CN114630495A

CN114630495A - Substrate holding device of substrate conveying apparatus

Info

Publication number: CN114630495A
Application number: CN202011459802.0A
Authority: CN
Inventors: 陈安顺
Original assignee: Group Up Industrial Co ltd
Current assignee: Group Up Industrial Co ltd
Priority date: 2020-12-11
Filing date: 2020-12-11
Publication date: 2022-06-14

Abstract

A substrate holding device of a substrate transport apparatus includes a plurality of holding members each configured to be displaced between a holding position and a release position to hold a substrate or release holding of the substrate, and a guide member configured to switch to the holding position or the release position when the holding member enters a holding state switching region to control holding of the substrate.

Description

Substrate holding device of substrate conveying equipment

Technical Field

The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate holding and supporting device of a substrate transfer apparatus.

Background

Printed circuit substrates need to undergo multiple stages of processing during the manufacturing process, such as: baking and drying are performed, and the substrate is often transferred by a substrate transfer apparatus during each stage of processing or between adjacent stages of processing. The substrate transport apparatus generally includes: a transmission mechanism (e.g., a transmission wheel), a conveying component (e.g., a conveying chain and a conveying belt) driven by the transmission mechanism, and a bearing frame (e.g., a U-shaped frame and a rectangular frame) for bearing the substrate.

However, the substrate transportation apparatus does not only transport along a flat horizontal path, but along with the requirements of each stage of processing and the mechanical design of the substrate transportation apparatus itself, there are various changes such as the ascending and descending of the slope, the upward or downward movement of the carrying frame, etc. in the transportation path, which easily causes the substrate to slide undesirably during the transportation process, thereby causing the substrate to slip, collide, and even be damaged.

Disclosure of Invention

Accordingly, an object of the present invention is to provide a substrate supporting device for a substrate transportation apparatus, which can assist in supporting a substrate to effectively reduce or prevent the substrate from slipping, colliding, and breaking during transportation.

The present invention has been made to solve the above-mentioned problems occurring in the prior art, and an object of the present invention is to provide a substrate supporting apparatus for a substrate transport apparatus, wherein the substrate transport apparatus includes a transport member moving along a transport path, the transport member is provided with a plurality of carrying frames arranged in an array, each of the plurality of carrying frames has a substrate carrying space for carrying a substrate to transport the substrate along with the movement of the transport member, the substrate supporting apparatus includes: a plurality of holding members arranged on the conveying member in an aligned manner corresponding to the plurality of carrying frames, respectively, and moving with the conveying member, each of the holding members being configured to be displaced between a holding position at which the holding member of the holding member is displaced to hold the substrate in the substrate holding space of the corresponding carrying frame and a release position at which the holding member of the holding member is displaced to release the holding of the substrate; and a guide member fixedly disposed corresponding to a preset holding state switching region on the conveying path, the guide member having a guide track structure configured to cause the holding member to move from the release position to the holding position or from the holding position to the release position when the holding member enters the holding state switching region by moving along with the conveying member and being guided by the guide track structure.

In one embodiment of the present invention, a substrate supporting apparatus is provided, wherein the supporting member includes a displacement member and a reset member, the supporting member is located on the displacement member, and the reset member is connected to the displacement member in a manner that the displacement member is normally biased toward the release position, so that the displacement member is displaced from the supporting position to the release position by the reset member when the supporting member is not in the supporting state switching region.

In one embodiment of the present invention, a substrate supporting device is provided, wherein the supporting member includes a displacement member and a reset member, the supporting member is located on the displacement member, and the reset member is connected to the displacement member in a manner that the displacement member is normally biased toward the supporting position, so that the displacement member is displaced from the release position to the supporting position by the reset member when the supporting member is not in the supporting state switching region.

In one embodiment of the present invention there is provided a substrate holding and supporting apparatus, wherein the holding and supporting member is arranged to: in the holding position, the holding member of the holding member is displaced into the corresponding substrate holding space of the holding frame to hold the substrate, and in the release position, the holding member of the holding member is displaced out of the substrate holding space to release the holding of the substrate.

In one embodiment of the present invention there is provided a substrate support apparatus wherein the support is a bar, the support member being arranged to: in the holding position, the holding member is displaced to be spaced apart from the carrying frame by a predetermined holding interval in the direction of the conveying path, and holds the substrate in such a manner that the end portion of the substrate is limited in the holding interval.

In one embodiment of the invention there is provided a substrate support apparatus in which the support is a jig, the support member being arranged to: in the holding position, the holding member is displaced to cause the holding opening of the holding member to clamp and move, and the substrate is held so as to hold the end portion of the substrate.

