CN115255854A - Desoldering method for target material assembly with welding defects - Google Patents
Desoldering method for target material assembly with welding defects Download PDFInfo
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- CN115255854A CN115255854A CN202210927505.7A CN202210927505A CN115255854A CN 115255854 A CN115255854 A CN 115255854A CN 202210927505 A CN202210927505 A CN 202210927505A CN 115255854 A CN115255854 A CN 115255854A
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- 238000003466 welding Methods 0.000 title claims abstract description 87
- 230000007547 defect Effects 0.000 title claims abstract description 44
- 239000013077 target material Substances 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000001125 extrusion Methods 0.000 claims abstract description 93
- 238000001513 hot isostatic pressing Methods 0.000 claims description 9
- 238000003825 pressing Methods 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 238000003754 machining Methods 0.000 abstract description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 239000010936 titanium Substances 0.000 description 10
- 229910052719 titanium Inorganic materials 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
Abstract
The invention relates to a desoldering method for a welding defect target assembly, which comprises the following steps: assembling the welding defect target assembly and the gasket, and then sequentially performing first extrusion and second extrusion to obtain a separated target and a separated back plate; the first extrusion is to arrange a first cushion block on a back plate of the welding defect target assembly for extrusion; the second extrusion is that a second cushion block is arranged on the backboard after the first extrusion for extrusion; the diameter of the first pad is greater than the diameter of the second pad. According to the desoldering method provided by the invention, the specific extrusion process is adopted to be matched with the extrusion assembly, so that the target material assembly with the welding defects is desoldered efficiently, and the welding surface of the target material and the back plate after desoldering can be subjected to secondary welding after leveling and machining.
Description
Technical Field
The invention relates to the field of targets, in particular to a desoldering method for a target assembly with welding defects.
Background
At present, a target assembly is used as a key raw material required in sputtering coating, and the target and a back plate are generally required to be welded in the preparation process, such as diffusion welding, brazing and the like.
For example, CN110565057a discloses a method for binding a TFT target and a copper back plate, which comprises the following steps: 1) Preparing materials for standby; 2) Heating pretreatment: heating the target blank and the back plate simultaneously; 3) Metallization pretreatment: carrying out ultrasonic indium coating pretreatment on the target blank and the back plate; 4) Binding and attaching treatment: and injecting indium solder into the welding surface of the back plate, and adjusting the position of the target blank to ensure that the target blank is attached to the binding area of the back plate at a certain inclination angle. The binding method of the scheme can effectively improve the binding quality of the TFT target, so that the target obtained by binding has a welding rate as high as 98.5%.
CN111822847A discloses a rotary friction welding method of a target assembly, which comprises the following steps: s1, pretreatment before welding: polishing the end faces to be welded of the target A and the target B, and performing pre-welding treatment on the end faces to be welded of the A, B target; s2, assembling a target material: respectively clamping the A, B target material at a rotating end and a sliding end of a friction welding machine, and setting welding parameters; s3, welding a target: the friction welding machine is operated to carry out friction welding of A, B target materials, the target materials are installed at the rotating end to rotate, the target materials are installed at the sliding end to slide and contact with the target materials at the rotating end, a telescopic contact is additionally arranged during welding of a contact interface to carry out top touch processing on a welding seam, and the top touch processing specifically comprises the following steps: and (3) after the welding of the contact interface is started, the axial shortening amount of the backspacing is 0.5-1mm, the excessive flash part of the welding seam is contacted and treated through the telescopic contact, and the welding seam is reset after being kept for 1-2 s. The scheme can improve the use consumption of the rotary friction welding target, reduce the overflow flash of the welding line and improve the strength of the rotary friction welding joint.
However, in the existing welding method, it cannot be guaranteed that the welding requirements can be met in hundreds of percent in the welding process, and a defective product still exists, but a certain utilization value still exists in the defective product.
