CN115679700A - 含浸液与活性碳布及其形成方法 - Google Patents
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 200
- 239000004744 fabric Substances 0.000 title claims abstract description 75
- 239000007788 liquid Substances 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000007654 immersion Methods 0.000 title claims description 22
- 239000005011 phenolic resin Substances 0.000 claims abstract description 48
- URQUNWYOBNUYJQ-UHFFFAOYSA-N diazonaphthoquinone Chemical compound C1=CC=C2C(=O)C(=[N]=[N])C=CC2=C1 URQUNWYOBNUYJQ-UHFFFAOYSA-N 0.000 claims abstract description 47
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims abstract description 41
- 229920001568 phenolic resin Polymers 0.000 claims abstract description 41
- 238000005470 impregnation Methods 0.000 claims abstract description 39
- 150000001875 compounds Chemical class 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 150000008040 ionic compounds Chemical class 0.000 claims abstract description 22
- 239000003960 organic solvent Substances 0.000 claims abstract description 18
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 claims description 68
- 239000011592 zinc chloride Substances 0.000 claims description 34
- 235000005074 zinc chloride Nutrition 0.000 claims description 34
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 22
- 238000003763 carbonization Methods 0.000 claims description 13
- 239000003365 glass fiber Substances 0.000 claims description 13
- 239000007787 solid Substances 0.000 claims description 11
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 9
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 claims description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 239000000835 fiber Substances 0.000 claims description 6
- -1 diazonaphthoquinone compound Chemical class 0.000 claims description 5
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910000019 calcium carbonate Inorganic materials 0.000 claims description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 2
- 239000000292 calcium oxide Substances 0.000 claims description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 2
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 claims description 2
- 239000001095 magnesium carbonate Substances 0.000 claims description 2
- 229910000021 magnesium carbonate Inorganic materials 0.000 claims description 2
- 229920001169 thermoplastic Polymers 0.000 claims description 2
