CN115446481A - Precise laser deep hole machining device and machining method - Google Patents
Precise laser deep hole machining device and machining method Download PDFInfo
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- CN115446481A CN115446481A CN202211407738.0A CN202211407738A CN115446481A CN 115446481 A CN115446481 A CN 115446481A CN 202211407738 A CN202211407738 A CN 202211407738A CN 115446481 A CN115446481 A CN 115446481A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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Abstract
The invention provides a precise laser deep hole processing device and a processing method, and relates to the technical field of laser processing. The precise laser deep hole processing device comprises a laser, a ring-focus paraboloid reflector, a cone inner reflector, a 45-degree total reflector, a linear lead screw stepping motor and a working table surface; the laser, the ring focus paraboloid reflector, the cone inner reflector, the linear screw rod stepping motor and the 45-degree total reflector are sequentially and coaxially arranged along the optical axis; the working table surface is arranged below the reflecting surface of the 45-degree total reflecting mirror; and a linear screw rod of the linear screw rod stepping motor is connected with the ring focus parabolic reflector. The invention has the advantages that: on the basis of not reducing the punching efficiency, the problems that the edge of a deep hole is not smooth and has conicity in deep hole machining of the traditional Gaussian beam can be effectively improved; and can well adapt to the processing requirements of different apertures.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a precise laser deep hole processing device and a processing method.
Background
The laser deep hole processing is to focus various laser beams, reach the melting point or boiling point of the material in a short time, and perform the through hole processing with a "large depth-diameter ratio" for the material which is difficult to process by the traditional technology, for example, process the through hole with a "depth-diameter ratio" of more than 50 for the metal with high hardness (such as tungsten alloy, titanium alloy, stainless steel, aluminum, etc.) or the non-metal material with high hardness and high brittleness (such as alumina ceramic, aluminum carbide ceramic, etc.).
Laser deep hole processing focuses laser beams into micron-sized focus or hollow annular focal spot through a focusing lens to obtain laser with high energy density, so that laser drilling can be performed on materials. The laser deep hole processing has the advantages of high speed, high efficiency, capability of obtaining the aperture with a large depth-diameter ratio, no limitation of material hardness, rigidity, brittleness and the like, no contact processing, mechanical loss avoidance and the like, and is widely applied to the processing of through holes of various materials at present. However, the output of a typical laser is close to the fundamental mode, and the energy distribution across the beam cross-section is close to gaussian: namely, the middle is strong, and the periphery is gradually weakened; and the energy of the spot center is rapidly weakened after the spot center deviates from the focus. Deep hole processing is carried out by adopting laser with Gaussian light intensity distribution, and the edge of a through hole is not smooth and has conicity no matter single laser pulse punching or repeated punching of a plurality of laser pulses is adopted; the reason is as follows: on one hand, the middle area is easier to penetrate through the material due to high light intensity, and the edge intensity of the light beam is weaker, so the edge of the through hole generates a melting phenomenon, namely the edge of the through hole is not smooth; on the other hand, because of the high central intensity of the light beam, the light beam is easy to penetrate through the material, and the taper is generated along with the continuous deepening of the through hole, namely, the diameter of the upper part of the through hole is different from the diameter of the bottom of the through hole, namely, the diameter of the upper part of the through hole is larger, and the diameter of the bottom of the through hole is smaller.
In order to solve the problem of the gaussian beam in deep hole processing, the following methods are generally adopted at present: the purposes of reducing the taper of the through hole and improving the smoothness of the edge are achieved by reducing the light intensity difference between the center of the light beam and the edge of the light beam; for example, a diaphragm is arranged in a vertical plane of the propagation direction of the laser beam to intercept the energy of the edge part of the beam, or the Gaussian beam is shaped; however, both the diaphragm and the beam shaping result in a decrease in the energy utilization of the beam, i.e., more energy is lost, which in turn results in a decrease in the punching efficiency.
