CN115074808A - Electroplating carrying platform for placing packaging assembly and electroplating method - Google Patents

Electroplating carrying platform for placing packaging assembly and electroplating method Download PDF

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Publication number
CN115074808A
CN115074808A CN202110282406.3A CN202110282406A CN115074808A CN 115074808 A CN115074808 A CN 115074808A CN 202110282406 A CN202110282406 A CN 202110282406A CN 115074808 A CN115074808 A CN 115074808A
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electroplating
adhesive layer
receiving groove
support plate
notch
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王杰
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JCET Group Co Ltd
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Jiangsu Changjiang Electronics Technology Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06Suspending or supporting devices for articles to be coated
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)

Abstract

本发明提供一种用于放置封装组件的电镀载台以及电镀方法,所述电镀载台具有至少一个收容槽、限定所述收容槽的槽口的台面、自所述槽口的周缘朝向所述收容槽内突伸的环形粘合层;所述环形贴合层能够与封装组件的外接面的边缘以及所述边缘焊球相接合,使所述外接面以及外接面上的球栅阵列等部件密封于所述收容槽内,从而保护所述外接面以及位于所述外接面上的球栅阵列等部件,防止发生溢镀现象,适用于具有球栅阵列的封装组件的电镀工艺。

Figure 202110282406

The present invention provides an electroplating stage for placing package components and an electroplating method. The electroplating stage has at least one receiving groove, a table surface defining a notch of the receiving groove, and facing the notch from the periphery of the notch. An annular adhesive layer protruding in the receiving groove; the annular adhesive layer can be engaged with the edge of the outer surface of the package assembly and the edge solder balls, so that the outer surface and the components such as ball grid arrays on the outer surface It is sealed in the receiving groove, so as to protect the outer surface and the components such as the ball grid array on the outer surface, and prevent the phenomenon of overflow plating, and is suitable for the electroplating process of the package assembly with the ball grid array.

Figure 202110282406

Description

用于放置封装组件的电镀载台及电镀方法Electroplating stage for placing package components and electroplating method

技术领域technical field

本发明涉及制造封装组件领域,尤其涉及一种用于放置封装组件的电镀载台以及采用所述电镀载台对封装组件进行电镀的电镀方法。The present invention relates to the field of manufacturing package components, in particular to an electroplating carrier for placing package components and an electroplating method for electroplating the package components by using the electroplating carrier.

背景技术Background technique

现有的封装组件的电镀工艺主要包括如下两种:1)在电镀载台上设置UV膜,将外接面以及外接面上的部件嵌入UV膜内,以在电镀过程中,保护所述外接面不被电镀;2)在电镀载台上设置收容槽,并在载台上与收容槽边缘相对应的位置粘贴双面胶,将外接面的边缘搭接在双面胶上,此时外接面上的部件收容于所述收容槽内,以保护所述外接面不被电镀。The electroplating process of the existing package assembly mainly includes the following two: 1) A UV film is set on the electroplating stage, and the outer surface and the components on the outer surface are embedded in the UV film to protect the outer surface during the electroplating process. Not to be electroplated; 2) Set a receiving groove on the electroplating stage, and paste the double-sided tape on the carrier at the position corresponding to the edge of the receiving groove, and overlap the edge of the outer surface on the double-sided tape. At this time, the outer surface The upper part is accommodated in the accommodating groove to protect the outer surface from being electroplated.

但是,对于外接面上具有球栅阵列的封装组件而言,因球栅阵列中的焊球较高,而UV胶膜的厚度有限,焊球无法全部嵌入,易造成溢焊;同时,球栅阵列中的边缘焊球距外接面的距离较小,导致所述外接面也无法精准地搭载在双面胶上,也易造成溢焊,即,外接面上具有球栅阵列的封装组件不适合采用上述两种电镀工艺。However, for a package with a ball grid array on the external surface, because the solder balls in the ball grid array are relatively high and the thickness of the UV film is limited, the solder balls cannot be fully embedded, which is likely to cause overflow soldering; at the same time, the ball grid The distance between the edge solder balls in the array and the external surface is small, so that the external surface cannot be accurately mounted on the double-sided tape, and it is also easy to cause overflow soldering, that is, the package components with the ball grid array on the external surface are not suitable for The above two electroplating processes are used.

有鉴于此,有必要提供一种新的用于放置封装组件的电镀载台以及采用所述电镀载台对封装组件进行电镀的电镀方法以解决上述问题。In view of this, it is necessary to provide a new electroplating stage for placing package components and an electroplating method for electroplating package components by using the electroplating stage to solve the above problems.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于提供一种用于放置封装组件的电镀载台以及采用所述电镀载台对封装组件进行电镀的电镀方法,所述封装组件具有球栅阵列。The object of the present invention is to provide an electroplating stage for placing a package component and an electroplating method for electroplating a package component using the electroplating stage, and the package component has a ball grid array.

为实现上述发明目的,本发明采用如下技术方案:一种用于放置封装组件的电镀载台,具有至少一个收容槽、限定所述收容槽的槽口的台面、自所述槽口的周缘朝向所述收容槽内突伸的环形粘合层。In order to achieve the above purpose of the invention, the present invention adopts the following technical solutions: an electroplating stage for placing package components, having at least one receiving groove, a table surface defining a notch of the receiving groove, and facing from the peripheral edge of the notch The annular adhesive layer protruding in the receiving groove.

