tube S1 are closed, and the power supply circuit provides voltage for the tested device; the first driving signal source DriverP and the second driving signal source DriverN drive the tested device to be switched on or switched off, and therefore the testing of the switching time is achieved.
In one embodiment, as shown in fig. 4, a circuit structure for threshold voltage test is shown. The first POWER supply comprises a low-voltage isolation POWER supply DC _ POWER and a constant current source IM, and the threshold voltage test circuit further comprises: the low-voltage isolation POWER supply DC _ POWER is used for charging the constant current source IM, the sampling chip ADC and the operational amplifier AMP; the constant current source IM is used for providing constant current output during threshold voltage test; the sampling chip ADC and the operational amplifier AMP are used for acquiring the threshold voltage of the device under test.
Specifically, when a threshold voltage test is performed, the first switch K1 and the second switch K2 are closed, and the first capacitor C1 is charged by using the low-voltage isolation POWER supply DC _ POWER and the constant current source IM; after the constant current source IM is fully charged, the third switch K3 is closed, and the current provided by the low-voltage isolation POWER supply DC _ POWER and the constant current source IM controls the tested device to work; and when the device to be tested works stably, the sampling chip ADC and the operational amplifier AMP are used for collecting the threshold voltage of the device to be tested. As shown in fig. 2 and 4, one end of the low voltage isolation POWER supply DC _ POWER is grounded, and the other end is connected to the external POWER supply VCC.
In one embodiment, as shown in fig. 2, the test circuit for testing the switching time and the threshold voltage further includes: and the charge releasing circuit is connected with two ends of the first capacitor and used for releasing the charge in the first capacitor after the switching time test and the threshold voltage test are carried out. The charge releasing circuit comprises a first resistor R and a second switch tube S2, wherein the first resistor R and the second switch tube S2 are connected in series and then connected in parallel at two ends of the first capacitor C1. When the electric charge is required to be released, the second switch tube S2 is controlled to be closed, and the electric charge of the first capacitor C1 is released to the first resistor R.
Specifically, by arranging the charge release circuit, if the first diode is damaged and needs to be replaced, electric shock can be avoided when the device is replaced by releasing the charge of the charge release circuit; in addition, the charge release is carried out after the threshold voltage test is carried out, so that the initial condition when the threshold voltage is measured is consistent to 0V, and the influence of the voltage at two ends of the first capacitor on the measurement of the threshold voltage is avoided.
It should be noted that, in the test circuit suitable for the switching time test and the threshold voltage test, the first switch, the second switch, the third switch, and the fifth switch may adopt relays; the first switch tube and the second switch tube can adopt IGBT switch devices.
An embodiment of the present invention further provides a test method for a test circuit suitable for a switching time test and a threshold voltage test, which is applied to the test circuit suitable for the switching time test and the threshold voltage test described in the above embodiment, as shown in fig. 5, the test method includes a threshold voltage test, and the threshold voltage test includes the following steps:
step S101: controlling the first switch K1 and the second switch K2 to be closed, and charging the first capacitor C1 for a first preset time by adopting a first current; specifically, after the first switch K1 and the second switch K2 are closed, the constant current source IM provides a constant current output of 100mA, the constant current is a first current, the first current charges the first capacitor C1 through the second diode D2 and the first diode D1, and since the third switch K3 is not turned on at this time, the device under test DUT is in an off state, and the first current does not pass through the device under test. The first capacitor C1 is charged to a value close to the supply voltage by waiting for a first predetermined time after a delay (5 ms), and the measured value of VTH position in fig. 4 is also close to the supply voltage. Where the supply voltage value is selected to be greater than an upper limit (10V), such as 15V, set by the VTH of the device. The power supply voltage value is the power supply voltage of the constant current source IM, and the voltage of the fully charged first capacitor C1 is the power supply voltage value minus the tube voltage drops of the first diode D1 and the second diode D2.
Step S102: controlling the third switch K3 to be closed, controlling the tested device to work by adopting a second current, and acquiring a threshold voltage after a second preset time; specifically, after the third switch K3 is closed, the constant current source IM provides a constant current output (e.g., 0.25 mA) that is set by the measurement requirement, and at this time, because the voltage value of the charged first capacitor C1 is greater than the threshold voltage value of the device under test, the output current of the constant current source IM does not flow to the first capacitor C1, but only flows to the device under test, and the first diode D1 stops the first capacitor C1 from discharging onto the device under test in an inverted phase. And delaying for 1ms, namely waiting for a second preset time until the device to be tested works stably, and sampling the numerical value to a processor for data processing and judgment after the threshold voltage passes through an operational Amplifier (AMP) and a sampling chip (ADC). The acquired threshold voltage is attenuated by 10 times through an operational Amplifier (AMP), the attenuated voltage enters the input end of a sampling chip (ADC), the attenuated voltage is converted into a digital signal in the sampling chip (ADC), a processor is connected with the sampling chip (ADC) to receive the converted digital signal, and the actual VTH value is restored through calculation.