The invention provides a precise laser deep hole processing device and a processing method, aiming at solving the problems that the edge of a deep hole is not smooth and has conicity in deep hole processing of a Gaussian beam on the basis of not reducing the punching efficiency.
Disclosure of Invention
The invention aims to solve the technical problem of providing a precise laser deep hole processing device and a processing method, which can solve the problems of unsmooth deep hole edge and conicity of a Gaussian beam in deep hole processing on the basis of not reducing the punching efficiency and can conveniently process deep holes with different apertures.
The invention is realized in the following way:
in a first aspect, a precise laser deep hole processing device comprises a laser, a ring-focus paraboloid reflector, a cone inner reflector, a 45-degree total reflector, a linear screw rod stepping motor and a working table;
the laser, the annular-focus parabolic reflector, the conical-cylinder internal reflector, the linear screw rod stepping motor and the 45-degree total reflector are sequentially and coaxially arranged along an optical axis, and a Gaussian beam emitted by the laser is reflected by the annular-focus parabolic reflector and the conical-cylinder internal reflector to generate a hollow annular beam; the worktable surface is arranged below the reflecting surface of the 45-degree total reflecting mirror, and the generated hollow annular light beam is guided to the worktable surface through the 45-degree total reflecting mirror; and a linear screw rod of the linear screw rod stepping motor is connected with the ring focus parabolic reflector.
Further, the parameter matching relationship and the position relationship between the ring focal paraboloid reflecting mirror and the cone inner reflecting mirror meet the following requirements:
(1) The output center of the laser is aligned with the sharp top of the ring focus parabolic reflector;
(2) The narrow opening end of the reflecting mirror in the cone cylinder is a light beam incident surface, and the wide opening end is a light beam emergent surface;
（3）
，
(ii) a Wherein the content of the first and second substances,
，
is the focal distance of the generatrix of the ring focus parabolic reflector,
is the distance from the generatrix focus of the ring focus parabolic reflector to the symmetry axis of the ring focus parabolic reflector,
is the bottom corner of the reflecting mirror in the cone,
is the inner radius of the bottom surface of the wide opening end of the conical cylinder inner reflecting mirror.
Furthermore, the ring focus parabolic reflector is in an axisymmetric structure, and a generatrix of the ring focus parabolic reflector is a part of a parabola; the symmetry axis of the ring focus parabolic reflector is vertical to the parabola directrix; the bus focus of the annular focus parabolic reflector is located on the outer side of the annular focus parabolic reflector, and the distance between the bus focus of the annular focus parabolic reflector and the symmetry axis of the annular focus parabolic reflector is larger than the distance between any point on the bus of the annular focus parabolic reflector and the symmetry axis of the annular focus parabolic reflector.
Furthermore, the reflecting mirror in the cone cylinder is of a hollow axisymmetric structure; the inner surface of the conical cylinder inner reflecting mirror is a part of a conical surface and is used as a light beam reflecting surface.
Furthermore, the device also comprises a support frame arranged between the conical cylinder internal reflector and the 45-degree total reflector; the linear screw rod stepping motor is installed on the support frame, a linear screw rod of the linear screw rod stepping motor penetrates through the support frame and is in adhesive connection with the middle of the bottom of the ring focus parabolic reflector, and the ring focus parabolic reflector is driven to move and adjust along the direction of an optical axis through the linear screw rod stepping motor.
Furthermore, the support frame is of an axisymmetric structure; the support frame comprises a metal inner frame, a metal outer frame and optical glass connected between the metal inner frame and the metal outer frame; a linear screw rod of the linear screw rod stepping motor penetrates through the metal inner frame;
the distance between the inner side of the metal outer frame and the symmetry axis is larger than the inner radius of the bottom surface of the wide opening end of the reflecting mirror in the cone; the distance between the outer side of the metal inner frame and the symmetry axis is smaller than or equal to the radius of the bottom of the ring focus parabolic reflector.
Furthermore, the ring focal paraboloid reflecting mirror and the cone inner reflecting mirror are both made of metal materials, the reflecting surfaces are both optically polished, and the reflecting surfaces are plated with reflection increasing films.
