CN115754654A - Power device drive circuit, semiconductor device test circuit and system - Google Patents
Power device drive circuit, semiconductor device test circuit and system Download PDFInfo
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Abstract
Description
技术领域technical field
本发明一般地涉及半导体器件技术领域。更具体地,本发明涉及一种功率器件驱动电路、一种半导体器件测试电路和半导体器件测试系统。The present invention generally relates to the field of semiconductor device technology. More specifically, the present invention relates to a power device driving circuit, a semiconductor device testing circuit and a semiconductor device testing system.
背景技术Background technique
近年来,采用氮化镓功率晶体管等功率器件的手机快充适配器市场需求越来越大,特别是基于反激电路的氮化镓适配器更是得到广泛应用。为了保证产品的可靠性,通常需要对适配器所采用的相应功率器件进行老化等性能测试。相关技术中采用模拟反激电路工况的方式来对功率器件进行测试。然而在实际应用时,由于测试电路中非线性器件(例如变压器漏感和开关管寄生电容等)存在偏差而导致被测功率器件没在其漏源极电压谐振到谷底时开通,使得模拟电路工况脱离被测功率器件的实际工况,从而导致测试结果不精确。In recent years, the market demand for mobile phone fast charging adapters using GaN power transistors and other power devices has increased, especially GaN adapters based on flyback circuits have been widely used. In order to ensure the reliability of the product, performance tests such as aging are generally required for the corresponding power devices used in the adapter. In the related art, the power device is tested by simulating the working condition of the flyback circuit. However, in practical applications, due to the deviation of nonlinear devices (such as transformer leakage inductance and switch tube parasitic capacitance, etc.) in the test circuit, the power device under test is not turned on when its drain-source voltage resonates to the bottom, making the analog circuit work The conditions are far from the actual working conditions of the power device under test, resulting in inaccurate test results.
发明内容Contents of the invention
为了至少解决上述背景技术部分所描述的技术问题,本发明提出了一种功率器件驱动电路,可通过对待功率器件的初始驱动信号进行延时调整,使得待测动功率器件能够在待测功率器件的漏源极电压振荡到谷底时开通,以满足对功率器件的应用需求。In order to at least solve the technical problems described in the above background technology section, the present invention proposes a power device drive circuit, which can adjust the delay of the initial drive signal of the power device to be tested, so that the dynamic power device under test can It turns on when the drain-source voltage oscillates to the bottom to meet the application requirements for power devices.
鉴于此,本发明在如下的多个方面提供解决方案。In view of this, the present invention provides solutions in the following aspects.
本发明的第一方面提供了一种功率器件驱动电路,包括:信号源,用于产生初始驱动信号;以及缓冲电路,用于接收所述初始驱动信号,基于待测功率器件的测试工况,对所述初始驱动信号进行延时处理并输出经延时处理的栅极驱动信号,其中,所述栅极驱动信号用于控制所述待测功率器件在所述待测功率器件的漏源极电压振荡到谷底时开通。The first aspect of the present invention provides a power device drive circuit, including: a signal source, used to generate an initial drive signal; and a buffer circuit, used to receive the initial drive signal, based on the test conditions of the power device under test, Delaying the initial drive signal and outputting a delayed gate drive signal, wherein the gate drive signal is used to control the power device under test at the drain-source of the power device under test Turns on when the voltage oscillates to the bottom.
本发明的第二方面提供了一种半导体器件测试电路,包括原边电路和副边电路,其中所述原边电路包括串联的原边绕组和原边待测功率器件,所述原边电路的两端用于连接测试电源以形成回路,所述副边电路包括串联的副边绕组和副边待测晶体管,所述原边绕组和所述副边绕组形成反激变压器,所述原边电路和所述副边电路并联且接地,其中所述原边电路还包括:第一功率器件驱动电路,连接至所述原边待测功率器件,包括如本发明第一发明以及下文实施例中所述的功率器件驱动电路,其中所述功率器件驱动电路中的缓冲电路用于根据所述原边待测功率器件的测试工况对初始驱动信号进行处理,并输出针对所述原边待测功率器件的第一栅极驱动信号,以基于所述第一栅极驱动信号控制所述原边待测功率器件在所述原边待测功率器件的源漏级电压振荡到谷底时开通。The second aspect of the present invention provides a semiconductor device test circuit, including a primary circuit and a secondary circuit, wherein the primary circuit includes a primary winding in series and a primary power device to be tested, and the primary circuit The two ends are used to connect the test power supply to form a loop. The secondary circuit includes a secondary winding in series and a secondary transistor to be tested. The primary winding and the secondary winding form a flyback transformer. The primary circuit It is connected in parallel with the secondary side circuit and grounded, wherein the primary side circuit further includes: a first power device drive circuit connected to the primary side power device under test, including the first invention of the present invention and the following embodiments The power device driving circuit described above, wherein the buffer circuit in the power device driving circuit is used to process the initial driving signal according to the test working condition of the power device under test on the primary side, and output the power for the power device under test on the primary side The first gate driving signal of the device is used to control the primary power device under test to turn on when the source-drain voltage of the primary power device under test oscillates to the bottom based on the first gate driving signal.
