CN211263687U - Soft-cut measurement circuit of dynamic resistance of gallium nitride power tube - Google Patents
Soft-cut measurement circuit of dynamic resistance of gallium nitride power tube Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及集成电路测量技术领域,特别涉及一种氮化镓功率管动态电阻的软切测量电路。The invention relates to the technical field of integrated circuit measurement, in particular to a soft-cut measurement circuit for the dynamic resistance of a gallium nitride power tube.
背景技术Background technique
氮化镓(GaN)是一种新型半导体材料,它具有禁带宽度大、导热率高、耐高温、抗辐射、耐酸碱、高强度和高硬度等特性,在早期广泛运用于新能源汽车、轨道交通、智能电网、半导体照明、新一代移动通信,被誉为第三代半导体材料。随着技术突破成本得到控制,目前氮化镓还被广泛运用到消费类电子等领域,充电器便是其中一项。随着对氮化镓的需求量增加以及越来越多的应用,对于氮化镓的测量越来越重要,氮化镓的测量分为静态参数和动态参数两类。Gallium nitride (GaN) is a new type of semiconductor material. It has the characteristics of large band gap, high thermal conductivity, high temperature resistance, radiation resistance, acid and alkali resistance, high strength and high hardness. It was widely used in new energy vehicles in the early days. , rail transit, smart grid, semiconductor lighting, new generation of mobile communications, known as the third generation of semiconductor materials. As the cost of technological breakthroughs is controlled, gallium nitride is currently widely used in consumer electronics and other fields, and chargers are one of them. With the increasing demand for gallium nitride and more and more applications, the measurement of gallium nitride is becoming more and more important, and the measurement of gallium nitride is divided into two categories: static parameters and dynamic parameters.
静态参数主要是指本身固有的,与其工作条件无关的相关参数,主要包括:门级开启电压、门级击穿电压,集电极发射机耐压、集电极发射机间漏电流、寄生电容(输入电容、转移电容、输出电容),以及以上参数的相关特性曲线的测量。Static parameters mainly refer to related parameters inherent in themselves and independent of their working conditions, including: gate-level turn-on voltage, gate-level breakdown voltage, collector-transmitter withstand voltage, leakage current between collector-transmitter, parasitic capacitance (input Capacitance, Transfer Capacitance, Output Capacitance), and the measurement of the relevant characteristic curves of the above parameters.
动态参数主要是指氮化镓功率管在动态工作情况下的动态导通电阻,由于氮化镓功率管结构中的陷阱以及为了适应高压击穿电压而需要设计较长的耗尽区长度,因此在高压阻断状态之后立即打开器件时,实质上的沟道电子会被捕获,因此不会参与导通,这样会导致氮化镓功率管在动态工作情况下比在静态状态下有更高的导通电阻,该动态的导通电阻即动态电阻对于研究氮化镓功率管的工作特性具有重要意义,然而现有技术中,没有一种简单有效的测量电路可以测量出该氮化镓功率管的动态电阻,以反映氮化镓功率管在动态工作情况下的特性,因此需要设计一种测量电路,对氮化镓功率管的动态电阻进行有效测量。The dynamic parameters mainly refer to the dynamic on-resistance of the GaN power transistor under dynamic working conditions. Due to the traps in the GaN power transistor structure and the need to design a long depletion region length in order to adapt to the high voltage breakdown voltage, so When the device is turned on immediately after the high voltage blocking state, the channel electrons are essentially trapped and therefore do not participate in conduction, which results in a higher GaN power transistor in dynamic operation than in static state On-resistance, the dynamic on-resistance or dynamic resistance is of great significance for studying the working characteristics of GaN power transistors. However, in the prior art, there is no simple and effective measurement circuit that can measure the GaN power transistors. In order to reflect the characteristics of the GaN power tube under dynamic working conditions, it is necessary to design a measurement circuit to effectively measure the dynamic resistance of the GaN power tube.
发明内容SUMMARY OF THE INVENTION
有鉴于此,本发明的主要目的在于提供一种氮化镓功率管动态电阻的软切测量电路及测量方法,通过设计一种可以快速进行高低压切换,且支持多个时序同步程控的软切测量电路,可有效测量氮化镓功率管在动态工作情况下的动态电阻。In view of this, the main purpose of the present invention is to provide a soft-cut measurement circuit and measurement method for the dynamic resistance of a gallium nitride power tube, by designing a soft-cut that can quickly perform high and low voltage switching and supports multiple timing synchronous program controls The measuring circuit can effectively measure the dynamic resistance of the gallium nitride power transistor under dynamic working conditions.