作为本发明进一步改进的技术方案,所述环形粘合层的内周开设有多个缺口。As a further improved technical solution of the present invention, the inner circumference of the annular adhesive layer is provided with a plurality of notches.

作为本发明进一步改进的技术方案,所述封装组件的外接面呈矩形,所述槽口呈矩形;所述缺口位于所述环形粘合层与所述槽口的直角相对应的位置处。As a further improved technical solution of the present invention, the outer surface of the package component is rectangular, and the notch is rectangular; the notch is located at a position corresponding to the right angle of the annular adhesive layer and the notch.

作为本发明进一步改进的技术方案,所述槽口的尺寸不小于所述外接面的尺寸,多个所述缺口的外端连接形成的环形的尺寸不大于所述外接面的尺寸。As a further improved technical solution of the present invention, the size of the notch is not smaller than the size of the outer surface, and the size of the ring formed by connecting the outer ends of the plurality of notches is not larger than the size of the outer surface.

作为本发明进一步改进的技术方案,靠近所述槽口的台面上贴设有第一粘合层,所述第一粘合层与所述环形粘合层一体设置。As a further improved technical solution of the present invention, a first adhesive layer is attached to the table surface near the notch, and the first adhesive layer is integrally provided with the annular adhesive layer.

作为本发明进一步改进的技术方案,所述电镀载台还包括自所述槽口朝向所述收容槽内突伸的支承板,所述支承板位于所述环形粘合层的下侧,所述支承板具有自所述槽口向所述收容槽内且向下倾斜延伸的支承状态。As a further improved technical solution of the present invention, the electroplating stage further includes a support plate protruding from the notch toward the receiving groove, the support plate is located on the lower side of the annular adhesive layer, the The support plate has a support state extending obliquely downward from the notch into the receiving groove.

作为本发明进一步改进的技术方案,所述支承板沿上下方向转动连接于所述槽口,所述环形粘合层贴设于所述支承板的上表面。As a further improved technical solution of the present invention, the support plate is rotatably connected to the notch in the up-down direction, and the annular adhesive layer is attached to the upper surface of the support plate.

作为本发明进一步改进的技术方案,所述支承板具有与所述槽口位于同一平面的水平状态,所述电镀载台还包括使所述支承板处于水平状态的弹性件。As a further improved technical solution of the present invention, the support plate has a horizontal state that is on the same plane as the notch, and the electroplating stage further includes an elastic member for keeping the support plate in a horizontal state.

作为本发明进一步改进的技术方案,所述弹性件为连接于所述支承板的下表面与所述收容槽之间的弹簧。As a further improved technical solution of the present invention, the elastic member is a spring connected between the lower surface of the support plate and the receiving groove.

作为本发明进一步改进的技术方案,所述封装组件具有外接面、设于所述外接面且具有多个焊球的球栅阵列,所述球栅阵列具有靠近所述外接面的边缘的边缘焊球;在所述封装组件与所述收容槽相对准后,处于水平状态的所述支承板与对应的边缘焊球相接触。As a further improved technical solution of the present invention, the package component has an outer surface, a ball grid array disposed on the outer surface and having a plurality of solder balls, and the ball grid array has edge solder close to the edge of the outer surface ball; after the package assembly is aligned with the receiving groove, the support plate in a horizontal state contacts the corresponding edge solder balls.

作为本发明进一步改进的技术方案,在所述封装组件与所述收容槽相对准后,处于水平状态的所述支承板的内端与对应的边缘焊球的最低点相接触。As a further improved technical solution of the present invention, after the package assembly is aligned with the receiving groove, the inner end of the support plate in a horizontal state contacts the lowest point of the corresponding edge solder ball.

为实现上述发明目的,本发明还提供一种采用上述的用于放置封装组件的电镀载台的电镀方法,包括如下步骤:In order to achieve the above purpose of the invention, the present invention also provides an electroplating method using the above-mentioned electroplating stage for placing package components, comprising the following steps:

将封装组件与所述收容槽相对准;Align the package assembly with the receiving groove;

将所述封装组件向下放置于所述收容槽内,使所述外接面的边缘与所述环形粘合层相接合;placing the package assembly downward in the receiving groove, so that the edge of the outer surface is engaged with the annular adhesive layer;

电镀;plating;

完成后,取出所述封装组件。After completion, the packaged assembly is removed.

本发明的有益效果是:本发明中的电镀载台通过在收容槽的边缘设置朝向所述收容槽内突伸的环形粘合层,使所述电镀载台适用于外接面具有球栅阵列的封装组件,在电镀的过程中,所述环形贴合层与所述外接面的边缘以及所述边缘焊球相接合,使所述外接面以及外接面上的球栅阵列等部件密封于所述收容槽内,从而保护所述外接面以及位于所述外接面上的球栅阵列等部件,防止发生溢镀现象,克服了外接面具有球栅阵列的封装组件电镀的工艺难点。The beneficial effect of the present invention is that: the electroplating stage in the present invention is provided with an annular adhesive layer protruding toward the receiving groove at the edge of the receiving groove, so that the electroplating carrying stage is suitable for use with a ball grid array on the outer surface. In the package assembly, during the electroplating process, the annular bonding layer is bonded to the edge of the outer surface and the edge solder balls, so that the outer surface and the components such as ball grid arrays on the outer surface are sealed to the outer surface. In the receiving groove, the outer surface and the components such as the ball grid array located on the outer surface are protected, the overflow plating phenomenon is prevented, and the process difficulty of electroplating of the package assembly with the ball grid array on the outer surface is overcome.