Disclosure of Invention
In view of the problems in the prior art, the present invention aims to provide a desoldering method for a target assembly with a welding defect, so as to solve the problem that the desoldering is difficult when the target assembly with the welding defect is recovered, and avoid the waste of the backing plate.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a desoldering method for a welding defect target assembly, which comprises the following steps:
assembling the welding defect target assembly and the gasket, and then sequentially performing first extrusion and second extrusion to obtain a separated target and a separated back plate;
the first extrusion is to weld the defective target assembly the back plate is provided with a first cushion block for extrusion;
the second extrusion is that a second cushion block is arranged on the backboard after the first extrusion for extrusion;
the diameter of the first pad is greater than the diameter of the second pad.
According to the desoldering method provided by the invention, a specific extrusion process is adopted to be matched with the extrusion assembly, so that the high-efficiency desoldering of the target assembly with the welding defects is realized, the welding surface of the backing plate and the target after desoldering can be welded for the second time after reworking and reworking, and the waste of the backing plate material is avoided.
In the invention, when the second extrusion is carried out, the first cushion block on the back plate needs to be removed, and then the second cushion block is arranged for carrying out the second extrusion, namely the first cushion block corresponds to the first extrusion process, and the second cushion block corresponds to the second extrusion process.
According to a preferred technical scheme of the invention, the welding defect target assembly comprises a target and a back plate which are subjected to hot isostatic pressing welding.
In the present invention, the welding-defective target assembly is obtained by diffusion pressure welding (such as hot isostatic pressing welding, but not including diffusion welding with an intermediate layer), because when the target assembly is brazed, the backing plate and the target are severely deformed or even torn, and the deformed or torn backing plate and target are not separated.
In the invention, the welding defect target material component refers to that the welding bonding rate of the target material and the back plate is less than or equal to 99%.
In the invention, the target is a titanium target.
In the invention, the material of the back plate can be copper alloy, copper back plate, titanium or titanium alloy and the like.
According to the scheme of the invention, if the tantalum target material and the aluminum target material are welded by hot isostatic pressing, the product can be gradually deformed along with the pressing of the pressure during desoldering by using the method, and the product cannot be separated. In the invention, the tensile stress of the target material and the tensile stress of the back plate are both larger than the engaging force between the target material and the back plate, so that the target material and the back plate can bear the extrusion effect in the desoldering process.
As a preferable technical scheme of the invention, the first extrusion is carried out under constant pressure after the pressure head is contacted with the first cushion block.
Preferably, the constant pressure is provided by an oil press.
Preferably, the constant pressure is 200-315t, such as 200t, 202t, 204t, 206t, 208t, 210t, 212t, 214t, 216t, 218t, 220t, 222t, 224t, 226t, 228t, 230t, 232t, 234t, 236t, 238t, 240t, 242t, 244t, 246t, 248t, 250t, 252t, 254t, 256t, 258t, 260t, 262t, 264t, 266t, 268t, 270t, 272t, 274t, 276t, 278t, 280t, 282t, 284t, 286t, 288t, 290t, 292t, 294t, 296t, 298t, 300t, 302t, 304t, 306t, 308t, 310t, 312t, 314t, or 315t, etc., but not limited to the recited values, and other non-recited values in this range apply equally.
As a preferable embodiment of the present invention, the vertical distance traveled by the indenter after the first pressing is brought into contact with the first pad is 4 to 6cm, for example, 4cm, 4.05cm, 4.1cm, 4.15cm, 4.2cm, 4.25cm, 4.3cm, 4.35cm, 4.4cm, 4.45cm, 4.5cm, 4.55cm, 4.6cm, 4.65cm, 4.7cm, 4.75cm, 4.8cm, 4.85cm, 4.9cm, 4.95cm, 5cm, 5.05cm, 5.1cm, 5.15cm, 5.2cm, 5.25cm, 5.3cm, 5.35cm, 5.4cm, 5.45cm, 5.5cm, 5.55cm, 5.6cm, 5.65cm, 5.7cm, 5.75cm, 5.8cm, 5.85cm, 5.95cm, 6cm, or the like, and other values are not specifically recited and applicable.
