CN115656183A - Defect detection device of chip - Google Patents
Defect detection device of chip Download PDFInfo
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- CN115656183A CN115656183A CN202211344936.7A CN202211344936A CN115656183A CN 115656183 A CN115656183 A CN 115656183A CN 202211344936 A CN202211344936 A CN 202211344936A CN 115656183 A CN115656183 A CN 115656183A
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Abstract
The invention belongs to the technical field of detection equipment, and particularly relates to a chip defect detection device, which can automatically convey chips and keep the conveying stability of the chips when detecting the defects of the chips by arranging and matching a conveying mechanism and a carrying mechanism, so that the chip defect detection device is suitable for fixing the chips with different sizes in different batches, and the requirement of efficient production detection is met; further setting through the upset subassembly can be in chip automatically move detects for the chip reachs automatic upset behind the assigned position, so that detect the another side of camera to the chip and detect, need not the secondary and detect, further improve the convenience, and through the further cooperation of break-make subassembly, can detect the completion back to the chip, carry out automatic classification according to the defect that the chip exists and unload, reduce the loaded down with trivial details step improvement continuity and the smoothness nature of production.
Description
Technical Field
The invention belongs to the technical field of detection equipment, and particularly relates to a chip defect detection device.
Background
With the development of science and technology, more advanced intelligence is applied to devices used in production activities and daily life, and particularly with the development of computer technology, an intelligent control terminal using a computer as a device has become mainstream, and a chip as an important control component of an intelligent device has been increasingly demanded.
At present in the chip production link, all can set up the one deck encapsulation in order to protect its inside circuit outside and be used for the protection, the model of the chip is distinguished for the convenience of the while, the encapsulation outside also can print corresponding character as the foundation, in order to ensure the quality of chip, then need detect the encapsulation of chip and printing character, the most traditional detection mode adopts artifical the detection usually, but not only inefficiency and quality are difficult to ensure like this, and adopt machine vision to detect gradually at present, but its continuity is not high in the testing process, can't satisfy high-efficient, stable detection needs.
Disclosure of Invention
The purpose of the invention is: the purpose is to provide a chip defect detection device, which is used for solving the problems mentioned in the background technology.
In order to achieve the technical purpose, the technical scheme adopted by the invention is as follows:
a chip defect detection device comprises a conveying mechanism, a control panel and a detection camera, wherein the conveying mechanism comprises a machine body, a motor, a gear and an accessory chain, and a plurality of groups of carrying mechanisms are arranged on the accessory chain;
the carrying mechanism comprises a support plate, a clamping assembly and an adsorption assembly, the support plate is connected with the accessory chain through a connecting lug, the clamping mechanism is arranged at the upper end of the support plate, and the adsorption assembly is arranged among the support plate, the support plate and the machine body;
the clamping assembly consists of four clamping devices which are distributed at the upper end of the carrier plate in a rectangular manner, each clamping device comprises a spring type electromagnetic valve and a clamping block, a movable groove matched with the clamping device is formed at the upper end of the carrier plate, the spring type electromagnetic valve is embedded in the carrier plate, an output shaft of the spring type electromagnetic valve extends into the movable groove in a sliding manner, and the clamping block is arranged in the movable groove in a sliding manner and connected with the output shaft of the spring type electromagnetic valve;
the adsorption component comprises an air suction rod and a ring suction device, an air suction channel is formed in the carrier plate, a plurality of adsorption holes communicated with the air suction channel are uniformly formed in the upper end of the carrier plate, the ring suction device is arranged on the side face of the machine body, the air suction rod is fixedly connected with the connecting lug and communicated with the air suction channel, and the other end of the air suction rod is communicated with the ring suction device.
The annular suction device comprises an annular plate and an annular rubber belt, the annular plate is fixedly connected with the side face of the machine body and communicated with an external vacuum suction mechanism, the vertical section of the annular plate is of a U-shaped structure, the annular rubber belt is the same as the opening of the annular plate and is in sliding sealing connection with the opening to form an inner cavity, the air suction rods of the adsorption assemblies are connected with the annular rubber belt and are communicated with the inner cavity of the annular plate, and the annular rubber belt is connected with the accessory chain; thus, the normal movement of the components is not affected while the vacuum suction environment is effectively formed.
