CN114672860B - 一种表面无凸起的电镀超薄切割砂轮的制作方法 - Google Patents
一种表面无凸起的电镀超薄切割砂轮的制作方法 Download PDFInfo
- Publication number
- CN114672860B CN114672860B CN202210202342.6A CN202210202342A CN114672860B CN 114672860 B CN114672860 B CN 114672860B CN 202210202342 A CN202210202342 A CN 202210202342A CN 114672860 B CN114672860 B CN 114672860B
- Authority
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- Prior art keywords
- washing
- electroplated
- electroplating
- nickel
- manufacturing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims abstract description 57
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 50
- 238000009713 electroplating Methods 0.000 claims abstract description 41
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 38
- 239000011701 zinc Substances 0.000 claims abstract description 38
- 238000005406 washing Methods 0.000 claims abstract description 36
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 26
- 239000002131 composite material Substances 0.000 claims abstract description 25
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 25
- 239000011159 matrix material Substances 0.000 claims abstract description 23
- 239000011248 coating agent Substances 0.000 claims abstract description 22
- 238000000576 coating method Methods 0.000 claims abstract description 22
- 238000007598 dipping method Methods 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 20
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 19
- 239000010432 diamond Substances 0.000 claims abstract description 19
- 229910052751 metal Inorganic materials 0.000 claims abstract description 16
- 239000002184 metal Substances 0.000 claims abstract description 16
- 238000004140 cleaning Methods 0.000 claims abstract description 15
- 238000005238 degreasing Methods 0.000 claims abstract description 15
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 239000002245 particle Substances 0.000 claims abstract description 7
- 239000004576 sand Substances 0.000 claims abstract description 7
- 238000005554 pickling Methods 0.000 claims abstract description 4
- 239000000243 solution Substances 0.000 claims description 41
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 claims description 30
- 239000004312 hexamethylene tetramine Substances 0.000 claims description 15
- 235000010299 hexamethylene tetramine Nutrition 0.000 claims description 15
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 claims description 10
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 10
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 9
- 229910017604 nitric acid Inorganic materials 0.000 claims description 9
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 claims description 8
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 claims description 8
- 239000002253 acid Substances 0.000 claims description 6
- 229910021578 Iron(III) chloride Inorganic materials 0.000 claims description 5
- 239000004115 Sodium Silicate Substances 0.000 claims description 5
- 239000007864 aqueous solution Substances 0.000 claims description 5
- 229910000365 copper sulfate Inorganic materials 0.000 claims description 5
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 claims description 5
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 claims description 5
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 claims description 5
- 235000017557 sodium bicarbonate Nutrition 0.000 claims description 5
- 229910000030 sodium bicarbonate Inorganic materials 0.000 claims description 5
- 239000001509 sodium citrate Substances 0.000 claims description 5
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 claims description 5
- 235000011006 sodium potassium tartrate Nutrition 0.000 claims description 5
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052911 sodium silicate Inorganic materials 0.000 claims description 5
- 239000011787 zinc oxide Substances 0.000 claims description 5
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 claims description 4
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 claims description 4
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 3
- 239000004327 boric acid Substances 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 150000003949 imides Chemical class 0.000 claims description 3
- 229940074439 potassium sodium tartrate Drugs 0.000 claims description 3
- -1 washing Substances 0.000 claims description 3
- 239000003082 abrasive agent Substances 0.000 claims description 2
- 239000000428 dust Substances 0.000 claims description 2
- 238000009966 trimming Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 10
