CN115571548A

CN115571548A - Substrate wet-method conveying device

Info

Publication number: CN115571548A
Application number: CN202211181485.XA
Authority: CN
Inventors: 姚森; 廖宝臣; 王亨
Original assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Current assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Priority date: 2022-09-27
Filing date: 2022-09-27
Publication date: 2023-01-06

Abstract

The invention provides a substrate wet conveying device. The substrate wet conveying device conveys the substrate through the front conveying roller, the middle conveying roller and the rear conveying roller under the action of the driving mechanism, and the first tangent point and the second tangent point are arranged on the middle conveying roller, and the distance between the first tangent point and the second tangent point and the axis of the middle conveying roller is different, so that the included angle between the substrate and the horizontal plane can be adjusted along with the advancing of the substrate in the conveying process, the substrate on the conveying roller can smoothly shake, the height difference of the water film surface of the substrate is manufactured, the water film can reciprocate on the substrate by means of the gravity of the water film, and the water film on the substrate can be automatically and uniformly paved and aged. The application discloses conveyor simple structure, the water film roughness after spreading old is high, and equipment structure not with substrate surface contact, can not destroy the water film on the substrate, solve among the prior art substrate transport structure complicated, at the bottom of the water film roughness, and destroy the problem of water film easily.

Description

Substrate wet-method conveying device

Technical Field

The invention relates to the technical field of conveying equipment, in particular to a substrate wet conveying device.

Background

In the production and processing process of the substrate, the surface of the substrate needs to be subjected to water film paving, and the paving water film in the prior art usually adopts modes such as coating, air flow blowing and the like.

The method comprises the following steps that water film spreading and coating are carried out on a substrate in a coating and scraping mode, flatness and pressure between the substrate and a coating and scraping surface need to be controlled, and the conveying speed of the substrate needs to be controlled; the water film paving by the air flow blowing mode needs to control the air flow area and the air flow size, and the air flow is required to be controlled to have extremely small variable in relative time. Through the two modes, on one hand, the requirement on the mechanical structure is high, and on the other hand, the planeness of the paved and aged water film is low.

In addition, the surface water film structure may be directly affected if the structure in the apparatus contacts the surface of the substrate, or the substrate structure may be damaged.

Therefore, it is necessary to design a conveying device which has a simple structure, a flat and high paved water film and does not contact the surface of the water film.

Disclosure of Invention

The invention aims to provide a substrate wet conveying device, which is used for solving the problems that the substrate conveying structure is complex, the water film is low in flatness and the water film is easy to damage in the prior art.

In order to achieve the aim, the invention provides a substrate wet conveying device which comprises a front conveying roller, an intermediate conveying roller, a rear conveying roller and a driving mechanism, wherein the front conveying roller is arranged on the front conveying roller; the interval conveying roller is arranged between the front conveying roller and the rear conveying roller, the driving mechanism is connected with the front conveying roller, the interval conveying roller and the rear conveying roller, the driving mechanism is used for driving the front conveying roller, the interval conveying roller and the rear conveying roller to rotate, and the driving mechanism is used for conveying substrates along the direction from the front conveying roller to the rear conveying roller; the cross section of the interval conveying roller is provided with a first tangent point and a second tangent point, and the distance between the first tangent point and the axis of the interval conveying roller is smaller than or larger than the distance between the second tangent point and the axis of the interval conveying roller.

The substrate wet conveying device has the beneficial effects that: the substrate is conveyed by the front conveying roller, the interval conveying roller and the rear conveying roller under the action of the driving mechanism, the first tangent point and the second tangent point are arranged on the interval conveying roller, and the distance between the first tangent point and the second tangent point and the axis of the interval conveying roller is different, so that the included angle between the substrate and the horizontal plane can be adjusted along with the advancing of the substrate in the conveying process, the substrate on the conveying roller can smoothly shake, the height difference of the water film surface of the substrate is manufactured, the water film can reciprocate on the substrate by means of the gravity of the water film, and the water film on the substrate can be automatically and uniformly laid. The conveying device is simple in structure, the flatness of the water film after being laid is high, the equipment structure is not in surface contact with the upper surface of the substrate, the water film on the substrate cannot be damaged, and the problems that the substrate conveying structure is complex, the flatness of the water film is low, and the water film is easy to damage in the prior art are solved.