- 239000004416 thermosoftening plastic Substances 0.000 claims description 2
- 239000011877 solvent mixture Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 16
- 239000000203 mixture Substances 0.000 description 13
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- RBTBFTRPCNLSDE-UHFFFAOYSA-N 3,7-bis(dimethylamino)phenothiazin-5-ium Chemical compound C1=CC(N(C)C)=CC2=[S+]C3=CC(N(C)C)=CC=C3N=C21 RBTBFTRPCNLSDE-UHFFFAOYSA-N 0.000 description 3
- 238000007598 dipping method Methods 0.000 description 3
- 229960000907 methylthioninium chloride Drugs 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000011152 fibreglass Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 238000002411 thermogravimetry Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- UWQPDVZUOZVCBH-UHFFFAOYSA-N 2-diazonio-4-oxo-3h-naphthalen-1-olate Chemical class C1=CC=C2C(=O)C(=[N+]=[N-])CC(=O)C2=C1 UWQPDVZUOZVCBH-UHFFFAOYSA-N 0.000 description 1
- 229920001342 Bakelite® Polymers 0.000 description 1
- 101100042856 Caenorhabditis elegans sms-5 gene Proteins 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
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- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007655 standard test method Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000004227 thermal cracking Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
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- D06M15/00—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment
- D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
- D06M15/37—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
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Abstract
本发明提供一种含浸液与活性碳布及其形成方法,含浸液包括:(A)酚醛树脂;(B)重氮萘醌为主的化合物或其衍生物;(C)离子化合物;以及(D)有机溶剂。(A)酚醛树脂的重量与(B)重氮萘醌为主的化合物或其衍生物的重量之间的比例为0.2:0.8至0.9:0.1,以及(C)离子化合物的重量与(A)酚醛树脂及(B)重氮萘醌为主的化合物或其衍生物的总重之间的比例为0.2:1至1.4:1。此含浸液可用于形成活性碳层以包覆并直接接触网状基材的表面。
Description
技术领域
本揭露关于活性碳布,还特别关于形成活性碳布所用的含浸液。
背景技术
光电业制程产生的正型光阻废弃物中的固形物(酚醛树脂与重氮萘醌)目前的主要处理方法为焚化而衍生恶臭废气。若能将废光阻重新利用,则有助于保护环境。
发明内容
本揭露一实施例提供的含浸液,包括:(A)酚醛树脂;(B)重氮萘醌为主的化合物或其衍生物;(C)离子化合物;以及(D)有机溶剂,其中(A)酚醛树脂的重量与(B)重氮萘醌为主的化合物或其衍生物的重量之间的比例为0.2:0.8至0.9:0.1,以及其中(C)离子化合物的重量与(A)酚醛树脂及(B)重氮萘醌为主的化合物或其衍生物的总重之间的比例为0.2:1至1.4:1。
本揭露一实施例提供的活性碳布的形成方法,包含:将网状基材置入上述含浸液中,使含浸液附着于网状基材的表面上;移除含浸液的(D)有机溶剂以保留固成分;以及对固成分进行碳化制程,形成活性碳层包覆并直接接触网状基材的表面,以得活性碳布。
本揭露一实施例提供的活性碳布,包括:网状基材;以及活性碳层,包覆并直接接触网状基材的表面。
具体实施方式