As a preferred embodiment of the present invention, the diameter of the first spacer is 50 to 55% of the diameter of the back plate, for example, 50%, 50.1%, 50.2%, 50.3%, 50.4%, 50.5%, 50.6%, 50.7%, 50.8%, 50.9%, 51%, 51.1%, 51.2%, 51.3%, 51.4%, 51.5%, 51.6%, 51.7%, 51.8%, 51.9%, 52%, 52.1%, 52.2%, 52.3%, 52.4%, 52.5%, 52.6%, 52.7%, 52.8%, 52.9%, 53%, 53.1%, 53.2%, 53.3%, 53.4%, 53.5%, 53.6%, 53.7%, 53.8%, 53.9%, 54%, 54.1%, 54.2%, 54.3%, 54.4%, 54.5%, 54.6%, 54.7%, 54.8%, 54.9%, or 55%, but the above-mentioned ranges are not limited thereto.
Preferably, the center lines of the first cushion block, the back plate and the pressure head in the first extrusion are coincident.
As a preferable technical scheme of the invention, the second extrusion is carried out under constant pressure after the pressure head is contacted with the second cushion block.
Preferably, the constant pressure is provided by an oil press.
Preferably, the constant pressure is 200-315t, such as 200t, 202t, 204t, 206t, 208t, 210t, 212t, 214t, 216t, 218t, 220t, 222t, 224t, 226t, 228t, 230t, 232t, 234t, 236t, 238t, 240t, 242t, 244t, 246t, 248t, 250t, 252t, 254t, 256t, 258t, 260t, 262t, 264t, 266t, 268t, 270t, 272t, 274t, 276t, 278t, 280t, 282t, 284t, 286t, 288t, 290t, 292t, 294t, 296t, 298t, 300t, 302t, 304t, 306t, 308t, 310t, 312t, 314t, or 315t, etc., but not limited to the recited values, and other non-recited values in this range apply equally.
As a preferable embodiment of the present invention, the vertical distance traveled by the indenter after the contact between the indenter and the second pad in the second extrusion is 4 to 6cm, for example, 4cm, 4.05cm, 4.1cm, 4.15cm, 4.2cm, 4.25cm, 4.3cm, 4.35cm, 4.4cm, 4.45cm, 4.5cm, 4.55cm, 4.6cm, 4.65cm, 4.7cm, 4.75cm, 4.8cm, 4.85cm, 4.9cm, 4.95cm, 5cm, 5.05cm, 5.1cm, 5.15cm, 5.2cm, 5.25cm, 5.3cm, 5.35cm, 5.4cm, 5.45cm, 5.5cm, 5.55cm, 5.6cm, 5.65cm, 5.7cm, 5.75cm, 5.8cm, 5.85cm, 5.95cm, 6cm, or the like, and other values are not specifically recited, but not limited to the same.
In a preferred embodiment of the present invention, the diameter of the second spacer is 22 to 25% of the diameter of the back plate, and may be, for example, 22%, 22.1%, 22.2%, 22.3%, 22.4%, 22.5%, 22.6%, 22.7%, 22.8%, 22.9%, 23%, 23.1%, 23.2%, 23.3%, 23.4%, 23.5%, 23.6%, 23.7%, 23.8%, 23.9%, 24%, 24.1%, 24.2%, 24.3%, 24.4%, 24.5%, 24.6%, 24.7%, 24.8%, 24.9%, or 25%, but not limited to the above values, and other values not listed in this range are also applicable.
Preferably, the center lines of the second cushion block, the back plate and the pressure head in the second extrusion are coincident.