附图说明Description of drawings

图1是本发明中的电镀载台的结构示意图,此时,所述支承板处于水平状态。FIG. 1 is a schematic diagram of the structure of the electroplating stage in the present invention, at this time, the support plate is in a horizontal state.

图2是图1中的环形粘合层的结构示意图。FIG. 2 is a schematic structural diagram of the annular adhesive layer in FIG. 1 .

图3是本发明中的封装组件的结构示意图。FIG. 3 is a schematic structural diagram of a package assembly in the present invention.

图4是本发明中的封装组件与所述电镀载台中的收容槽对准后的结构示意图。FIG. 4 is a schematic view of the structure of the present invention after the package assembly is aligned with the receiving groove in the electroplating stage.

图5是本发明中的封装组件安装至所述收容槽内后的结构示意图。FIG. 5 is a schematic structural diagram of the package assembly of the present invention after being installed in the receiving groove.

图6是本发明中的封装组件电镀后的结构示意图。FIG. 6 is a schematic structural diagram of the package assembly of the present invention after electroplating.

图7是本发明中的电镀方法的流程图。FIG. 7 is a flow chart of the electroplating method in the present invention.

具体实施方式Detailed ways

以下将结合附图所示的各实施方式对本发明进行详细描述,请参照图1至图7所示,为本发明的较佳实施方式。但应当说明的是,这些实施方式并非对本发明的限制,本领域普通技术人员根据这些实施方式所作的功能、方法、或者结构上的等效变换或替代,均属于本发明的保护范围之内。The present invention will be described in detail below with reference to the various embodiments shown in the accompanying drawings. Please refer to FIG. 1 to FIG. 7 , which are preferred embodiments of the present invention. However, it should be noted that these embodiments do not limit the present invention, and equivalent transformations or substitutions in functions, methods, or structures made by those of ordinary skill in the art according to these embodiments all fall within the protection scope of the present invention.

请参图1至图6所示,本发明提供一种用于放置封装组件20的电镀载台10,在将所述封装组件20放置于所述电镀载台10上后,在电镀过程中,能够保护所述封装组件20的外接面21以及外接面21上的部件不被溅镀,防止发生溢镀现象。Referring to FIGS. 1 to 6 , the present invention provides an electroplating stage 10 for placing package components 20 . After the package components 20 are placed on the electroplating stage 10 , during the electroplating process, The outer surface 21 of the package assembly 20 and the components on the outer surface 21 can be protected from being sputtered, and the phenomenon of overflow plating can be prevented.

本发明中以所述封装组件20为外接面21上具有球栅阵列的封装组件20为例进行具体阐述。但应当说明的是,在下述的实施方式中所涉及的技艺精神可以被替换地应用到其他形式的封装组件20的电镀工艺中,例如双面封装组件20或POP封装组件20或其他具有植球的封装组件20。In the present invention, the package assembly 20 is taken as an example of the package assembly 20 having the ball grid array on the outer surface 21 for specific description. However, it should be noted that the technical spirit involved in the following embodiments can be alternatively applied to the electroplating process of other forms of packaging components 20, such as double-sided packaging components 20 or POP packaging components 20 or other packaging components with ball mounting. the package assembly 20.

所述电镀载台10具有至少一个收容槽1、限定所述收容槽1的槽口的台面2。一般的,所述电镀载台10具有多个收容槽1,以能够同时对多个所述封装组件20进行电镀,增强工作效率。The electroplating stage 10 has at least one accommodating groove 1 and a table 2 defining a slot of the accommodating groove 1 . Generally, the electroplating stage 10 has a plurality of accommodating grooves 1, so as to be able to perform electroplating on a plurality of the package components 20 at the same time, thereby enhancing the work efficiency.

于一具体实施方式中,所述电镀载台10包括支撑板3,所述收容槽1自所述支撑板3的上表面向下凹设形成,即,所述支撑板3的上表面即为所述的台面2。当然,并不以此为限,可以理解的是,于其他实施方式中,所述电镀载台10还可以包括设于所述支撑板3上且具有沿上下方向贯穿设置的通孔的第一板,所述通孔与所述支撑板3共同围设形成所述收容槽1,此时,所述第一板的上表面即为所述的台面2。In a specific embodiment, the electroplating stage 10 includes a support plate 3 , and the receiving groove 1 is formed concavely downward from the upper surface of the support plate 3 , that is, the upper surface of the support plate 3 is The table top 2. Of course, it is not limited to this. It can be understood that, in other embodiments, the electroplating stage 10 may further include a first through hole disposed on the support plate 3 and having a through hole disposed in the up-down direction. The through hole and the support plate 3 are formed together to form the receiving groove 1 . At this time, the upper surface of the first plate is the table top 2 .

