CN114964194B - 传感器以及电子装置 - Google Patents

传感器以及电子装置 Download PDF

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Publication number
CN114964194B
CN114964194B CN202110959346.4A CN202110959346A CN114964194B CN 114964194 B CN114964194 B CN 114964194B CN 202110959346 A CN202110959346 A CN 202110959346A CN 114964194 B CN114964194 B CN 114964194B
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China
Prior art keywords
electrode
sensor
sensor element
signal
support portion
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Chinese (zh)
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CN114964194A (zh
Inventor
丸藤龙之介
小野大骑
富泽泰
宫崎史登
加治志织
增西桂
平贺广贵
小川悦治
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Toshiba Corp
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Toshiba Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
CN202110959346.4A 2021-02-25 2021-08-20 传感器以及电子装置 Active CN114964194B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-028468 2021-02-25
JP2021028468A JP7362684B2 (ja) 2021-02-25 2021-02-25 センサ及び電子装置

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CN114964194A CN114964194A (zh) 2022-08-30
CN114964194B true CN114964194B (zh) 2025-06-17

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US (1) US11680800B2 (https=)
JP (1) JP7362684B2 (https=)
CN (1) CN114964194B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024011323A (ja) 2022-07-14 2024-01-25 株式会社東芝 センサ及び電子装置
JP7746236B2 (ja) 2022-08-16 2025-09-30 株式会社東芝 センサ及び電子装置

Citations (1)

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Publication number Priority date Publication date Assignee Title
US5383362A (en) * 1993-02-01 1995-01-24 General Motors Corporation Control for vibratory gyroscope

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US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
US5817940A (en) * 1996-03-14 1998-10-06 Aisin Seiki Kabishiki Kaisha Angular rate detector
JPH10253362A (ja) * 1997-03-10 1998-09-25 Ono Sokki Co Ltd ジャイロセンサ
JP4631992B2 (ja) * 2008-01-07 2011-02-16 株式会社村田製作所 角速度センサ
JP5320862B2 (ja) * 2008-07-01 2013-10-23 株式会社デンソー センサ装置
JP5408961B2 (ja) * 2008-10-30 2014-02-05 日立オートモティブシステムズ株式会社 角速度センサ
JP2010181240A (ja) * 2009-02-04 2010-08-19 Murata Mfg Co Ltd 複合センサ
US8151641B2 (en) * 2009-05-21 2012-04-10 Analog Devices, Inc. Mode-matching apparatus and method for micromachined inertial sensors
WO2010138717A1 (en) * 2009-05-27 2010-12-02 King Abdullah University Of Science And Technology Mems mass spring damper systems using an out-of-plane suspension scheme
US8783103B2 (en) * 2009-08-21 2014-07-22 Analog Devices, Inc. Offset detection and compensation for micromachined inertial sensors
JP2011133246A (ja) * 2009-12-22 2011-07-07 Sony Corp 角速度センサ及び電子機器
JP5561187B2 (ja) * 2011-01-26 2014-07-30 株式会社デンソー 角速度センサ装置
JP5838689B2 (ja) * 2011-09-26 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
JP6264535B2 (ja) * 2013-11-13 2018-01-24 セイコーエプソン株式会社 振動素子製造用基板、振動素子の製造方法、物理量検出装置、電子機器、および移動体
CN107003129B (zh) * 2014-12-01 2021-04-02 索尼公司 传感器装置、陀螺仪传感器和电子设备
US9869552B2 (en) * 2015-03-20 2018-01-16 Analog Devices, Inc. Gyroscope that compensates for fluctuations in sensitivity
US10236858B1 (en) * 2015-08-26 2019-03-19 Hrl Laboratories, Llc Differential split-electrode feedthrough cancellation mechanism
JP2018128336A (ja) * 2017-02-08 2018-08-16 セイコーエプソン株式会社 ジャイロセンサー、電子機器、および移動体
US10767992B2 (en) 2017-03-24 2020-09-08 Kabushiki Kaisha Toshiba Gyro sensor system
JP2019178994A (ja) * 2018-03-30 2019-10-17 セイコーエプソン株式会社 センサー素子、物理量センサー、電子機器および移動体
JP6903610B2 (ja) 2018-08-27 2021-07-14 株式会社東芝 共振器およびそれを含む装置
JP7003076B2 (ja) 2019-03-08 2022-01-20 株式会社東芝 センサ
JP7204576B2 (ja) * 2019-05-15 2023-01-16 株式会社東芝 センサ
US12012327B2 (en) * 2020-03-12 2024-06-18 Honeywell International Inc. Methods for vibration immunity to suppress bias errors in sensor devices
JP2021192012A (ja) * 2020-06-05 2021-12-16 株式会社東芝 センサ及び電子装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5383362A (en) * 1993-02-01 1995-01-24 General Motors Corporation Control for vibratory gyroscope

Also Published As

Publication number Publication date
JP2022129691A (ja) 2022-09-06
JP7362684B2 (ja) 2023-10-17
US11680800B2 (en) 2023-06-20
CN114964194A (zh) 2022-08-30
US20220268583A1 (en) 2022-08-25

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