In the present invention, the thickness of the first and second blocks may be 27 to 30mm, for example, 27mm, 27.1mm, 27.2mm, 27.3mm, 27.4mm, 27.5mm, 27.6mm, 27.7mm, 27.8mm, 27.9mm, 28mm, 28.1mm, 28.2mm, 28.3mm, 28.4mm, 28.5mm, 28.6mm, 28.7mm, 28.8mm, 28.9mm, 29mm, 29.1mm, 29.2mm, 29.3mm, 29.4mm, 29.5mm, 29.6mm, 29.7mm, 29.8mm, 29.9mm or 30mm, etc., but is not limited thereto, and other values not listed in the range are also applicable.
In the present invention, the contact between the indenter and the pad means that the perpendicular distance between the indenter and the pad is not more than 3mm, and may be, for example, 3mm, 2.8mm, 2.6mm, 2.4mm, 2.2mm, 2mm or 1mm, but is not limited to the values listed, and other values not listed in the range are also applicable.
As a preferred embodiment of the present invention, the gasket is a ring gasket.
Preferably, the diameter of the inner circle of the annular gasket is larger than the diameter of the target material.
Preferably, the diameter of the outer circle of the annular gasket is less than or equal to that of the back plate.
In the invention, the depth of the gasket is larger than the thickness of the target material, so that the gasket can support the back plate after the target material assembly and the gasket are assembled, the target material is in a suspended state, a certain space is provided for subsequent extrusion, the diameter of the target material assembly is smaller than that of the back plate, specifically, the depth of the gasket can be 1.25-1.7 times of the thickness of the target material, for example, the amount may be 1.25 times, 1.26 times, 1.27 times, 1.28 times, 1.29 times, 1.3 times, 1.31 times, 1.32 times, 1.33 times, 1.34 times, 1.35 times, 1.36 times, 1.37 times, 1.38 times, 1.39 times, 1.4 times, 1.41 times, 1.42 times, 1.43 times, 1.44 times, 1.45 times, 1.46 times, 1.47 times, 1.48 times, 1.49 times, 1.5 times, 1.51 times, 1.52 times, 1.53 times, 1.54 times, 1.55 times, 1.56 times, 1.57 times, 1.58 times, 1.59 times, 1.6 times, 1.61 times, 1.62 times, 1.63 times, 1.64 times, 1.65 times, 1.66 times, 1.67 times, 1.68 times, 1.69 times, 1.7 times, or the same values as those listed above, but not limited to other values are also applicable.
As a preferable technical solution of the present invention, the desoldering method includes:
assembling the welding defect target assembly and the gasket, and then sequentially performing first extrusion and second extrusion to obtain a separated target and a separated back plate;
the welding defect target assembly comprises a target and a back plate which are welded through hot isostatic pressing; the gasket is an annular gasket, the diameter of the inner circle of the annular gasket is larger than that of the target material, and the diameter of the outer circle of the annular gasket is smaller than or equal to that of the back plate;
the first extrusion is that a first cushion block is arranged on a back plate of the welding defect target material assembly for extrusion, the pressure head is in contact with the first cushion block and then is extruded at constant pressure, the constant pressure is provided by an oil press to be 200-315t, and the vertical distance of the pressure head after the pressure head is in contact with the first cushion block is 4-6cm;
the second extrusion is that a second cushion block is arranged on the backboard after the first extrusion for extrusion, the pressure head and the second cushion block are contacted and then extruded at constant pressure, the constant pressure is provided by an oil press, the constant pressure is 200-315t, and the vertical distance traveled by the pressure head is 4-6cm after the pressure head and the second cushion block are contacted;
the diameter of the first cushion block is larger than that of the second cushion block, the diameter of the first cushion block is 50-55% of that of the back plate, and the center lines of the first cushion block, the back plate and the pressure head in the first extrusion are coincided; the diameter of the second cushion block is 22-25% of the diameter of the back plate, and the center lines of the second cushion block, the back plate and the pressure head are coincided.