本发明的第三方面提供了一种半导体器件测试系统,包括多个原边电路和副边电路,其中每个所述原边电路包括串联的原边绕组和原边待测功率器件,每个所述原边电路的两端用于连接测试电源以形成回路,每个所述副边电路包括串联的副边绕组和副边待测晶体管,每个所述原边绕组和每个所述副边绕组形成反激变压器,每个所述原边电路和每个所述副边电路并联且接地;其中每个所述原边电路还包括第一功率器件驱动电路,连接至所述原边待测功率器件;和/或所述副边待测晶体管包括副边待测功率器件,每个所述副边电路还包括连接至所述副边待测功率器件的第二功率器件驱动电路;其中所述第一功率器件驱动电路和/或所述第二功率器件驱动电路包括本发明第一方面以及下文多个实施例所述的功率器件驱动电路,多个所述功率器件驱动电路基于其信号源产生同一初始驱动信号,其中每个所述功率器件驱动电路用于根据其对应的原边待测功率器件或者副边待测功率器件的测试工况对所述初始驱动信号进行处理以得到栅极驱动信号,并向其对应的原边待测功率器件或者副边待测功率器件输出对应的栅极驱动信号,以基于对应的栅极驱动信号控制其对应的原边待测功率器件在所述原边待测功率器件的漏源极电压振荡到谷底时开通,或者控制其对应的副边待测功率器件在所述副边待测功率器件的漏源极电压振荡到谷底时开通。A third aspect of the present invention provides a semiconductor device testing system, including a plurality of primary circuits and secondary circuits, wherein each of the primary circuits includes a primary winding and a primary power device to be tested in series, and each The two ends of the primary side circuit are used to connect the test power supply to form a loop, each of the secondary side circuits includes a secondary side winding and a secondary side transistor to be tested in series, each of the primary side windings and each of the secondary side The side winding forms a flyback transformer, each of the primary side circuits and each of the secondary side circuits are connected in parallel and grounded; wherein each of the primary side circuits also includes a first power device drive circuit connected to the primary side to be A power device to be measured; and/or the secondary side transistor under test includes a secondary side power device under test, and each of the secondary side circuits further includes a second power device drive circuit connected to the secondary side power device under test; wherein The first power device driving circuit and/or the second power device driving circuit includes the power device driving circuit described in the first aspect of the present invention and the following multiple embodiments, and the multiple power device driving circuits are based on their signals The source generates the same initial drive signal, wherein each of the power device drive circuits is used to process the initial drive signal according to the test conditions of its corresponding primary side power device under test or secondary side power device under test to obtain a gate pole drive signal, and output the corresponding gate drive signal to its corresponding primary side power device under test or secondary side power device under test, so as to control its corresponding primary side power device under test based on the corresponding gate drive signal. Turn on when the drain-source voltage of the primary power device under test oscillates to the bottom, or control the corresponding secondary power device under test to turn on when the drain-source voltage of the secondary power device under test oscillates to the bottom.
利用本发明所提供的方案,基于功率器件驱动电路中的缓冲电路对待测功率器件的初始驱动信号进行延时处理,以使待测动功率器件能够在该待测功率器件的漏源极电压振荡到谷底时开通,从而满足功率器件的应用需求。在一些实施例中,可将该功率器件驱动电路应用于半导体器件测试电路中,以确保对功率器件的模拟电路工况符合实际工况,从而提高测试精准度。另外,在又一些实施例中,还可以将该功率器件驱动电路应用于半导体器件测试系统中,以克服批量化测试过程中被测功率器件测试条件以及功耗不一致的问题,从而有效确保半导体器件测试系统中的每个被测功率器件工况一致。Utilizing the scheme provided by the present invention, based on the buffer circuit in the power device drive circuit, the initial drive signal of the power device under test is delayed, so that the dynamic power device under test can oscillate at the drain-source voltage of the power device under test Turn on when it reaches the bottom, so as to meet the application requirements of power devices. In some embodiments, the power device driving circuit can be applied to a semiconductor device test circuit, so as to ensure that the simulated circuit working conditions for the power devices conform to the actual working conditions, thereby improving test accuracy. In addition, in some other embodiments, the power device drive circuit can also be applied to a semiconductor device test system to overcome the problem of inconsistent test conditions and power consumption of the power device under test in the batch test process, thereby effectively ensuring that the semiconductor device The working conditions of each power device under test in the test system are consistent.
附图说明Description of drawings
通过参考附图阅读下文的详细描述,本发明示例性实施方式的上述以及其他目的、特征和优点将变得易于理解。在附图中,以示例性而非限制性的方式示出了本发明的若干实施方式,并且相同或对应的标号表示相同或对应的部分,其中:The above and other objects, features and advantages of exemplary embodiments of the present invention will become readily understood by reading the following detailed description with reference to the accompanying drawings. In the drawings, several embodiments of the present invention are shown by way of illustration and not limitation, and the same or corresponding reference numerals indicate the same or corresponding parts, wherein:
图1是示出根据本发明第一个实施例的功率器件驱动电路的结构图;FIG. 1 is a structural diagram showing a power device driving circuit according to a first embodiment of the present invention;
图2是示出根据本发明第二个实施例的功率器件驱动电路的结构图;2 is a structural diagram showing a power device driving circuit according to a second embodiment of the present invention;
图3是示出根据本发明第三个实施例的功率器件驱动电路的结构图;3 is a structural diagram showing a power device driving circuit according to a third embodiment of the present invention;
图4是示出根据本发明第四个实施例的功率器件驱动电路的结构图;4 is a structural diagram showing a power device driving circuit according to a fourth embodiment of the present invention;
图5是示出根据本发明第五个实施例的功率器件驱动电路的结构图;5 is a structural diagram showing a power device driving circuit according to a fifth embodiment of the present invention;
图6是示出根据本发明实施例的半导体器件测试电路的结构图;以及6 is a structural diagram illustrating a semiconductor device test circuit according to an embodiment of the present invention; and
图7是示出根据本发明实施例的半导体器件测试系统的结构图。FIG. 7 is a configuration diagram showing a semiconductor device testing system according to an embodiment of the present invention.