Furthermore, the device also comprises a control device for controlling the position of the worktable to be adjusted along the propagation direction of the hollow annular light beam.
In a second aspect, a method for machining a precision laser deep hole machining apparatus includes the steps of:
emitting a Gaussian beam to the sharp top of the ring-focus parabolic reflector by using a laser;
according to the Snell's law, an annular-focus parabolic reflector is used for reflecting an incident Gaussian beam to an inner conical-cylinder reflector, the inner conical-cylinder reflector reflects the Gaussian beam to a 45-degree total reflector, the annular-focus parabolic reflector and the inner conical-cylinder reflector are subjected to two-time reflection, the Gaussian beam is converted into a hollow annular beam from a solid beam, a central beam with the strongest light intensity in the Gaussian beam is converted to the outer edge of the hollow annular beam, and an edge beam with the weakest light intensity in the Gaussian beam is converted to the inner edge of the hollow annular beam;
and guiding the hollow annular light beam to the working table by using a 45-degree total reflection mirror so as to realize deep hole machining on the material to be machined on the working table.
Further, the processing method of the precision laser deep hole processing device further comprises the following steps:
and driving the ring focus parabolic reflector to move and adjust along the direction of the optical axis by using a linear screw rod stepping motor, and adjusting the radius of the hollow annular light beam to the aperture required by the deep hole.
By adopting the technical scheme of the invention, the invention at least has the following beneficial effects:
1. after the gaussian beam of laser instrument transmission is in the twice reflection via ring burnt parabolic mirror and awl section of thick bamboo internal reflector, can produce the outside edge that energy concentrates on hollow annular beam, and the outside edge of hollow annular beam keeps the novel annular beam of parallel with the optical axis, treat the processing material through utilizing this novel annular beam and carry out BTA, can be on the basis that does not reduce punching efficiency (need not to increase the diaphragm or carry out the plastic to the gaussian beam, can avoid the light beam energy to damage, thereby guarantee punching efficiency), effectively improve the deep hole edge that traditional gaussian type light beam exists in BTA not smooth, the problem that has the taper.
2. Under the condition of not changing the system structure, the aperture of the processed deep hole can be precisely adjusted only by changing the position of the ring-focus parabolic reflector on the optical axis, and the processing requirements of different apertures can be well met.
Drawings
The invention will be further described with reference to the following examples with reference to the accompanying drawings.
FIG. 1 is an overall configuration diagram of a precision laser deep hole processing apparatus according to the present invention;
FIG. 2 is a block diagram of the inner reflector of the cone of the present invention;
FIG. 3 is a block diagram of a toroidal-focus parabolic reflector of the present invention;
FIG. 4 is a structural view of the stand of the present invention;
FIG. 5 is a schematic diagram of the light intensity distribution of a hollow ring beam according to the present invention;
FIG. 6 is a schematic diagram of the present invention showing the cone inner mirror having its emergent rays parallel to the axis of symmetry of the toroidal-focus parabolic mirror.
Description of reference numerals:
a laser 1;
a ring focus parabolic mirror 2;
a cone inner reflector 3;
a 45 ° total reflection mirror 4;
a linear screw rod stepping motor 5, a linear screw rod 51;
a work table top 6;
a support frame 7, a metal inner frame 71, a metal outer frame 72 and optical glass 73.
Detailed Description
For better understanding of the technical solutions of the present invention, the technical solutions of the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1 to 6, a preferred embodiment of a precise laser deep hole processing device according to the present invention includes a laser 1, a ring-focus parabolic reflector 2, a cone internal reflector 3, a 45 ° total reflector 4, a linear lead screw stepping motor 5, and a working table 6; wherein, the laser 1 is used for generating a Gaussian beam; the annular focal paraboloid reflecting mirror 2 and the cone inner reflecting mirror 3 are used for reflecting and converting incident Gaussian beams, so that the incident Gaussian beams are converted into hollow annular beams from solid beams; the 45-degree total reflector 4 is used for reflecting the incident hollow annular light beam to the working table 6 so as to realize deep hole machining on the material to be machined on the working table 6; the linear screw rod stepping motor 5 is used for driving the ring focal paraboloid reflecting mirror 2 to move so as to adapt to processing of different apertures; the working table surface 6 is used for placing materials to be processed.