进一步地,所述电镀载台10还包括自所述槽口的周缘朝向所述收容槽1内突伸的环形粘合层4,所述外接面21的尺寸大于所述环形粘合层4的内周的尺寸,在所述封装组件20与所述收容槽1相对准并受到向下的压力后,所述球栅阵列中靠近所述外接面21的边缘的边缘焊球22首先与所述环形粘合层4相接触,并使所述环形粘合层4向下弯折,最终使所述外接面21的周缘接合于所述环形粘合层4上,即,所述外接面21以及外接面21上的球栅阵列等部件密封于所述收容槽1内,从而保护所述外接面21以及位于所述外接面21上的球栅阵列等部件,防止发生溢镀现象。Further, the electroplating stage 10 further includes an annular adhesive layer 4 protruding from the periphery of the slot toward the receiving groove 1 , and the size of the outer surface 21 is larger than that of the annular adhesive layer 4 . The size of the inner circumference, after the package assembly 20 is aligned with the receiving groove 1 and subjected to downward pressure, the edge solder balls 22 in the ball grid array close to the edge of the outer surface 21 are first connected to the The annular adhesive layer 4 is in contact with the annular adhesive layer 4, and the annular adhesive layer 4 is bent downward, and finally the peripheral edge of the outer surface 21 is joined to the annular adhesive layer 4, that is, the outer surface 21 and the Components such as the ball grid array on the outer surface 21 are sealed in the receiving groove 1 , so as to protect the outer surface 21 and the components such as the ball grid array located on the outer surface 21 and prevent overplating.

如图6所示,在所述封装组件20位于所述收容槽1内后,所述外接面21的周缘接合于所述环形粘合层4上,在电镀的过程中,能够防止所述外接面21上被溅镀,从而达到防止发生溢镀现象的效果,即,电镀后,仅在所述封装组件20除所述外接面21外的其他五个面上形成镀层。As shown in FIG. 6 , after the package assembly 20 is located in the receiving groove 1 , the peripheral edge of the external surface 21 is bonded to the annular adhesive layer 4 , which can prevent the external The surface 21 is sputtered, so as to achieve the effect of preventing overplating, that is, after electroplating, plating layers are only formed on the other five surfaces of the package component 20 except the outer surface 21 .

可以理解的是,所述环形粘合层4具有柔性以及弹性,在所述封装组件20下压的过程中,所述环形粘合层4能够发生一定的形变以适应所述封装组件20的运动,最终使所述外接面21的周缘接合于所述环形粘合层4上。It can be understood that the annular adhesive layer 4 has flexibility and elasticity, and during the process of pressing the package assembly 20 down, the annular adhesive layer 4 can deform to a certain extent to adapt to the movement of the package assembly 20 , and finally the peripheral edge of the outer surface 21 is joined to the annular adhesive layer 4 .

具体地,所述环形粘合层4的材质为双面胶。Specifically, the material of the annular adhesive layer 4 is double-sided tape.

进一步地,请参图2所示,所述环形粘合层4的内周开设有多个缺口41,在所述封装组件20下压推动所述环形粘合层4向下弯折的过程中,使所述缺口41变大,能够减小所述封装组件20下移的阻力,便于所述封装组件20的安装。Further, as shown in FIG. 2 , a plurality of notches 41 are formed in the inner circumference of the annular adhesive layer 4 . During the process of the encapsulation component 20 pressing down and pushing the annular adhesive layer 4 to bend downwards , making the gap 41 larger, which can reduce the resistance of the packaging component 20 moving down, and facilitate the installation of the packaging component 20 .

进一步地,所述槽口的尺寸不小于所述外接面21的尺寸,多个所述缺口41的外端连接形成的环形的尺寸不大于所述外接面21的尺寸,从而,所述外接面21的周缘均能与所述环形粘合层4相紧密接合,保证所述外接面21以及外接面21上的球栅阵列等部件均密封于所述收容槽1内,从而保护所述外接面21以及位于所述外接面21上的球栅阵列等部件,防止发生溢镀现象。Further, the size of the notch is not smaller than the size of the outer surface 21, and the size of the ring formed by connecting the outer ends of the plurality of notches 41 is not larger than the size of the outer surface 21, so that the outer surface 21 can be tightly bonded with the annular adhesive layer 4 to ensure that the outer surface 21 and the ball grid array and other components on the outer surface 21 are sealed in the receiving groove 1, thereby protecting the outer surface. 21 and components such as ball grid arrays located on the outer surface 21 to prevent overplating.

可以理解的是,所述缺口41沿所述环形粘合层4的突伸方向延伸,缺口41的内端指所述缺口41与所述环形粘合层4的内周相对应的一端,对应的,所述缺口41的外端即指与所述缺口41的内端相对的一端。It can be understood that the notch 41 extends along the protruding direction of the annular adhesive layer 4 , and the inner end of the notch 41 refers to the end of the notch 41 corresponding to the inner circumference of the annular adhesive layer 4 . The outer end of the notch 41 refers to the end opposite to the inner end of the notch 41 .