具体实施方式Detailed ways
下面将结合本发明实施方式中的附图,对本发明实施方式中的技术方案进行清楚、完整地描述,显然,所描述的实施方式是本发明一部分实施方式,而不是全部的实施方式。基于本发明中的实施方式,本领域技术人员在没有做出创造性劳动前提下所获得的所有其他实施方式,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of them. Based on the implementation manners in the present invention, all other implementation manners obtained by those skilled in the art without creative efforts shall fall within the protection scope of the present invention.
应当理解,本发明的权利要求、说明书及附图中的术语“第一”、“第二”、“第三”和“第四”等是用于区别不同对象,而不是用于描述特定顺序。本发明的说明书和权利要求书中使用的术语“包括”和“包含”指示所描述特征、整体、步骤、操作、元素和/或组件的存在,但并不排除一个或多个其它特征、整体、步骤、操作、元素、组件和/或其集合的存在或添加。It should be understood that the terms "first", "second", "third" and "fourth" in the claims, description and drawings of the present invention are used to distinguish different objects, rather than to describe a specific order . The terms "comprising" and "comprising" used in the description and claims of the present invention indicate the presence of described features, integers, steps, operations, elements and/or components, but do not exclude one or more other features, integers , steps, operations, elements, components, and/or the presence or addition of collections thereof.
还应当理解,在此本发明说明书中所使用的术语仅仅是出于描述特定实施方式的目的,而并不意在限定本发明。如在本发明说明书和权利要求书中所使用的那样,除非上下文清楚地指明其它情况,否则单数形式的“一”、“一个”及“该”意在包括复数形式。还应当进一步理解,在本发明说明书和权利要求书中使用的术语“和/或”是指相关联列出的项中的一个或多个的任何组合以及所有可能组合,并且包括这些组合。It should also be understood that the terms used in the description of the present invention are for the purpose of describing specific embodiments only, and are not intended to limit the present invention. As used in the specification and claims herein, the singular forms "a", "an" and "the" are intended to include the plural forms unless the context clearly dictates otherwise. It should be further understood that the term "and/or" used in the description and claims of the present invention refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.
发明人经研究发现,针对氮化镓功率晶体管等功率器件,通常会采用驱动信号直接触发功率器件的开通或关断。然而,随着氮化镓功率晶体管等功率器件的广泛应用,需要功率器件在相应的工况下工作。特别是,针对基于反激电路和能量回馈的批量测试电路系统,系统中的待测功率器件需要工作在反激电路工况下,此时待测功率器件需要在其漏源极电压满足最低谐振电压(也即谷底电压)时开通。然而在实际应用中,由于反激电路中一些非线性器件存在偏差(例如变压器漏感偏差等),使得待测功率器件的源漏极电压谐振周期可能不同,从而造成待测功率器件开通条件(例如待测功率器件漏源极电压未谐振至谷底即开通)不满足应用需求。为此,发明人还发现可以通过调整功率器件的驱动信号,以使驱动信号能够适时触发功率器件开通,以满足功率器件的应用需求。The inventors have found through research that for power devices such as gallium nitride power transistors, a driving signal is usually used to directly trigger the power device to be turned on or off. However, with the wide application of power devices such as gallium nitride power transistors, the power devices need to work under corresponding working conditions. In particular, for the batch test circuit system based on the flyback circuit and energy feedback, the power device under test in the system needs to work in the flyback circuit condition. At this time, the power device under test needs to meet the minimum resonance at its drain-source Voltage (that is, the valley voltage) is turned on. However, in practical applications, due to the deviation of some nonlinear devices in the flyback circuit (such as transformer leakage inductance deviation, etc.), the source-drain voltage resonance period of the power device under test may be different, resulting in the turn-on condition of the power device under test ( For example, the drain-source voltage of the power device under test does not resonate to the bottom and then turns on) does not meet the application requirements. For this reason, the inventors also found that the driving signal of the power device can be adjusted so that the driving signal can trigger the power device to be turned on in good time, so as to meet the application requirements of the power device.
下面结合附图来详细描述本发明的具体实施方式。The specific implementation manner of the present invention will be described in detail below in conjunction with the accompanying drawings.
图1是示出根据本发明一个实施例的功率器件驱动电路100的结构图。如图1所述,功率器件驱动电路100可以包括缓冲电路101和信号源102。同时,为了能够更清楚说明功率器件驱动电路100的工作原理,在图1中还示出待测功率器件103。FIG. 1 is a structural diagram illustrating a power
其中,前述的信号源可以用于产生初始驱动信号。在一些实施例中,该信号源具体可以包括信号发生器或者脉冲发生电路等。具体地,可以通过信号发生器或者脉冲发生电路来产生初始驱动信号,且在一些实施场景下,该初始驱动信号可以包括占空比可设置的高低电平。需要说明的是,这里对初始驱动信号的细节性描述仅是示例性说明。Wherein, the aforementioned signal source can be used to generate the initial driving signal. In some embodiments, the signal source may specifically include a signal generator or a pulse generating circuit or the like. Specifically, the initial driving signal may be generated by a signal generator or a pulse generating circuit, and in some implementation scenarios, the initial driving signal may include high and low levels with a duty cycle that can be set. It should be noted that the detailed description of the initial driving signal here is only an exemplary description.
