CN112247379A

CN112247379A - Rotary-cut perforating device

Info

Publication number: CN112247379A
Application number: CN202011149665.0A
Authority: CN
Inventors: 龙宙; 童杰; 程明; 秦应雄; 段光前; 秦庆全; 龙宇
Original assignee: Wuhan Preceder Laser Technology Co ltd
Current assignee: Wuhan Preceder Laser Technology Co ltd
Priority date: 2020-10-23
Filing date: 2020-10-23
Publication date: 2021-01-22

Abstract

The invention relates to the technical field of laser drilling, and provides a rotary-cut drilling device which comprises a laser used for outputting laser, a rotatable optical wedge and a lens assembly used for focusing laser beams, wherein the optical wedge is provided with a light path channel capable of adjusting the emergent angle of the laser, the lens assembly comprises at least two convex lenses with adjustable distance between each other, and the laser, the optical wedge, a first convex lens and a second convex lens are sequentially arranged along the transmission direction of the laser. According to the rotary-cut perforating device, the optical wedge rotates at a high speed, laser emitted after passing through the optical path channel has deviation and inclination angles through the refraction effect of the optical wedge so as to adjust the perforating taper, and the perforating aperture can be adjusted through adjusting the distance between two convex lenses of the lens component, so that a non-taper hole with controllable aperture is obtained finally; the whole structure is simple, the installation, the positioning and the precision adjustment are greatly reduced, and the processing cost is also greatly reduced.

Description

Rotary-cut perforating device

Technical Field

The invention relates to the technical field of laser drilling, in particular to a rotary cutting and drilling device.

Background

The micro-holes are mainly applied to the semiconductor industry and the aerospace field, and have very high requirements on the roundness and the taper of the holes. The traditional punching process adopts electric spark punching or mechanical punching, the problems of instability, high energy consumption and the like exist in the electric spark punching, the edge burning phenomenon and conicity and the like exist in the hole punched by the method, and the precision of the mechanical punching is not enough, so that the yield of the punched hole is not high, and the industrial development is limited.

Aiming at the problems, the current common processing method is galvanometer scanning punching, and compared with the traditional method, the method has the advantages of high precision, and the precision can be adjusted to the micron level after laser is focused, so that the precision problem in the traditional process is solved. And because the laser has the characteristics of high energy, good directivity and the like, the thermal influence of the surface of the material perforated by the method is small; meanwhile, laser drilling is non-contact, so that the structure of the finally drilled material cannot be damaged, and various characteristics of the hole can be kept to the maximum extent. However, due to the divergence of the focused laser, the light beam is reflected inside the hole, and other problems, the taper of the hole cannot be adjusted, and the quality of the hole on the rear surface of the material cannot be guaranteed.

Disclosure of Invention

The invention aims to provide a rotary cutting and punching device which can at least solve part of defects in the prior art.

In order to achieve the above purpose, the embodiments of the present invention provide the following technical solutions: the utility model provides a rotary-cut perforating device, is including the laser instrument that is used for output laser, still includes rotatable optical wedge and is used for the lens subassembly of focus laser beam, the optical wedge has the light path passageway of the exit angle of adjustable laser, the lens subassembly includes two at least convex lens of interval adjustable each other, the laser instrument optical wedge, first convex lens and second convex lens are laid in proper order along the transmission direction of laser.

Further, the optical wedge device further comprises a driving mechanism for driving the optical wedge to rotate.

Further, the driving mechanism comprises a hollow motor, and the optical wedge is connected to the output end of the hollow motor.

Further, the optical wedge is detachably connected with the driving mechanism.

Further, the device also comprises a distance adjusting mechanism for adjusting the distance between the two convex lenses.

Further, the optical wedge is a square optical wedge with an adjustable inclined posture.

And further, the optical wedge further comprises an inclination angle adjusting mechanism used for adjusting the inclination posture of the square optical wedge.

Furthermore, the square optical wedge is provided with four side faces, each side face is perpendicular to the incident face, and in the process of adjusting the inclined posture of the square optical wedge, one group of two opposite side faces are always located in the corresponding planes.

Furthermore, the wedge angle of the square optical wedge is smaller than 1 degree, and the included angle between the inclination direction of the square optical wedge and the vertical direction is smaller than 20 degrees.