本发明采用的技术方案为,一种氮化镓功率管动态电阻的软切测量电路,包括:The technical solution adopted in the present invention is a soft-cut measurement circuit for the dynamic resistance of a gallium nitride power tube, comprising:
连接于被测氮化镓功率管漏极与源极之间的主电路,主电路包括并联的高压输出电路和低压输出电路,高压输出电路用于通过主电路向氮化镓功率管漏极与源极之间提供高压,低压输出电路用于通过主电路向氮化镓功率管漏极与源极之间提供低压;The main circuit is connected between the drain and the source of the GaN power tube under test. The main circuit includes a parallel high-voltage output circuit and a low-voltage output circuit. A high voltage is provided between the sources, and the low voltage output circuit is used to provide a low voltage between the drain and the source of the gallium nitride power transistor through the main circuit;
向被测氮化镓功率管栅极提供驱动电压的高速驱动电路;A high-speed drive circuit that provides drive voltage to the gate of the GaN power transistor under test;
同步程控电路,分别为高速驱动电路、高压输出电路和低压输出电路提供设定时序的同步控制信号,控制所述驱动电压、高压和低压按照所述时序同步供断;A synchronous program-controlled circuit, respectively providing a high-speed drive circuit, a high-voltage output circuit and a low-voltage output circuit with a synchronous control signal with a set timing sequence, and controlling the drive voltage, high-voltage and low-voltage to be supplied and cut synchronously according to the timing sequence;
电压采样电路,并联于被测氮化镓功率管漏极与源极两端。The voltage sampling circuit is connected in parallel between the drain and the source of the gallium nitride power transistor under test.
由上,本发明通过同步程控电路输出设定时序的同步控制信号,以控制该软切测量电路中的高压输出电路、低压输出电流和高速驱动电路按照设定时序依次导通,并测量氮化镓功率管在各时序下的电压值和电流值,从而计算出对应各时序的电阻值,本发明支持控制信号的同步和硬件数据的处理功能,实现了对氮化镓功率管的漏极和源极之间的快速高低压切换测量,从而有效测量氮化镓功率管在动态工作情况下的动态电阻。From the above, the present invention outputs the synchronous control signal of the set timing through the synchronous program control circuit, so as to control the high-voltage output circuit, the low-voltage output current and the high-speed driving circuit in the soft-cut measurement circuit to be turned on in sequence according to the set timing, and measure the nitridation. The voltage value and current value of the gallium power tube at each time sequence, so as to calculate the resistance value corresponding to each time sequence, the invention supports the synchronization of the control signal and the processing function of the hardware data, and realizes the drain and the voltage of the gallium nitride power tube. Fast high and low voltage switching measurement between sources, so as to effectively measure the dynamic resistance of GaN power transistors under dynamic operating conditions.
优选的,所述高压输出电路包括:Preferably, the high-voltage output circuit includes:
依次串联的高压源、第一开关和第一电阻;a high voltage source, a first switch and a first resistor connected in series in sequence;
该第一开关接收所述同步程控电路提供的同步控制信号进行导通或关断。The first switch is turned on or off by receiving a synchronous control signal provided by the synchronous program control circuit.
由上,高压源可用于提供不高于1000V的电压,其最大电流能力为10mA,第一开关可接收同步控制信号控制高压源的开启或关断,第一电阻用于高压电路向低压电路切换时,实现高压源的电流钳位。From the above, the high-voltage source can be used to provide a voltage not higher than 1000V, and its maximum current capability is 10mA. The first switch can receive a synchronous control signal to control the on or off of the high-voltage source, and the first resistor is used to switch the high-voltage circuit to the low-voltage circuit. , the current clamping of the high voltage source is realized.
优选的,所述电压采样电路包括:Preferably, the voltage sampling circuit includes:
串联的电压表和高压钳位电路。A voltmeter and high voltage clamp circuit in series.
由上,该电压采样电路可通过一高精度电压表实时采集氮化镓功率管两端的电压,高压钳位电路可在被测氮化镓功率管关断时,对其漏极的高压进行钳位,以保护该高精度电压表不被高压损坏。From the above, the voltage sampling circuit can collect the voltage at both ends of the GaN power tube in real time through a high-precision voltmeter, and the high-voltage clamping circuit can clamp the high voltage of the drain of the GaN power tube under test when it is turned off. bit to protect the high-precision voltmeter from being damaged by high voltage.
优选的,所述低压输出电路包括:Preferably, the low-voltage output circuit includes:
低压源,该低压源通过四线开尔文电路连接被测氮化镓功率管的漏极和源极;A low-voltage source, the low-voltage source connects the drain and source of the GaN power transistor under test through a four-wire Kelvin circuit;
其中,所述低压源通过四线开尔文电路的Force_High线串联第三开关后连接于所述被测氮化镓功率管的漏极;该低压源还通过四线开尔文电路的Sense_High线串联所述高压钳位电路后连接于所述被测氮化镓功率管的漏极,该第三开关接收所述同步程控电路提供的同步控制信号进行导通或关断;Wherein, the low-voltage source is connected to the drain of the tested gallium nitride power transistor through the Force_High line of the four-wire Kelvin circuit in series with the third switch; the low-voltage source is also connected in series with the high-voltage through the Sense_High line of the four-wire Kelvin circuit The clamping circuit is connected to the drain of the tested gallium nitride power transistor, and the third switch is turned on or off by receiving the synchronous control signal provided by the synchronous programming circuit;
所述四线开尔文电路的Force_Low线和Sense_Low线分别连接于所述低压源的负输出端和被测氮化镓功率管的源极之间。The Force_Low line and the Sense_Low line of the four-wire Kelvin circuit are respectively connected between the negative output end of the low voltage source and the source of the GaN power transistor under test.
