CN114678297A - 一种半导体加热盘 - Google Patents
一种半导体加热盘 Download PDFInfo
- Publication number
- CN114678297A CN114678297A CN202210241549.4A CN202210241549A CN114678297A CN 114678297 A CN114678297 A CN 114678297A CN 202210241549 A CN202210241549 A CN 202210241549A CN 114678297 A CN114678297 A CN 114678297A
- Authority
- CN
- China
- Prior art keywords
- cavity
- block
- heating
- sets
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 63
- 239000004065 semiconductor Substances 0.000 title claims abstract description 22
- 238000000926 separation method Methods 0.000 claims abstract description 14
- 238000000605 extraction Methods 0.000 claims abstract description 8
- 238000007599 discharging Methods 0.000 claims description 5
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 abstract description 34
- 239000007789 gas Substances 0.000 abstract description 13
- 239000002699 waste material Substances 0.000 abstract description 4
- 230000003139 buffering effect Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 238000000265 homogenisation Methods 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 238000001035 drying Methods 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000002313 adhesive film Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210241549.4A CN114678297B (zh) | 2022-03-11 | 2022-03-11 | 一种半导体加热盘 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210241549.4A CN114678297B (zh) | 2022-03-11 | 2022-03-11 | 一种半导体加热盘 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN114678297A true CN114678297A (zh) | 2022-06-28 |
CN114678297B CN114678297B (zh) | 2023-04-21 |
Family
ID=82071435
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202210241549.4A Active CN114678297B (zh) | 2022-03-11 | 2022-03-11 | 一种半导体加热盘 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN114678297B (zh) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040048220A1 (en) * | 2002-09-10 | 2004-03-11 | Nguyen Vuong P. | Thermal process station with heated lid |
CN1762040A (zh) * | 2003-02-10 | 2006-04-19 | Asml控股股份有限公司 | 用于晶片制造系统中的整体形成的烘烤盘单元 |
CN105842992A (zh) * | 2016-05-16 | 2016-08-10 | 上海华力微电子有限公司 | 一种新型的光刻涂布软烘系统 |
CN106653646A (zh) * | 2015-10-29 | 2017-05-10 | 沈阳拓荆科技有限公司 | 一种冷热腔可控温加热支撑架 |
US20170341113A1 (en) * | 2016-05-26 | 2017-11-30 | Semes Co., Ltd. | Apparatus and method for treating a substrate |
CN111524842A (zh) * | 2020-07-06 | 2020-08-11 | 宁波润华全芯微电子设备有限公司 | 一种渐进式烘烤加热装置 |
CN111668140A (zh) * | 2020-07-02 | 2020-09-15 | 沈阳芯源微电子设备股份有限公司 | 一种基于陶瓷加热器温度一致性的调整装置及方法 |
CN112349626A (zh) * | 2020-09-28 | 2021-02-09 | 芯米(厦门)半导体设备有限公司 | 一种晶圆烘烤装置 |
-
2022
- 2022-03-11 CN CN202210241549.4A patent/CN114678297B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040048220A1 (en) * | 2002-09-10 | 2004-03-11 | Nguyen Vuong P. | Thermal process station with heated lid |
CN1762040A (zh) * | 2003-02-10 | 2006-04-19 | Asml控股股份有限公司 | 用于晶片制造系统中的整体形成的烘烤盘单元 |
CN106653646A (zh) * | 2015-10-29 | 2017-05-10 | 沈阳拓荆科技有限公司 | 一种冷热腔可控温加热支撑架 |
CN105842992A (zh) * | 2016-05-16 | 2016-08-10 | 上海华力微电子有限公司 | 一种新型的光刻涂布软烘系统 |
US20170341113A1 (en) * | 2016-05-26 | 2017-11-30 | Semes Co., Ltd. | Apparatus and method for treating a substrate |
CN111668140A (zh) * | 2020-07-02 | 2020-09-15 | 沈阳芯源微电子设备股份有限公司 | 一种基于陶瓷加热器温度一致性的调整装置及方法 |
CN111524842A (zh) * | 2020-07-06 | 2020-08-11 | 宁波润华全芯微电子设备有限公司 | 一种渐进式烘烤加热装置 |
CN112349626A (zh) * | 2020-09-28 | 2021-02-09 | 芯米(厦门)半导体设备有限公司 | 一种晶圆烘烤装置 |
Also Published As
Publication number | Publication date |
---|---|
CN114678297B (zh) | 2023-04-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101650816B1 (ko) | 진공 펌핑 장치, 진공유리 제작 시스템, 및 관련 방법 | |
WO2020124692A1 (zh) | 玻璃热弯上下料机 | |
CN210657131U (zh) | 一种等离子体cvd装置 | |
WO2023029331A1 (zh) | 注液装置 | |
CN114678297A (zh) | 一种半导体加热盘 | |
CN111730807B (zh) | 一种注塑模具加工用夹具 | |
KR100444098B1 (ko) | 진공처리장치 | |
CN211964831U (zh) | 燃料电池膜片涂布装置 | |
CN113465424B (zh) | 自动化注液及抽真空设备 | |
CN211993819U (zh) | 一种双层抽真空机构 | |
CN113410174B (zh) | 吸附机构及吸附系统 | |
CN112267961A (zh) | Egr阀总成 | |
CN117074193B (zh) | 一种工程检测用混凝土强度检测装置 | |
CN115440613A (zh) | 晶圆冷却装置 | |
CN112895254B (zh) | 一种用于硅胶手环加工的可调节模具及其使用方法 | |
CN218139292U (zh) | 一种便于生产的成型模具 | |
CN215703724U (zh) | 散热手机电池前壳注塑成型结构 | |
CN219427368U (zh) | 一种切割治具 | |
CN220324425U (zh) | 一种半导体加工用冷却装置 | |
JP2015059051A (ja) | ガラス成形装置およびガラス成形品 | |
CN220091819U (zh) | 一种笔记本转轴套注塑件的喷涂载具 | |
CN220314162U (zh) | 一种便于注塑件用矫正装置 | |
WO2024060824A1 (zh) | 基板处理装置 | |
CN117051371A (zh) | 一种加热基座及基片加热镀膜方法 | |
CN220772371U (zh) | 一种半导体器件检测用温度控制装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Applicant after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Address before: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Applicant before: Zhicheng semiconductor equipment technology (Kunshan) Co.,Ltd. |
|
CB02 | Change of applicant information | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Address after: 215000, No. 889 Zhonghua Road, Bacheng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region after: China Address before: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region before: China |