In a possible embodiment, a plane on which the outer tangent of the front conveyor roller and the rear conveyor roller is located is a first plane, a distance from the first tangent point to the axis of the intermediate conveyor roller is greater than a distance from the intermediate conveyor roller to the first plane, and a distance from the second tangent point to the axis of the intermediate conveyor roller is less than or equal to the distance from the intermediate conveyor roller to the first plane. The beneficial effects are that: the distance between the first tangent point and the axis is set to be larger than the distance between the conveying roller and the first plane, and the distance between the second tangent point and the axis is set to be smaller than the distance between the conveying roller and the first plane, so that the substrates have the processes of bending down and bending up in the conveying process, the angle change range of the substrates in the conveying process is enlarged, and the water film on the substrates is more uniform.

In a possible embodiment, the front conveyor roller and the rear conveyor roller have different diameters. The beneficial effects are that: the arrangement is such that the conveying speeds of the substrates on the front conveying roller and the rear conveying roller are different, so that the speed difference caused by the action of different tangent points of the two conveying rollers on the substrates can be conveniently adapted.

In one possible embodiment, the front conveyor roller, the intermediate conveyor roller and the rear conveyor roller are disposed on the same plane. The beneficial effects are that: this arrangement facilitates the arrangement and driving of the respective conveying rollers.

In a possible embodiment, the intermediate transport roller is provided with an arc-shaped surface section and a plane section, both of which are used for supporting the substrate. The beneficial effects are that: the arc-shaped section and the plane section are arranged, so that the change of the angle between the substrate and the horizontal plane in the conveying process is changed in different speeds, and the shake of water on the substrate is increased.

In a possible embodiment, the cross section of the interval conveying roller is in a kidney-shaped hole shape or a circular cam shape.

In one possible embodiment, the distance between the front transport roller and the intermediate transport roller is smaller than the distance between the intermediate transport roller and the rear transport roller. The beneficial effects are that: the arrangement can advance the time point of the change of the substrate angle under the condition that the distance between the front conveying roller and the rear conveying roller is not changed, and relatively increase the process of the change of the substrate angle.

In a possible embodiment, the intermediate transport rollers are provided in at least two. The beneficial effects are that: the interval conveying rollers are arranged into at least two rollers, so that the diversity of angle changes in the substrate conveying process can be improved.

In a possible embodiment, the device further comprises a fixing frame; preceding conveying roller with back conveying roller all fixed set up in the mount, the conveying roller activity set up in the mount. The beneficial effects are that: the arrangement is convenient for adjusting the distance between the middle conveying roller and the front conveying roller, and the angle change range can be adjusted.

In a possible embodiment, the device further comprises an elastic piece; the elastic piece is arranged between the conveying roller and the fixing frame. The beneficial effects are that: the elastic piece is arranged, so that when the angle of the substrate on the conveying roller changes suddenly, the impact between the substrate and the conveying roller is relieved through the elastic piece, and the possibility of damaging the substrate is reduced.

In a possible embodiment, it also comprises oblique delivery rollers; the oblique conveying roller is arranged between the front conveying roller and the rear conveying roller, the front conveying roller is horizontally arranged, the oblique conveying roller is obliquely arranged relative to a horizontal plane, the driving mechanism is connected with the oblique conveying roller, and the driving mechanism is used for driving the oblique conveying roller to rotate. The beneficial effects are that: the inclined conveying rollers are arranged, so that the substrate can be inclined along the axial direction of the inclined conveying rollers when moving onto the inclined conveying rollers, and the water on the substrate can be subjected to acting forces in two nonparallel directions under the action of the conveying rollers between the inclined conveying rollers, so that the water film on the substrate is uniform.

In a possible embodiment, the oblique conveying rollers are provided in at least two, and the inclination direction of at least one of the oblique conveying rollers is opposite to the inclination direction of at least one of the oblique conveying rollers. The beneficial effects are that: the inclined directions of at least two inclined conveying rollers are reversely arranged, so that the moisture on the substrate can be automatically paved along the two opposite directions.