由上,高压输出电路为被测氮化镓功率管的漏极和源极提供高压,使其处于高压环境中一段时间后,由低压输出电路将被测氮化镓功率管的漏极和源极之间的高压快速切换到低压,然后进行被测氮化镓功率管的电流值和电压值的测量,以得到其在动态工作电压下的电阻值变化参数,该低压输出电路通过四线开尔文电路(Force_High线、Sense_High线、Force_Low线、Sense_Low线)连接到被测氮化镓功率管的漏极和源极,其中四线开尔文电路的Force_High线(或称高端驱动电流线)通过一第三开关连接到被测氮化镓功率管的漏极,该第三开关用于隔离高压源和低压源,四线开尔文电路的Sense_High线(或称高端感测电压线)通过串联高压钳位电路后连接到被测氮化镓功率管的漏极,为被测氮化镓功率管提供低压。From the above, the high-voltage output circuit provides high voltage for the drain and source of the GaN power tube under test, so that after a period of time in a high-voltage environment, the low-voltage output circuit will connect the drain and source of the GaN power tube under test. The high voltage between the poles is quickly switched to the low voltage, and then the current value and voltage value of the tested GaN power tube are measured to obtain its resistance value change parameters under the dynamic operating voltage. The low voltage output circuit passes the four-wire Kelvin The circuits (Force_High line, Sense_High line, Force_Low line, Sense_Low line) are connected to the drain and source of the GaN power transistor under test, wherein the Force_High line (or high-side driving current line) of the four-wire Kelvin circuit passes through a third The switch is connected to the drain of the GaN power transistor under test. The third switch is used to isolate the high-voltage source and the low-voltage source. Connect to the drain of the tested GaN power transistor to provide low voltage for the tested GaN power transistor.
优选的,所述低压输出电路还包括并联于所述第三开关两端的反向电流抑制电路,包括:串联的第二电阻和第四开关;Preferably, the low-voltage output circuit further includes a reverse current suppression circuit connected in parallel to both ends of the third switch, including: a second resistor and a fourth switch connected in series;
该第四开关接收所述同步程控电路提供的同步控制信号进行导通或关断。The fourth switch is turned on or off by receiving the synchronous control signal provided by the synchronous program control circuit.
由上,第二电阻是分流电阻,通过控制第四开关的导通或关断,可降低高压向低压的切换速度,以降低流向被测氮化镓功率管漏极的反向电流。From the above, the second resistor is a shunt resistor. By controlling the turn-on or turn-off of the fourth switch, the switching speed from high voltage to low voltage can be reduced, so as to reduce the reverse current flowing to the drain of the tested GaN power transistor.
优选的,所述Force_High线和Sense_High线之间串联有第二开关,该第二开关接收所述同步程控电路提供的同步控制信号进行导通或关断,以控制Force_High线和Sense_High线之间形成短路或开路。Preferably, a second switch is connected in series between the Force_High line and the Sense_High line, and the second switch receives a synchronous control signal provided by the synchronous program control circuit to turn on or off, so as to control the formation between the Force_High line and the Sense_High line. short circuit or open circuit.
由上,当高压输出电路向被测氮化镓功率管的漏极和源极施加高压时,低压输出电路为断开状态,在高压向低压切换之前,需要将第二开关导通,以保证当高压切换到低压时,低压源输出端的开尔文电路是短路的,且提前到达了预设的低压值,否则,低压源输出端的开尔文电路如果是开路状态,则低压源需要大概20ms的调整时间才能使其达到预设的低压值。From the above, when the high voltage output circuit applies high voltage to the drain and source electrodes of the GaN power tube under test, the low voltage output circuit is in an off state. Before switching from high voltage to low voltage, the second switch needs to be turned on to ensure that When the high voltage is switched to the low voltage, the Kelvin circuit at the output of the low-voltage source is short-circuited and reaches the preset low-voltage value in advance. Otherwise, if the Kelvin circuit at the output of the low-voltage source is open, the low-voltage source needs about 20ms of adjustment time to bring it to the preset low pressure value.