The laser 1, the annular-focus parabolic reflector 2, the conical-cylinder internal reflector 3, the linear lead screw stepping motor 5 and the 45-degree total reflector 4 are sequentially and coaxially arranged along an optical axis L0, and a Gaussian beam emitted by the laser 1 is reflected by the annular-focus parabolic reflector 2 and the conical-cylinder internal reflector 3 to generate a hollow annular beam; the worktable surface 6 is arranged below the reflecting surface of the 45-degree total reflecting mirror 4, and the generated hollow annular light beam is guided to the worktable surface 6 through the 45-degree total reflecting mirror 4 so as to realize deep hole machining on a material to be machined on the worktable surface 6; the linear screw rod 51 of the linear screw rod stepping motor 5 is connected with the ring focus parabolic reflector 2, so that the ring focus parabolic reflector 2 is driven to move by the linear screw rod stepping motor 5, and the processing suitable for different apertures is realized.
When the precise laser deep hole processing device works, a Gaussian beam emitted by a laser 1 is normally incident to the tip of a ring-focus parabolic reflector 2, the central ray O of the incident Gaussian beam has the strongest light intensity, and the edge ray of the Gaussian beam
Is weakest; according to Snell's law, the Gaussian beam incident to the toroidal-focus parabolic reflector 2 is converged at the outer side of the toroidal-focus parabolic reflector 2 to form an annular focal spot, the converged annular focal spot is incident to the inner surface of the cone inner reflector 3 again to change the light intensity distribution, at the moment, the Gaussian beam is converted from a solid beam to a hollow annular beam, the central ray O with the strongest light intensity is converted to the outer side edge of the hollow annular beam, and the edge ray with the weakest light intensity is converted to the outer side edge of the hollow annular beam
The light intensity is changed to the inner edge of the hollow annular light beam, as shown in fig. 5, which is a schematic diagram of the light intensity distribution of the hollow annular light beam outputted after the light intensity is changed in fig. 5, wherein,
representing the light intensity; the hollow annular light beam is guided to the working table surface by the 45-degree total reflection mirror 46, thereby realizing deep hole machining of the material to be machined on the working table surface 6.
The precise laser deep hole processing device for processing deep holes has the following beneficial effects:
1. gaussian beam of 1 transmission of laser instrument can produce energy and concentrate on the outside edge of hollow cyclic annular beam after the twice reflection of speculum 2 and awl section of thick bamboo internal reflection mirror 3, and the outside edge of hollow cyclic annular beam keeps the novel cyclic annular beam of parallel with optical axis L0, treat the processing material through utilizing this novel cyclic annular beam and carry out BTA, can be on the basis that does not reduce punching efficiency (need not to increase the diaphragm or carry out the plastic to the Gaussian beam, can avoid light beam energy to damage, thereby guarantee punching efficiency), effectively improve the deep hole edge that traditional Gaussian beam exists in BTA not smooth, the problem that has the tapering.
2. Under the condition of not changing the system structure, the aperture of the processed deep hole can be precisely adjusted only by changing the position of the ring-focus parabolic reflector 2 on the optical axis, and the processing requirements of different apertures can be well met.