The carrier plate is also provided with a turnover assembly, the carrier plate is rotatably connected with the connecting lug, the turnover assembly comprises a spring coiling box, an extension shaft and a driver, a rotating shaft of the carrier plate is connected with the extension shaft, the spring coiling box is arranged on the extension shaft and fixedly connected with the connecting lug, the driver is fixedly connected with the other end of the extension shaft, a rack matched with the driver is arranged on the side surface of the machine body, and the position of the rack is matched with that of the detection camera; therefore, the other side of the chip can be detected more conveniently, and the purpose of improving the detection efficiency is achieved.
The driver comprises an outer wheel, a plurality of meshing teeth and a plurality of elastic telescopic rods, the outer wheel is concentrically and fixedly connected with the extension shaft, an annular cavity is formed in the outer wheel, the elastic telescopic rods are uniformly arranged in the annular cavity, and the meshing teeth and the elastic telescopic rods are connected in a one-to-one correspondence manner and extend out of the annular cavity in a sliding manner; this enables to keep the carrier plate position constant and not to influence the movement of the components while normally driving the carrier plate.
The connecting lug is provided with a limiting strip parallel to the ground, and the carrier plate is provided with a barrier strip matched with the limiting strip; this enables the range of positional movement of the carrier plate to be defined.
The carrying mechanism further comprises an on-off component matched with the carrier plate, the on-off component comprises two conducting strips and an on-off rod, the two conducting strips are arranged on one side, away from the driver, of the carrier plate, the plurality of clamping devices are electrically connected with the conducting strips, a conducting groove matched with the detection camera is formed in the upper end of the machine body, the on-off rod comprises a rod body and a plug body, a transverse groove communicated with the air suction channel is formed in the movable groove close to one side of the adsorption component, the rod body is connected with the clamping blocks and extends into the transverse groove, the plug body is connected with the rod body and is in sliding sealing connection with the transverse groove, the length of the rod body is matched with the minimum contraction length of the spring type electromagnetic valve, namely when the spring type electromagnetic valve contracts, the plug body cuts off the connection between the air suction rod and the air suction channel; therefore, after the detection of the chips is completed, the automatic blanking of the corresponding chips is effectively controlled.
The number of the detection cameras can be two, the two detection cameras are arranged on the upper side of the machine body at intervals through an external support, the machine body is further provided with two guide inclined plates, the second detection camera corresponds to the first guide inclined plate relative to the conveying direction of the conveying mechanism, and the length of the rack is larger than the distance between the first detection camera and the last guide inclined plate; therefore, the control and detection requirements of the components can be more conveniently and stably carried out.
The number and the positions of the conductive grooves arranged on the machine body correspond to those of the detection cameras; this ensures a stable control of the electrical control components on the carrier plate.
Relative to the conveying direction of the conveying mechanism, the head part on the upper side of the machine body is also provided with a balance plate matched with the carrier plate; therefore, the stability during feeding can be improved.
Compared with the prior art, the invention at least has the following advantages:
through the arrangement and the matching of the conveying mechanism and the carrying mechanism, when the chip is subjected to defect detection, the chip can be automatically conveyed and the conveying stability of the chip can be kept, so that the chip fixing requirements of different sizes in different batches are met, and the requirement of efficient production detection is met; further setting through the upset subassembly can be in chip automatically move detects for the chip reachs automatic upset behind the assigned position, so that detect the another side of camera to the chip and detect, need not the secondary and detect, further improve the convenience, and through the further cooperation of break-make subassembly, can detect the completion back to the chip, carry out automatic classification according to the defect that the chip exists and unload, reduce the loaded down with trivial details step improvement continuity and the smoothness nature of production.
Drawings
The invention is further illustrated by the non-limiting examples given in the figures.