In a possible embodiment, the inclined conveying rollers are provided in a plurality, and the included angle between each inclined conveying roller and the horizontal plane gradually increases and then gradually decreases. The beneficial effects are that: therefore, the substrate is conveyed by the inclined conveying roller with smooth angle change, and the water film on the substrate is promoted to be more uniform.

In a possible embodiment, at least one of the front conveyor roller, the intermediate conveyor roller and the rear conveyor roller is provided with a flexible layer. The beneficial effects are that: stress when can reducing substrate and conveying roller initial contact on the one hand avoids damaging the substrate, and on the other hand can promote the area of contact between substrate and the conveying roller, promotes and carries the effort.

In a possible embodiment, the device further comprises a spraying mechanism; the spraying mechanism is arranged corresponding to the substrate conveyed by the front conveying roller or the middle conveying roller, and is used for spraying water to the substrate. The beneficial effects are that: the substrate on the conveying roller is sprayed with water through the spraying mechanism, so that the purpose of water film spreading is achieved.

In one possible embodiment, the spray mechanism includes a spray header and a water source pumping mechanism; the spray head is arranged corresponding to the substrate conveyed by the front conveying roller or the middle conveying roller, the water source pumping mechanism is communicated with the spray head, the water source pumping mechanism is used for supplying water to the spray head, and the spray head is used for spraying water to the substrate. The beneficial effects are that: the water is supplied by the water source pumping mechanism, and the substrate is sprayed with water by the spray head, so that the purpose of water film spreading on the substrate is realized.

In a possible embodiment, the shower head is provided in several numbers. The beneficial effects are that: through inciting somebody to action the shower head sets up to a plurality of, promotes the area that sprays of spray mechanism to the substrate, can promote machining efficiency.

In one possible embodiment, the spray mechanism further comprises a detector and a controller; the detector is arranged at the front conveying roller and electrically connected with the controller, the detector is used for detecting the position of the substrate and generating a detection signal, and the detector is used for conveying the detection signal to the controller; the controller is electrically connected with the water source pumping mechanism and is used for controlling the opening and closing of the water source pumping mechanism according to the detection signal. The beneficial effects are that: the position of the substrate is detected through the detector, a detection signal is obtained through detection of the detector, and the controller controls the opening and closing of the water source pumping mechanism according to the detection signal, so that the water consumption can be reduced.

Drawings

FIG. 1 is a schematic structural diagram of a substrate wet transportation apparatus according to a first embodiment of the present invention;

FIG. 2 is a schematic view of a portion of the intermediate conveyor roller and spray mechanism of FIG. 1;

FIG. 3 is a schematic view of the arrangement of the substrate in FIG. 1 on the front and intermediate transport rollers;

FIG. 4 is a schematic view of the substrate of FIG. 1 positioned between the nip rollers and the post-nip rollers;

FIG. 5 is a partial schematic structural view of a substrate wet transportation device according to a second embodiment of the present invention;

FIG. 6 is a partial schematic structural view of a substrate wet transportation apparatus according to a third embodiment of the present invention;

FIG. 7 is a partial schematic structural view of a wet substrate conveying apparatus according to a fourth embodiment of the present invention;

FIG. 8 is a partial schematic structural view of a substrate wet transportation apparatus according to a fifth embodiment of the present invention;

FIG. 9 is a schematic partial structural view of a substrate wet transportation apparatus according to a sixth embodiment of the present invention;

FIG. 10 is an enlarged view of a portion of FIG. 9 at A;

FIG. 11 is a schematic partial structural view of a substrate wet transportation apparatus according to a seventh embodiment of the present invention.

The reference numbers in the figures:

1. a front delivery roller;

2. a intermittent conveying roller; 201. an arc-shaped face section; 202. a planar section;

3. a rear delivery roller;

4. a drive mechanism;

5. a spraying mechanism; 501. a shower head; 502. a water source pumping mechanism;

6. a fixed mount;

7. an elastic member;

8. an oblique conveying roller;

9. a flexible layer.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used herein, the word "comprising" and similar words are intended to mean that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items.

In order to solve the problems in the prior art, embodiments of the present invention provide a substrate wet transportation apparatus.