前述的缓冲电路101可以接收初始驱动信号,并且可以基于待测功率器件的测试工况,对初始驱动信号进行延时处理并输出经延时处理的栅极驱动信号。其中,该栅极驱动信号可以用于控制待测功率器件在待测功率器件的漏源极电压振荡到谷底时开通。由此,可以基于待测功率器件的测试工况通过缓冲电路适应性地对初始驱动信号进行延时处理,调整待测功率器件的开通时刻点,以使调整后的驱动信号能够适时触发功率器件开通,以满足功率器件的应用需求。需要说明的是,前述的功率器件可以包括氮化镓功率器件、碳化硅功率器件或者其他功率器件,这里对功率器件的具体类型不作限定。The
在一些实施例中,前述的功率器件驱动电路还可以包括驱动器。该驱动器可以接收从缓冲电路101输出的栅极驱动信号,并将该栅极驱动信号输出至待测功率器件。In some embodiments, the aforementioned power device driving circuit may further include a driver. The driver can receive the gate drive signal output from the
前述的缓冲电路101在具体应用中可以有多种实现形式,以下结合图2至图5进行进一步说明。The
图2是示出根据本发明另一个实施例的功率器件驱动电路200的结构图。可以理解的是,图2是图1中功率器件驱动电路100的一种具体实现。因此,前述结合图1中的相关细节性描述同样也使用于图2。例如,图2中的初始驱动信号可以通过信号发生器或脉冲发生电路来产生。此外,在功率驱动电路200中同时示出了驱动器104,该驱动器104可以根据实际应用需求进行删减或保留。FIG. 2 is a structural diagram illustrating a power
具体参见图2,功率器件驱动电路200可以包括缓冲电路101和信号源102。其中,前述的缓冲电路101可以包括第一RC缓冲电路,该第一RC缓冲电路可以利用其中的电容的充放电过程对前述的初始驱动信号进行延时调节。具体地,在一些实施例中,该第一RC缓冲电路可以包括第一电阻器R1和第一电容C1。其中该第一电容C1的一端连接至第一电阻器R1,所述第一电容C1的另一端接地。初始驱动信号经过第一电阻器R1之后会给第一电容C1充电。对于第一电容C1后续的电路来说,初始驱动信号经第一电容C1的充放电时长的调节后得到栅极驱动信号。该栅极驱动信号可以直接输出待测功率器件103,或者经由驱动器104输出至待测功率器件103。Specifically referring to FIG. 2 , the power
进一步地,在一些实施例中,前述的第一电阻器可以包括固定电阻器,具体可以根据待驱动器件的应用需求来确定所需的固定电阻器,通过调换不同阻值的固定电阻器来适应性调整功率器件驱动电路200,使其满足应用需求。Further, in some embodiments, the aforesaid first resistor may include a fixed resistor, specifically, the required fixed resistor may be determined according to the application requirements of the device to be driven, and the fixed resistors with different resistance values may be exchanged to adapt to The power
又例如,在另一些实施例中,前述的第一电阻器还可以包括可调电阻器。在该场景下,可以根据应用需求直接调整可调电阻器的电阻,无需繁琐的进行电阻器的更换操作。例如,可以基于可调电阻器的阻值调整以调控待驱动功率器件开通时的漏源极电压。在实际应用中,可配合示波器来进行阻值的调整。具体地,在调整可调电阻器的阻值过程中,可以通过示波器来检测待驱动功率器件的开通情况,直至在通过示波器检测到待驱动功率器件在其漏源极电压在谷底时开通,此时停止阻值的调整。需要说明的是,这里对可调电阻器的阻值调整过程的描述仅是示例性说明,本发明的方案并不受此限制。For another example, in some other embodiments, the aforementioned first resistor may also include an adjustable resistor. In this scenario, the resistance of the adjustable resistor can be directly adjusted according to the application requirements, without cumbersome resistor replacement operations. For example, the drain-source voltage when the power device to be driven is turned on can be adjusted based on the resistance value of the adjustable resistor. In practical applications, the resistance value can be adjusted with an oscilloscope. Specifically, in the process of adjusting the resistance value of the adjustable resistor, an oscilloscope can be used to detect the turn-on of the power device to be driven until it is detected by the oscilloscope that the power device to be driven is turned on when its drain-source voltage is at the bottom. stop the adjustment of the resistance value. It should be noted that the description of the process of adjusting the resistance of the adjustable resistor here is only an example, and the solution of the present invention is not limited thereto.
