CN1156673C - 检查结果输出装置及基板检查系统 - Google Patents

检查结果输出装置及基板检查系统 Download PDF

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Publication number
CN1156673C
CN1156673C CNB001064975A CN00106497A CN1156673C CN 1156673 C CN1156673 C CN 1156673C CN B001064975 A CNB001064975 A CN B001064975A CN 00106497 A CN00106497 A CN 00106497A CN 1156673 C CN1156673 C CN 1156673C
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CN
China
Prior art keywords
defective
check result
arrangenent diagram
result output
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB001064975A
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English (en)
Chinese (zh)
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CN1282865A (zh
Inventor
石羽正人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
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Omron Corp
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Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Publication of CN1282865A publication Critical patent/CN1282865A/zh
Application granted granted Critical
Publication of CN1156673C publication Critical patent/CN1156673C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0266—Marks, test patterns or identification means
    • H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8858—Flaw counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/888—Marking defects

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  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Signal Processing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Supply And Installment Of Electrical Components (AREA)
CNB001064975A 1995-04-20 1996-04-19 检查结果输出装置及基板检查系统 Expired - Lifetime CN1156673C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11763995A JP3216033B2 (ja) 1995-04-20 1995-04-20 検査結果出力装置および検査結果出力方法、ならびにこの検査結果出力装置を用いた基板検査システムおよびこの検査結果出力方法を用いた基板検査方法
JP117639/1995 1995-04-20

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN96105130A Division CN1059740C (zh) 1995-04-20 1996-04-19 检查结果输出装置及基板检查系统

Publications (2)

Publication Number Publication Date
CN1282865A CN1282865A (zh) 2001-02-07
CN1156673C true CN1156673C (zh) 2004-07-07

Family

ID=14716681

Family Applications (2)

Application Number Title Priority Date Filing Date
CN96105130A Expired - Lifetime CN1059740C (zh) 1995-04-20 1996-04-19 检查结果输出装置及基板检查系统
CNB001064975A Expired - Lifetime CN1156673C (zh) 1995-04-20 1996-04-19 检查结果输出装置及基板检查系统

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN96105130A Expired - Lifetime CN1059740C (zh) 1995-04-20 1996-04-19 检查结果输出装置及基板检查系统

Country Status (4)

Country Link
JP (1) JP3216033B2 (ja)
KR (1) KR100205733B1 (ja)
CN (2) CN1059740C (ja)
TW (1) TW304230B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1862259B (zh) * 2005-05-12 2010-05-12 欧姆龙株式会社 检查基准设定装置及方法、以及工序检查装置

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19940584A1 (de) * 1999-08-26 2001-03-22 Siemens Ag Verfahren und System zum Bestücken von in einer Bestückungseinheit angeordneten Schaltungsträgern
JP4045838B2 (ja) * 2002-04-12 2008-02-13 松下電器産業株式会社 部品装着管理方法
JP3733094B2 (ja) * 2002-08-22 2006-01-11 トヨタ自動車株式会社 良否判定装置、良否判定プログラムおよび良否判定方法
JP2005227882A (ja) * 2004-02-10 2005-08-25 Mazda Motor Corp 整備情報提供システム
JP4493421B2 (ja) * 2004-06-30 2010-06-30 株式会社リコー プリント回路基板検査装置とプリント回路基板組み立て検査ラインシステムおよびプログラム
JP4541172B2 (ja) * 2005-01-28 2010-09-08 ヤマハ発動機株式会社 部品実装ラインにおける情報管理システム
JP2007081318A (ja) * 2005-09-16 2007-03-29 Omron Corp 検査結果出力方法、検査結果出力装置、検査結果出力用プログラム、および検査結果出力用プログラムを記録した記録媒体
KR20090008185A (ko) * 2006-05-15 2009-01-21 가부시키가이샤 니콘 표면 검사 장치
JP2008186879A (ja) * 2007-01-29 2008-08-14 Omron Corp 基板検査方法
JP2009036736A (ja) * 2007-08-04 2009-02-19 Djtech Co Ltd 印刷半田検査方法及び装置
US8285028B2 (en) * 2007-09-28 2012-10-09 Panasonic Corporation Inspection apparatus and inspection method
DE102007049702A1 (de) * 2007-10-17 2009-04-23 Robert Bosch Gmbh Pickerstrasse
JP5400342B2 (ja) 2008-10-01 2014-01-29 キヤノン株式会社 情報処理装置、その表示方法及びプログラム
JP5284767B2 (ja) * 2008-12-03 2013-09-11 東海旅客鉄道株式会社 車両台車油量検査システム
CN101477063B (zh) * 2009-01-22 2011-02-16 北京星河泰视特科技有限公司 印刷电路板的检测方法及光学检测仪
JP5065329B2 (ja) * 2009-05-12 2012-10-31 ヴィスコ・テクノロジーズ株式会社 形状検査装置および形状検査プログラム
US10260996B2 (en) * 2014-02-03 2019-04-16 Fuji Corporation Board production monitoring device and board production monitoring method
JP6652327B2 (ja) * 2015-04-17 2020-02-19 株式会社フジタ 検査対象物の状態評価装置
KR101619721B1 (ko) * 2015-11-25 2016-05-11 주식회사 케이엔케이 Pcb 검사 장치
JP6673268B2 (ja) * 2017-03-14 2020-03-25 オムロン株式会社 管理装置、管理装置の制御方法、情報処理プログラム、および記録媒体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1862259B (zh) * 2005-05-12 2010-05-12 欧姆龙株式会社 检查基准设定装置及方法、以及工序检查装置

Also Published As

Publication number Publication date
TW304230B (ja) 1997-05-01
CN1282865A (zh) 2001-02-07
KR100205733B1 (ko) 1999-07-01
JP3216033B2 (ja) 2001-10-09
KR960040114A (ko) 1996-11-25
CN1151519A (zh) 1997-06-11
CN1059740C (zh) 2000-12-20
JPH08292018A (ja) 1996-11-05

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