Fig. 1 is a schematic structural diagram of a substrate wet conveying device in a first embodiment of the present invention, fig. 2 is a schematic partial structural diagram of a middle conveying roller and a spraying mechanism in fig. 1, fig. 3 is a schematic structural diagram of a substrate on a front conveying roller and a middle conveying roller in fig. 1, and fig. 4 is a schematic structural diagram of a substrate on a middle conveying roller and a rear conveying roller in fig. 1.

In some embodiments of the present invention, referring to fig. 1 to 4, the substrate wet transport apparatus includes a front transport roller 1, an intermediate transport roller 2, a rear transport roller 3, and a driving mechanism 4; the inter-conveying roller 2 is arranged between the front conveying roller 1 and the rear conveying roller 3, the driving mechanism 4 is connected with the front conveying roller 1, the inter-conveying roller 2 and the rear conveying roller 3, the driving mechanism 4 is used for driving the front conveying roller 1, the inter-conveying roller 2 and the rear conveying roller 3 to rotate, and the driving mechanism 4 is used for conveying substrates in the direction from the front conveying roller 1 to the rear conveying roller 3; the cross section of the interval conveying roller 2 is provided with a first tangent point and a second tangent point, and the distance from the first tangent point to the axis of the interval conveying roller 2 is smaller than or larger than the distance from the second tangent point to the axis of the interval conveying roller 2.

In some embodiments of the present invention, the driving mechanism 4 is a wheel type conveying mechanism. In some specific embodiments, the wheeled conveyance mechanism is a motor-driven sprocket-and-chain mechanism. In still other embodiments, the wheeled conveyance is a motor-driven belt and pulley conveyance.

In some embodiments, the apparatus further comprises a spray mechanism 5; the spraying mechanism 5 is arranged corresponding to the substrate conveyed by the front conveying roller 1 or the middle conveying roller 2, and the spraying mechanism 5 is used for spraying water on the substrate.

In some embodiments, the front conveying roller 1, the middle conveying roller 2, and the rear conveying roller 3 are sequentially horizontally arranged in a front-back direction from left to right, the front conveying roller 1, the middle conveying roller 2, and the rear conveying roller 3 are freely rotatably arranged on a fixed frame 6, and a sprocket or a pulley cooperating with the driving mechanism 4 is arranged at an end of the front conveying roller 1, the middle conveying roller 2, and the rear conveying roller 3.

In some embodiments, when the left end of the substrate is located on the front conveying roller 1 and the position of the substrate does not change, when the right portion of the substrate is tangent to the horizontal direction where the first tangent point is located, the included angle between the substrate and the horizontal plane is a first included angle, when the right portion of the substrate is tangent to the horizontal direction where the second tangent point is located, the included angle between the substrate and the horizontal plane is a second included angle, and due to the different influences of the distances between the two tangent points and the axis, the first included angle and the second included angle are not equal. And along with the rotation of the interval conveying roller 2, when the position of the substrate is not changed, the included angle between the substrate and the horizontal plane can be changed in a reciprocating way in the first included angle and the second included angle.

In some embodiments, the angle between the substrate and the horizontal plane changes gradually as the substrate is transported from left to right.

In some embodiments, the front conveyor roller 1, the intermediate conveyor roller 2, and the rear conveyor roller 3 are all cylindrical rollers. In some specific embodiments, the front conveyor roller 1 and the rear conveyor roller 3 are both cylindrical rollers.

In some embodiments, the spraying mechanism 5 is disposed above the front conveyor roller 1.

In some embodiments, the spraying mechanism 5 is disposed above a position between the front conveying roller 1 and the intermediate conveying roller 2.

In some embodiments, the first tangent point and the second tangent point are both points of the cross section of the intermediate transfer roller 2 that are in contact with the substrate when the substrate is in contact with the intermediate transfer roller 2.

In some embodiments, the first tangent point is located at the farthest point from the axial center of the intermediate transfer roller 2 on the surface of the intermediate transfer roller 2.

In some embodiments, the first tangent point is located at a distance from the axis of the gap roll 2, which is the closest point on the surface of the gap roll 2 to the axis of the gap roll 2.

In some embodiments, the substrate is a silicon wafer or substrate.