图3是示出根据本发明再一个实施例的功率器件驱动电路300的结构图。可以理解的是,图3是图1中功率器件驱动电路100的另一种具体实现。此外,图3还可以理解为是对图2中功率器件驱动电路200功能的进一步补充。因此,前述结合图1和图2中的相关细节性描述同样也使用于图3。例如,图3中的初始驱动信号可以通过信号发生器或脉冲发生电路来产生。此外,在功率驱动电路300中同时示出了驱动器104,该驱动器104可以根据实际应用需求进行删减或保留。。FIG. 3 is a structural diagram showing a power
具体参加图3,功率器件驱动电路300可以包括缓冲电路101和信号源102。其中,该缓冲电路包括第二RC缓冲电路和第一逻辑门调整电路。该第二RC缓冲电路包括第二电阻器R2和第二电容C2,可以理解的是,该第二RC缓冲电路可以具备与图1中第一RC缓冲电路相同的电路结构。初始驱动信号经过第一电阻器R2之后会给第一电容C2充电。对于第一电容C2后续的电路来说,初始驱动信号经第一电容C2的充放电时长的调节后得到第一驱动信号。该第一驱动信号经过第一逻辑门调整电路进行逻辑运算得到栅极驱动信号。该栅极驱动信号可以直接输出待测功率器件103,或者经由驱动器104输出至待测功率器件103。Referring specifically to FIG. 3 , the power
在一些实施例中,该第一逻辑门调整电路具体可以通过逻辑运算来调整第一驱动信号的电平翻转速度。其中第一逻辑门调整电路中逻辑运算(例如取反或取通等运算)需根据其具体电路结构确定。In some embodiments, the first logic gate adjustment circuit can specifically adjust the level inversion speed of the first driving signal through logic operations. Wherein, the logic operations (such as operations such as inversion or switching) in the first logic gate adjustment circuit need to be determined according to its specific circuit structure.
在缓冲电路包括第二RC缓冲电路的基础上,还可以包括第一逻辑门调整电路。由此,对于一些对待驱动功率器件的关断时间有要求的场景,可以通过缓冲电路中的第一逻辑门调整电路对驱动信号的进一步调整来满足应用需求。在实际应用中,第一逻辑门调整电路可以有多种实现方式。On the basis that the buffer circuit includes the second RC buffer circuit, it may further include a first logic gate adjustment circuit. Therefore, for some scenarios that require the turn-off time of the power device to be driven, the driving signal can be further adjusted by the first logic gate adjustment circuit in the buffer circuit to meet the application requirements. In practical applications, the first logic gate adjustment circuit may be implemented in various manners.
例如,在图4中,该第一逻辑门调整电路可以包括与门1011。该与门1011可以连接至RC缓冲电路(例如图2所示的第一RC缓冲电路或图3所示的第二RC缓冲电路),其中经该RC缓冲电路延时调节后的驱动信号由与门1011输出至驱动器。在一些实施例中,RC缓冲电路包括电阻R和电容C,如图4所示,此时与门1011可以连接至电阻R的一端。其中,该电阻R可以为固定电阻或可调电路,本实施例中,优选地采用可调电阻。For example, in FIG. 4 , the first logic gate adjustment circuit may include an AND
进一步地,如图4所示,在一些实施例中,第一逻辑门调整电路还可以包括第三电阻1012。该第三电阻1012可以连接至RC缓冲电路,其中初始驱动信号经由第三电阻器1012输出至RC缓冲电路,以通过增设第三电阻器来调整驱动信号的负载能力。在一些实施例中,RC缓冲电路包括电阻R和电容C。如图4所示,此时初始驱动信号可以连接至第三电阻1012的一端,第二电阻1012的另一端可以连接至电阻R的一端,电阻R的另一端分别连接至电容C和与门1011,与门1011输出端连接至驱动器104。由此,不仅能确保待测功率器件能够适时开通,还能满足待测功率器件的关断时间需求。Further, as shown in FIG. 4 , in some embodiments, the first logic gate adjustment circuit may further include a
图5是示出根据本发明又一个实施例的功率器件驱动电路500的结构图。可以理解的是,图5是图1中功率器件驱动电路100的又一种具体实现。此外,图5还可以理解为是对图3中功率器件驱动电路300功能的进一步补充。因此,前述结合图1和图3中的相关细节性描述同样也使用于图5。例如,图5中的初始驱动信号可以通过信号发生器或脉冲发生电路来产生。而驱动器104可以根据应用需求保留或删减。还例如,缓冲电路101中的电阻器可以是固定电阻器或可调式变阻器等。FIG. 5 is a structural diagram showing a power
具体参加图5,功率器件驱动电路500可以包括缓冲电路101和信号源102。其中,在缓冲电路包括RC缓冲电路的基础上,还可以包括第一逻辑门调整电路和驱动器104具体地,该第一逻辑门调整电路可以包括第一与非门1013、第二与非门1014和二极管1015。其中,该第一与非门1013的输入端连接至初始驱动信号,其输出端连接至RC缓冲电路的输入端。第二与非门1014的输入端连接至RC缓冲电路的输出端,且其输出端连接至驱动器102。而二极管1015的阳极连接至第一与非门1013的输出端,其阴极连接至第二与非门1014的输入端。由此,对于一些对待驱动功率器件的关断时间有要求的场景,可以通过缓冲电路中的逻辑门调整电路对驱动信号的进一步调整来满足应用需求。Referring specifically to FIG. 5 , the power
在一些实施例中,RC缓冲电路(例如图2所示的第一RC缓冲电路或图3所示的第二RC缓冲电路)包括电阻R和电容C。此时功率器件驱动电路中各个器件间的连接关系,如图5所示,第一与非门的输入端可以连接至初始驱动信号,其输出端可以连接至5电阻R的一端和二极管1015的阳极。二极管1015的阴极可以连接至5电阻R的另一端、电容C的一端和第二与非门1014的输入端。第二与非门1014的输出端连接至驱动器104的输入端,驱动器104的输出端连接至待驱动功率器件103的栅极。待驱动功率器件103的源极和电容C的另一端共地。需要说明的是,这里对功率器件驱动电路中器件的连接关系的描述仅是示例性说明。In some embodiments, the RC snubber circuit (such as the first RC snubber circuit shown in FIG. 2 or the second RC snubber circuit shown in FIG. 3 ) includes a resistor R and a capacitor C. At this time, the connection relationship between each device in the power device driving circuit is as shown in Figure 5. The input end of the first NAND gate can be connected to the initial drive signal, and its output end can be connected to one end of the 5 resistor R and the