Because the ring focus parabolic reflector 2 and the cone inner reflector 3 can collimate the outer edge light of the hollow annular light beam, in order to enable the outer edge light of the hollow annular light beam to be parallel to the optical axis L0 in a long range, the problems that the edge of a deep hole is not smooth and has conicity are effectively solved; in the preferred embodiment of the present invention, the parameter matching relationship and the position relationship between the toroidal parabolic mirror 2 and the conical internal reflector 3 satisfy the following requirements:
(1) The output center of the laser 1 is aligned with the tip of the toroidal-focus parabolic reflector 2, so that the Gaussian beam emitted by the laser 1 is incident on the tip of the toroidal-focus parabolic reflector 2;
(2) As shown in fig. 2, the inner radius of the bottom surface of the narrow opening end of the reflecting mirror 3 in the cone is R2, and the inner radius of the bottom surface of the wide opening end of the reflecting mirror 3 in the cone is R1;
（3）
，
(ii) a Wherein the content of the first and second substances,
，
is the focal distance of a generatrix L3 of the ring focal paraboloid reflecting mirror 2,
is the distance from the generatrix focus Q of the ring focus parabolic reflector 2 to the symmetry axis L2 of the ring focus parabolic reflector 2,
is the bottom corner of the reflecting mirror 3 in the cone,
is the inner radius of the bottom surface of the wide opening end of the cone inner reflector 3.
As shown in fig. 6, the central light ray O of the present invention is incident to the vertex of the ring-focus parabolic reflector 2, changes the transmission direction, and is incident to the cone inner reflector 3 after passing through the generatrix focus Q; the invention requires the emergent light of the cone inner reflector 3 to be parallel to the symmetry axis of the ring focus paraboloid reflector 2 when in implementation; therefore, the base angle and wide mouth end radius of the mirror 3 in the cone must be constrained:
setting a y axis at the center of a generatrix (parabola) directrix and a focus by taking the symmetric axis of the ring focus paraboloid reflector 2 as an x axis, and establishing a coordinate system; the coordinate system is equivalent to a unit of translation h (namely the distance from a generatrix focus Q of the ring focus parabolic reflector 2 to a symmetry axis of the ring focus parabolic reflector 2) of a standard parabolic coordinate system to the negative direction of a y axis; under the coordinate system, the coordinate of any point on the parabola satisfies the following conditions:
the tip of the toroidal-focus parabolic reflector 2 is located on the generatrix (parabola), and the distance from the tip to the y-axis can be expressed as:
the central light ray O is incident to the vertex of the ring-focus parabolic reflector 2, and if the included angle between the reflected light ray and the symmetry axis of the ring-focus parabolic reflector 2 is α, then:
therefore, in order to ensure that the outgoing ray of the cone inner mirror 3 is parallel to the symmetry axis of the toroidal parabolic mirror 2, it is necessary to satisfy:
in order to ensure that the light can be output from the cone inner reflector 3 without obstruction, the inner radius of the wide opening end of the cone inner reflector 3 is generally required
Satisfies the following conditions:
。
in the preferred embodiment of the present invention, as shown in fig. 3, in order to make the gaussian light beam converge and form a ring-shaped focal spot on the outer side of the ring-focus parabolic mirror 2, the ring-focus parabolic mirror 2 is of an axisymmetric structure, and a generatrix L3 of the ring-focus parabolic mirror 2 is a part of a parabola; the symmetry axis L2 of the ring focus parabolic reflector 2 is vertical to the parabola directrix L1; the bus focus Q of the toroidal-focus parabolic reflector 2 is positioned on the outer side of the toroidal-focus parabolic reflector 2, and the distance from the bus focus Q of the toroidal-focus parabolic reflector 2 to the symmetric axis L2 of the toroidal-focus parabolic reflector 2 is greater than the distance from any point on the bus L3 of the toroidal-focus parabolic reflector 2 to the symmetric axis L2 of the toroidal-focus parabolic reflector 2. The ring focus parabolic reflector 2 is formed by rotating a part of a parabola as a bus L3 for 360 degrees around a symmetry axis L2, and the bus L3 has a focus; the bus L3 rotates 360 degrees around the symmetry axis L2, and the bus focus Q also rotates 360 degrees around the symmetry axis L2; the ring focal parabolic mirror 2 thus presents a focal ring.
In the preferred embodiment of the present invention, as shown in fig. 2, the cone inner reflector 3 is a hollow axisymmetric structure; the inner surface of the cone inner reflecting mirror 3 is a part of a conical surface, and the inner surface of the cone inner reflecting mirror 3 serves as a light beam reflecting surface.
