CN115274414A - 半导体器件的制造方法 - Google Patents

半导体器件的制造方法 Download PDF

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Publication number
CN115274414A
CN115274414A CN202210417034.5A CN202210417034A CN115274414A CN 115274414 A CN115274414 A CN 115274414A CN 202210417034 A CN202210417034 A CN 202210417034A CN 115274414 A CN115274414 A CN 115274414A
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CN
China
Prior art keywords
oxide film
transistor
film
silicon oxide
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210417034.5A
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English (en)
Chinese (zh)
Inventor
清水秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Electronics Corp
Original Assignee
Renesas Electronics Corp
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Filing date
Publication date
Application filed by Renesas Electronics Corp filed Critical Renesas Electronics Corp
Publication of CN115274414A publication Critical patent/CN115274414A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H10B41/42—Simultaneous manufacture of periphery and memory cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/031—Manufacture or treatment of data-storage electrodes
    • H10D64/035—Manufacture or treatment of data-storage electrodes comprising conductor-insulator-conductor-insulator-semiconductor structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0144—Manufacturing their gate insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H10B41/42—Simultaneous manufacture of periphery and memory cells
    • H10B41/49—Simultaneous manufacture of periphery and memory cells comprising different types of peripheral transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0411—Manufacture or treatment of FETs having insulated gates [IGFET] of FETs having floating gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/68—Floating-gate IGFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/68—Floating-gate IGFETs
    • H10D30/681—Floating-gate IGFETs having only two programming levels
    • H10D30/683—Floating-gate IGFETs having only two programming levels programmed by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
CN202210417034.5A 2021-04-30 2022-04-20 半导体器件的制造方法 Pending CN115274414A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021077655A JP7503024B2 (ja) 2021-04-30 2021-04-30 半導体装置の製造方法
JP2021-077655 2021-04-30

Publications (1)

Publication Number Publication Date
CN115274414A true CN115274414A (zh) 2022-11-01

Family

ID=81327396

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210417034.5A Pending CN115274414A (zh) 2021-04-30 2022-04-20 半导体器件的制造方法

Country Status (6)

Country Link
US (1) US11882697B2 (enExample)
EP (1) EP4084055A1 (enExample)
JP (1) JP7503024B2 (enExample)
KR (1) KR20220149426A (enExample)
CN (1) CN115274414A (enExample)
TW (1) TW202308131A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230065598A (ko) * 2021-11-05 2023-05-12 삼성전자주식회사 반도체 장치 및 반도체 장치의 제조 방법

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6890450B2 (en) * 2001-02-02 2005-05-10 Intel Corporation Method of providing optical quality silicon surface
JP4859290B2 (ja) 2001-06-21 2012-01-25 富士通セミコンダクター株式会社 半導体集積回路装置の製造方法
KR100437451B1 (ko) * 2002-05-07 2004-06-23 삼성전자주식회사 트랩형 비휘발성 메모리 장치의 제조 방법
TW594944B (en) * 2003-06-05 2004-06-21 Taiwan Semiconductor Mfg Method of forming an embedded flash memory device
JP2005026380A (ja) * 2003-06-30 2005-01-27 Toshiba Corp 不揮発性メモリを含む半導体装置及びその製造方法
US7084035B2 (en) 2004-04-13 2006-08-01 Ricoh Company, Ltd. Semiconductor device placing high, medium, and low voltage transistors on the same substrate
JP2006245046A (ja) * 2005-02-28 2006-09-14 Toshiba Microelectronics Corp 半導体装置の製造方法
JP2010183003A (ja) * 2009-02-09 2010-08-19 Renesas Electronics Corp 半導体装置の製造方法および半導体装置
JP5549411B2 (ja) * 2010-06-18 2014-07-16 富士通セミコンダクター株式会社 半導体素子の製造方法、半導体メモリの製造方法、及び半導体素子
JP2013004764A (ja) * 2011-06-17 2013-01-07 Panasonic Corp 半導体記憶装置の製造方法
JP2013201335A (ja) * 2012-03-26 2013-10-03 Citizen Holdings Co Ltd 半導体装置の製造方法及び半導体装置
TW201614766A (en) 2014-10-15 2016-04-16 Powerchip Technology Corp Method for fabricating semiconductor device
JP2019079938A (ja) 2017-10-25 2019-05-23 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法

Also Published As

Publication number Publication date
JP7503024B2 (ja) 2024-06-19
TW202308131A (zh) 2023-02-16
EP4084055A1 (en) 2022-11-02
US20220352189A1 (en) 2022-11-03
KR20220149426A (ko) 2022-11-08
JP2022171175A (ja) 2022-11-11
US11882697B2 (en) 2024-01-23

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