进一步地,结合图5所示的电路结构对功率器件驱动电路的工作原理进行说明。在该场景下,初始信号可以包括占空比可设定的高低电平。当输入低电平信号时,经由第一与非门1013反转得到高电平驱动信号。在该高电平驱动信号作用下,二极管1015开通。此时经由二极管1015对电容C进行充电,电容C的电压迅速从低电平升至高电平后,再经由第二与非门1014反转后得到低电平信号,此时待测功率器件的驱动器104输出低电平,待测功率器件关断。当输入为高电平信号时,经第一与非门1013反转后得到低电平信号,此时二极管1015反向截止,第一与非门1013通过电阻R对电容C进行放电。经过一定放电时间后电容C的电压从高电平降至低电平,第二与非门1014将低电平信号反转为高电平信号,此时待测功率器件的驱动器104输出高电平,待测功率器件开通。另外,功率器件驱动电路中的电阻R的阻值经预先调整后,在使用时无需再调整,即可确保待驱动功率器件在其漏源极电压谐振到谷底电压时开通。其中,电阻R的阻值调整过程可参考前文相关描述,这里不再进行赘述。可以看出,在整个驱动信号的调整过程中,二极管能够确保驱动信号只通过RC缓冲调整功率器件开通时刻的延时,不改变关断时刻,使得经调整后的驱动信号更满足实际需求。Further, the working principle of the power device driving circuit will be described in conjunction with the circuit structure shown in FIG. 5 . In this scenario, the initial signal may include high and low levels with a duty cycle that can be set. When a low-level signal is input, the high-level drive signal is obtained through inversion through the
可以看出,本发明通过功率器件驱动电路中的缓冲电路对驱动信号进行调整以驱动功率器件适时开通,整个电路结构精简且使用的器件成本低廉,可有效降低整个电路技术实现成本。It can be seen that the present invention adjusts the drive signal through the buffer circuit in the drive circuit of the power device to drive the power device to be turned on in a timely manner. The entire circuit structure is simplified and the cost of the used devices is low, which can effectively reduce the implementation cost of the entire circuit technology.
以下结合图6和图7对上述功率器件驱动电路的应用场景进行说明。The application scenarios of the power device driving circuit described above will be described below with reference to FIG. 6 and FIG. 7 .
图6是示出根据本发明实施例的半导体器件测试电路500的结构图。该半导体器件测试电路600可以包括原边电路和副边电路,其中原边电路包括串联的原边绕组和原边待测功率器件,原边电路的两端用于连接测试电源以形成回路,副边电路包括串联的副边绕组和副边待测晶体管,原边绕组和副边绕组形成反激变压器,原边电路和所述副边电路并联且接地,其中原边电路还包括第一功率器件驱动电路,连接至所述原边待测功率器件,包括如图1至图5中所示的功率器件驱动电路,其中功率器件驱动电路中的缓冲电路用于根据原边待测功率器件的测试工况对初始驱动信号进行处理,并输出针对原边待测功率器件的第一栅极驱动信号,以基于第一栅极驱动信号控制原边待测功率器件在原边待测功率器件在其漏源极电压振荡到谷底时开通。FIG. 6 is a structural diagram showing a semiconductor
具体地,如图6所示,该半导体器件测试电路600可以包括图5所示的功率器件驱动电路。其中,半导体器件测试电路600中的功率器件驱动电路包括第一与非门Ubu-n、二极管Dbu-n、第一电阻器Rbu-n、电容Cbu-n、第二与非门Ubu-2n以及驱动器。另外,图6还示出了待测原边待测功率器件QL-n、副边待测晶体管DH-n以及原边绕组和副边绕组形成反激变压Tn。Specifically, as shown in FIG. 6 , the semiconductor
通过结合反激电路和能量回馈,将半导体器件测试电路的副边电路接至原边电路,等效于储能+能馈的双脉冲电路,实现应力和电流等多种开关测试,可以有效降低测试电路功耗。同时,通过增设功率器件驱动电路对驱动信号进行调整,可解决因变压器漏感和功率器件寄生电容等差异导致被测器件开通时的漏源极谐振电压和开关损耗存在较大差异的问题,能够最大程度模拟实际反激适配器的工况。By combining the flyback circuit and energy feedback, the secondary side circuit of the semiconductor device test circuit is connected to the primary side circuit, which is equivalent to a double pulse circuit of energy storage + energy feedback, and realizes various switch tests such as stress and current, which can effectively reduce Test circuit power consumption. At the same time, by adding a power device drive circuit to adjust the drive signal, it can solve the problem of large differences in drain-source resonant voltage and switching loss when the device under test is turned on due to differences in transformer leakage inductance and power device parasitic capacitance. Simulate the working conditions of the actual flyback adapter to the greatest extent.
进一步地,图6还展示了RCD吸收电路和AC吸收电路(也即有源箝位吸收电路)。由此,可以利用RCD吸收电路减少对于反激变压器漏感导致的关断电压尖峰,以及能够对原边待测功率器件在RCD吸收电路中的开关特性、可靠性等指标进行评估测试。另外,利用AC吸收电路可以减少对于反激变压器漏感导致的关断电压尖峰,以及同时能够对原边待测功率器件在AC吸收电路中的开关特性、可靠性等指标进行评估测试。Further, FIG. 6 also shows an RCD snubber circuit and an AC snubber circuit (that is, an active clamp snubber circuit). Therefore, the RCD snubber circuit can be used to reduce the turn-off voltage spike caused by the leakage inductance of the flyback transformer, and the switching characteristics and reliability of the primary power device under test in the RCD snubber circuit can be evaluated and tested. In addition, using the AC absorption circuit can reduce the turn-off voltage spike caused by the leakage inductance of the flyback transformer, and at the same time, it can evaluate and test the switching characteristics and reliability of the primary power device under test in the AC absorption circuit.