Further, the optical wedge fixing device further comprises a connecting fixture for fixing the optical wedge.

Compared with the prior art, the invention has the beneficial effects that: a rotary cutting perforating device, the optical wedge rotates at a high speed, through the refraction effect of the optical wedge, make it have skew and dip angle through the laser that the light path channel of back jet out, in order to regulate the taper of perforating, and through the distance adjustment between two convex lenses of the lens assembly, can regulate the aperture of perforating, get the non-taper hole of the controllable aperture finally; the whole structure is simple, the installation, the positioning and the precision adjustment are greatly reduced, and the processing cost is also greatly reduced.

Drawings

Fig. 1 is a schematic view illustrating a first laser beam deflection of a rotary-cut drilling apparatus according to an embodiment of the present invention;

fig. 2 is a schematic diagram illustrating a second laser beam deflection of a rotary-cut drilling apparatus according to an embodiment of the present invention;

fig. 3 is a schematic diagram illustrating a spiral descending of the focus of a rotary-cut punch device according to an embodiment of the present invention;

in the reference symbols: 1-a hollow motor; 2-connecting a fixture; 3-a square optical wedge; 4-laser; 5-a first convex lens; 6-second convex lens.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1 and 2, an embodiment of the present invention provides a rotary-cut drilling apparatus, including a laser for outputting laser 4, a rotatable optical wedge, and a lens assembly for focusing a laser beam, where the optical wedge has an optical path channel capable of adjusting an emitting angle of the laser, the lens assembly includes at least two convex lenses with an adjustable distance therebetween, and the laser, the optical wedge, a first convex lens 5, and a second convex lens 6 are sequentially arranged along a transmission direction of the laser. In this embodiment, because of the reason of the material of optical wedge itself, because the existence of wedge angle, it is preferred, it is less than 1 degree to predetermine the wedge angle, after the light beam passes through this optical wedge from the light path passageway, refraction phenomenon can take place, last light beam forms skew and inclination after passing through from the optical wedge, thereby change the outgoing angle of laser, with the adjustment dimension of punching, the laser beam enters into the lens subassembly after that, through adjusting the distance between two convex lens, can change the focus degree of laser beam, and then control the size of punching the aperture, the no tapering hole of steerable aperture is finally obtained. The number of convex lenses can be selected according to the actual situation. Compared with the existing complex optical structure, the whole device is simpler, the installation, the positioning and the precision adjustment are greatly reduced, and the combined structure has stronger later expansibility, high flexibility, simple realization and greatly reduced processing cost. Usually, focused light is irradiated on the surface of a material to be processed, and after the energy of laser is acted on the surface, the energy received in the material is insufficient, so that the material cannot be completely punctured, and therefore, the position of a focus is lowered during punching, so that the focus is slowly lowered from the upper surface of the material which just starts to the lower surface of the material, please refer to fig. 3, spiral-type lowering punching can be realized, compared with the existing fixed-point punching, due to the characteristic that light is converged, the light is diffused after being converged, the aperture of the back surface of a hole is possibly larger than that of the front surface, and the focus is lowered in a spiral-type lowering mode, so that the front surface and the back surface are both radiated by the energy with the same characteristic, the overall punching effect of the hole is improved, the conicity of the front surface and the back surface of the hole is convenient to adjust, and compared with vibrating mirror scanning punching, a, the areas inside the hole are burned by the energy at the focus, so that the removing effect of the inner wall of the hole can be greatly improved, the quality inside the hole is optimized, and meanwhile, the spiral punching mode can enable the utilization rate of laser to be the highest, and the punching efficiency can be greatly improved. After a light beam with an inclination angle from the optical wedge enters the lens assembly, the light beam is inclined, so that the focusing position of the light beam deviates from the optical axis, the position of the light beam is deviated under the action of the square optical wedge 3, after passing through the lens assembly, one side of the light beam and a focus to be converged are positioned on the same vertical line, so that deflection cannot be generated, and the light beam is vertically incident to the surface of a material for rotary cutting; because the light beam vertically enters the material, the energy of the light beam can directly reach a focus, the light beam cannot be acted beside an area due to the fact that the laser is inclined, and a thermal effect exists. In addition, arrows in fig. 1 and 2 indicate the moving directions of the optical wedge and the convex lens.