Fig. 1 is a schematic structural diagram of a defect detection apparatus for a chip according to the present invention.
Fig. 2 is another angle structure diagram of the present invention.
Fig. 3 is an enlarged schematic view of a portion a of fig. 1.
Fig. 4 is a schematic structural view of the mounting mechanism of the present invention.
Fig. 5 is a plan structure sectional view of the mounting mechanism of the present invention.
Fig. 6 is a vertical cross-sectional view of the mounting mechanism of the present invention.
Fig. 7 is an enlarged schematic view at B in fig. 6.
FIG. 8 is a structural cross-sectional view of the actuator of the present invention.
FIG. 9 is a schematic view of the structure of the ring suction device of the present invention.
The detection camera comprises a detection camera 1, a machine body 11, a motor 12, a gear 13, an accessory chain 14, a carrier plate 2, a spring type electromagnetic valve 21, a clamping block 22, a movable groove 23, an air suction rod 3, an air suction channel 31, an adsorption hole 32, an annular plate 33, an annular rubber belt 34, a coil spring box 4, an extension shaft 41, a rack 42, an outer wheel 5, meshing teeth 51, an elastic telescopic rod 52, an annular cavity 53, a conducting strip 6, a conducting groove 61, a rod body 62, a plug body 63, a transverse groove 64 and a guide inclined plate 7.
Detailed Description
In order that those skilled in the art can better understand the present invention, the following technical solutions are further described with reference to the accompanying drawings and examples.
The first embodiment is as follows:
as shown in fig. 1-9, a chip defect detection device comprises a transmission mechanism, a control panel and a detection camera 1, wherein the transmission mechanism comprises a machine body 11, a motor 12, a gear 13 and an accessory chain 14, and a plurality of groups of carrying mechanisms are arranged on the accessory chain 14;
the carrying mechanism comprises a carrier plate 2, a clamping component and an adsorption component, wherein the carrier plate 2 is connected with the accessory chain 14 through a connecting lug, the clamping mechanism is arranged at the upper end of the carrier plate 2, and the adsorption component is arranged among the carrier plate 2, the carrier plate 2 and the machine body 11;
the clamping assembly consists of four clamping devices which are distributed at the upper end of the carrier plate 2 in a rectangular shape, each clamping device comprises a spring type electromagnetic valve 21 and a clamping block 22, the upper end of the carrier plate 2 is provided with a movable groove 23 matched with the clamping device, the spring type electromagnetic valve 21 is embedded in the carrier plate 2, an output shaft extends into the movable groove 23 in a sliding manner, and the clamping block 22 is arranged in the movable groove 23 in a sliding manner and connected with the output shaft of the spring type electromagnetic valve 21;
the adsorption component comprises an air suction rod 3 and a ring suction device, an air suction channel 31 is formed in the carrier plate 2, a plurality of adsorption holes 32 communicated with the air suction channel 31 are uniformly formed in the upper end of the carrier plate 2, the ring suction device is arranged on the side surface of the machine body 11, the air suction rod 3 is fixedly connected with the connecting lug and communicated with the air suction channel 31, and the other end of the air suction rod 3 is communicated with the ring suction device.
