CN115537883A - 电解铜箔制备用IrO2-Ta2O5/Ti电极析氧电位的降低方法 - Google Patents
电解铜箔制备用IrO2-Ta2O5/Ti电极析氧电位的降低方法 Download PDFInfo
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- CN115537883A CN115537883A CN202211142431.2A CN202211142431A CN115537883A CN 115537883 A CN115537883 A CN 115537883A CN 202211142431 A CN202211142431 A CN 202211142431A CN 115537883 A CN115537883 A CN 115537883A
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- China
- Prior art keywords
- electrode
- iro
- oxygen evolution
- copper foil
- electrolytic copper
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 63
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 63
- 239000001301 oxygen Substances 0.000 title claims abstract description 63
- 239000011889 copper foil Substances 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- -1 alkyl trimethyl ammonium halide Chemical class 0.000 claims abstract description 24
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 16
- 229910000365 copper sulfate Inorganic materials 0.000 claims description 13
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 claims description 13
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 11
- 102000004169 proteins and genes Human genes 0.000 claims description 11
- 108090000623 proteins and genes Proteins 0.000 claims description 11
- 125000000217 alkyl group Chemical group 0.000 claims 1
- 125000004432 carbon atom Chemical group C* 0.000 claims 1
- 239000000654 additive Substances 0.000 abstract description 10
- 230000000996 additive effect Effects 0.000 abstract description 10
- 230000009467 reduction Effects 0.000 abstract description 9
- 238000006243 chemical reaction Methods 0.000 abstract description 8
- 239000003792 electrolyte Substances 0.000 abstract description 7
- 238000002360 preparation method Methods 0.000 abstract description 7
- 239000010936 titanium Substances 0.000 description 60
- 238000004070 electrodeposition Methods 0.000 description 37
- 229910052802 copper Inorganic materials 0.000 description 32
- 239000010949 copper Substances 0.000 description 32
- 239000000243 solution Substances 0.000 description 25
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 22
- 229910052719 titanium Inorganic materials 0.000 description 22
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 19
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 description 14
- 229910052697 platinum Inorganic materials 0.000 description 10
- 229910021607 Silver chloride Inorganic materials 0.000 description 9
- 239000007864 aqueous solution Substances 0.000 description 9
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 9
- 239000008151 electrolyte solution Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 125000005211 alkyl trimethyl ammonium group Chemical group 0.000 description 7
- 238000009472 formulation Methods 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- YSJGOMATDFSEED-UHFFFAOYSA-M behentrimonium chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCCCCCCCC[N+](C)(C)C YSJGOMATDFSEED-UHFFFAOYSA-M 0.000 description 5
- XWBIZYHDVFHTID-UHFFFAOYSA-M butyl(trimethyl)azanium;iodide Chemical compound [I-].CCCC[N+](C)(C)C XWBIZYHDVFHTID-UHFFFAOYSA-M 0.000 description 5
- 230000003197 catalytic effect Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 229910001431 copper ion Inorganic materials 0.000 description 5
- LGPJVNLAZILZGQ-UHFFFAOYSA-M hexadecyl(trimethyl)azanium;iodide Chemical compound [I-].CCCCCCCCCCCCCCCC[N+](C)(C)C LGPJVNLAZILZGQ-UHFFFAOYSA-M 0.000 description 5
- SZEMGTQCPRNXEG-UHFFFAOYSA-M trimethyl(octadecyl)azanium;bromide Chemical compound [Br-].CCCCCCCCCCCCCCCCCC[N+](C)(C)C SZEMGTQCPRNXEG-UHFFFAOYSA-M 0.000 description 5
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 4
- 229940107816 ammonium iodide Drugs 0.000 description 4