于一具体实施方式中,所述封装组件20的外接面21呈矩形,所述槽口呈矩形,对应的,所述环形粘合层4呈矩形状,所述缺口41位于所述环形粘合层4与所述槽口的直角相对应的位置处,即所述缺口41位于所述环形粘合层4的直角处。In a specific embodiment, the outer surface 21 of the packaging component 20 is rectangular, and the notch is rectangular. Correspondingly, the annular adhesive layer 4 is rectangular, and the notch 41 is located in the annular adhesive layer. The position of the layer 4 corresponding to the right angle of the notch, that is, the notch 41 is located at the right angle of the annular adhesive layer 4 .

具体地,所述环形粘合层4包括两个相对的第一边、两个相对的第二边,两个所述第一边以及两个所述第二边首尾相接形成矩形状的所述环形粘合层4。所述缺口41位于相邻的第一边以及第二边之间。Specifically, the annular adhesive layer 4 includes two opposite first sides and two opposite second sides, and the two first sides and the two second sides are connected end to end to form a rectangular shape. The annular adhesive layer 4 is described. The notch 41 is located between the adjacent first sides and the second sides.

可以理解的是,相邻的第一边与所述第二边呈部分连接状态,使得所述槽口的尺寸不小于所述外接面21的尺寸,多个所述缺口41的外端连接形成的环形的尺寸不大于所述外接面21的尺寸,从而安装好所述封装组件20后,所述外接面21的边缘能够接合于所述环形粘合层4上,密封所述封装组件4的边缘。It can be understood that the adjacent first sides and the second sides are partially connected, so that the size of the notch is not smaller than the size of the outer surface 21, and the outer ends of the plurality of notches 41 are connected to form The size of the annular ring is not larger than the size of the outer surface 21, so that after the package assembly 20 is installed, the edge of the outer surface 21 can be bonded to the annular adhesive layer 4 to seal the package assembly 4. edge.

可以理解的是,上述的所述槽口的尺寸不小于所述外接面21的尺寸,即指所述槽口长、宽分别不小于所述外接面21的长、宽。It can be understood that the size of the aforementioned notch is not smaller than the size of the outer surface 21 , that is, the length and width of the notch are not smaller than the length and width of the outer surface 21 , respectively.

进一步地,靠近所述槽口的台面2上贴设有第一粘合层5,所述第一粘合层5与所述环形粘合层4一体设置,增强所述环形粘合层4与所述台面2之间的粘接强度。Further, a first adhesive layer 5 is attached to the table 2 near the notch, and the first adhesive layer 5 is integrally arranged with the annular adhesive layer 4 to enhance the connection between the annular adhesive layer 4 and the annular adhesive layer 4. The bonding strength between the table tops 2 .

上述的一体设置可以理解为一整片双面胶部分作为所述第一粘合层5,部分作为所述环形粘合层4。The above-mentioned integrated arrangement can be understood as a whole piece of double-sided adhesive tape, partly as the first adhesive layer 5 and partly as the annular adhesive layer 4 .

进一步地,所述电镀载台10还包括自所述槽口朝向所述收容槽1内突伸的支承板6,所述环形粘合层4位于所述支承板6的上侧,所述支承板6具有自所述槽口向所述收容槽1内且向下倾斜延伸的支承状态,在所述外接面21的周缘与所述环形粘合层4相紧密接合后,所述环形粘合层4贴设于所述支承板6的上表面,所述支承板6能够支撑所述封装组件20,以定位所述封装组件20。Further, the electroplating stage 10 further includes a support plate 6 protruding from the notch toward the receiving groove 1 , the annular adhesive layer 4 is located on the upper side of the support plate 6 , and the support plate 6 The plate 6 has a supporting state that extends from the notch to the receiving groove 1 and extends downward obliquely. After the peripheral edge of the outer surface 21 is in close contact with the annular adhesive layer 4, the annular adhesive The layer 4 is attached to the upper surface of the support plate 6 , and the support plate 6 can support the package component 20 to position the package component 20 .

可以理解的是,在具有所述支承板6的实施方式中,所述环形粘合层4可以直接贴设于所述支承板6上,或者所述环形粘合层4在所述封装组件20的带动下弯折后贴合于所述支承板6上。It can be understood that, in the embodiment with the support plate 6 , the annular adhesive layer 4 may be directly attached to the support plate 6 , or the annular adhesive layer 4 may be placed on the package assembly 20 . After being driven, it is bent and attached to the support plate 6 .

于一具体实施方式中,所述支承板6沿上下方向转动连接于所述槽口,所述环形粘合层4贴设于所述支承板6的上表面,所述支承板6还具有与所述槽口位于同一平面的水平状态,即,在所述电镀载台10上未设置所述封装组件20之前,所述支承板6处于水平状态,在所述封装组件20安装于所述电镀载台10上后,所述支承板6呈支承状态,所述封装组件20支撑于所述支承板6上。In a specific embodiment, the support plate 6 is rotated and connected to the slot in the up-down direction, the annular adhesive layer 4 is attached to the upper surface of the support plate 6, and the support plate 6 also has The notch is in a horizontal state on the same plane, that is, before the package assembly 20 is not disposed on the plating stage 10, the support plate 6 is in a horizontal state, and the package assembly 20 is mounted on the electroplating stage 10. After the stage 10 is mounted, the support plate 6 is in a supported state, and the package assembly 20 is supported on the support plate 6 .