When characters printed outside the chip are detected, a motor 12 in the conveying mechanism provides conveying power for the device, a machine body 11 serves as a support of the device, a gear 13 and an accessory chain 14 form a wheel type winding conveying structure, the principle of the wheel type winding conveying structure is the same as that of a belt conveyor, and after the device is started, the motor 12 is opened and closed at intervals, so that the accessory chain 14 intermittently and equidistantly moves;
when the device is started to perform detection operation, a manual or external mechanical arm is positioned at the conveying end of the conveying mechanism, then when the conveying mechanism stops at intervals, a chip to be detected is placed on the carrier plate 2 of the carrying mechanism, and is fixed through the clamping component and the adsorption component, so that the stability of the position of the chip and the stability of detection are ensured, when the chip to be detected is placed on the carrier plate 2, the clamping component receives downward extrusion force of the chip, the spring type electromagnetic valve 21 actively extends out in an initial state, so that the clamping block 22 is kept to move towards the middle part of the carrier plate 2, the spring type electromagnetic valve 21 can be manually pressed, stretched and automatically reset under the condition of not being electrified, the spring type electromagnetic valve 21 belongs to the conventional common technology, redundant structural description is not needed, the clamping block 22 has certain flexibility under the action of the spring type electromagnetic valve 21, so that the clamping stability requirements of parts of chips with different sizes can be met, the vacuum suction action of the external ring suction device is matched, the suction rod 3 is used for sucking the suction channel 31 of the carrier plate 2, so that the adsorption hole 32 on the carrier plate 2 generates negative pressure, and the chip can be further stably detected;
along with transport mechanism's transport, chip on a plurality of support plates 2 also will be carried to detecting camera 1 in succession, through detecting camera 1 to the detection on chip surface, then can judge whether chip surface has the condition such as the disappearance of defect or printing character, stained, at the transport end afterbody of device at last, through artifical or arm sort can, such detection mode continuity is high, compare in traditional artifical naked eye observation, improvement production efficiency that can be very big, and ensure the degree of accuracy that detects.
The annular suction device comprises an annular plate 33 and an annular rubber belt 34, the annular plate 33 is fixedly connected with the side face of the machine body 11 and communicated with an external vacuum suction mechanism, the vertical section of the annular plate 33 is of a U-shaped structure, the annular rubber belt 34 is identical to the opening of the annular plate 33 and is connected with the opening in a sliding and sealing mode to form an inner cavity, the suction rods 3 of the adsorption components are connected with the annular rubber belt 34 and communicated with the inner cavity of the annular plate 33, and the annular rubber belt 34 is connected with the accessory chain 14.
The annular plate 33 cooperates with the annular rubber belt 34, can make the annular plate 33 form a relatively airtight space, cooperation outside vacuum suction mechanism can reach the effect of assisting pressure suction, and the pole 3 that inhales of a plurality of support plates 2 passes annular rubber belt 34 again and stretches into the inner chamber, then can carry out negative pressure suction in the suction channel 31 of support plate 2, and because annular rubber belt 34 and annular plate 33 sliding seal connect, consequently under the drive effect of the pole 3 that inhales of annex chain 14 and a plurality of support plates 2, annular rubber belt 34 will move at the opening part of annular plate 33, and then satisfy the continuous endless conveyor's support plate 2 and assist pressure suction needs.
Relative to the conveying direction of the conveying mechanism, the head part of the upper side of the machine body 11 is also provided with a balance plate matched with the carrier plate 2; the setting of balance plate can improve artifical or outside arm 2 when placing the chip and receive pressure, improve stability, corresponding department of unloading also can set up corresponding balance plate in order to reach same effect.
The second embodiment:
as shown in fig. 1-2, fig. 4 and fig. 8, in a further improvement based on the first embodiment, the carrier plate 2 is further provided with a flip assembly, the carrier plate 2 is rotatably connected with the connecting lug, the flip assembly includes a spring case 4, an extension shaft 41 and a driver, a rotating shaft of the carrier plate 2 is connected with the extension shaft 41, the spring case 4 is arranged on the extension shaft 41 and fixedly connected with the connecting lug, the driver is fixedly connected with the other end of the extension shaft 41, a rack 42 matched with the driver is arranged on the side surface of the machine body 11, and the position of the rack 42 is matched with the position of the detection camera 1; the driver comprises an outer wheel 5, a plurality of meshing teeth 51 and a plurality of elastic telescopic rods 52, wherein the outer wheel 5 is concentrically and fixedly connected with the extension shaft 41, an annular cavity 53 is formed in the outer wheel 5, the elastic telescopic rods 52 are uniformly arranged in the annular cavity 53, and the meshing teeth 51 and the elastic telescopic rods 52 are correspondingly connected one by one and slidably extend out of the annular cavity 53; the connecting lug is provided with a limiting strip parallel to the ground, and the support plate 2 is provided with a barrier strip matched with the limiting strip.