基于上述的氮化镓功率管动态电阻的软切测量电路,本发明还提供了一种氮化镓功率管动态电阻的测量方法,包括步骤:Based on the above-mentioned soft-cut measurement circuit of the dynamic resistance of the gallium nitride power tube, the present invention also provides a method for measuring the dynamic resistance of the gallium nitride power tube, comprising the steps of:
A、通过同步程控电路分别向高速驱动电路、高压输出电路和低压输出电路提供设定时序的同步控制信号,控制所述高速驱动电路向被测氮化镓功率管栅极提供的驱动电压,高压输出电路向氮化镓功率管漏极与源极之间提供的高压以及低压输出电路向氮化镓功率管漏极与源极之间提供的低压按照所述时序同步供断;A. Provide the high-speed drive circuit, the high-voltage output circuit and the low-voltage output circuit with a synchronous control signal with a set timing through the synchronous program control circuit, and control the drive voltage provided by the high-speed drive circuit to the gate of the GaN power tube under test. The high voltage provided by the output circuit between the drain and the source of the gallium nitride power transistor and the low voltage provided by the low voltage output circuit between the drain and the source of the gallium nitride power transistor are supplied and disconnected synchronously according to the timing sequence;
B、通过低压输出电路和电压采样电路获得对应各时序的各电流值和电压值;B. Obtain each current value and voltage value corresponding to each time sequence through the low-voltage output circuit and the voltage sampling circuit;
C、根据所述对应各时序的各电流值和电压值计算出对应的各电阻值,得到被测氮化镓功率管的动态电阻的参数。C. Calculate each corresponding resistance value according to each current value and voltage value corresponding to each time sequence, and obtain the parameters of the dynamic resistance of the gallium nitride power transistor under test.
由上,该测量方法通过同步程控电路提供的同步控制信号实现了高速驱动电路、高压输出电路和低压输出电路按照设定时序进行导通和关断,同时对氮化镓功率管的电压值和电流值进行同步测量,根据欧姆定律,利用测量出的电压值和电流值即可计算各时序下的电阻值,以得到被测氮化镓功率管的动态电阻的参数。From the above, the measurement method realizes that the high-speed drive circuit, the high-voltage output circuit and the low-voltage output circuit are turned on and off according to the set timing through the synchronous control signal provided by the synchronous program-controlled circuit. The current value is measured synchronously. According to Ohm's law, the resistance value under each time sequence can be calculated by using the measured voltage value and current value, so as to obtain the parameters of the dynamic resistance of the tested GaN power tube.
优选的,步骤C后还包括:Preferably, after step C, also include:
根据所述动态电阻的参数对应的特性曲线是否符合正常的氮化镓功率管的对应的特性曲线判定该被测氮化镓功率管是否正常。Whether the tested gallium nitride power transistor is normal is determined according to whether the characteristic curve corresponding to the parameter of the dynamic resistance conforms to the corresponding characteristic curve of the normal gallium nitride power transistor.
由上,根据氮化镓材料的特性,正常的氮化镓功率管在低压工作状态下,其导通电阻较小,当给氮化镓功率管施加一段时间的高压后,再将其切换为低压工作状态时,其导通电阻会变大,因此根据该特性可判断测量的结果是否正确,从而判定被测氮化镓功率管是否正常。From the above, according to the characteristics of the gallium nitride material, the on-resistance of the normal gallium nitride power tube is small in the low-voltage working state. When a high voltage is applied to the gallium nitride power tube for a period of time, it is switched to In the low-voltage working state, its on-resistance will increase, so according to this characteristic, it can be judged whether the measurement result is correct, so as to judge whether the tested GaN power tube is normal.
优选的,所述设定时序的同步控制信号包括:Preferably, the synchronization control signal for the set timing includes:
控制所述高速驱动电路驱动被测氮化镓功率管导通和控制低压输出电路向氮化镓功率管漏极与源极之间提供低压,持续时间为T1;Controlling the high-speed driving circuit to drive the tested gallium nitride power tube to conduct and controlling the low-voltage output circuit to provide a low voltage between the drain and the source of the gallium nitride power tube, and the duration is T1;
控制所述高速驱动电路驱动被测氮化镓功率管断开和控制高压输出电路向氮化镓功率管漏极与源极之间提供高压,持续时间为T2,且T2>T1。The high-speed driving circuit is controlled to drive the gallium nitride power transistor under test to disconnect and the high-voltage output circuit is controlled to provide a high voltage between the drain and the source of the gallium nitride power transistor, and the duration is T2, and T2>T1.
由上,本发明中,通过在被测氮化镓功率管的漏极和源极之间间隔输出低压和高压,使其处于动态工作电压下,从而测量其动态工作电压下的电阻值,以获得其动态电阻的参数。From the above, in the present invention, by outputting a low voltage and a high voltage between the drain and the source of the tested gallium nitride power tube, it is under the dynamic working voltage, so as to measure the resistance value under the dynamic working voltage to obtain Get the parameters of its dynamic resistance.