- 238000007747 plating Methods 0.000 abstract description 9
- 239000002699 waste material Substances 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 13
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000002386 leaching Methods 0.000 description 7
- 238000000227 grinding Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005470 impregnation Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 239000002351 wastewater Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000001476 sodium potassium tartrate Substances 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 231100000636 lethal dose Toxicity 0.000 description 1
- 244000144972 livestock Species 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000011272 standard treatment Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000167 toxic agent Toxicity 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- GTLDTDOJJJZVBW-UHFFFAOYSA-N zinc cyanide Chemical compound [Zn+2].N#[C-].N#[C-] GTLDTDOJJJZVBW-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/34—Pretreatment of metallic surfaces to be electroplated
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D15/00—Electrolytic or electrophoretic production of coatings containing embedded materials, e.g. particles, whiskers, wires
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/12—Electroplating: Baths therefor from solutions of nickel or cobalt
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/34—Pretreatment of metallic surfaces to be electroplated
- C25D5/42—Pretreatment of metallic surfaces to be electroplated of light metals
- C25D5/44—Aluminium
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/48—After-treatment of electroplated surfaces
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
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CN202210202342.6A CN114672860B (zh) | 2022-03-03 | 2022-03-03 | 一种表面无凸起的电镀超薄切割砂轮的制作方法 |
Applications Claiming Priority (1)
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CN202210202342.6A CN114672860B (zh) | 2022-03-03 | 2022-03-03 | 一种表面无凸起的电镀超薄切割砂轮的制作方法 |
Publications (2)
Publication Number | Publication Date |
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CN114672860A CN114672860A (zh) | 2022-06-28 |
CN114672860B true CN114672860B (zh) | 2024-04-12 |
Family
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Family Applications (1)
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CN202210202342.6A Active CN114672860B (zh) | 2022-03-03 | 2022-03-03 | 一种表面无凸起的电镀超薄切割砂轮的制作方法 |
Country Status (1)
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CN (1) | CN114672860B (zh) |
Citations (10)
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CN101580952A (zh) * | 2009-06-12 | 2009-11-18 | 广州市三孚化工有限公司 | 无氰沉锌溶液及使用该溶液的铝轮毂无氰电镀方法 |
CN102732922A (zh) * | 2012-06-13 | 2012-10-17 | 广州鸿葳科技股份有限公司 | 无氰浸锌溶液及使用该溶液的滤波器铝合金无氰电镀方法 |
CN106637359A (zh) * | 2016-10-11 | 2017-05-10 | 郑州磨料磨具磨削研究所有限公司 | 轮毂型电镀超薄金刚石切割砂轮的制造方法 |
CN107604401A (zh) * | 2017-09-28 | 2018-01-19 | 永星化工(上海)有限公司 | 一种铝合金电镀前处理用浸锌剂 |
CN108546939A (zh) * | 2018-06-29 | 2018-09-18 | 郑州晶研科技有限公司 | 一种超薄轮毂型金刚石划片刀的电化学加工工艺及工装 |
CN109518259A (zh) * | 2018-12-30 | 2019-03-26 | 苏州赛尔科技有限公司 | 镍铜复合电镀轮毂型划片刀及其应用 |
CN110216598A (zh) * | 2019-06-24 | 2019-09-10 | 中山市思考电子科技有限公司 | 一种半导体用划片刀及其加工工艺 |
CN111733432A (zh) * | 2019-03-25 | 2020-10-02 | 深圳市威富通讯技术有限公司 | 浸锌液及其制备方法、金属的表面处理方法、铝制件 |
CN112621143A (zh) * | 2021-01-18 | 2021-04-09 | 苏州工业园区代思科电子科技有限公司 | 电镀切割划片刀的制造方法 |
CN113172779A (zh) * | 2021-04-01 | 2021-07-27 | 郑州磨料磨具磨削研究所有限公司 | 一种半导体晶圆阶梯切割用高强度划片刀及制作方法 |
-
2022
- 2022-03-03 CN CN202210202342.6A patent/CN114672860B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101580952A (zh) * | 2009-06-12 | 2009-11-18 | 广州市三孚化工有限公司 | 无氰沉锌溶液及使用该溶液的铝轮毂无氰电镀方法 |
CN102732922A (zh) * | 2012-06-13 | 2012-10-17 | 广州鸿葳科技股份有限公司 | 无氰浸锌溶液及使用该溶液的滤波器铝合金无氰电镀方法 |
CN106637359A (zh) * | 2016-10-11 | 2017-05-10 | 郑州磨料磨具磨削研究所有限公司 | 轮毂型电镀超薄金刚石切割砂轮的制造方法 |
CN107604401A (zh) * | 2017-09-28 | 2018-01-19 | 永星化工(上海)有限公司 | 一种铝合金电镀前处理用浸锌剂 |
CN108546939A (zh) * | 2018-06-29 | 2018-09-18 | 郑州晶研科技有限公司 | 一种超薄轮毂型金刚石划片刀的电化学加工工艺及工装 |
CN109518259A (zh) * | 2018-12-30 | 2019-03-26 | 苏州赛尔科技有限公司 | 镍铜复合电镀轮毂型划片刀及其应用 |
CN111733432A (zh) * | 2019-03-25 | 2020-10-02 | 深圳市威富通讯技术有限公司 | 浸锌液及其制备方法、金属的表面处理方法、铝制件 |
CN110216598A (zh) * | 2019-06-24 | 2019-09-10 | 中山市思考电子科技有限公司 | 一种半导体用划片刀及其加工工艺 |
CN112621143A (zh) * | 2021-01-18 | 2021-04-09 | 苏州工业园区代思科电子科技有限公司 | 电镀切割划片刀的制造方法 |
CN113172779A (zh) * | 2021-04-01 | 2021-07-27 | 郑州磨料磨具磨削研究所有限公司 | 一种半导体晶圆阶梯切割用高强度划片刀及制作方法 |
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