In a preferred embodiment of the present invention, as shown in fig. 4, the precise laser deep hole processing apparatus further includes a supporting frame 7 disposed between the conical internal reflector 3 and the 45 ° total reflector 4, so as to support the toroidal parabolic reflector 2 and the linear lead screw stepping motor 5; the linear screw rod stepping motor 5 is installed on the support frame 7, a linear screw rod 51 of the linear screw rod stepping motor 5 penetrates through the support frame 7 and is in bonding connection with the middle of the bottom of the ring focus parabolic reflector 2, the ring focus parabolic reflector 2 is driven to move and adjust along the optical axis direction through the linear screw rod stepping motor 5, the purpose of adjusting the radius of the hollow annular light beam is achieved, and the processing requirements of different apertures are met. In a specific implementation, when the ring focus parabolic reflector 2 moves towards the laser 1, the radius of the hollow ring-shaped light beam becomes smaller; conversely, when the ring focus parabolic mirror 2 moves away from the laser 1, the radius of the hollow ring beam increases.
In the preferred embodiment of the present invention, the supporting frame 7 has an axisymmetric structure; the support frame 7 comprises a metal inner frame 71, a metal outer frame 72 and optical glass 73 connected between the metal inner frame 71 and the metal outer frame 72; the linear screw rod 51 of the linear screw rod stepping motor 5 penetrates through the metal inner frame 71, and the linear screw rod stepping motor 5 is fixedly installed on the metal inner frame 71. As an embodiment of the present invention, the linear screw stepping motor 5 may be a wireless screw motor powered by a rechargeable battery. The optical glass 73 is an optical glass having a low absorption and a high damage threshold, so as to reduce the influence on the light beam.
The distance R5 from the inner side of the metal outer frame 72 to the symmetry axis (i.e., the optical axis L0) is greater than the bottom inner radius R1 of the wide-mouth end of the reflecting mirror 3 in the cone, so that the hollow annular light beam reflected by the reflecting mirror 3 in the cone can be ensured not to be blocked, and the hollow annular light beam can pass through the optical glass 73 to reach the 45 ° total reflecting mirror 4;
the distance R4 between the outer side of the metal inner frame 71 and the symmetry axis (i.e., the optical axis L0) is less than or equal to the bottom radius R3 of the toroidal-focus parabolic reflector 2, so as to ensure that the metal inner frame 71 does not block the light beams reflected by the toroidal-focus parabolic reflector 2 and the cone inner reflector 3.
In the preferred embodiment of the present invention, the toroidal-focus parabolic reflector 2 and the cone internal reflector 3 are both made of metal materials, the reflective surfaces are both optically polished, and the reflective surfaces are coated with a reflection increasing film to reduce the amount of transmitted light and increase the amount of reflected light. In an embodiment of the present invention, the toroidal parabolic mirror 2 and the cone internal reflector 3 are both made of copper.
In the preferred embodiment of the present invention, the precise laser deep hole processing apparatus further includes a control device (not shown) for controlling the position adjustment of the work table 6 along the propagation direction of the hollow annular beam; for example, in a specific implementation, the lifting structure may be controlled by a computer to drive the working platform 6 to lift, so as to adjust the height position of the working platform 6.
The invention further provides a processing method of the precise laser deep hole processing device, wherein the specific structure of the precise laser deep hole processing device is described in detail with reference to the above, and the detailed description is omitted here, and the processing method of the precise laser deep hole processing device comprises the following steps:
by usingThe laser 1 emits a Gaussian beam to the tip of the ring-focus parabolic reflector 2, the central ray O of the Gaussian beam has the strongest light intensity, and the edge ray of the Gaussian beam has the strongest light intensity
Is weakest;
according to Snell's law, the ring-focus paraboloidal reflector 2 is used to reflect the incident Gaussian beam to the cone-cylinder inner reflector 3, then the cone-cylinder inner reflector 3 reflects the Gaussian beam to the 45-degree total reflector 4, the ring-focus paraboloidal reflector 2 and the cone-cylinder inner reflector 3 reflect twice to transform the Gaussian beam from solid beam to hollow annular beam, the central ray O with the strongest light intensity in the Gaussian beam is transformed to the outer edge of the hollow annular beam, and the edge ray with the weakest light intensity in the Gaussian beam
Is transformed to the inner edge of the hollow annular beam;
the hollow annular light beam is guided to the working table surface 6 by the 45-degree total reflection mirror 4 so as to realize deep hole processing of the material to be processed on the working table surface 6.