Step S103: and the first switch K1, the second switch K2 and the third switch K3 are disconnected, the second switch tube S2 is closed, and the charge in the first capacitor C1 is released by adopting a charge release circuit. The steps S101 to S103 are specifically a specific flow of the threshold voltage test, and the three steps correspond to three stages i, ii, and iii of a threshold voltage measurement timing chart in fig. 6, respectively, where the threshold voltage measurement timing chart specifically includes a curve of the change of the switching state of the second switching tube S2 with time, a curve of the switching state of the third switch K3 with time, a curve of the change of the output current of the constant current source IM with time, and a curve of the change of the voltage value VTH of the threshold voltage with time in the threshold voltage measurement process. The threshold voltage is measured by a test method of a test circuit suitable for the switching time test and the threshold voltage test, and the test time of the threshold voltage can reach within 20 ms.
According to the test method of the test circuit suitable for the switching time test and the threshold voltage test, provided by the embodiment of the invention, the first capacitor is charged firstly through the first switch, the second switch and the third switch in sequence; then testing the threshold voltage of the tested device; the test time of the threshold voltage can be reduced; meanwhile, through the arrangement of the threshold voltage test circuit and the switching time test circuit, a relay or a switch is not required to be arranged in a power loop, and the testing of the switching time is not influenced.
In one embodiment, the test method of the test circuit suitable for the switch time test and the threshold voltage test comprises a switch time test, wherein the switch time test comprises the following steps: closing the first switch tube S1, and charging a first capacitor C1 by adopting a power supply circuit; closing the fourth switch K4, and controlling the tested device to be cut off after the tested device is controlled to be switched on for a third preset time by adopting the driving circuit; after the fourth preset time, the driving circuit is adopted again to control the conduction of the tested device and control the cut-off of the tested device; and (3) disconnecting the first switch tube S1, closing the second switch tube S2, and releasing the charges in the first capacitor C1 by using a charge release circuit.
Specifically, as shown in fig. 7, when the switching time test is performed, the following procedure is adopted: the first switch tube S1 is closed, the second Power supply HV _ Power charges the first capacitor C1, and at the moment, the second driving signal source DriverN cuts off the device to be tested; and then the first driving signal source DriverP turns on the device to be tested, the current collected by the current sensor and flowing through the device to be tested slowly rises under the inductive load, when the current collected by the current sensor and flowing through the device to be tested reaches a set value, the second driving signal source DriverN turns off the device to be tested, wherein the time of slowly rising to the preset value is a third preset time. And waiting for a fourth preset time after delaying for a period of time, wherein the current in the inductive load freewheels through the first diode D1. The device under test is turned on by using the first driving signal source DriverP and turned off by using the second driving signal source DriverN. The first switch tube S1 is turned off, and the second switch tube S2 is turned on to discharge the first capacitor C1. And sending the waveform of each stage to an upper computer through an oscilloscope for data processing to obtain the switching time. Fig. 8 is a timing chart of measurement in the switching-time test, which specifically includes a time-varying switching state curve of the first switching tube S1, a time-varying switching state curve of the second switching tube S2, a time-varying gate voltage VG of the device under test, a time-varying collector voltage VC of the device under test, and a time-varying current flowing through the device under test collected by the current sensor ICE.
It should be noted that the switching time test described above adopts a double-pulse test principle, in which the purpose of turning on the device under test for the first time is to make the current collected by the current sensor reach a set value, and the purpose of turning on the device under test for the second time is to obtain a waveform of turning on the device under test after the current collected by the current sensor reaches the set value. In the two on-off processes, the first process is only to make the current reach the set value, and the second process is to obtain the corresponding waveform to calculate the switching time.
The above embodiment shows a specific flow of the threshold voltage test and the switching time test, but when the threshold voltage test is performed on the device under test and when the switching time test is performed on the device under test, the following flow can be implemented. Namely, the test method of the test circuit suitable for the switch time test and the threshold voltage test comprises the following steps: controlling the tested device to carry out the threshold voltage test; judging whether the threshold voltage test result is in a preset range or not; when the switching time is within a preset range, controlling the tested device to carry out the switching time test; controlling the tested device to carry out the threshold voltage test again; and judging whether the tested device is damaged or not according to the threshold voltage test result.
Specifically, as shown in fig. 9, the testing method of the testing circuit suitable for the switching time test and the threshold voltage test is implemented by adopting the following procedures: firstly testing the threshold voltage value of a tested device and confirming whether the tested device has open short circuit or not; after the threshold voltage is normal, testing the relevant parameters of the switching time; because the switching time test is a test of high voltage and large current, the tested device can be damaged when the device is poor, and therefore, after the switching time test is finished, the threshold voltage test is carried out again to confirm whether the device is damaged during the switching time test.
Although the present invention has been described in detail with respect to the exemplary embodiments and the advantages thereof, those skilled in the art will appreciate that various changes, substitutions and alterations can be made to the embodiments without departing from the spirit and scope of the invention as defined by the appended claims. For other examples, one of ordinary skill in the art will readily appreciate that the order of the process steps may be varied while maintaining the scope of the present invention.
Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. As one of ordinary skill in the art will readily appreciate from the disclosure of the present invention, processes, machines, manufacture, compositions of matter, means, methods, or steps, presently existing or later to be developed, that perform substantially the same function or achieve substantially the same result as the corresponding embodiments described herein may be utilized according to the present invention. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps.
Claims (10)
1. A test circuit adapted for both a switching time test and a threshold voltage test, comprising: a power loop, a switching time test circuit and a threshold voltage test circuit,
the threshold voltage test circuit comprises a first power supply, a first switch, a second switch and a third switch, the power loop comprises a tested device and a first capacitor, the first power supply is connected with a collector of the tested device through the first switch, an emitter of the tested device is connected through the second switch, and a base of the tested device is connected through the third switch, when the first switch and the second switch are closed, the first power supply charges the first capacitor, and when the third switch is closed, the threshold voltage test circuit is used for testing the threshold voltage of the tested device;
the switch time test circuit is connected with the power loop to carry out switch time test on the tested device.
2. The test circuit adapted for both a switching time test and a threshold voltage test of claim 1, further comprising: and the charge release circuit is connected with two ends of the first capacitor and used for releasing the charge in the first capacitor after the switching time test and the threshold voltage test are carried out.
3. The test circuit adapted for both switch time testing and threshold voltage testing of claim 1, wherein the power loop further comprises: the first diode is connected between a device to be tested and the first capacitor, and the load loop is connected to two ends of the first diode;
the first diode is used for preventing current in the first capacitor from flowing back when a threshold voltage test is carried out;
the load circuit is used for being connected to two ends of the first diode when the switching time test is carried out, and the first diode is also used as a freewheeling diode of the load circuit when the switching time test is carried out.
4. The test circuit adapted for both on-off time testing and threshold voltage testing of claim 1, wherein the first power supply comprises a low voltage isolated power supply and a constant current source, the threshold voltage test circuit further comprising: a sampling chip, an operational amplifier and a second diode which are connected in sequence,
the low-voltage isolation power supply is used for charging the constant current source, the sampling chip and the operational amplifier;
the constant current source is used for providing constant current output during threshold voltage test;
the sampling chip and the operational amplifier are used for acquiring the threshold voltage of the device under test.
5. The test circuit adapted for both a switching time test and a threshold voltage test of claim 2, wherein the switching time test circuit comprises: a power supply circuit and a drive circuit;
the power supply circuit is connected with the power loop and used for providing voltage for the tested device;
the driving circuit is connected with the device to be tested and used for controlling the device to be tested to be switched on or switched off.
6. The test circuit suitable for the switch time test and the threshold voltage test as claimed in claim 5, wherein the power circuit comprises a second power supply, a second capacitor and a first switch tube, the second power supply and the second capacitor are connected to two ends of the first capacitor through the first switch tube;
the driving circuit comprises a first driving signal source, a second driving signal source, a third diode, a fourth diode, a first variable resistor array, a second variable resistor array and a fourth switch, wherein one end of the fourth switch is connected with the device to be tested, the other end of the fourth switch is connected with one end of the first variable resistor array and one end of the second variable resistor array, the other end of the first variable resistor array is connected with the cathode of the third diode, the anode of the third diode is connected with the first driving signal source, the other end of the second variable resistor array is connected with the anode of the fourth diode, and the cathode of the fourth diode is connected with the second driving signal source.
7. The test circuit for testing the switching time and the threshold voltage according to claim 6, wherein the charge releasing circuit comprises a first resistor and a second switch tube, and the first resistor and the second switch tube are connected in series and then connected in parallel to two ends of the first capacitor.
8. A test method of a test circuit adapted to a switching time test and a threshold voltage test, applied to the test circuit adapted to a switching time test and a threshold voltage test of claim 7, the test method comprising a threshold voltage test comprising:
controlling the first switch and the second switch to be closed, and charging the first capacitor for a first preset time by adopting a first current;
controlling the third switch to be closed, controlling the tested device to work by adopting a second current, and collecting a threshold voltage after a second preset time;
and the first switch, the second switch and the third switch are disconnected, the second switch tube is closed, and the charge in the first capacitor is released by adopting the charge release circuit.
9. The method of testing the test circuit for both the on-off time test and the threshold voltage test of claim 8, wherein the test method comprises an on-off time test comprising:
closing the first switch tube, and charging the first capacitor by adopting a power supply circuit;
closing the fourth switch, and controlling the tested device to be cut off after the tested device is controlled to be switched on for a third preset time by adopting the driving circuit;
after the fourth preset time, the driving circuit is adopted again to control the conduction of the tested device and control the cut-off of the tested device;
and opening the first switch tube, closing the second switch tube, and releasing the charges in the first capacitor by using the charge release circuit.
10. The method of testing the test circuit for both the on-off time test and the threshold voltage test of claim 9, wherein the method of testing comprises:
controlling the tested device to carry out the threshold voltage test;
judging whether the threshold voltage test result is in a preset range or not;
when the switching time is within a preset range, controlling the tested device to carry out the switching time test;
controlling the tested device to perform the threshold voltage test again;
and judging whether the tested device is damaged or not according to the threshold voltage test result.
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