在所述槽口呈矩形的实施方式中,所述电镀载台10包括与所述槽口的四个边分别转动连接的四个支承板6,分别为两个相对设置第一支承板、两个相对设置的第二支承板,在所述支承板6处于水平状态时,相邻的第一支承板与第二支承板相对接形成环状。In the embodiment in which the slot is rectangular, the electroplating stage 10 includes four supporting plates 6 rotatably connected with the four sides of the slot, respectively, two oppositely arranged first supporting plates, two There are two oppositely arranged second support plates. When the support plates 6 are in a horizontal state, the adjacent first support plates and the second support plates face each other to form an annular shape.

在所述封装组件20与所述收容槽1相对准后,处于水平状态的所述支承板6与对应的边缘焊球22相接触,即,所述环形粘合层4仅与边缘焊球22相接触,减少所述球栅阵列与环形粘合层4之间的接触面积,能够降低残胶的概率,且更有利于所述支承板6向下转动。After the package assembly 20 is aligned with the receiving groove 1 , the support plate 6 in a horizontal state is in contact with the corresponding edge solder balls 22 , that is, the annular adhesive layer 4 is only in contact with the edge solder balls 22 The contact area between the ball grid array and the annular adhesive layer 4 is reduced, the probability of glue residue can be reduced, and the downward rotation of the support plate 6 is more favorable.

请参图5所示,在所述封装组件20与所述收容槽1相对准并受到向下的压力后,所述边缘锡球带动所述支承板6向下转动,所述环形粘合层4随所述支承板6同步向下弯折,直至所述外接面21的边缘接合至所述环形粘合层4上。Referring to FIG. 5 , after the package assembly 20 is aligned with the receiving groove 1 and subjected to downward pressure, the edge solder ball drives the support plate 6 to rotate downward, and the annular adhesive layer 4 is simultaneously bent down with the support plate 6 until the edge of the outer surface 21 is joined to the annular adhesive layer 4 .

进一步地,在所述封装组件20与所述收容槽1相对准后,处于水平状态的所述支承板6的内端与对应的边缘焊球22的最低点相接触,从而,在所述封装组件20受到向下的压力后,更易带动所述支承板6向下转动。Further, after the package assembly 20 is aligned with the receiving groove 1, the inner end of the support plate 6 in a horizontal state is in contact with the lowest point of the corresponding edge solder ball 22, so that in the package After the assembly 20 is subjected to downward pressure, it is easier to drive the support plate 6 to rotate downward.

进一步地,所述电镀载台10还包括使所述支承板6处于水平状态的弹性件7,在所述支承板6向下转动的过程中,所述弹性件7发生弹性形变,支承板6受到所述弹性件7施加的使所述支承板6具有向上转动的趋势的弹性回复力,从而,在电镀完成后,所述弹性件7能够配合吸嘴将电镀完的所述封装组件20取出,更有利于所述封装组件20的取件。Further, the electroplating stage 10 further includes an elastic member 7 for keeping the support plate 6 in a horizontal state. During the downward rotation of the support plate 6, the elastic member 7 is elastically deformed, and the support plate 6 is elastically deformed. The elastic restoring force exerted by the elastic member 7 makes the supporting plate 6 have a tendency to rotate upward, so that after the electroplating is completed, the elastic member 7 can cooperate with the suction nozzle to take out the electroplated package assembly 20 , which is more conducive to the removal of the package assembly 20 .

于一具体实施方式中,所述弹性件7为连接于所述支承板6的下表面与所述收容槽1之间的弹簧,在所述支承板6向下转动的过程中,所述弹簧收缩,在电镀完成后,所述封装组件20在所述吸嘴的吸力以及所述弹簧向上的弹性回复力的作用下取出。In a specific embodiment, the elastic member 7 is a spring connected between the lower surface of the support plate 6 and the receiving groove 1 . During the downward rotation of the support plate 6 , the spring After shrinking, after the electroplating is completed, the package assembly 20 is taken out under the action of the suction force of the suction nozzle and the upward elastic restoring force of the spring.

可以理解的是,在所述支承板6处于支承状态时,虽然所述弹性件7施加给所述支承板6向上转动的趋势的弹性回复力,但是,在所述环形粘合层4与所述封装组件20之间的接合力以及所述封装组件20的重力的共同作用下,所述支承板6能够保持在所述支承状态。It can be understood that, when the supporting plate 6 is in the supporting state, although the elastic member 7 exerts an elastic restoring force for the upward rotation tendency of the supporting plate 6, the annular adhesive layer 4 and the Under the combined action of the bonding force between the packaging components 20 and the gravity of the packaging components 20 , the supporting plate 6 can be kept in the supporting state.

当然,于其他实施方式中,也可以设置能够使所述支承板6保持支承状态的限位件,增强所述支承板6的支撑效果。Of course, in other embodiments, a limiter capable of maintaining the support plate 6 in a supported state may also be provided, so as to enhance the support effect of the support plate 6 .