本揭露一实施例提供的含浸液,包括:(A)酚醛树脂;(B)重氮萘醌为主的化合物或其衍生物;(C)离子化合物;以及(D)有机溶剂。(A)酚醛树脂与(B)重氮萘醌为主的化合物或其衍生物可来自未曝光的回收光阻,亦可取市售的酚醛树脂与重氮萘醌为主的化合物混合而成。在其他实施例中,亦可添加市售的酚醛树脂或重氮萘醌为主的化合物至未曝光的回收光阻,以调整(A)酚醛树脂与(B)重氮萘醌为主的化合物或其衍生物的比例。
在一实施例中,(A)酚醛树脂的重量与(B)重氮萘醌为主的化合物或其衍生物的重量之间的比例为0.2:0.8至0.9:0.1。若(A)酚醛树脂的比例过高,则之后形成的活性碳层的比表面积偏低。若(B)重氮萘醌为主的化合物或其衍生物比例过高,则在含浸过程中可能自网状基材的表面脱落。在一些实施例中,(C)离子化合物的重量与(A)酚醛树脂及(B)重氮萘醌为主的化合物或其衍生物的总重之间的比例为0.2:1至1.4:1。若含浸液中(C)离子化合物的比例过低,则之后形成的活性碳层的比表面积偏低。若含浸液中(C)离子化合物的比例过高,则含浸液无法附着在网状基材上而无法形成活性碳布。
在一些实施例中,(A)酚醛树脂、(B)重氮萘醌为主的化合物或其衍生物、及(C)离子化合物的总重与(D)有机溶剂的重量之间的比例为0.1:0.9至0.5:0.5。若(D)有机溶剂的比例过低,则(A)酚醛树脂、(B)重氮萘醌为主的化合物或其衍生物、及(C)离子化合物可能沉淀而无法溶解。若(D)有机溶剂的比例过高,则无法形成足够的活性碳层以包覆网状基材。在一些实施例中,(A)酚醛树脂为热塑性酚醛树脂。若(A)酚醛树脂为热固性酚醛树脂,则不溶于(D)有机溶剂中以形成含浸液。
在一些实施例中,(B)重氮萘醌为主的化合物或其衍生物包括重氮萘醌化合物、磺酸化重氮萘醌化合物、磺酸化茚并烯酮化合物、磺酸化茚并羧酸化合物、或上述的组合。一般而言,含浸液中的(B)重氮萘醌为主的化合物或其衍生物的主要组成为重氮萘醌为主的化合物,顶多含有10%的衍生物。衍生物主要来自于回收过程中,重氮萘醌为主的化合物因热分解而损失偶氮基的衍生物、与剥除液中的水反应所形成的衍生物、或进行其他反应所形成的衍生物。由于未曝光的回收光阻中的重氮萘醌为主的化合物可能形成少量衍生物,因此不适于再次用于微影制程。但对本揭露的碳化制程而言,重氮萘醌为主的化合物的衍生物不会劣化产品。换言之,(B)重氮萘醌为主的化合物或其衍生物均可用于本揭露实施例的含浸液。
在一些实施例中,(C)离子化合物可包括氯化锌、碳酸钙、氧化钙、或碳酸镁,或是其他含双价或以上的离子化合物。值得注意的是,当含浸液用于含浸玻璃纤维布时,则(C)离子化合物倾向采用氯化锌等中性物种,以避免损伤玻璃纤维布。
在一些实施例中,(D)有机溶剂可包括丙二醇甲醚醋酸酯(PGMEA)、丙二醇甲醚(PGME)、N-甲基吡咯烷酮(NMP)、丙酮(Acetone)、或丁酮(MEK)。具体而言,可采用丙二醇甲醚醋酸酯作为(D)有机溶剂,但不限于此。
本揭露一实施例提供的活性碳布的形成方法,包含:将网状基材置入上述含浸液中,使含浸液附着于网状基材的表面上。接着移除含浸液的(D)有机溶剂以保留固成分,以作为活性碳层的前驱物。接着对固成分进行碳化制程,形成活性碳层包覆并直接接触网状基材的表面,以得活性碳布。在一些实施例中,活性碳层可包覆网状基材的所有表面。在其他实施例中,活性碳层可包覆网状基材的部分表面,并露出部分的网状基材。
在一些实施例中,碳化制程的温度为250℃至400℃。此温度可随网状基材的材质调整。若网状基材的耐温程度较高,则碳化制程的温度可提高,反之可降低。若碳化制程的温度过高,则可能会使网状基材破裂。若碳化制程的温度过低,则固成分可能无法完全转化成活性碳层,而劣化活性碳布的性质。
在一些实施例中,上述方法还包括在该碳化制程之后,进行一酸洗制程以移除该活性碳层中的(C)离子化合物。若(C)离子化合物如氯化锌残留于活性碳层中,则可能会降低活性碳层的比表面积,甚至不符合某些产品所需的无重金属残留标准。
在一些实施例中,网状基材包含玻璃纤维布、陶瓷纤维布、或金属纤维布。具体而言,网状基材可采用玻璃纤维布,使活性碳层包覆玻璃纤维布中的玻璃纤维表面。另一方面,网状基材的重量与该活性碳层的重量的比例为1:0.05至1:0.3。若活性碳层的比例过低,则活性碳层形成的孔洞偏向中孔以上,导致比表面积降低。若活性碳层的比例过高,则活性碳层内部孔洞有(C)离子化合物残留,难以去除,导致比表面积降低。在一些实施例中,活性碳层的比表面积为130m2/g至500m2/g。若活性碳层的比表面积过低,则会弱化活性碳吸附能力,缩短使用寿命。
在一些实施例中,上述活性碳布可用于有机溶剂与废气的吸附材料、空气滤芯、或集尘滤袋等,因为其透气量大于或等于2cc/cm2·sec,活性碳层的亚甲基蓝吸附值可大于或等于54mg/g,甚至高达134mg/g,而表面阻抗小于或等于107Ω/□。值得注意的是,上述活性碳布亦可用于其他应用且具有对应特性,并不限于上述应用与特性。
为让本揭露的上述内容和其他目的、特征、和优点能更明显易懂,下文特举出较佳实施例,作详细说明如下:
[实施例]
在以下实施例中,取未曝光的回收光阻作为酚醛树脂与重氮萘醌化合物的来源,其酚醛树脂与重氮萘醌化合物的重量比为0.7:0.3。另一方面,有机溶剂为丙二醇甲醚醋酸酯(PGMEA),而离子化合物为氯化锌。此外,亦可直接混合市售的酚醛树脂(购自住友电木的光阻用PR系列)与市售的重氮萘醌化合物(购自SMS Technology的SMS-5PAC系列)。下述实施例的网状基材为玻璃纤维布(购自德宏工业的7628系列)。