In some embodiments of the present invention, referring to fig. 1 to 4, a plane where a tangent line of the front conveyor roller 1 and the rear conveyor roller 3 is located is a first plane, a distance from the first tangent point to the axis of the intermediate conveyor roller 2 is greater than a distance from the intermediate conveyor roller 2 to the first plane, and a distance from the second tangent point to the axis of the intermediate conveyor roller 2 is less than or equal to the distance from the intermediate conveyor roller 2 to the first plane.

In some embodiments of the present invention, the plane of the external tangent line refers to a plane that is tangent to both the upper surface of the front conveyor roller 1 and the upper surface of the rear conveyor roller 3, which is the first plane.

In some embodiments, the distance between the first tangent point and the intermediate transfer roller 2 is greater than the distance between the intermediate transfer roller 2 and the first plane, when the intermediate transfer roller 2 rotates to the position above the first tangent point, the current position is in a state where the substrates on the front transfer roller 1 and the intermediate transfer roller 2 are lower left and higher right, and the current position is in a state where the substrates on the intermediate transfer roller 2 and the rear transfer roller 3 are higher left and lower right.

In some embodiments, the distance between the second tangent point and the interval delivery roller 2 is smaller than the distance between the interval delivery roller 2 and the first plane, when the interval delivery roller 2 rotates to the position above the second tangent point, the current position is in a state that the substrates on the front delivery roller 1 and the interval delivery roller 2 are in a state of being high on the left and the right, and the current position is in a state that the substrates on the interval delivery roller 2 and the rear delivery roller 3 are in a state of being high on the left and the right.

In some embodiments, the first plane is disposed parallel to a horizontal plane.

In some embodiments, the first plane is disposed obliquely to a horizontal plane.

In some embodiments, the first tangent point is located at a smaller distance from the axis of the interval conveyor roller 2 than the second tangent point is located at a smaller distance from the axis of the interval conveyor roller 2.

In some embodiments, the distance between the first tangent point and the axis of the interval conveyor roller 2 and the distance between the second tangent point and the axis of the interval conveyor roller 2 are greater than the distance between the first plane and the axis of the interval conveyor roller 2.

In some embodiments, a third tangent point is provided on the intermediate transfer roller 2, and the distance from the third tangent point to the axis of the intermediate transfer roller 2 is greater than the distance from the first tangent point to the axis of the intermediate transfer roller 2.

In some embodiments, a fourth tangent point is provided on the interval delivery roller 2, and the distance between the fourth tangent point and the axis of the interval delivery roller 2 is smaller than the distance between the second tangent point and the axis of the interval delivery roller 2.

In some embodiments of the invention, referring to fig. 1 to 4, the diameters of the front conveyor roller 1 and the rear conveyor roller 3 are different.

In some embodiments of the invention, the diameter of the front conveyor roller 1 is larger than the diameter of the rear conveyor roller 3.

In some embodiments of the present invention, referring to fig. 1 to 4, the front conveyor roller 1, the intermediate conveyor roller 2, and the rear conveyor roller 3 are disposed on the same plane.

In some embodiments of the present invention, the front conveying roller 1, the intermediate conveying roller 2, and the rear conveying roller 3 are all horizontally disposed in the front-rear direction, and the axis of the front conveying roller 1, the axis of the intermediate conveying roller 2, and the axis of the rear conveying roller 3 are located on the same horizontal plane.

Fig. 5 is a partial structural view of a substrate wet transportation apparatus according to a second embodiment of the present invention, and fig. 6 is a partial structural view of a substrate wet transportation apparatus according to a third embodiment of the present invention.

In some embodiments of the present invention, referring to fig. 1 to 6, the gap transporting roller 2 is provided with an arc-shaped section 201 and a plane section 202, and the arc-shaped section 201 and the plane section 202 are used for supporting the substrate.

In some embodiments of the present invention, the surface of the gap transporting roller 2 is provided with an arc-shaped surface section 201, a plane section 202, an arc-shaped surface section 201 and a plane section 202 in sequence.

In some embodiments of the present invention, referring to fig. 1 to 6, the cross section of the interval transfer roller 2 is a kidney-shaped hole or a circular cam.