In one embodiment of the present invention, a substrate supporting apparatus is provided, wherein the conveying member is an annular conveying member, a plurality of the supporting frames are arranged outside the annular conveying member, and the guiding member is fixedly disposed at an inner position of the annular conveying member.

In one embodiment of the present invention, a substrate supporting device is provided, wherein the guiding member is a fixed cam, and the guiding track structure is a cam surface of the fixed cam, and the cam surface is configured to push an inner end of the supporting member in a lift-forming manner when the supporting member enters the supporting state switching region along with the conveying member, so that the supporting member is moved to the supporting position or the releasing position in a lift manner.

In one embodiment of the present invention, there is provided a substrate holding and supporting device, wherein the holding state switching region is provided to correspond to a gradient change region on the conveying path of the substrate conveying apparatus.

In one embodiment of the present invention, a substrate holding and supporting device is provided, wherein the holding state switching region is provided to correspond to a substrate lead-in area and/or a substrate lead-out area on the conveying path of the substrate conveying apparatus.

Through the technical means adopted by the invention, the substrate supporting device can support the substrate on the conveying path so as to effectively reduce or inhibit the slipping, collision and damage of the substrate in the conveying process. Further, the substrate holding device can hold the substrate in a specific holding state switching region on the transport path and does not hold the substrate in a region other than the holding state switching region, or hold the substrate in the transport path at all times and release the holding of the substrate only in the holding state switching region, depending on the design. In the preferred embodiment, the substrate holding and supporting device can hold and support the substrate in various manners such as a position limitation and a clamping according to various types of conveyance.

Drawings

Fig. 1 is a perspective view of a substrate holding device of a substrate transport apparatus according to an embodiment of the present invention;

fig. 2 is an exploded schematic view of a substrate holding device of the substrate transport apparatus according to the embodiment of the present invention;

FIG. 3 is a schematic side view of a substrate holding device of the substrate transport apparatus according to the embodiment of the present invention;

FIG. 4 is a schematic view of a substrate supporting device of the substrate transport apparatus according to the embodiment of the present invention in a release position;

FIG. 5 is a schematic view of a substrate supporting device of the substrate transportation apparatus according to the embodiment of the present invention in a supporting position;

FIG. 6 is a schematic side view of a substrate holding device of a substrate transport apparatus according to another embodiment of the present invention;

FIG. 7 is a schematic view of a substrate supporting device of a substrate transport apparatus according to another embodiment of the present invention in a supporting position;

fig. 8 is a schematic view of a substrate holding device of a substrate transport apparatus according to another embodiment of the present invention at a release position.

Reference numerals:

1-substrate holder device, 1 a-substrate holder device, 11-holder member, 110-base member, 110 a-clamping counterpart, 111-holder, 112-displacement member, 112 a-vertical rod, 112B-link, 112C-link, 112D-push rod, 113-reset member, 12-guide member, 121-guide track structure, 2-transport member, 3-carrier frame, B-substrate, C-clamp opening, D-holder gap, E-holder state switching region, E1-substrate lead-in region, E2-substrate lead-out region, P-transport path, S-substrate holding space.

Detailed Description

The following describes an embodiment of the present invention with reference to fig. 1 to 8. The description is not intended to limit the embodiments of the present invention, but is one example of the present invention.

As shown in fig. 1 to 5, a substrate holding device 1 of a substrate transport apparatus according to one embodiment of the present invention is provided at the substrate transport apparatus. The substrate conveying apparatus has a conveying member 2 moving along a conveying path P, a plurality of carrying frames 3 are arranged on the conveying member 2, and each of the plurality of carrying frames 3 has a substrate carrying space S for carrying a substrate B to convey the substrate B along with the movement of the conveying member 2.

As shown in fig. 1 to 5, in the embodiment of the present invention, the substrate holding apparatus 1 includes: a plurality of support members 11 and guide members 12.

As shown in fig. 1 to 5, in the substrate supporting device 1 according to the embodiment of the present invention, a plurality of the supporting members 11 are arranged on the conveying member 2 in an array corresponding to the plurality of the supporting frames 3, respectively, and as the conveying member 2 moves, each of the supporting members 11 is arranged to be displaced between a supporting position (shown in fig. 5) in which the supporting member 111 of the supporting member 11 is displaced to support the substrate B in the substrate supporting space S of the corresponding supporting frame 3 and a releasing position (shown in fig. 4) in which the supporting member 111 of the supporting member 11 is displaced to release the supporting of the substrate B.