进一步地,请参图7所示,本发明还提供一种电镀方法,基于上述的用于放置封装组件20的电镀载台10,所述电镀载台10的结构如上所述,于此,不再赘述。Further, as shown in FIG. 7 , the present invention also provides an electroplating method, based on the above-mentioned electroplating stage 10 for placing the package components 20 , the structure of the electroplating stage 10 is as described above, and here, no Repeat.

所述电镀方法包括如下步骤:The electroplating method includes the following steps:

将封装组件20与所述收容槽1相对准;Align the package assembly 20 with the receiving groove 1;

将所述封装组件20向下放置于所述收容槽1内,使所述外接面21的边缘与所述环形粘合层4相接合;Place the package assembly 20 in the receiving groove 1 downward, so that the edge of the outer surface 21 is engaged with the annular adhesive layer 4;

电镀;plating;

完成后,取出所述封装组件20。After completion, the package assembly 20 is taken out.

具体地,步骤“将所述封装组件20向下放置于所述收容槽1内,使所述外接面21的边缘与所述环形粘合层4相接合”具体为:给所述封装组件20施加向下的压力,使所述封装组件20向下移动,所述封装组件20向下移动的过程中带动所述支承板6向下转动,所述环形粘合层4同步向下弯折,直至所述外接面21的边缘与所述环形粘合层4相接合,此时,所述支承板6处于支承状态。Specifically, the step of "putting the package assembly 20 downward in the receiving groove 1, so that the edge of the outer surface 21 is engaged with the annular adhesive layer 4" is specifically: giving the package assembly 20 A downward pressure is applied to move the package assembly 20 downward. During the downward movement of the package assembly 20, the support plate 6 is driven to rotate downward, and the annular adhesive layer 4 is bent downward synchronously. Until the edge of the outer surface 21 is engaged with the annular adhesive layer 4, at this time, the supporting plate 6 is in a supporting state.

进一步地,在取出所述封装组件20后,可以将使用过的所述环形粘合层4撕下,更换新的环形粘合层4,以为下一次电镀工序做准备。Further, after taking out the package assembly 20, the used annular adhesive layer 4 can be torn off and replaced with a new annular adhesive layer 4 to prepare for the next electroplating process.

综上所述,本发明中的电镀载台10通过在收容槽1的边缘设置朝向所述收容槽1内突伸的环形粘合层4,使所述电镀载台10适用于外接面21具有球栅阵列的封装组件20,在电镀的过程中,所述环形贴合层与所述外接面21的边缘以及所述边缘焊球22相接合,使所述外接面21以及外接面21上的球栅阵列等部件密封于所述收容槽1内,从而保护所述外接面21以及位于所述外接面21上的球栅阵列等部件,防止发生溢镀现象,克服了外接面21具有球栅阵列的封装组件20电镀的工艺难点。To sum up, in the electroplating stage 10 of the present invention, the annular adhesive layer 4 protruding toward the receiving groove 1 is provided on the edge of the receiving groove 1 , so that the electroplating carrying stage 10 is suitable for the outer surface 21 having In the package assembly 20 of the ball grid array, during the electroplating process, the annular bonding layer is bonded to the edge of the outer surface 21 and the edge solder balls 22 , so that the outer surface 21 and the solder balls on the outer surface 21 are bonded. Components such as ball grid arrays are sealed in the receiving groove 1, so as to protect the outer surface 21 and the components such as the ball grid array located on the outer surface 21, prevent overplating phenomenon, and overcome the problem that the outer surface 21 has a ball grid. Difficulties in the electroplating process of the package components 20 of the array.

应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施方式中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。It should be understood that although this specification is described in terms of embodiments, not every embodiment only includes an independent technical solution, and this description in the specification is only for the sake of clarity, and those skilled in the art should take the specification as a whole, and each The technical solutions in the embodiments can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

上文所列出的一系列的详细说明仅仅是针对本发明的可行性实施方式的具体说明,它们并非用以限制本发明的保护范围,凡未脱离本发明技艺精神所作的等效实施方式或变更均应包含在本发明的保护范围之内。The series of detailed descriptions listed above are only specific descriptions for the feasible embodiments of the present invention, and they are not used to limit the protection scope of the present invention. Changes should all be included within the protection scope of the present invention.

Claims (12)