In some embodiments of the present invention, the cross section of the intermediate conveying roller 2 is a kidney-shaped hole, that is, an arc-shaped surface section 201, a plane section 202, an arc-shaped surface section 201, and a plane section 202 are sequentially disposed on the surface of the intermediate conveying roller 2, the two arc-shaped surface sections 201 have the same size, and the planes of the two plane sections 202 are parallel.

In some embodiments, the cross section of the intermediate conveying roller 2 is circular cam-shaped, that is, the surface of the intermediate conveying roller 2 is provided with an arc-shaped surface section 201, a plane section 202, an arc-shaped surface section 201 and a plane section 202 in sequence, the two arc-shaped surface sections 201 have different sizes, and the planes where the two plane sections 202 are located are not parallel.

In some embodiments, the spacing between the front conveyor roller 1 and the inter conveyor roller 2 is smaller than the spacing between the inter conveyor roller 2 and the rear conveyor roller 3.

In some embodiments, the distance between the interval conveying roller 2 and the front conveying roller 1 and the distance between the interval conveying roller 3 are set to be different, so that when the substrate is separated from the front conveying roller 1, the sizes of the left side and the right side of the substrate on the interval conveying roller 2 are different, the substrate can be changed from a state of being low on the left and high on the right to a state of being high on the left and low on the right due to the gravity of the substrate, and the phenomenon that the substrate slips on the interval conveying roller 2 is avoided.

In some embodiments, when the cross section of the arc-shaped surface segment 201 is a circular arc, and the first tangent point is located on the arc-shaped surface segment 201, or the distance from the first tangent point to the axis of the inter-conveyor roller 2 is equal to the distance from the tangent point on the arc-shaped surface segment 201 to the axis of the inter-conveyor roller 2, any tangent point on the arc-shaped surface segment 201 can be regarded as the first tangent point.

In some embodiments, there are two or more of the second tangency points.

Fig. 7 is a partial structural schematic view of a substrate wet conveying device in a fourth embodiment of the invention.

In some embodiments of the present invention, referring to fig. 1 to 7, the inter-feed roller 2 is provided in at least two.

In some embodiments of the present invention, the inter-conveyor rollers 2 are provided in two, and both of the inter-conveyor rollers 2 are horizontally provided in the front-rear direction.

In some embodiments of the present invention, referring to fig. 1 to 7, the present invention further includes a fixing frame 6; preceding conveying roller 1 with back conveying roller 3 all fixed set up in mount 6, conveying roller 2 activity set up in mount 6.

In some embodiments of the present invention, the fixing frame 6 is provided with a waist hole extending in the left-right direction, and the intermediate conveying roller 2 is movably disposed at the waist hole, so that the position of the intermediate conveying roller 2 relative to the front conveying roller 1 can be adjusted.

In some embodiments, the waist holes fixing the intermediate transfer roller 2 are arranged vertically or obliquely.

In some embodiments, the intermediate conveying roller 2 is disposed on the fixing frame 6 through a bearing seat, and the bearing seat is movably and fixedly disposed on the fixing frame 6.

Fig. 8 is a partial structural schematic view of a substrate wet conveying device in a fifth embodiment of the present invention, fig. 9 is a partial structural schematic view of a substrate wet conveying device in a sixth embodiment of the present invention, and fig. 10 is a partial enlarged structural schematic view at a in fig. 9.

In some embodiments of the present invention, referring to fig. 1 to 10, further comprising an elastic member 7; the elastic member 7 is disposed between the inter-feed roller 2 and the fixing frame 6.

In some embodiments of the present invention, the elastic element 7 is a spring, one end of the elastic element 7 abuts against the sidewall of the intermediate conveying roller 2, and the other end of the elastic element 7 is fixedly disposed in the waist hole of the fixing frame 6.

In some embodiments of the present invention, referring to fig. 1-10, further comprising an oblique conveyor roller 8; the oblique conveying roller 8 is arranged between the front conveying roller 1 and the rear conveying roller 3, the front conveying roller 1 is horizontally arranged, the oblique conveying roller 8 is obliquely arranged relative to a horizontal plane, the driving mechanism 4 is connected with the oblique conveying roller 8, and the driving mechanism 4 is used for driving the oblique conveying roller 8 to rotate.