By adopting the processing method to process the deep hole on the material to be processed, the problems of unsmooth and taper of the edge of the deep hole in the deep hole processing of the traditional Gaussian beam can be effectively improved on the basis of not reducing the punching efficiency.
In a preferred embodiment of the present invention, in order to facilitate deep hole processing with different hole diameters, the processing method of the precision laser deep hole processing apparatus further includes:
and a linear lead screw stepping motor 5 is utilized to drive the ring focus parabolic reflector 2 to move and adjust along the direction of the optical axis, so that the radius of the hollow annular light beam is adjusted to the aperture required by the deep hole. For example, in specific implementation, when the aperture of a deep hole needs to be reduced, the ring-focus parabolic reflector 2 is driven to move towards the direction close to the laser 1 by the linear screw rod stepping motor 5; when the aperture of the deep hole needs to be increased, the linear lead screw stepping motor 5 is used for driving the annular focus parabolic reflector 2 to move towards the direction far away from the laser 1.
While specific embodiments of the invention have been described, it will be understood by those skilled in the art that the specific embodiments described are illustrative only and are not limiting upon the scope of the invention, as equivalent modifications and variations as will be made by those skilled in the art in light of the spirit of the invention are intended to be included within the scope of the appended claims.
Claims (10)
1. The utility model provides a precision laser deep hole processingequipment which characterized in that: the device comprises a laser, a ring-focus paraboloid reflector, a cone inner reflector, a 45-degree total reflector, a linear screw rod stepping motor and a working table;
the laser, the annular-focus parabolic reflector, the conical-cylinder internal reflector, the linear screw rod stepping motor and the 45-degree total reflector are sequentially and coaxially arranged along an optical axis, and a Gaussian beam emitted by the laser is reflected by the annular-focus parabolic reflector and the conical-cylinder internal reflector to generate a hollow annular beam; the worktable surface is arranged below the reflecting surface of the 45-degree total reflecting mirror, and the generated hollow annular light beam is guided to the worktable surface through the 45-degree total reflecting mirror; and a linear screw rod of the linear screw rod stepping motor is connected with the ring focus parabolic reflector.
2. A precision laser deep hole machining apparatus according to claim 1, characterized in that: the parameter matching relation and the position relation between the ring focal paraboloid reflecting mirror and the cone inner reflecting mirror meet the following requirements:
(1) The output center of the laser is aligned with the sharp top of the ring focus parabolic reflector;
(2) The narrow opening end of the reflecting mirror in the cone cylinder is a light beam incident surface, and the wide opening end is a light beam emergent surface;
（3）
，
(ii) a Wherein, the first and the second end of the pipe are connected with each other,
，
is the focal distance of the generatrix of the ring focus parabolic reflector,
is the distance from the generatrix focus of the ring focus parabolic reflector to the symmetry axis of the ring focus parabolic reflector,
is the bottom corner of the reflecting mirror in the cone,
is the inner radius of the bottom surface of the wide opening end of the cone inner reflector.
3. A precision laser deep hole machining apparatus according to claim 1, characterized in that: the ring focus parabolic reflector is of an axisymmetric structure, and a generatrix of the ring focus parabolic reflector is a part of a parabola; the symmetry axis of the ring focus parabolic reflector is vertical to the parabola directrix; the bus focus of the annular focus parabolic reflector is located on the outer side of the annular focus parabolic reflector, and the distance between the bus focus of the annular focus parabolic reflector and the symmetry axis of the annular focus parabolic reflector is larger than the distance between any point on the bus of the annular focus parabolic reflector and the symmetry axis of the annular focus parabolic reflector.