Compared with the prior art, the invention has the following beneficial effects:
according to the desoldering method provided by the invention, the cushion block with a specific size is adopted to be combined with the pressure of the pressure head and the pressing stroke of the pressure head, the specific large-area pressing block is adopted to perform primary extrusion to realize the pre-separation of the target material and the back plate, and then the small-area pressing block is used for performing secondary extrusion to realize the complete separation of the target material and the back plate, the pressure change treatment for multiple times on different extrusion points is not needed, the desoldering process is obviously simplified, and the secondary welding can be performed on the welding surface of the target material and the back plate after leveling and machining.
Detailed Description
To better illustrate the invention and to facilitate the understanding of the technical solutions thereof, typical but non-limiting examples of the invention are as follows:
example 1
The embodiment provides a desoldering method for a welding defect target assembly, which comprises the following steps:
assembling the welding defect target assembly and the gasket, and then sequentially performing first extrusion and second extrusion to obtain a separated target and a separated back plate;
the welding defect target assembly comprises a titanium target with the diameter of 434mm and the thickness of 14.8mm and a copper back plate with the diameter of 534mm, the welding bonding rate is 75%, and the welding defect target assembly is obtained by hot isostatic pressing welding; the gasket is an annular gasket, the diameter of the inner circle of the annular gasket is larger than that of the target, the diameter of the outer circle of the annular gasket is smaller than or equal to that of the back plate, the depth of the gasket is 1.5 times of the thickness of the target, namely 22.2mm, the diameter of the inner circle of the annular gasket can be directly 450mm, and the diameter of the outer circle of the annular gasket can be 534mm.
The first extrusion is that a first cushion block is arranged on a back plate of the welding defect target material assembly for extrusion, the pressure head is in contact with the first cushion block and then is extruded at constant pressure, the constant pressure is provided for 300t through an oil press, and the vertical distance of the pressure head after the pressure head is in contact with the first cushion block is 4.3cm;
the second extrusion is that a second cushion block is arranged on the backboard after the first extrusion for extrusion, the pressure head and the second cushion block are contacted and then extruded at constant pressure, the constant pressure is provided by an oil press, the constant pressure is 200t, and the vertical distance of the pressure head after the pressure head and the second cushion block are contacted is 6cm;
the diameter of the first cushion block is larger than that of the second cushion block, the diameter of the first cushion block is 52% of that of the back plate and is 277.68mm, and the center lines of the first cushion block, the back plate and the pressure head in the first extrusion are overlapped; the diameter of the second cushion block is 23% of the diameter of the back plate and is 122.82mm, and the center lines of the second cushion block, the back plate and the pressure head are coincided.
The thickness of the first cushion block and the second cushion block is 30mm.
After the desoldering, the target and the assembly are completely separated.
Example 2
The embodiment provides a desoldering method for a welding defect target assembly, which comprises the following steps:
assembling the welding defect target assembly and the gasket, and then sequentially performing first extrusion and second extrusion to obtain a separated target and a separated back plate;
the welding defect target assembly comprises a titanium target with the diameter of 357mm and the thickness of 12.6mm and a copper back plate with the diameter of 460mm, the welding bonding rate is 65%, and the welding defect target assembly is obtained by hot isostatic pressing welding; the gasket is an annular gasket, the diameter of the inner circle of the annular gasket is larger than that of the target, the diameter of the outer circle of the annular gasket is smaller than or equal to that of the back plate, the depth of the gasket is 1.7 times of the thickness of the target, namely 21.42mm, the inner circle of the annular gasket can be directly 380mm, and the diameter of the outer circle can be 440mm.