在下述实施例中,移除含浸液中的PGMEA后的固成分其热裂解温度的量测方法为热重量分析法(TGA法),活性碳层的比表面积的量测方法为氮气吸脱附法(BET法),活性碳层的亚甲基蓝吸附值(活性碳布的亚甲基蓝吸附值(mg)/活性碳层(g))的量测方法为JIS K1474标准测试法,活性碳布的破裂程度的量测方法为织物撕裂强度测试法(ASTM D2261),而活性碳层的附着性的量测方法为测试胶带法(ASTM D3359)。另一方面,将活性碳布的重量减去玻璃纤维布的重量,即可得活性碳层的重量。将活性碳层的重量除以活性碳布的重量,即可得活性碳布中活性碳层的重量比例。
实施例1
取30g的未曝光的回收光阻、30g的氯化锌、与140g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为1:0.3:0.7,且上述组成的固含量为30wt%。
将玻璃纤维布浸入上述含浸液5分钟后,取出加热至150℃并维持5分钟,接着升温至180℃并维持60分钟,以去除含浸液中的PGMEA并保留固成分于玻璃纤维布上。之后将含有固成分的玻璃纤维布置于烧结高温炉中,并在75%氮气与25%氢气的混合气体下,以5℃/min升温至400℃并碳化30分钟以形成活性碳层。碳化后的产物冷却至室温,接着以0.5N氯化氢与水交替清洗数次以去除活性碳层中的氯化锌。接着以100℃烘干,即得活性碳布。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。
实施例2
取30g的未曝光的回收光阻、15g的氯化锌、与105g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为0.5:0.3:0.7,且上述组成的固含量为约30wt%。后续形成活性碳布的步骤与实施例1相同。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。
实施例3
取10g的未曝光的回收光阻、10g的氯化锌、与180g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为1:0.3:0.7,且上述组成的固含量为约10wt%。后续形成活性碳布的步骤与实施例1相同。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。
实施例4
取30g的未曝光的回收光阻、30g的氯化锌、与140g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为1:0.3:0.7,且上述组成的固含量为30wt%。后续形成活性碳布的步骤与实施例1类似,差别在于碳化温度为350℃。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。
实施例5
取27g的酚醛树脂、3g的重氮萘醌、30g的氯化锌、与140g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为1:0.1:0.9,且上述组成的固含量为30wt%。后续形成活性碳布的步骤与实施例1相同。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。
实施例6
取6g的酚醛树脂、24g的重氮萘醌、30g的氯化锌、与140g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为1:0.8:0.2,且上述组成的固含量为30wt%。后续形成活性碳布的步骤与实施例1相同。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。
实施例7
取30g的未曝光的回收光阻、30g的氯化锌、与60g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为1:0.3:0.7,且上述组成的固含量为50wt%。后续形成活性碳布的步骤与实施例1相同。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。
比较例1
取30g的酚醛树脂、30g的氯化锌、与140g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为1:0:1,且上述组成的固含量为30wt%。后续形成活性碳布的步骤与实施例1相同。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。由表2可知,无重氮萘醌的含浸液所形成的活性碳布,其活性碳层的比表面积偏低。
比较例2
取60g的未曝光的回收光阻与140g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为0:0.3:0.7,且上述组成的固含量为30wt%。后续形成活性碳布的步骤与实施例1相同。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。由表2可知,无氯化锌的含浸液所形成的活性碳布,其活性碳层的比表面积极低。
比较例3
取30g的未曝光的回收光阻、30g的氢氧化钾、与140g的PGMEA混合形成含浸液。氢氧化钾、重氮萘醌、与酚醛树脂的重量比为1:0.3:0.7,且上述组成的固含量为30wt%。后续形成活性碳布的步骤与实施例1相同。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。由表2可知,采用氢氧化钾而非氯化锌的含浸液所形成的活性碳布会破裂。
比较例4
取30g的未曝光的回收光阻、30g的氯化锌、与140g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为1:0.3:0.7,且上述组成的固含量为30wt%。后续形成活性碳布的步骤与实施例1类似,差异在于碳化温度升高到500℃。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。由表2可知,碳化温度过高会造成活性碳布破裂。