4. A precision laser deep hole machining apparatus according to claim 1, characterized in that: the conical barrel inner reflector is of a hollow axisymmetric structure; the inner surface of the cone inner reflecting mirror is a part of a conical surface and is used as a light beam reflecting surface.
5. A precision laser deep hole machining apparatus according to claim 1, characterized in that: the support frame is arranged between the reflecting mirror in the cone and the 45-degree total reflecting mirror; the linear screw rod stepping motor is installed on the support frame, a linear screw rod of the linear screw rod stepping motor penetrates through the support frame and is in bonding connection with the middle of the bottom of the ring focus parabolic reflector, and the ring focus parabolic reflector is driven to move and adjust along the direction of an optical axis through the linear screw rod stepping motor.
6. A precision laser deep hole machining apparatus according to claim 5, characterized in that: the support frame is of an axisymmetric structure; the support frame comprises a metal inner frame, a metal outer frame and optical glass connected between the metal inner frame and the metal outer frame; a linear screw rod of the linear screw rod stepping motor penetrates through the metal inner frame;
the distance between the inner side of the metal outer frame and the symmetry axis is greater than the inner radius of the bottom surface of the wide opening end of the reflecting mirror in the cone; the distance between the outer side of the metal inner frame and the symmetry axis is smaller than or equal to the radius of the bottom of the ring focus parabolic reflector.
7. A precision laser deep hole machining apparatus according to claim 1, characterized in that: the ring focal paraboloid reflecting mirror and the cone inner reflecting mirror are both made of metal materials, the reflecting surfaces are both optically polished, and reflection increasing films are plated on the reflecting surfaces.
8. A precision laser deep hole machining apparatus according to claim 1, characterized in that: the device also comprises a control device for controlling the position of the worktable surface to be adjusted along the propagation direction of the hollow annular light beam.
9. A machining method based on the precision laser deep hole machining apparatus of any one of claims 1 to 8, characterized in that: the processing method of the precise laser deep hole processing device comprises the following steps:
emitting a Gaussian beam to the sharp top of the ring-focus parabolic reflector by using a laser;
according to the Snell's law, the ring-focus parabolic reflector is utilized to reflect the incident Gaussian beam to the cone internal reflector, then the cone internal reflector reflects the Gaussian beam to the 45-degree total reflector, the ring-focus parabolic reflector and the cone internal reflector reflect twice, the Gaussian beam is converted from the solid beam to the hollow annular beam, the central light ray with the strongest light intensity in the Gaussian beam is converted to the outer edge of the hollow annular beam, and the edge light ray with the weakest light intensity in the Gaussian beam is converted to the inner edge of the hollow annular beam;
and guiding the hollow annular light beam to the working table by using a 45-degree total reflection mirror so as to realize deep hole machining on the material to be machined on the working table.
10. The machining method of the precision laser deep hole machining device according to claim 9, characterized in that: the processing method of the precise laser deep hole processing device further comprises the following steps:
and driving the ring-focus parabolic reflector to move and adjust along the direction of the optical axis by using a linear lead screw stepping motor, and adjusting the radius of the hollow annular light beam to the aperture required by the deep hole.
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| CN202211407738.0A CN115446481B (en) | 2022-11-10 | 2022-11-10 | Precise laser deep hole machining device and machining method |
| PCT/CN2023/086104 WO2024098648A1 (en) | 2022-11-10 | 2023-04-04 | Precise laser deep hole machining device and machining method |
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| CN202211407738.0A CN115446481B (en) | 2022-11-10 | 2022-11-10 | Precise laser deep hole machining device and machining method |
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| WO2024098648A1 (en) * | 2022-11-10 | 2024-05-16 | 泉州师范学院 | Precise laser deep hole machining device and machining method |
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