The first extrusion is that a first cushion block is arranged on a back plate of the welding defect target assembly for extrusion, the pressure head is in contact with the first cushion block and then is extruded at constant pressure, the constant pressure is provided by an oil press to be 250t, and the vertical distance of the pressure head after the pressure head is in contact with the first cushion block is 6cm;
the second extrusion is that a second cushion block is arranged on the back plate after the first extrusion for extrusion, the pressure head is in contact with the second cushion block and then is extruded at constant pressure, the constant pressure is provided by an oil press, the constant pressure is 315t, and the vertical distance of the pressure head after the pressure head is in contact with the second cushion block is 4cm;
the diameter of the first cushion block is larger than that of the second cushion block, and the diameter of the first cushion block is 50% of that of the back plate and is 230mm; the center lines of the first cushion block, the back plate and the pressure head in the first extrusion are coincided; the diameter of the second cushion block is 24% of the diameter of the back plate and is 110.4mm, and the center lines of the second cushion block, the back plate and the pressure head are coincided.
The thickness of the first cushion block and the second cushion block is 27mm.
After the desoldering, the target and the assembly are completely separated.
Example 3
The embodiment provides a desoldering method for a welding defect target assembly, which comprises the following steps:
assembling the welding defect target assembly and the gasket, and then sequentially performing first extrusion and second extrusion to obtain a separated target and a separated back plate;
the welding defect target assembly comprises a target with the diameter of 434mm and the thickness of 14.8mm and a back plate with the diameter of 534mm, the welding bonding rate is 57%, and the welding defect target assembly is obtained by hot isostatic pressing welding; the gasket is an annular gasket, the diameter of the inner circle of the annular gasket is larger than that of the target, the diameter of the outer circle of the annular gasket is smaller than or equal to that of the back plate, the depth of the gasket is 1.25 times of the thickness of the target, namely 18.5mm, the diameter of the inner circle of the annular gasket can be directly 450mm, and the diameter of the outer circle of the annular gasket can be 534mm.
The first extrusion is that a first cushion block is arranged on a back plate of the welding defect target assembly for extrusion, the pressure head is in contact with the first cushion block and then is extruded at constant pressure, the constant pressure is provided by an oil press to be 250t, and the vertical distance of the pressure head after the pressure head is in contact with the first cushion block is 4.7cm;
the second extrusion is that a second cushion block is arranged on the backboard after the first extrusion for extrusion, the pressure head is in contact with the second cushion block and then is extruded at constant pressure, the constant pressure is provided by an oil press, the constant pressure is 243t, and the vertical distance of the pressure head after the pressure head is in contact with the second cushion block is 5.3cm;
the diameter of the first cushion block is larger than that of the second cushion block, and the diameter of the first cushion block is 55 percent of the diameter of the back plate and is 293.7mm; the center lines of the first cushion block, the back plate and the pressure head in the first extrusion are coincided; the diameter of the second cushion block is 22% of the diameter of the back plate and is 117.48mm; the center lines of the second cushion block, the back plate and the pressure head are overlapped.
The thickness of the first cushion block and the second cushion block is 29mm.
After the desoldering, the target and the component are completely separated.
Example 4
The embodiment provides a desoldering method for a welding defect target assembly, which comprises the following steps:
assembling the welding defect target assembly and the gasket, and then sequentially performing first extrusion and second extrusion to obtain a separated target and a separated back plate;
the welding defect target assembly comprises a target with the diameter of 224mm and the thickness of 8.6mm and a back plate with the diameter of 334mm, the welding bonding rate is 66%, and the welding defect target assembly is obtained by hot isostatic pressing welding; the gasket is an annular gasket, the diameter of the inner circle of the annular gasket is larger than that of the target, the diameter of the outer circle of the annular gasket is smaller than or equal to that of the back plate, the depth of the gasket is 1.33 times of the thickness of the target, namely 11.44mm, the diameter of the inner circle of the annular gasket can be 244mm directly, and the diameter of the outer circle can be 334mm.