1.一种用于放置封装组件的电镀载台,具有至少一个收容槽、限定所述收容槽的槽口的台面;其特征在于:所述电镀载台还包括自所述槽口的周缘朝向所述收容槽内突伸的环形粘合层。1. An electroplating stage for placing package components, comprising at least one receiving groove and a stage defining a slot of the receiving slot; wherein the electroplating stage further comprises a surface extending from the peripheral edge of the slot. The annular adhesive layer protruding in the receiving groove. 2.如权利要求1所述的用于放置封装组件的电镀载台,其特征在于:所述环形粘合层的内周开设有多个缺口。2 . The electroplating stage for placing package components as claimed in claim 1 , wherein a plurality of notches are formed in the inner circumference of the annular adhesive layer. 3 . 3.如权利要求2所述的用于放置封装组件的电镀载台,其特征在于:所述封装组件的外接面呈矩形,所述槽口呈矩形;所述缺口位于所述环形粘合层与所述槽口的直角相对应的位置处。3 . The electroplating stage for placing package components according to claim 2 , wherein: the outer surface of the package component is rectangular, the notch is rectangular; the gap is located in the annular adhesive layer. 4 . at a position corresponding to the right angle of the notch. 4.如权利要求2或3所述的用于放置封装组件的电镀载台,其特征在于:所述槽口的尺寸不小于所述外接面的尺寸,多个所述缺口的外端连接形成的环形的尺寸不大于所述外接面的尺寸。4. The electroplating stage for placing package components according to claim 2 or 3, wherein the size of the notch is not smaller than the size of the outer surface, and the outer ends of a plurality of the notches are connected to form The size of the ring is not larger than the size of the outer surface. 5.如权利要求1所述的用于放置封装组件的电镀载台,其特征在于:靠近所述槽口的台面上贴设有第一粘合层,所述第一粘合层与所述环形粘合层一体设置。5 . The electroplating stage for placing package components as claimed in claim 1 , wherein a first adhesive layer is attached to the surface near the notch, and the first adhesive layer and the The annular adhesive layer is integrally arranged. 6.如权利要求1所述的用于放置封装组件的电镀载台,其特征在于:所述电镀载台还包括自所述槽口朝向所述收容槽内突伸的支承板,所述支承板位于所述环形粘合层的下侧,所述支承板具有自所述槽口向所述收容槽内且向下倾斜延伸的支承状态。6 . The electroplating stage for placing package components as claimed in claim 1 , wherein the electroplating stage further comprises a support plate protruding from the notch toward the receiving groove, the support plate 6 . The plate is located on the lower side of the annular adhesive layer, and the support plate has a support state extending obliquely downward from the notch into the receiving groove. 7.如权利要求6所述的用于放置封装组件的电镀载台,其特征在于:所述支承板沿上下方向转动连接于所述槽口,所述环形粘合层贴设于所述支承板的上表面。7 . The electroplating stage for placing package components as claimed in claim 6 , wherein the support plate is rotated and connected to the slot in the up-down direction, and the annular adhesive layer is attached to the support. 8 . the upper surface of the board. 8.如权利要求7所述的用于放置封装组件的电镀载台,其特征在于:所述支承板具有与所述槽口位于同一平面的水平状态,所述电镀载台还包括使所述支承板处于水平状态的弹性件。8 . The electroplating stage for placing package components as claimed in claim 7 , wherein the support plate has a horizontal state that is on the same plane as the notch, and the electroplating stage further comprises making the The elastic member with the support plate in a horizontal state. 9.如权利要求8所述的用于放置封装组件的电镀载台,其特征在于:所述弹性件为连接于所述支承板的下表面与所述收容槽之间的弹簧。9 . The electroplating stage for placing package components as claimed in claim 8 , wherein the elastic member is a spring connected between the lower surface of the support plate and the receiving groove. 10 . 10.如权利要求7所述的用于放置封装组件的电镀载台,其特征在于:所述封装组件具有外接面、设于所述外接面且具有多个焊球的球栅阵列,所述球栅阵列具有靠近所述外接面的边缘的边缘焊球;在所述封装组件与所述收容槽相对准后,处于水平状态的所述支承板与对应的边缘焊球相接触。10. The electroplating stage for placing package components as claimed in claim 7, wherein the package components have an outer surface, a ball grid array disposed on the outer surface and having a plurality of solder balls, the The ball grid array has edge solder balls close to the edge of the outer surface; after the package assembly is aligned with the receiving groove, the support plate in a horizontal state contacts the corresponding edge solder balls. 11.如权利要求10所述的用于放置封装组件的电镀载台,其特征在于:在所述封装组件与所述收容槽相对准后,处于水平状态的所述支承板的内端与对应的边缘焊球的最低点相接触。11 . The electroplating stage for placing package components according to claim 10 , wherein after the package components are aligned with the receiving groove, the inner end of the support plate in a horizontal state corresponds to the corresponding The edges of the solder balls are in contact with the lowest point. 12.一种采用如权利要求1-11中任意一项所述的用于放置封装组件的电镀载台的电镀方法,其特征在于:所述电镀方法包括如下步骤:12. An electroplating method using the electroplating stage for placing package components according to any one of claims 1-11, wherein the electroplating method comprises the following steps: 将封装组件与所述收容槽相对准;Align the package assembly with the receiving groove; 将所述封装组件向下放置于所述收容槽内,使所述外接面的边缘与所述环形粘合层相接合;placing the package assembly downward in the receiving groove, so that the edge of the outer surface is engaged with the annular adhesive layer; 电镀;plating; 完成后,取出所述封装组件。After completion, the packaged assembly is removed.
CN202110282406.3A 2021-03-16 2021-03-16 Electroplating carrying platform for placing packaging assembly and electroplating method Pending CN115074808A (en)

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CN105826211A (en) * 2016-05-11 2016-08-03 苏州日月新半导体有限公司 Semiconductor product, and tool and method for manufacturing the semiconductor product
CN109055912A (en) * 2018-08-21 2018-12-21 环旭电子股份有限公司 A kind of sputtering carrier and method for sputtering
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