The following are specific examples:

referring to fig. 1 and 2 as a preferred solution of the embodiment of the present invention, the driving mechanism includes a hollow motor, and the optical wedge is connected to an output end of the hollow motor. In the embodiment, the optical wedge is driven to rotate by adopting a hollow motor, and the optical wedge can be stably rotated at high speed by utilizing the performance of the existing hollow motor. Of course, other existing devices that can rotate them at high speed can be used herein, and are not limited thereto.

As an optimized scheme of the embodiment of the invention, the optical wedge is detachably connected with the driving mechanism. In this embodiment, the adoption can be dismantled the connection, can be convenient for install and dismantle, can select the optical wedge and the transparent subassembly of suitable model according to the actual condition for this device is applicable to the processing in various holes. As for the detachable connection, any available form such as snap connection, screw connection, magnetic connection, etc. is feasible, and the present embodiment is not limited thereto.

As an optimized solution of the embodiment of the present invention, the apparatus further includes a distance adjusting mechanism for adjusting a distance between the two convex lenses. In this embodiment, the above-mentioned embodiment mentions that the focusing degree can be adjusted by adjusting the distance between two convex lenses, so as to control the size of the aperture of the hole, and the distance between two convex lenses can be adjusted by a more precise distance adjusting mechanism besides manual adjustment, and the distance adjusting mechanism is actually a clamping mechanism with an adjusting scale, the distance between two convex lenses is adjusted by adjusting the distance between two clamping portions, the adjusting distance is controlled by the scale defined by the clamping mechanism, and the adjustment here can be adjusted by electric adjustment. The scale can be realized in a structural form similar to a rack. This is the existing adjustment structure and will not be described in detail here.

As an optimization scheme of the embodiment of the invention, the optical wedge is a square optical wedge 3 with adjustable inclined posture. Preferably, the square optical wedge 3 has four side faces, each of which is perpendicular to the incident face, and during the adjustment of the tilt posture of the square optical wedge 3, a set of two opposite side faces always lie in respective corresponding planes. The device also comprises an inclination angle adjusting mechanism for adjusting the inclination posture of the square optical wedge 3. Preferably, the included angle between the inclination direction of the square optical wedge and the vertical direction is less than 20 degrees. In this embodiment, the optical wedge is a square optical wedge 3 having a thickness, so that it is possible to swing left and right or back and forth only by ensuring that the incident surface is above and the exit surface is below. Compared with a cylindrical optical wedge, the optical wedge 3 in the present invention is easier to install, position and design the dimension of rotary-cut punching. Preferably, the end face with the changed placing angle is parallel to the main section of the end face, and the angle of the light beam when the light beam is incident is changed by adjusting the placing angle of the optical wedge. The self distance of the square optical wedge 3 can influence the offset, and meanwhile, the placing angle of the optical wedge is equivalent to the incident angle of the light beam, so that the placing angle can be adjusted manually or by an inclination angle adjusting structure, the offset direction of the light beam after passing through is determined by the wedge angle and the placing angle, and the offset direction can be flexibly adjusted according to the actual situation. The inclination angle adjusting mechanism is also an existing mechanism, can adopt a remote-controlled battery to drive a deflection motor to rotate so as to realize the adjustment of the placed inclination angle, can improve the deflection precision by using the deflection motor, can improve the precision of the upper surface hole taper and the lower surface hole taper of the device adjustment along with the improvement of the deflection precision, does not need to use a brush structure on a rotating structure to control the deflection motor, improves the reliability of the deflection adjustment of a thick optical wedge, can realize the real-time taper adjustment of rotary cutting punching, and processes the hole with a complex structure. So far, the mode of specifically punching can be regarded as, there is the declination after laser skew and the light emergence in square optical wedge 3, after the light beam passes through the lens subassembly again, because the light beam has the skew to add the declination, the light path that the light beam arrived the focus at last can have one side light path direction for perpendicular, the condition of one side for the slope, through the compound mode of adjusting square optical wedge 3 and battery of lens, the one side that can appear the slope passes through the optical axis, the motor drives the rotation and can appear the perpendicular limit in the outside, this can be favorable to beating out non-tapered hole.