In order to further improve the detection efficiency and effect and achieve the purpose of rapidly and conveniently detecting the front and back surfaces of the chip at the same time, in a static state in the conveying process of the carrier plate 2, because the effect of the coil spring box 4 is matched with the arrangement of the limiting strip and the barrier strip, the state that the upper end of the carrier plate 2 faces upwards and is parallel to the ground is maintained, and the requirement of a preparation stage is further met, the carrier plate 2 passes through the first detection camera 1 along with the continuous movement of the carrier plate 2, so that the scanning detection is carried out on the upper end surface of the chip at the upper end of the carrier plate 2, but the driver is meshed and matched with the rack 42 along with the continuous movement of the carrier plate 2, at the moment, a plurality of meshed teeth 51 on the outer wheel 5 are matched and driven with the gear 13, so that the outer wheel 5 rotates and drives the extension shaft 41 to rotate, so that the carrier plate 2 generates the overturning action, and the chip still receives the fixing effect of the clamping assembly and the adsorption assembly in the process, so that the stability of the chip can be still maintained after the carrier plate 2 rotates;
because the position of the limiting strip and the position of the blocking strip are further matched, the carrier plate 2 cannot continuously rotate after being turned over by 180 degrees, namely, the carrier plate 2 is kept in a state that the back face of the carrier plate faces upwards, and the whole carrier plate 2 and the clamping assembly are made of transparent plastics, the shielding influence on the chip can be reduced, so that the back face of the chip can be scanned and detected through the detection camera 1, the detection efficiency is improved without secondary detection, the chip placement is not required to be required deliberately in a preparation stage, along with the continuous movement of the carrier plate 2, in order to keep the carrier plate 2 in a turn-over state for a certain time, the length of the rack 42 can be adaptively prolonged, and the arrangement of the elastic telescopic rod 52 is matched, wherein the elastic force of the elastic telescopic rod 52 is greater than the winding force of the coil spring box 4, so that under the continuous movement of the carrier plate 2, the meshing teeth 51 can be blocked by the rack 42 and then retract into the annular cavity 53, and under the condition that the movement of the carrier plate 2 is not influenced, the turn-over state of the carrier plate 2 can still be kept, and the driver can be automatically reset through the coil spring box 4 after being separated from the rack 42, thereby further improving the detection effect and the detection efficiency.
Example three:
as shown in fig. 3 and 5-7, a further improvement on the first embodiment is that the carrying mechanism further includes an on-off assembly matched with the carrier plate 2, the on-off assembly includes two conductive sheets 6 and an on-off rod, the two conductive sheets 6 are both disposed on the side of the carrier plate 2 away from the driver, the plurality of holders are electrically connected to the conductive sheets 6, the upper end of the body 11 is provided with a conductive slot 61 matched with the detection camera 1, the on-off rod includes a rod body 62 and a plug body 63, the movable slot 23 near one side of the adsorption assembly is provided with a transverse slot 64 communicated with the air suction channel 31, the rod body 62 is connected to the clamp block 22 and extends into the transverse slot 64, the plug body 63 is connected to the rod body 62 and is connected to the transverse slot 64 in a sliding and sealing manner, the length of the rod body 62 is matched with the minimum contraction length of the spring-type solenoid valve 21, that is, when the spring-type solenoid valve 21 contracts, the plug body 63 cuts off the connection between the air suction rod 3 and the air suction channel 31; the number of the detection cameras 1 can be two, the two detection cameras 1 are arranged on the upper side of the machine body 11 at intervals through an external support, the machine body 11 is also provided with two guide inclined plates 7, relative to the conveying direction of the conveying mechanism, the second detection camera 1 corresponds to the first guide inclined plate 7, and the length of the rack 42 is larger than the distance between the first detection camera 1 and the last guide inclined plate 7; the number and positions of the conductive grooves 61 arranged on the body 11 correspond to those of the detection camera 1.