As shown in fig. 1 to 5, in the substrate holding device 1 according to the embodiment of the present invention, the guide member 12 is fixedly disposed corresponding to a predetermined holding state switching region E on the conveying path P, the guide member 12 has a guide track structure 121, and the guide track structure 121 is disposed to cause the holding member 11 to move from the release position to the holding position or to move from the holding position to the release position when the holding member 11 enters the holding state switching region E by following the movement of the conveying member 2 and the guidance of the guide track structure 121.

Specifically, as shown in fig. 3 to 5, in the substrate supporting apparatus 1 according to the embodiment of the present invention, the supporting member 11 includes a displacement member 112 and a reset member 113, the supporting member 111 is located on the displacement member 112, and the reset member 113 is connected to the displacement member 112 in a manner that the displacement member 112 is normally biased toward the release position (fig. 4), so that when the supporting member 11 is not in the supporting state switching region E, the displacement member 111 is displaced from the supporting position (fig. 5) to the release position (fig. 4) by the reset member 113.

In the present embodiment, the restoring member 113 is a spring, more specifically, a compression spring. One end of the compression spring abuts against the base part 110 of the holding member 11, and the other end abuts against the inner end (lower end in the figure) of the displacement member 112, and the holding member 111 is disposed at the outer end (upper end in the figure) of the displacement member 112. Accordingly, the spring force of the compression spring pushes the displacement member 112 downward in the drawing, so that the displacement member 112 moves downward in a normal state where the displacement member is not biased by a force other than the compression spring, and the holder 111 also moves to the release position where the substrate is not held as the displacement member 112 moves downward (fig. 4). Of course, the invention is not limited thereto. The reset member 113 may be disposed to achieve the reset effect by other means (e.g., gravity). The return member 113 may be replaced with a mechanism other than a spring (e.g., a pull cord).

As shown in fig. 3 to 5, according to the substrate holding device 1 of the embodiment of the present invention, the holding member 11 is provided as: in the holding position (fig. 5), the holder 111 of the holding member 11 is displaced into the corresponding substrate holding space S of the holding frame 3 to hold the substrate B, and in the release position (fig. 4), the holder 111 of the holding member 11 is displaced out of the substrate holding space S to release the holding of the substrate B.

Specifically, in the present embodiment, in order to avoid the interference of the support 111 with other components or substrates in the substrate supporting space S, the support 111 is withdrawn from the substrate supporting space S in the release position. Of course, the present invention is not limited thereto, and the support 111 may just leave the substrate B without exiting the substrate carrying space S for other reasons.

As shown in fig. 3 to 5, in the substrate supporting apparatus 1 according to the embodiment of the present invention, the supporting member 111 is a stopper, and the supporting member 11 is configured to: in the holding position (fig. 5), the holding member 111 is displaced so as to be spaced apart from the carrier frame 3 by a predetermined holding interval D in the direction of the conveying path P, and holds the substrate B in such a manner that the end portion of the substrate B is held in the holding interval D.

Specifically, in the present embodiment, the support 111 does not directly clamp the substrate B, and the support 111 is used for blocking the end of the substrate B to prevent the substrate B from greatly sliding in the direction of the conveying path P, so as to prevent the substrate B from slipping off the carrying frame 3.

As shown in fig. 3, in the substrate holding and supporting device 1 according to the embodiment of the present invention, the holding state switching area E is set to correspond to a gradient change area on the conveying path P of the substrate conveying apparatus.

Specifically, in the present embodiment, the substrate supporting apparatus 1 is mainly used to prevent the substrate B from slipping off the supporting frame 3. Since the carrying frame 3 and the substrate B on the conveying path P are rotated in addition to the original translational motion when being conveyed through a region where the gradient changes (i.e., a gradient change region), the slipping-off of the substrate is likely to occur in this region. By disposing the guide members 12 correspondingly to the slope varying regions, the slipping-off of the substrate B can be effectively reduced or suppressed.

Fig. 6 to 8 show a substrate supporting apparatus 1a according to another embodiment of the present invention, wherein the same or corresponding elements are denoted by the same reference numerals.

As shown in fig. 6 to 8, according to a substrate supporting apparatus 1a of another embodiment of the present invention, the supporting member 11 includes a displacement member 112 and a restoring member 113, the supporting member 111 is located on the displacement member 112, and the restoring member 113 is connected to the displacement member 112 in a manner that the displacement member 112 is normally biased toward the supporting position (fig. 7), so as to displace the displacement member 112 from the releasing position (fig. 8) to the supporting position (fig. 7) by the restoring member 113 when the supporting member 11 is not in the supporting state switching region E.