附图说明Description of drawings
图1为本发明氮化镓功率管动态电阻的软切测量电路的电路原理图;Fig. 1 is the circuit schematic diagram of the soft-cut measurement circuit of the dynamic resistance of the gallium nitride power tube of the present invention;
图2为本发明氮化镓功率管动态电阻的测量方法的流程图;2 is a flow chart of a method for measuring dynamic resistance of a gallium nitride power tube according to the present invention;
图3为本发明设定时序下的各电路部分的波形示意图;Fig. 3 is the waveform schematic diagram of each circuit part under the setting sequence of the present invention;
图4为本发明氮化镓功率管的动态电阻特性曲线的示意图。FIG. 4 is a schematic diagram of a dynamic resistance characteristic curve of a gallium nitride power transistor according to the present invention.
具体实施方式Detailed ways
下面参照如图1-图4对本发明所述的氮化镓功率管动态电阻的软切测量电路的具体实施方式进行详细说明。The specific implementation of the soft-cut measurement circuit for the dynamic resistance of a gallium nitride power tube according to the present invention will be described in detail below with reference to FIGS. 1 to 4 .
如图1所示为本发明氮化镓功率管动态电阻的软切测量电路的电路原理图,该软切测量电路包括:As shown in FIG. 1, the circuit principle diagram of the soft-cut measurement circuit of the dynamic resistance of the gallium nitride power tube of the present invention is shown, and the soft-cut measurement circuit includes:
同步程控电路(未在图中画出),可采用一可编程的FPGA芯片实现,通过编程控制,使其输出设定时序的同步控制信号,使本发明的软切测量电路同步导通或关断,并在每次导通时,同步测量氮化镓功率管的电压值和电流值;The synchronous program control circuit (not shown in the figure) can be realized by a programmable FPGA chip, and through programming control, it outputs a synchronous control signal with a set timing, so that the soft-cut measurement circuit of the present invention is turned on or off synchronously. turn off, and synchronously measure the voltage value and current value of the GaN power tube each time it is turned on;
高压源VI1,该高压源VI1的正输出端依次串联一MOS开关K1和电阻R1后连接至被测氮化镓功率管的漏极(D),该MOS开关K1接收由同步程控电路提供的同步控制信号CTRL1,该电阻R1的阻值为1000欧姆,可用于高压到低压切换时,实现高压源输出端的电流钳位;该高压源VI1的负输出端连接至被测氮化镓功率管的源极(S);The high voltage source VI1, the positive output terminal of the high voltage source VI1 is connected in series with a MOS switch K1 and a resistor R1 and then connected to the drain (D) of the gallium nitride power transistor under test. The MOS switch K1 receives the synchronization provided by the synchronous programming circuit. The control signal CTRL1, the resistance value of the resistor R1 is 1000 ohms, which can be used to realize the current clamping of the output terminal of the high voltage source when switching from high voltage to low voltage; the negative output terminal of the high voltage source VI1 is connected to the source of the GaN power tube under test. pole(S);
低压源VI2,其输出端通过四线开尔文电路进行低压输出和电流测量,该四线开尔文电路包括连接在低压源VI2正输出端的驱动电流线Force_High和感测电压线Sense_High,以及连接在低压源VI2负输出端的驱动电流线Force_Low和感测电压线Sense_Low;其中,驱动电流线Force_High上串联一MOS开关K3后连接至被测氮化镓功率管的漏极(D),该MOS开关K3接收由同步程控电路提供的同步控制信号CTRL3,可用于实现低压源VI2和高压源VI1的隔离,以保护低压源VI2,同时其快速的导通能力可以使低压源VI2提供的低压快速建立到被测氮化镓功率管的漏极(D),且该MOS开关K3两端还并联有串联的MOS开关K4和电阻R2,该MOS开关K4接收由同步程控电路提供的同步控制信号CTRL4,可用于降低高压到低压的切换速度,电阻R2为分流电阻,可用于降低流向被测氮化镓功率管漏极的反向电流;感测电压线Sense_High串联后续所述的电压采样电路中的衰减器Attenuator后连接到被测氮化镓功率管的漏极(D),向被测氮化镓功率管的漏极(D)提供低压;该驱动电流线Force_High和感测电压线Sense_High之间还串联有MOS开关K2,该MOS开关K2接收由同步程控电路提供的同步控制信号CTRL2,当高压持续施加到被测氮化镓功率管上时,上述MOS开关K3为断开状态,此时将MOS开关K2导通,以使低压源VI2的开尔文电路是短路的,可使低压源VI2提前到达预设的低压值,从而避免当高压切换到低压时,切换瞬间高压会对低压源VI2造成一定冲击,该低压源VI2需要大概20ms的调整时间才能达到预设的低压值;The low-voltage source VI2, whose output end performs low-voltage output and current measurement through a four-wire Kelvin circuit, the four-wire Kelvin circuit includes a driving current line Force_High and a sensing voltage line Sense_High connected to the positive output of the low-voltage source VI2, and connected to the low-voltage source VI2 The driving current line Force_Low and the sensing voltage line Sense_Low at the negative output end; wherein, a MOS switch K3 is connected in series with the driving current line Force_High and then connected to the drain (D) of the GaN power transistor under test. The MOS switch K3 receives the synchronous signal The synchronous control signal CTRL3 provided by the program control circuit can be used to isolate the low-voltage source VI2 and the high-voltage source VI1 to protect the low-voltage source VI2. At the same time, its fast turn-on capability enables the low-voltage provided by the low-voltage source VI2 to quickly establish to the tested nitridation. The drain (D) of the gallium power tube, and the two ends of the MOS switch K3 are also connected in parallel