In order to improve the unloading convenience of finished detection and the chip classification requirements of different defects, after each end face of a chip is detected, if the upper end face of the chip is detected, a conductive groove 61 corresponding to one guide inclined plate 7 is electrified, a corresponding conductive sheet 6 is gradually contacted with the conductive groove 61 along with the movement of the carrier plate 2, so that a spring type electromagnetic valve 21 on the carrier plate 2 is electrified, the spring type electromagnetic valve 21 is electrified to drive an output shaft to contract, and further a connected clamping block 22 moves towards the middle part far away from the carrier plate 2, at the moment, a clamping component loses the clamping stabilizing effect on the chip, further, when the clamping block 22 connected with an on-off rod moves, the clamping block 22 drives a rod body 62 to move and push a plug body 63, until the plug body 63 cuts off the connection between the air suction rod 3 and the air suction channel 31, so that the adsorption force of a plurality of adsorption holes 32 is lost, and the whole carrier plate 2 loses the clamping adsorption control on the chip, and the chip unloading effect is achieved, wherein the first guide inclined plate 7 plays a role in collecting the chip surface and the defect-free second guide inclined plate 7;
further still can add a guide swash plate 7, a set of electrically conductive groove 61 again, through the cooperation that detects camera 1 and control panel, can further carry out further classification to chip surface in having the defect, printing character defect or encapsulation appearance defect, reach accurate classification, improve production efficiency, reduce the production degree of difficulty and further improve the effect that detects the continuity.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (9)
1. The utility model provides a defect detecting device of chip, includes transport mechanism, control panel and detection camera, transport mechanism includes organism, motor, gear and annex chain, its characterized in that: the accessory chain is provided with a plurality of groups of carrying mechanisms;
the carrying mechanism comprises a support plate, a clamping assembly and an adsorption assembly, the support plate is connected with the accessory chain through a connecting lug, the clamping mechanism is arranged at the upper end of the support plate, and the adsorption assembly is arranged among the support plate, the support plate and the machine body;
the clamping assembly consists of four clamping devices which are distributed at the upper end of the carrier plate in a rectangular manner, each clamping device comprises a spring type electromagnetic valve and a clamping block, a movable groove matched with the clamping device is formed at the upper end of the carrier plate, the spring type electromagnetic valve is embedded in the carrier plate, an output shaft of the spring type electromagnetic valve extends into the movable groove in a sliding manner, and the clamping block is arranged in the movable groove in a sliding manner and connected with the output shaft of the spring type electromagnetic valve;
the adsorption component comprises an air suction rod and a ring suction device, an air suction channel is formed in the carrier plate, a plurality of adsorption holes communicated with the air suction channel are uniformly formed in the upper end of the carrier plate, the ring suction device is arranged on the side surface of the machine body, the air suction rod is fixedly connected with the connecting lug and communicated with the air suction channel, and the other end of the air suction rod is communicated with the ring suction device.
2. The apparatus for detecting defects of a chip according to claim 1, wherein: the ring aspirator includes annular slab and annular rubber area, the annular slab with organism side fixed connection and with outside vacuum suction mechanism intercommunication, the U-shaped structure is personally submitted in the annular slab perpendicular section, the annular rubber area with the opening of annular slab is the same and forms the inner chamber with opening sliding seal and connecting, and is a plurality of adsorption component's the pole of breathing in with the annular rubber area connect and with the inner chamber intercommunication of annular slab, the annular rubber area with the annex chain is connected.
3. The apparatus for detecting defects of a chip according to claim 2, wherein: the carrier plate still is equipped with the upset subassembly, the carrier plate with the engaging lug is for rotating the connection, the upset subassembly includes spring coil box, extension axle and actuator, the pivot of carrier plate with the extension hub connection, spring coil box locate the extension axle and with engaging lug fixed connection, the actuator with extension axle other end fixed connection, the organism side be equipped with actuator assorted rack, the rack position with detect camera position phase-match.