进一步地,在一些实施例中,副边待测晶体管还可以包括副边待测功率器件(图6中未示出)。副边电路还包括第二功率器件驱动电路,连接至副边待测功率器件,包括图1至图5中所示的功率器件驱动电路。其中功率器件驱动电路中的缓冲电路用于根据副边待测功率器件的测试工况对初始驱动信号进行处理,并输出针对副边待测功率器件的第二栅极驱动信号,以基于第二栅极驱动信号控制副边待测功率器件在副边待测功率器件的漏源极电压振荡到谷底时开通。由此可以评估测试副边待测功率器件用于同步整流的开关特性。在实际测试时,可以通过功率器件驱动电路分别向原边待测功率器件和副边待测功率器件输入经调整后的驱动信号,使得原边待测功率器件和副边待测功率器件都能够根据驱动信号周期性的开通和关断。例如:原边待测功率器件和副边待测功率器件的驱动信号可以是互补并加入一定的死区时间。Further, in some embodiments, the secondary-side transistor under test may further include a secondary-side power device under test (not shown in FIG. 6 ). The secondary circuit further includes a second power device driving circuit connected to the secondary power device under test, including the power device driving circuits shown in FIGS. 1 to 5 . The buffer circuit in the power device drive circuit is used to process the initial drive signal according to the test condition of the power device under test on the secondary side, and output the second gate drive signal for the power device under test on the secondary side, based on the second The gate driving signal controls the power device under test on the secondary side to turn on when the drain-source voltage of the power device under test on the secondary side oscillates to a valley bottom. In this way, the switching characteristics of the secondary power device under test for synchronous rectification can be evaluated. In the actual test, the adjusted driving signal can be input to the primary side power device under test and the secondary side power device under test respectively through the power device drive circuit, so that both the primary side power device under test and the secondary side power device under test can be tested according to The driving signal is turned on and off periodically. For example, the driving signals of the power device under test on the primary side and the power device under test on the secondary side may be complementary and a certain dead time may be added.
图7是示出根据本发明实施例的半导体器件测试系统700的结构图。不同于传统的反激适配器老化测试系统存在负载设备多、老化功耗大、批量测试系统复杂庞大以及不利于器件大批量测试筛选等缺点和问题。本实施例中的半导体器件测试系统700可以包括多个原边电路和副边电路,其中每个原边电路包括串联的原边绕组和原边待测功率器件,每个原边电路的两端用于连接测试电源以形成回路,每个副边电路包括串联的副边绕组和副边待测晶体管,每个原边绕组和每个副边绕组形成反激变压器,每个原边电路和每个副边电路并联且接地。其中每个原边电路还包括第一功率器件驱动电路,连接至原边待测功率器件;和/或副边待测晶体管包括副边待测功率器件,每个副边电路还包括连接至副边待测功率器件的第二功率器件驱动电路。FIG. 7 is a structural diagram showing a semiconductor
在一些实施例中,第一功率器件驱动电路和/或第二功率器件驱动电路包括如图1至图5中所示的功率器件驱动电路,多个功率器件驱动电路基于一个信号源产生同一初始驱动信号,其中每个功率器件驱动电路用于根据其对应的原边待测功率器件或者副边待测功率器件的测试工况对初始驱动信号进行处理以得到栅极驱动信号,并向其对应的原边待测功率器件或者副边待测功率器件输出对应的栅极驱动信号,以基于对应的栅极驱动信号控制其对应的原边待测功率器件在原边待测功率器件的漏源极电压振荡到谷底时开通,或者控制其对应的副边待测功率器件在副边待测功率器件的漏源极电压振荡到谷底时开通。In some embodiments, the first power device driving circuit and/or the second power device driving circuit include the power device driving circuits shown in Figures 1 to 5, and multiple power device driving circuits generate the same initial Drive signal, wherein each power device drive circuit is used to process the initial drive signal according to the test condition of its corresponding primary side power device under test or secondary side power device under test to obtain a gate drive signal, and send it to the corresponding The primary side power device under test or the secondary side power device under test outputs the corresponding gate drive signal, so as to control the corresponding primary side power device under test on the drain source of the primary side power device under test based on the corresponding gate drive signal Turn on when the voltage oscillates to the bottom, or control its corresponding secondary power device under test to turn on when the drain-source voltage of the secondary power device under test oscillates to the bottom.
由此,所有半导体器件测试电路的输入共用测试电源、待测器件共用初始驱动信号以组成批量测试系统。其中驱动信号引入功率器件驱动电路,避免实际系统开关过程中变压器漏感和寄生参数存在偏差而导致被测器件开通时漏源电压不一致的问题,从而确保实现待测器件基于反激工况批量测试的一致性和准确性。Therefore, the inputs of all semiconductor device test circuits share the test power supply, and the devices under test share the initial drive signal to form a batch test system. The drive signal is introduced into the power device drive circuit to avoid the problem of inconsistent drain-source voltage when the device under test is turned on due to the deviation of transformer leakage inductance and parasitic parameters in the actual system switching process, so as to ensure the batch test of the device under test based on the flyback working condition consistency and accuracy.