As an optimization of the embodiment of the present invention, the apparatus further comprises a connection fixture 2 for fixing the optical wedge. In this embodiment, the optical wedge can be fixed by a connection fixture 2, specifically, the connection fixture 2 wraps the optical wedge therein to leave a channel for the light beam to enter, and then the connection fixture 2 is connected with the driving mechanism to protect the optical wedge from abrasion, and also to facilitate the connection of the optical wedge with the driving mechanism (i.e., the hollow motor 1), specifically, the hollow motor 1 is installed above the connection fixture 2, and the two are coaxially arranged. The connection fixture 2 is preferably a metal device.

As an optimized scheme of the embodiment of the invention, the device further comprises a working platform for placing the material to be punched, wherein the working platform is arranged on one side of the second convex lens 6, which is far away from the first convex lens 5. In this embodiment, the working platform is used for placing a material to be punched, and the laser focused by the two convex lenses directly acts on the working platform, so that laser punching of the material is realized.

One specific example is as follows:

wherein, the light source is a laser; a square optical wedge 3 and two convex lenses are adopted; according to the parameters of the laser, the spot size of the laser beam after being focused is 27 μm.

Specifically, as shown in fig. 2, in the rotary-cut punching device, the square optical wedge 3 can be rotated left and right to change the placing angle, and the two convex lenses can be moved up and down to adjust the distance, so as to control the overall focal length. The center of the whole device is positioned on the optical axis. The laser beam is deviated and has an inclination angle after passing through the square optical wedge 3, and the laser beam is focused by the convex lens after being deviated and emitted and then is operated. In this embodiment, the wedge angle of the square optical wedge 3 is preset to be 0.17 °, the placing angle is 8.9 °, the focal length of a single convex lens in the lens assembly is 20cm, the distance between two convex lenses is 60cm, and the focal length formed by calculating the lens assembly is 20 cm; the square optical wedge 3 rotates 5 degrees anticlockwise, which means that light beams enter the optical wedge at an angle of 5 degrees, the light beams deviate 1.47cm towards the right side after passing through the optical wedge, meanwhile, the light beams obliquely exit at a tiny angle of 0.08 degrees, the focus of the light beam focusing deviates 28 microns from the position of an optical axis after being focused by a lens, a hole of 83 microns is formed under the action of a focusing light spot, finally, the light path passes through a lens assembly and is shot on a material at an angle with one side vertical to the other side, the focus is lowered again, the upper aperture and the lower aperture of the whole hole are the same, and a hole without taper is shot.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A rotary-cut perforating device, including the laser instrument that is used for output laser, its characterized in that: the laser device comprises a laser device, a rotatable optical wedge and a lens assembly used for focusing laser beams, wherein the optical wedge is provided with a light path channel capable of adjusting the emitting angle of laser, the lens assembly comprises at least two convex lenses with adjustable intervals, and the laser device, the optical wedge, the first convex lens and the second convex lens are sequentially arranged along the transmission direction of the laser.

2. The rotary atherectomy perforating device of claim 1, wherein: and the driving mechanism is used for driving the optical wedge to rotate.

3. The rotary atherectomy perforating device of claim 2, wherein: the driving mechanism comprises a hollow motor, and the optical wedge is connected to the output end of the hollow motor.

4. The rotary atherectomy perforating device of claim 2, wherein: the optical wedge is detachably connected with the driving mechanism.

5. The rotary atherectomy perforating device of claim 1, wherein: and the distance adjusting mechanism is used for adjusting the distance between the two convex lenses.

6. The rotary atherectomy perforating device of claim 1, wherein: the optical wedge is a square optical wedge with an adjustable inclined posture.

7. The rotary atherectomy perforating device of claim 6, wherein: the optical wedge device also comprises an inclination angle adjusting mechanism used for adjusting the inclination posture of the square optical wedge.

8. The rotary atherectomy perforating device of claim 6, wherein: the square optical wedge is provided with four side faces, each side face is perpendicular to the incident face, and in the process of adjusting the inclined posture of the square optical wedge, one group of two opposite side faces are always located in the corresponding planes.

9. The rotary atherectomy perforating device of claim 6, wherein: the wedge angle of the square optical wedge is smaller than 1 degree, and the included angle between the inclination direction of the square optical wedge and the vertical direction is smaller than 20 degrees.

10. The rotary atherectomy perforating device of claim 1, wherein: and the connecting fixture is used for fixing the optical wedge.