4. The apparatus for detecting defects of a chip according to claim 3, wherein: the driver comprises an outer wheel, a plurality of meshing teeth and a plurality of elastic telescopic rods, the outer wheel is concentrically and fixedly connected with the extension shaft, an annular cavity is formed in the outer wheel, the elastic telescopic rods are uniformly arranged in the annular cavity, and the meshing teeth and the elastic telescopic rods are connected in a one-to-one correspondence mode and extend out of the annular cavity in a sliding mode.
5. The apparatus for detecting defects of a chip according to claim 4, wherein: the engaging lug is provided with a limiting strip parallel to the ground, and the carrier plate is provided with a barrier strip matched with the limiting strip.
6. The apparatus for detecting defects of a chip according to claim 5, wherein: the carrying mechanism further comprises an on-off component matched with the support plate, the on-off component comprises two conducting strips and an on-off rod, the two conducting strips are arranged on the support plate and are far away from one side of the driver, the plurality of holders are electrically connected with the conducting strips, the upper end of the machine body is provided with a conducting groove matched with the detection camera, the on-off rod comprises a rod body and a plug body, the moving groove close to one side of the adsorption component is provided with a transverse groove communicated with the air suction channel, the rod body is connected with the clamping block and extends into the transverse groove, the plug body is connected with the rod body and is connected with the transverse groove in a sliding sealing mode, the length of the rod body is matched with the minimum shrinkage length of the spring type electromagnetic valve, namely when the spring type electromagnetic valve shrinks, the plug body cuts off the air suction rod and the connection between the air suction channels.
7. The apparatus for detecting defects of a chip according to claim 6, wherein: the quantity that detects the camera can be two, two it locates through the outer support interval to detect the camera the organism upside, the organism still is equipped with two guide swash plates, for transport mechanism's direction of delivery, the second it corresponds with first guide swash plate to detect the camera, the length of rack is greater than first detect the camera to the interval between the last guide swash plate.
8. The apparatus for detecting defects of a chip according to claim 7, wherein: the number and the positions of the conductive grooves on the machine body correspond to those of the detection cameras.
9. The apparatus for detecting defects of a chip according to claim 8, wherein: and relative to the conveying direction of the conveying mechanism, the head part on the upper side of the machine body is also provided with a balance plate matched with the carrier plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211344936.7A CN115656183A (en) | 2022-10-31 | 2022-10-31 | Defect detection device of chip |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211344936.7A CN115656183A (en) | 2022-10-31 | 2022-10-31 | Defect detection device of chip |
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| CN115656183A true CN115656183A (en) | 2023-01-31 |
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| CN202211344936.7A Pending CN115656183A (en) | 2022-10-31 | 2022-10-31 | Defect detection device of chip |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117133690A (en) * | 2023-10-25 | 2023-11-28 | 沈阳和研科技股份有限公司 | Full-automatic cutting and sorting integrated dicing saw |
| CN117405684A (en) * | 2023-12-12 | 2024-01-16 | 深圳市天地通电子有限公司 | Detection equipment for MEMS gas sensor module production |
| CN117548360A (en) * | 2024-01-12 | 2024-02-13 | 中国传媒大学 | Image feature recognition method and device |
-
2022
- 2022-10-31 CN CN202211344936.7A patent/CN115656183A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117133690A (en) * | 2023-10-25 | 2023-11-28 | 沈阳和研科技股份有限公司 | Full-automatic cutting and sorting integrated dicing saw |
| CN117133690B (en) * | 2023-10-25 | 2024-01-19 | 沈阳和研科技股份有限公司 | Full-automatic cutting and sorting integrated dicing saw |
| CN117405684A (en) * | 2023-12-12 | 2024-01-16 | 深圳市天地通电子有限公司 | Detection equipment for MEMS gas sensor module production |
| CN117405684B (en) * | 2023-12-12 | 2024-02-27 | 深圳市天地通电子有限公司 | Detection equipment for MEMS gas sensor module production |
| CN117548360A (en) * | 2024-01-12 | 2024-02-13 | 中国传媒大学 | Image feature recognition method and device |
| CN117548360B (en) * | 2024-01-12 | 2024-03-26 | 中国传媒大学 | Image feature recognition method and device |
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