The first extrusion is that a first cushion block is arranged on a back plate of the welding defect target assembly for extrusion, the pressure head is in contact with the first cushion block and then is extruded at constant pressure, the constant pressure is provided by an oil press to be 226t, and the vertical distance of the pressure head after the pressure head is in contact with the first cushion block is 5.3cm;
the second extrusion is that a second cushion block is arranged on the back plate after the first extrusion for extrusion, the pressure head and the second cushion block are in contact and then are extruded at constant pressure, the constant pressure is provided by an oil press, the constant pressure is 276t, and the vertical distance traveled by the pressure head is 4.7cm after the pressure head and the second cushion block are in contact;
the diameter of the first cushion block is larger than that of the second cushion block, and the diameter of the first cushion block is 54 percent of the diameter of the back plate and is 180.36mm; the center lines of the first cushion block, the back plate and the pressure head in the first extrusion are coincided; the diameter of the second cushion block is 25% of that of the back plate and is 83.5mm; the center lines of the second cushion block, the back plate and the pressure head are overlapped.
The thickness of the first cushion block and the second cushion block is 28mm.
After the desoldering, the target and the assembly are completely separated.
Example 5
The difference from the embodiment 1 is only that the target material assembly is replaced by the equal-size tantalum target material and copper back plate assembly, and after the desoldering, the tantalum target material and the copper back plate cannot be separated, and only the tantalum target material is pulled and deformed.
Example 6
The difference from the embodiment 1 is only that the target material assembly is replaced by an aluminum target material and a titanium back plate assembly with equal size, and after the above-mentioned desoldering, the aluminum target material and the titanium back plate cannot be separated, and only the aluminum target material is pulled and deformed.
Example 7
The difference from the embodiment 1 is that the center line of the first cushion block is not coincident with the centers of the back plate and the pressure head, namely, the center line of the first cushion block is deviated, but the surface of the cushion block is kept coincident with the surface of the back plate, and after the desoldering, the titanium material and the copper back plate cannot be separated, and a part of area still has adhesion.
Example 8
The only difference from example 1 is that the centre line of the second spacer block is not coincident with the centre of the back plate and ram, i.e. there is an offset, but the surfaces of the spacer block and the back plate are kept coincident.
After the desoldering, the titanium material and the copper back plate can not be separated, and part of area is still adhered.
Example 9
The only difference from example 1 is that the size of the second shoe was replaced with the size of the first shoe, i.e., the shoes in 2 extrusion passes were the same. After the desoldering, the titanium material and the copper back plate can not be separated, and part of area is still adhered.
Example 10
The only difference from example 1 is that the size of the first ram was replaced with the size of the second ram, i.e. the ram was the same size during 2 extrusions. After the desoldering, the titanium material and the copper back plate can not be separated, and part of area is still adhered.
Example 11
The difference from the example 1 is only that the target with the welding bonding rate of 99.2% is selected for desoldering. The target material and the back plate are still adhered together after treatment.
According to the results of the embodiment, the desoldering method provided by the invention realizes efficient desoldering of the target material assembly with the welding defect by adopting the specific extrusion process and the extrusion assembly, so that the welding surface of the target material and the back plate after desoldering can be subjected to secondary welding after simple machining.
It is to be understood that the present invention has been described in detail with reference to the above embodiments, but the present invention is not limited to the above detailed structural features, and it is not intended that the present invention be limited to the above detailed structural features. It should be understood by those skilled in the art that any modifications, equivalent substitutions of selected elements of the present invention, additions of auxiliary elements, selection of specific forms, etc., are intended to fall within the scope and disclosure of the present invention.
The preferred embodiments of the present invention have been described in detail, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.
It should be noted that, in the above embodiments, the various features described in the above embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, the present invention does not separately describe various possible combinations.
In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.
Claims (10)
1. A desoldering method for a welding defect target assembly is characterized by comprising the following steps:
assembling the welding defect target assembly and the gasket, and then sequentially performing first extrusion and second extrusion to obtain a separated target and a separated back plate;
the first extrusion is to arrange a first cushion block on a back plate of the welding defect target assembly for extrusion;
the second extrusion is that a second cushion block is arranged on the backboard after the first extrusion for extrusion;
the diameter of the first pad is larger than the diameter of the second pad.
2. The desoldering method of claim 1, wherein the weld-defect target assembly comprises a hot isostatic pressed welded target and backing plate.