with a series-connected MOS switch K4 and a resistor R2, the MOS switch K4 receives the synchronous control signal CTRL4 provided by the synchronous programming circuit, and can be used to reduce the high voltage to Low-voltage switching speed, resistor R2 is a shunt resistor, which can be used to reduce the reverse current flowing to the drain of the GaN power tube under test; the sensing voltage line Sense_High is connected in series with the attenuator Attenuator in the voltage sampling circuit described later, and then connected to The drain (D) of the tested gallium nitride power transistor provides a low voltage to the drain (D) of the tested gallium nitride power transistor; a MOS switch K2 is also connected in series between the driving current line Force_High and the sensing voltage line Sense_High , the MOS switch K2 receives the synchronous control signal CTRL2 provided by the synchronous program control circuit, when the high voltage is continuously applied to the tested gallium nitride power transistor, the above-mentioned MOS switch K3 is in the off state, and the MOS switch K2 is turned on at this time, So that the Kelvin circuit of the low-voltage source VI2 is short-circuited, the low-voltage source VI2 can reach the preset low-voltage value in advance, so as to avoid that when the high-voltage switches to the low-voltage, the high-voltage at the moment of switching will cause a certain impact on the low-voltage source VI2. The low-voltage source VI2 It takes about 20ms of adjustment time to reach the preset low voltage value;
驱动器Driver,其输出端分别连接被测氮化镓功率管的栅极(G)和源极(S),该驱动器Driver接收同步程控电路提供的同步控制信号CTRL0,并在同步控制信号CTRL0的控制下,输出高速驱动信号,即驱动电压,给被测氮化镓功率管,以控制其导通或关断;The driver Driver, whose output terminals are respectively connected to the gate (G) and the source (S) of the GaN power transistor under test, the driver Driver receives the synchronous control signal CTRL0 provided by the synchronous programming circuit, and is controlled by the synchronous control signal CTRL0 , output a high-speed driving signal, that is, driving voltage, to the tested GaN power tube to control its turn-on or turn-off;
电压采样电路,并联于该氮化镓功率管的漏极(D)和源极(S)两端,其包括串联的高精度电压表V1和衰减器Attenuator,上述四线开尔文电路的Sense_High串联该衰减器Attenuator,向被测氮化镓功率管提供低压,该高精度电压表V1在同步程控电路提供的设定时序的同步控制信号的控制下,实时采集氮化镓功率管对应各时序下的电压值,该衰减器Attenuator主要在该电路中起到高压钳位保护的作用,在被测氮化镓功率管关断时,对其漏极的高压进行钳位,以保护该高精度电压表和低压源VI2不被高压损坏;A voltage sampling circuit, connected in parallel with both ends of the drain (D) and source (S) of the gallium nitride power transistor, includes a series-connected high-precision voltmeter V1 and an attenuator Attenuator, and the Sense_High of the four-wire Kelvin circuit is connected in series with the The Attenuator provides low voltage to the GaN power tube to be tested. The high-precision voltmeter V1 is controlled by the synchronous control signal of the set timing provided by the synchronous program control circuit, and real-time collects the voltage of the GaN power tube corresponding to each timing. Voltage value, the Attenuator mainly plays the role of high-voltage clamping protection in the circuit. When the tested GaN power tube is turned off, it clamps the high-voltage of its drain to protect the high-precision voltmeter and low voltage source VI2 are not damaged by high voltage;
上述设定时序下,同步程控电路提供的同步控制信号逻辑为:Under the above set timing, the synchronous control signal logic provided by the synchronous program-controlled circuit is:
在高压源向被测氮化镓功率管施加高压时,驱动器Driver不输出驱动电压,被测氮化镓功率管不导通;When the high-voltage source applies high voltage to the tested GaN power tube, the driver does not output the driving voltage, and the tested GaN power tube is not turned on;
当低压源导通,施加在被测氮化镓功率管的高压切换成低压后,驱动器Driver输出驱动电压,驱动被测氮化镓功率管导通,同时电压采样电路和低压源VI2同步进行电压值和电流值的测量;When the low-voltage source is turned on, and the high voltage applied to the GaN power tube under test is switched to a low voltage, the driver Driver outputs the driving voltage to drive the GaN power tube under test to turn on. At the same time, the voltage sampling circuit and the low-voltage source VI2 synchronize the voltage measurement of values and current values;
上述高压和低压为间隔施加,且低压施加的持续时间远小于高压施加的持续时间,一般低压持续时间为5ms,高压持续时间为100ms。The above-mentioned high pressure and low pressure are applied at intervals, and the duration of low pressure application is much shorter than the duration of high pressure application. Generally, the duration of low pressure is 5ms, and the duration of high pressure is 100ms.