In some embodiments of the present invention, a vertical plane of the axis of the oblique conveying roller 8 is parallel to a vertical plane of the axis of the front conveying roller 1.

In some embodiments, the oblique conveying roller 8 is disposed in the front-rear direction, and a front side end surface of the oblique conveying roller 8 is located higher than a rear side end surface thereof.

In some embodiments, the driving mechanism 4 is connected to the oblique conveying roller 8 through a cardan shaft, and drives the oblique conveying roller 8 to rotate.

In some embodiments, the oblique conveying roller 8 is driven by a motor separately.

In some embodiments of the present invention, referring to fig. 1 to 10, the oblique conveying rollers 8 are provided in at least two, and the oblique direction of at least one of the oblique conveying rollers 8 is opposite to the oblique direction of the other at least one of the oblique conveying rollers 8.

In some embodiments of the present invention, the oblique conveying rollers 8 are provided in two, one of the oblique conveying rollers 8 is arranged in a front-low and rear-high manner, and the other oblique conveying roller 8 is arranged in a front-high and rear-low manner.

In some embodiments, the number of the inclined conveying rollers 8 is several, and the included angle between each inclined conveying roller 8 and the horizontal plane gradually increases and then gradually decreases.

Fig. 11 is a partial structural view of a substrate wet conveying apparatus according to a seventh embodiment of the present invention.

In some embodiments of the present invention, referring to fig. 1 to 11, at least one of the front conveyor roller 1, the intermediate conveyor roller 2, and the rear conveyor roller 3 is provided with a flexible layer 9.

In some embodiments of the present invention, the front conveyor roller 1, the intermediate conveyor roller 2 and the rear conveyor roller 3 are all provided with a flexible layer 9.

In some embodiments of the present invention, referring to fig. 1-11, the spray mechanism 5 comprises a spray header 501 and a water source pumping mechanism 502; the spray header 501 is arranged corresponding to the substrate conveyed by the front conveying roller 1 or the middle conveying roller 2, the water source pumping mechanism 502 is communicated with the spray header 501, the water source pumping mechanism 502 is used for supplying water to the spray header 501, and the spray header 501 is used for spraying water to the substrate.

In some embodiments of the present invention, the shower head 501 is disposed above the front conveying roller 1.

In some embodiments, the water source pumping mechanism 502 includes a water pump and a pipeline, one end of the pipeline is communicated with a water source, the other end of the pipeline is communicated with the shower head 501, the water pump is disposed on the pipeline, and the water pump is turned on to drive water from the water source to be conveyed to the shower head 501 through the pipeline.

In some embodiments, the shower head 501 is disposed above a position between the front conveying roller 1 and the intermediate conveying roller 2.

In some embodiments of the present invention, referring to fig. 1 to 11, the shower head 501 is provided in a plurality.

In some embodiments of the present invention, the number of the spray headers 501 is several, the several spray headers 501 are uniformly arranged in the front-back direction, and each spray header 501 is communicated with the water source pumping mechanism 502.

In some embodiments of the present invention, referring to fig. 1, the spraying mechanism 5 further comprises a detector (not shown) and a controller (not shown); the detector is arranged at the front conveying roller 1, is electrically connected with the controller, is used for detecting the position of the substrate and generating a detection signal, and is used for conveying the detection signal to the controller; the controller is electrically connected with the water source pumping mechanism 502, and the controller is used for controlling the on-off of the water source pumping mechanism 502 according to the detection signal.

In some embodiments of the present invention, the detector (not shown) is a sensor, the detector is fixedly disposed at the upper left side or the lower side of the front conveying roller 1, and the detector is vertically disposed, the detector emits detection light downward or upward, when the substrate blocks the detection light, the detector generates the detection signal, the controller (not shown) controls the water source pumping mechanism 502 to be turned on according to the detection signal, and when the substrate does not block the detection light, the controller controls the water source pumping mechanism 502 to be turned off. Although the embodiments of the present invention have been described in detail hereinabove, it is apparent to those skilled in the art that various modifications and variations can be made to the embodiments. However, it is to be understood that such modifications and variations fall within the scope and spirit of the present invention as set forth in the following claims. Moreover, the invention as described herein is capable of other embodiments and of being practiced or of being carried out in various ways.