3. The desoldering method according to claim 1 or 2, wherein the first pressing is performed at a constant pressure after the indenter is brought into contact with the first pad;
preferably, the constant pressure is provided by an oil press;
preferably, the constant pressure is 200-315t.
4. The desoldering method of claim 3, wherein the ram travels a vertical distance of 4-6cm after the first press and the first pad contact.
5. The desoldering method of claim 3 or 4, wherein a diameter of said first spacer is 50-55% of a diameter of said backing plate;
preferably, the center lines of the first cushion block, the back plate and the pressure head in the first extrusion are coincident.
6. The desoldering method of any of claims 1-5, wherein the second pressing is performed at a constant pressure after the indenter is contacted with the second pad;
preferably, the constant pressure is provided by an oil press;
preferably, the constant pressure is 200-315t.
7. The desoldering method of claim 6, wherein the ram travels a vertical distance of 4-6cm after the second press ram contacts the second pad.
8. The desoldering method of claim 6 or 7, wherein a diameter of said second pad is 22-25% of a diameter of said backing plate;
preferably, the center lines of the second cushion block, the back plate and the pressure head in the second extrusion are coincident.
9. The desoldering method of any of claims 1-8, wherein the gasket is an annular gasket;
preferably, the inner circle diameter of the annular gasket is larger than the diameter of the target material;
preferably, the diameter of the outer circle of the annular gasket is less than or equal to that of the back plate.
10. The desoldering method of any of claims 1-9, comprising:
assembling the welding defect target assembly and the gasket, and then sequentially performing first extrusion and second extrusion to obtain a separated target and a separated back plate;
the welding defect target assembly comprises a target and a back plate which are welded through hot isostatic pressing; the gasket is an annular gasket, the diameter of the inner circle of the annular gasket is larger than that of the target material, and the diameter of the outer circle of the annular gasket is smaller than or equal to that of the back plate;
the first extrusion is that a first cushion block is arranged on a back plate of the welding defect target assembly for extrusion, the pressure head is contacted with the first cushion block and then extruded at constant pressure, the constant pressure is provided by an oil press to be 200-315t, and the vertical distance traveled by the pressure head is 4-6cm after the pressure head is contacted with the first cushion block;
the second extrusion is that a second cushion block is arranged on the backboard after the first extrusion for extrusion, the pressure head and the second cushion block are contacted and then extruded at constant pressure, the constant pressure is provided by an oil press, the constant pressure is 200-315t, and the vertical distance traveled by the pressure head is 4-6cm after the pressure head and the second cushion block are contacted;
the diameter of the first cushion block is larger than that of the second cushion block, the diameter of the first cushion block is 50-55% of that of the back plate, and the center lines of the first cushion block, the back plate and the pressure head in the first extrusion are coincided; the diameter of the second cushion block is 22-25% of the diameter of the back plate, and the center lines of the second cushion block, the back plate and the pressure head are overlapped.
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| JPH11131225A (en) * | 1997-10-24 | 1999-05-18 | Dowa Mining Co Ltd | Sputtering target, joining and joining device therefor |
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| CN111185659A (en) * | 2020-02-18 | 2020-05-22 | 宁波江丰电子材料股份有限公司 | Diffusion welding method for titanium target and back plate and prepared titanium target assembly |
| CN113458729A (en) * | 2021-07-05 | 2021-10-01 | 宁波江丰电子材料股份有限公司 | Preparation method of planar special-shaped titanium target assembly |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH11131225A (en) * | 1997-10-24 | 1999-05-18 | Dowa Mining Co Ltd | Sputtering target, joining and joining device therefor |
| CN105689832A (en) * | 2014-11-28 | 2016-06-22 | 宁波江丰电子材料股份有限公司 | Target sealing-off method |
| CN105296944A (en) * | 2015-10-27 | 2016-02-03 | 有研亿金新材料有限公司 | Target material assembly with antioxidative plating |
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