如图2所示,根据上述的软切测量电路进行氮化镓功率管动态电阻测量时,包括以下步骤:As shown in Figure 2, when the dynamic resistance measurement of the gallium nitride power tube is performed according to the above-mentioned soft-cut measurement circuit, the following steps are included:
S100:通过同步程控电路分别向高速驱动电路、高压输出电路和低压输出电路提供设定时序的同步控制信号,控制所述高速驱动电路向被测氮化镓功率管栅极提供的驱动电压,高压输出电路向氮化镓功率管漏极与源极之间提供的高压以及低压输出电路向氮化镓功率管漏极与源极之间提供的低压按照所述时序同步供断;S100: Provide the high-speed drive circuit, the high-voltage output circuit and the low-voltage output circuit with a synchronous control signal with a set timing through the synchronous program control circuit, and control the drive voltage provided by the high-speed drive circuit to the gate of the gallium nitride power tube under test. The high voltage provided by the output circuit between the drain and the source of the gallium nitride power transistor and the low voltage provided by the low voltage output circuit between the drain and the source of the gallium nitride power transistor are supplied and disconnected synchronously according to the timing sequence;
如图3所示为同步程控电路输出的设定时序下的各电路部分的波形示意图,该设定时序下,同步程控电路分别提供给高速驱动电路、高压输出电路、低压输出电路同步控制信号,控制其在设定时序下的导通或断开,本发明中,该软切测量电路的高压到低压的切换主要通过低压输出电路的导通或断开实现,在实际测量中,高压输出电路的开关K1可始终保持导通状态,具体的,一个完整的时序同步控制周期如下:Figure 3 is a schematic diagram of the waveforms of each circuit part under the set timing output of the synchronous program-controlled circuit. Under the set timing, the synchronous program-controlled circuit provides synchronous control signals to the high-speed drive circuit, the high-voltage output circuit, and the low-voltage output circuit, respectively. It is controlled to be turned on or off under the set timing. In the present invention, the switching from high voltage to low voltage of the soft-cut measurement circuit is mainly realized by turning on or off the low-voltage output circuit. In actual measurement, the high-voltage output circuit The switch K1 can always remain in an on state. Specifically, a complete timing synchronization control cycle is as follows:
在t1时刻,控制驱动器Driver向被测氮化镓功率管的栅极(G)输出5V驱动电压,驱动其导通,将开关K1、K3导通,开关K2、K4断开,此时高压源VI1输出的高压500V被导通的开关K3拉低,施加到被测氮化镓功率管的电压为低压0.1V,保持该低压状态持续5ms,直至t1’时刻;At time t1, the driver is controlled to output a 5V driving voltage to the gate (G) of the GaN power tube under test, and it is driven to turn on, the switches K1 and K3 are turned on, and the switches K2 and K4 are turned off. At this time, the high-voltage source The
在t1’时刻,控制驱动器Driver断开向被测氮化镓功率管的栅极(G)输出的5V驱动电压,驱动其断开,将开关K1、K2导通,开关K3、K4断开,此时高压源VI1输出的高压500V施加到被测氮化镓功率管,低压源与高压源隔离,开关K2导通使开尔文电路的驱动电流线Force_High和感测电压线Sense_High短路,低压源通过该短路的开尔文电路提前到达预设的电压值,保持该高压状态100ms,直至t2时刻;At time t1', the driver is controlled to disconnect the 5V driving voltage output to the gate (G) of the GaN power transistor under test, drive it off, turn on the switches K1 and K2, and turn off the switches K3 and K4. At this time, the
在t2时刻,控制驱动器Driver向被测氮化镓功率管的栅极(G)输出5V驱动电压,驱动其导通,将开关K1、K4导通,开关K2、K3断开,开关K4和电阻R2可降低高压到低压切换瞬间流向被测氮化镓功率管的反向电流;然后将开关K1、K3导通,开关K2、K4断开,施加到被测氮化镓功率管的电压重新被拉低为低压0.1V,保持该低压状态持续5ms,直至t2’时刻。At time t2, the driver is controlled to output a 5V drive voltage to the gate (G) of the GaN power transistor under test, and it is driven to turn on, the switches K1 and K4 are turned on, the switches K2 and K3 are turned off, the switch K4 and the resistor R2 can reduce the reverse current flowing to the tested GaN power tube at the moment of switching from high voltage to low voltage; then the switches K1 and K3 are turned on, the switches K2 and K4 are turned off, and the voltage applied to the tested GaN power tube is reset Pull down to a low voltage of 0.1V, and keep the low voltage state for 5ms until time t2'.