- WOWHHFRSBJGXCM-UHFFFAOYSA-M cetyltrimethylammonium chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCC[N+](C)(C)C WOWHHFRSBJGXCM-UHFFFAOYSA-M 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- XCOHAFVJQZPUKF-UHFFFAOYSA-M octyltrimethylammonium bromide Chemical compound [Br-].CCCCCCCC[N+](C)(C)C XCOHAFVJQZPUKF-UHFFFAOYSA-M 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 150000001335 aliphatic alkanes Chemical class 0.000 description 2
- 239000010405 anode material Substances 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- XJWSAJYUBXQQDR-UHFFFAOYSA-M dodecyltrimethylammonium bromide Chemical compound [Br-].CCCCCCCCCCCC[N+](C)(C)C XJWSAJYUBXQQDR-UHFFFAOYSA-M 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- DEXFNLNNUZKHNO-UHFFFAOYSA-N 6-[3-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperidin-1-yl]-3-oxopropyl]-3H-1,3-benzoxazol-2-one Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1CCN(CC1)C(CCC1=CC2=C(NC(O2)=O)C=C1)=O DEXFNLNNUZKHNO-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- BPNRRQFZIBQRMK-UHFFFAOYSA-N [O-2].[Ta+5].[Ir+3].[O-2].[O-2].[O-2] Chemical compound [O-2].[Ta+5].[Ir+3].[O-2].[O-2].[O-2] BPNRRQFZIBQRMK-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 125000002751 aliphatic alkane group Chemical group 0.000 description 1
- SWLVFNYSXGMGBS-UHFFFAOYSA-N ammonium bromide Chemical compound [NH4+].[Br-] SWLVFNYSXGMGBS-UHFFFAOYSA-N 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/04—Wires; Strips; Foils
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrolytic Production Of Metals (AREA)
Abstract
Description
例 | 析氧电位差值/mV | 电沉积铜薄膜状况 |
实施例1 | -50 | ◎ |
实施例2 | -56 | ◎ |
实施例3 | -98 | ◎ |
实施例4 | -41 | ◎ |
实施例5 | -34 | ○ |
实施例6 | -31 | ○ |
比较例1 | -3 | X |
比较例2 | -5 | X |
Claims (3)
Priority Applications (1)
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CN202211142431.2A CN115537883B (zh) | 2022-09-20 | 2022-09-20 | 电解铜箔制备用IrO2-Ta2O5/Ti电极析氧电位的降低方法 |
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CN202211142431.2A CN115537883B (zh) | 2022-09-20 | 2022-09-20 | 电解铜箔制备用IrO2-Ta2O5/Ti电极析氧电位的降低方法 |
Publications (2)
Publication Number | Publication Date |
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CN115537883A true CN115537883A (zh) | 2022-12-30 |
CN115537883B CN115537883B (zh) | 2023-07-04 |
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CN202211142431.2A Active CN115537883B (zh) | 2022-09-20 | 2022-09-20 | 电解铜箔制备用IrO2-Ta2O5/Ti电极析氧电位的降低方法 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101928970A (zh) * | 2009-06-20 | 2010-12-29 | 赣州逸豪实业有限公司 | 生产高精电解铜箔方法和设备 |
CN102560561A (zh) * | 2010-12-10 | 2012-07-11 | 上海太阳能工程技术研究中心有限公司 | Dsa电极及其制作方法 |
CN103827360A (zh) * | 2011-09-13 | 2014-05-28 | 学校法人同志社 | 电解镀敷用阳极及使用该阳极的电解镀敷法 |
CN109112605A (zh) * | 2018-08-28 | 2019-01-01 | 常州大学 | 一种电解铜箔用钛基铱-钽氧化物涂层阳极的再生处理液及再生方法 |
CN114592218A (zh) * | 2022-02-25 | 2022-06-07 | 广州鸿葳科技股份有限公司 | 一种钛基阳极及其制备方法和应用 |
CN114990679A (zh) * | 2022-07-19 | 2022-09-02 | 陕西迪诺尔环保科技有限公司 | 一种析氧钛阳极的制备方法 |
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2022
- 2022-09-20 CN CN202211142431.2A patent/CN115537883B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101928970A (zh) * | 2009-06-20 | 2010-12-29 | 赣州逸豪实业有限公司 | 生产高精电解铜箔方法和设备 |
CN102560561A (zh) * | 2010-12-10 | 2012-07-11 | 上海太阳能工程技术研究中心有限公司 | Dsa电极及其制作方法 |
CN103827360A (zh) * | 2011-09-13 | 2014-05-28 | 学校法人同志社 | 电解镀敷用阳极及使用该阳极的电解镀敷法 |
US20150027899A1 (en) * | 2011-09-13 | 2015-01-29 | The Doshisha | Anode for electroplating and method for electroplating using anode |
CN109112605A (zh) * | 2018-08-28 | 2019-01-01 | 常州大学 | 一种电解铜箔用钛基铱-钽氧化物涂层阳极的再生处理液及再生方法 |
CN114592218A (zh) * | 2022-02-25 | 2022-06-07 | 广州鸿葳科技股份有限公司 | 一种钛基阳极及其制备方法和应用 |
CN114990679A (zh) * | 2022-07-19 | 2022-09-02 | 陕西迪诺尔环保科技有限公司 | 一种析氧钛阳极的制备方法 |
Non-Patent Citations (1)
Title |
---|
李延伟 等: "十六烷基三甲基溴化铵对硫酸盐电镀镍的影响" * |
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CN115537883B (zh) | 2023-07-04 |
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