在一些实施方式中,如图6所示,在测试电源的正极和每个半导体器件测试电路的原边电路之间还串联有熔断器,从而能够有效提高每个半导体器件测试电路的独立性,在某个半导体器件测试电路的原边待测开关元件失效时不影响其他半导体器件测试电路的老化测试。In some embodiments, as shown in Figure 6, a fuse is also connected in series between the positive pole of the test power supply and the primary side circuit of each semiconductor device test circuit, thereby effectively improving the independence of each semiconductor device test circuit, When the switching element to be tested on the primary side of a certain semiconductor device test circuit fails, it does not affect the aging test of other semiconductor device test circuits.
在一些实施方式中,如图6所示,测试电源为直流母线,信号源用于向每一个半导体器件测试电路中的功率器件驱动电路输入初始驱动信号。在实际连接时,第一个半导体器件测试电路中包括熔断器Fin-1、电容Cin-1、反激变压器T1、二极管DH-1、待测功率器件QL-1和功率器件驱动电路1(包括第一与非门Ubu-1、二极管Dbu-1、第一电阻器Rbu-1、电容Cbu-1、第二与非门Ubu-21以及驱动器),第二个半导体器件测试电路中包括熔断器Fin-2、电容Cin-2、反激变压器T2、二极管DH-2、待测功率器件QL-2和功率器件驱动电路2(包括第一与非门Ubu-2、二极管Dbu-2、第一电阻器Rbu-2、电容Cbu-2、第二与非门Ubu-22以及驱动器)······第n个半导体器件测试电路中包括熔断器Fin-n、电容Cin-n、反激变压器Tn、二极管DH-n、待测功率器件QL-n和功率器件驱动电路n(包括第一与非门Ubu-n、二极管Dbu-n、第一电阻器Rbu-n、电容Cbu-n、第二与非门Ubu-2n以及驱动器),将每一个半导体器件测试电路的原边电路的两端分别连接至直流母线上,以形成回路,同时,将每一个半导体器件测试电路的功率器件驱动电路与信号源连接。应当理解的是,由于熔断器的设置,每一个半导体器件测试电路均各自独立。In some implementations, as shown in FIG. 6 , the test power supply is a DC bus, and the signal source is used to input an initial drive signal to the power device drive circuit in each semiconductor device test circuit. In the actual connection, the first semiconductor device test circuit includes fuse F in-1 , capacitor C in-1 , flyback transformer T 1 , diode D H-1 , power device Q L-1 under test and power device Drive circuit 1 (including first NAND gate U bu-1 , diode D bu-1 , first resistor R bu-1 , capacitor C bu-1 , second NAND gate U bu-21 and driver), the first The two semiconductor device test circuits include fuse F in-2 , capacitor C in-2 , flyback transformer T 2 , diode D H-2 , power device Q L-2 to be tested and power device drive circuit 2 (including the first A NAND gate U bu-2 , a diode D bu-2 , a first resistor R bu-2 , a capacitor C bu-2 , a second NAND gate U bu-22 and a driver)... nth A semiconductor device test circuit includes a fuse F in-n , a capacitor C in-n , a flyback transformer T n , a diode D Hn , a power device to be tested Q Ln and a power device drive circuit n (including the first NAND gate U bu-n , diode D bu-n , first resistor R bu-n , capacitor C bu-n , second NAND gate U bu-2n and driver), the primary side circuit of each semiconductor device test circuit The two ends are respectively connected to the DC bus to form a loop, and at the same time, the power device driving circuit of each semiconductor device test circuit is connected to the signal source. It should be understood that due to the setting of the fuses, each semiconductor device testing circuit is independent.
因此,不仅可以有效降低测试系统的整体功耗,还可以有效解决在批量测试过程中被测器件测试条件、损耗不一致的问题,从而最大限度的模拟实际反激适配器的工况。而且测试系统所涉及的测试温度、测试电压、测试电流、测试频率、测试占空比、测试器件数量均可以根据加速条件进行调节,以满足多维度的加速测试需求。Therefore, it can not only effectively reduce the overall power consumption of the test system, but also effectively solve the problem of inconsistent test conditions and losses of the tested devices during the batch test, thereby simulating the working conditions of the actual flyback adapter to the greatest extent. Moreover, the test temperature, test voltage, test current, test frequency, test duty cycle, and the number of test devices involved in the test system can be adjusted according to the acceleration conditions to meet the multi-dimensional acceleration test requirements.
虽然本说明书已经示出和描述了本发明的多个实施方式,但对于本领域技术人员显而易见的是,这样的实施方式是仅以示例的方式提供的。本领域技术人员在不偏离本发明思想和精神的情况下想到许多更改、改变和替代的方式。应当理解在实践本发明的过程中,可以采用本文所描述的本发明实施方式的各种替代方案。所附权利要求书旨在限定本发明的保护范围,并因此覆盖这些权利要求范围内的模块组成、等同或替代方案。While various embodiments of the invention have been illustrated and described, it will be obvious to those skilled in the art that such embodiments are provided by way of example only. Many modifications, changes and substitutions will occur to those skilled in the art without departing from the idea and spirit of the present invention. It should be understood that various alternatives to the embodiments of the invention described herein may be employed in practicing the invention. It is intended that the appended claims define the scope of the invention and therefore cover modular compositions, equivalents or alternatives within the scope of these claims.
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