S200:通过低压输出电路和电压采样电路获得对应各时序的各电流值和电压值;S200: obtain each current value and voltage value corresponding to each time sequence through the low-voltage output circuit and the voltage sampling circuit;
本步骤中,通过所述电压采样电路和低压源VI2同步测量获得对应各时序中低压持续时间内的各电压值和电流值;In this step, each voltage value and current value within the low-voltage duration corresponding to each time sequence are obtained by synchronously measuring the voltage sampling circuit and the low-voltage source VI2;
其中,低压源VI2测量的各低压持续时间内的电流值IC的波形如图3所示,根据低压源VI2测量的电流值IC和电压表V1测量的电压,即可计算该被测氮化镓功率管在每个时序下的电阻值。Among them, the waveform of the current value IC measured by the low voltage source VI2 during each low voltage duration is shown in Figure 3. According to the current value IC measured by the low voltage source VI2 and the voltage measured by the voltmeter V1, the measured gallium nitride can be calculated. The resistance value of the power tube at each timing.
S300:根据所述对应各时序的各电流值和电压值计算出对应的各电阻值,得到被测氮化镓功率管的动态电阻的参数;S300: Calculate the corresponding resistance values according to the current values and voltage values corresponding to the time sequences, and obtain parameters of the dynamic resistance of the gallium nitride power transistor under test;
S400:根据所述动态电阻的参数对应的特性曲线是否符合正常的氮化镓功率管的对应的特性曲线判定该被测氮化镓功率管是否正常;S400: Determine whether the tested GaN power tube is normal according to whether the characteristic curve corresponding to the parameter of the dynamic resistance conforms to the corresponding characteristic curve of the normal GaN power tube;
如图4所示为氮化镓功率管的动态电阻特性曲线的示意图,其中,RON1、RON2分别为氮化镓功率管对应图3所示的时序下,电阻值RON的测量结果,通过将该测量结果进行整合,可生成如图4的动态电阻的参数对应的特性曲线,根据氮化镓材料的特性,正常的氮化镓功率管在低压工作状态下,其导通电阻较小,当给其漏极和源极施加一段时间的高压之后,根据其特性,在紧邻的下一次低压动作状态下,其导通电阻会升高,该升高过程可能会持续几个高低压切换的周期后,区域平稳;因此,根据本软切测量电路所获得的动态电阻特性曲线,可判断该氮化镓功率管是否符合其特性,若符合,则判断其为正常,若不符合,则判断其为不正常;Figure 4 is a schematic diagram of the dynamic resistance characteristic curve of the GaN power tube, wherein RON1 and RON2 are the measurement results of the resistance value RON of the GaN power tube corresponding to the timing shown in Figure 3. The measurement results are integrated to generate the characteristic curve corresponding to the parameters of the dynamic resistance as shown in Figure 4. According to the characteristics of the gallium nitride material, the on-resistance of a normal gallium nitride power transistor in the low-voltage working state is small. After a period of high voltage is applied to its drain and source, according to its characteristics, its on-resistance will increase in the next low-voltage action state, and the increase process may last for several cycles of high-voltage and low-voltage switching. , the region is stable; therefore, according to the dynamic resistance characteristic curve obtained by the soft-cut measurement circuit, it can be judged whether the GaN power tube conforms to its characteristics, if so, it is judged to be normal, if not, it is judged to be unusual;
从图4的变化曲线可看出,在T1时刻(t1-t1’),氮化镓功率管导通状态下的电阻值RON1较低,之后的T2时刻(t2-t2’),氮化镓功率管导通状态下的电阻值RON2开始升高,从该测量结果得出:It can be seen from the change curve in Figure 4 that at the time T1 (t1-t1'), the resistance value RON1 of the GaN power transistor in the ON state is lower, and at the time T2 (t2-t2'), the resistance value RON1 of the GaN power transistor is low. The resistance value RON2 in the ON state of the power tube starts to rise, and from this measurement result:
RON1<RON2;RON1<RON2;
((RON2-RON1)/RON1)*100%>x%;((RON2-RON1)/RON1)*100%>x%;
其中,x%为该氮化镓功率管设计者提出的浮动限值(limit),用于体现该氮化镓功率管在动态工作状态下的动态参数变化情况;Among them, x% is the floating limit proposed by the designer of the GaN power tube, which is used to reflect the dynamic parameter change of the GaN power tube under the dynamic working state;
根据该测量结果,可判定上述氮化镓功率管的性能符合其特性,判断为正常状态。According to the measurement results, it can be determined that the performance of the above-mentioned gallium nitride power transistor conforms to its characteristics, and it is determined to be in a normal state.
以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the scope of the present invention. within the scope of protection.
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CN110794280A (en) * | 2019-11-20 | 2020-02-14 | 北京华峰测控技术股份有限公司 | Soft-cut measurement circuit and measurement method of dynamic resistance of gallium nitride power tube |
CN110794280B (en) * | 2019-11-20 | 2025-04-29 | 北京华峰测控技术股份有限公司 | Soft-cut measurement circuit and measurement method of dynamic resistance of GaN power tube |
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