比较例5
取30g的未曝光的回收光阻、3g的氯化锌、与77g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为0.1:0.3:0.7,且上述组成的固含量为30wt%。后续形成活性碳布的步骤与实施例1相同。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。由表2可知,氯化锌比例偏低的含浸液所形成的活性碳布,其活性碳层的比表面积极低。
比较例6
取30g的未曝光的回收光阻、45g的氯化锌、与175g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为1.5:0.3:0.7,且上述组成的固含量为30wt%。上述含浸液无法附着在玻璃纤维布上。
比较例7
取3g的酚醛树脂、27g的重氮萘醌、30g的氯化锌、与140g的PGMEA混合形成含浸液。氯化锌、重氮萘醌、与酚醛树脂的重量比为1:0.9:0.1,且上述组成的固含量为30wt%。后续形成活性碳布的步骤与实施例1相同。上述含浸液组成比例如表1所示,而活性碳布的性质如表2所示。上述玻璃纤维布在含浸时,有含浸物脱落的现象。由表2可知,重氮萘醌的比例过高的含浸液所形成的活性碳布,其活性碳层的比表面积偏低。
表1
表2
**破裂程度:O=不会破裂,X=会破裂
***活性碳附着性:O=不会脱落,X=直接脱落
虽然本揭露已以数个较佳实施例揭露如上,然其并非用以限定本揭露,任何所属技术领域中具有通常知识者,在不脱离本揭露的精神和范围内,当可作任意的更动与润饰,因此本揭露的保护范围当视所附的权利要求书所界定的范围为准。
Claims (14)
1.一种含浸液,其特征在于,包括:
(A)酚醛树脂;
(B)重氮萘醌为主的化合物或其衍生物;
(C)离子化合物;以及
(D)有机溶剂,
其中(A)酚醛树脂的重量与(B)重氮萘醌为主的化合物或其衍生物的重量之间的比例为0.2:0.8至0.9:0.1,以及
其中(C)离子化合物的重量与(A)酚醛树脂及(B)重氮萘醌为主的化合物或其衍生物的总重之间的比例为0.2:1至1.4:1。
2.如权利要求1所述的含浸液,其特征在于,其中(A)酚醛树脂、(B)重氮萘醌为主或其衍生物的化合物、及(C)离子化合物的总重与(D)有机溶剂的重量之间的比例为0.1:0.9至0.5:0.5。
3.如权利要求1所述的含浸液,其特征在于,其中(A)酚醛树脂为热塑性酚醛树脂。
4.如权利要求1所述的含浸液,其特征在于,其中(B)重氮萘醌为主的化合物或其衍生物包括重氮萘醌化合物、磺酸化重氮萘醌化合物、磺酸化茚并烯酮化合物、磺酸化茚并羧酸化合物、或上述的组合。
5.如权利要求1所述的含浸液,其特征在于,其中(C)离子化合物包括氯化锌、碳酸钙、氧化钙、或碳酸镁。
6.如权利要求1所述的含浸液,其特征在于,其中(D)有机溶剂包括丙二醇甲醚醋酸酯、丙二醇甲醚、N-甲基吡咯烷酮、丙酮、或丁酮。
7.一种活性碳布的形成方法,其特征在于,包含:
将一网状基材置入权利要求1的含浸液中,使含浸液附着于该网状基材的表面上;
移除含浸液的(D)有机溶剂以保留固成分;以及
对固成分进行一碳化制程,形成一活性碳层包覆并直接接触该网状基材的表面,以得一活性碳布。
8.如权利要求7所述的活性碳布的形成方法,其特征在于,其中该碳化制程的温度为250℃至400℃。
9.如权利要求7所述的活性碳布的形成方法,其特征在于,还包括在该碳化制程之后,进行一酸洗制程以移除该活性碳层中的(C)离子化合物。
10.如权利要求7所述的活性碳布的形成方法,其特征在于,其中该网状基材包含玻璃纤维布、陶瓷纤维布、或金属纤维布。
11.一种活性碳布,其特征在于,包括:
一网状基材;以及
一活性碳层,包覆并直接接触该网状基材的表面。
12.如权利要求11所述的活性碳布,其特征在于,其中该网状基材包括玻璃纤维布、陶瓷纤维布、或金属纤维布。
13.如权利要求11所述的活性碳布,其特征在于,其中该网状基材的重量与该活性碳层的重量的比例为1:0.05至1:0.3。
14.如权利要求11所述的活性碳布,其特征在于,其中该活性碳层的比表面积为130m2/g至500m2/g。
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CN112684661A (zh) * | 2020-12-23 | 2021-04-20 | 阜阳申邦新材料技术有限公司 | 一种光刻胶组合物及其制备方法 |
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KR20000038842A (ko) * | 1998-12-09 | 2000-07-05 | 신현준 | 피복층의 접합성이 강하고 흡착능이 우수한 활성탄소 섬유의 제조방법 |
KR20030069337A (ko) * | 2002-02-20 | 2003-08-27 | 한국화학연구원 | 무기 섬유를 이용한 활성탄소체 섬유의 제조방법 |
CN104497246A (zh) * | 2014-12-16 | 2015-04-08 | 山东圣泉新材料股份有限公司 | 一种阻燃湿帘用酚醛树脂及制备方法 |
CN112684661A (zh) * | 2020-12-23 | 2021-04-20 | 阜阳申邦新材料技术有限公司 | 一种光刻胶组合物及其制备方法 |
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