Claims

1. The substrate wet conveying device is characterized by comprising a front conveying roller, a middle conveying roller, a rear conveying roller and a driving mechanism;

the interval conveying roller is arranged between the front conveying roller and the rear conveying roller, the driving mechanism is connected with the front conveying roller, the interval conveying roller and the rear conveying roller, the driving mechanism is used for driving the front conveying roller, the interval conveying roller and the rear conveying roller to rotate, and the driving mechanism is used for conveying substrates along the direction from the front conveying roller to the rear conveying roller;

the cross section of the interval conveying roller is provided with a first tangent point and a second tangent point, and the distance between the first tangent point and the axis of the interval conveying roller is smaller than or larger than the distance between the second tangent point and the axis of the interval conveying roller.

2. The apparatus as claimed in claim 1, wherein a plane on which a tangent of the front conveyor roller and the rear conveyor roller is located is a first plane, a distance from the first tangent point to an axis of the intermediate conveyor roller is greater than a distance from the intermediate conveyor roller to the first plane, and a distance from the second tangent point to the axis of the intermediate conveyor roller is less than or equal to the distance from the intermediate conveyor roller to the first plane.

3. The apparatus of claim 1, wherein the front conveyor roller and the rear conveyor roller are different diameters.

4. The apparatus of claim 1, wherein the front conveyor roller, the intermediate conveyor roller, and the rear conveyor roller are disposed on the same plane.

5. The apparatus of claim 1, wherein the inter-feed roller is provided with an arcuate section and a planar section, both of which are used to support the substrate.

6. The apparatus according to claim 1, wherein the cross-section of the intermediate transfer roller is a kidney-shaped hole shape or a circular cam shape.

7. The apparatus according to claim 1, wherein a spacing between the front transport roller and the inter-transport roller is smaller than a spacing between the inter-transport roller and the rear transport roller.

8. The apparatus according to claim 1, wherein the inter-conveying rollers are provided in at least two.

9. The device of claim 1, further comprising a mount;

preceding conveying roller with back conveying roller all fixed set up in the mount, the conveying roller activity set up in the mount.

10. The device of claim 9, further comprising a resilient member;

the elastic piece is arranged between the conveying roller and the fixing frame.

11. The apparatus of claim 1, further comprising an oblique conveyor roller;

the inclined conveying roller is arranged between the front conveying roller and the rear conveying roller, the front conveying roller is horizontally arranged, the inclined conveying roller is obliquely arranged relative to a horizontal plane, the driving mechanism is connected with the inclined conveying roller, and the driving mechanism is used for driving the inclined conveying roller to rotate.

12. The apparatus as claimed in claim 11, wherein the oblique conveying rollers are provided in at least two, and an inclination direction of at least one of the oblique conveying rollers is opposite to an inclination direction of the other at least one of the oblique conveying rollers.

13. The device as claimed in claim 11, wherein the number of the oblique conveying rollers is several, and the included angle between each oblique conveying roller and the horizontal plane is gradually increased and then gradually decreased.

14. The apparatus of claim 1, wherein at least one of the front conveyor roller, the intermediate conveyor roller, and the rear conveyor roller is provided with a flexible layer.

15. The apparatus of claim 1, further comprising a spray mechanism;

the spraying mechanism is arranged corresponding to the substrate conveyed by the front conveying roller or the middle conveying roller, and is used for spraying water to the substrate.

16. The apparatus of claim 15, wherein the spray mechanism comprises a spray header and a water source pumping mechanism;

the spray head is arranged corresponding to the substrate conveyed by the front conveying roller or the middle conveying roller, the water source pumping mechanism is communicated with the spray head, the water source pumping mechanism is used for supplying water to the spray head, and the spray head is used for spraying water to the substrate.

17. The apparatus of claim 16, wherein the shower head is provided in plurality.

18. The apparatus of claim 16, wherein the spray mechanism further comprises a detector and a controller;

the detector is arranged at the front conveying roller and electrically connected with the controller, the detector is used for detecting the position of the substrate and generating a detection signal, and the detector is used for conveying the detection signal to the controller;

the controller is electrically connected with the water source pumping mechanism and is used for controlling the opening and closing of the water source pumping mechanism according to the detection signal.