In the present embodiment, the displacement member 112 is a linkage, and the restoring member 113 is a spring, more specifically a compression spring. One end of the compression spring abuts against the base element 110 of the holding member 11, and the other end abuts against the inner end (upper end in the figure) of the displacement element 112, so that the upright rod 112a of the linkage is biased upward in a normal state without being biased by a force other than the compression spring, and the push rod 112d of the linkage is pushed laterally by the action of the

links

112b and 112c, so that the holding element 111 disposed on the push rod 112d is displaced to approach the corresponding clamping part 110a on the base element 110 for clamping. Of course, the invention is not limited thereto. The reset member 113 may be disposed to achieve the reset effect by other means (e.g., gravity). The return member 113 may be replaced with a mechanism other than a spring (e.g., a pull cord).

As shown in fig. 6 to 8, according to a substrate supporting apparatus 1a of another embodiment of the present invention, the support 111 is a jig, and the support member 11 is provided with: in the holding position (fig. 7), the holder 111 is displaced to clamp the holding opening C of the holder member 11, and holds the substrate B so as to hold the end portion of the substrate B.

Specifically, in the present embodiment, the holder 111 directly holds the substrate B, and the holder 111 is capable of holding the substrate B so that the substrate B does not fall off even when being conveyed below the conveying member 2.

As shown in fig. 6 to 8, according to the substrate supporting device 1a of another embodiment of the present invention, the supporting state switching region E is provided to correspond to the substrate lead-in area E1 and/or the substrate lead-out area E2 on the conveying path P of the substrate conveying apparatus.

Specifically, in the present embodiment, the substrate holding device 1a is mainly used to prevent the substrate B from falling off the carrying frame 3 all the way along the conveying path P, so it is desirable that the substrate holding device 1a continuously holds the substrate B except for the substrate introduction area E1 where the substrate B is introduced into the substrate conveying apparatus and the substrate lead-out area E2 where the substrate B is led out from the substrate conveying apparatus, and therefore, only the guide members 12 are provided correspondingly to the substrate introduction area E1 and the substrate lead-out area E2.

As shown in fig. 1, 3 and 6, in the substrate supporting apparatus 1, 1a according to the embodiment of the present invention, the conveying member 2 is an annular conveying member, a plurality of the supporting frames 3 are arranged outside the annular conveying member, and the guide member 12 is fixedly disposed at an inner position of the annular conveying member. With this structure, the guide member 12 can be disposed without occupying an additional space, effectively avoiding the increase in volume of the substrate transport apparatus.

As shown in fig. 1 and 3 to 8, the guiding member 12 is a fixed cam, and the guiding track structure 121 is a cam surface of the fixed cam, which is configured to push against an inner end of the supporting member 11 in a lift-forming manner when the supporting member 11 enters the supporting state switching region E along with the conveying member 2, so as to lift (i.e., lift and move relative to the guiding member 12) the supporting member 11 to the supporting position (fig. 5) or the releasing position (fig. 8). Of course, the invention is not limited thereto, the guiding member 12 can be other members, and the guiding track structure 121 can also be other structures, for example, the guiding track structure 121 can be a concave track formed on the fixed cam.

With the above configuration, the substrate holding device 1, 1a of the present invention can hold the substrate B on the transport path P to effectively reduce or suppress slipping, collision, and damage of the substrate B during transport. Further, the substrate holding device can hold the substrate B in a specific holding state switching region E on the transport path P according to different designs, and does not hold the substrate B in a region other than the holding state switching region E (the substrate holding device 1 shown in fig. 3 to 5), or holds the substrate B in a normal state on the transport path P, and releases the holding of the substrate B only in the holding state switching region E (the substrate holding device 1a shown in fig. 6 to 8). In the preferred embodiment, the substrate holding device can hold the substrate in various manners such as a limit position (the substrate holding device 1 shown in fig. 3 to 5) and a clamp position (the substrate holding device 1a shown in fig. 6 to 8) according to various types of transport.

While the foregoing description and description are of the preferred embodiment of the present invention, other modifications will be apparent to those skilled in the art from this disclosure and it is intended that such modifications be included within the spirit and scope of the present invention as defined in the appended claims.

Claims

1. A substrate holding device of a substrate transport apparatus having a transport member moving along a transport path, the transport member being provided with a plurality of carrier frames arranged thereon, the plurality of carrier frames each having a substrate holding space for holding a substrate to be transported with the movement of the transport member, the substrate holding device comprising:

a plurality of holding members arranged on the transport member in an aligned manner corresponding to the plurality of carrier frames, respectively, and each of the holding members is configured to be displaced as the transport member moves between a holding position where a holder of the holding member is displaced to hold the substrate in the substrate holding space of the corresponding carrier frame and a release position where the holder of the holding member is displaced to release the holding of the substrate; and

and a guide member fixedly provided corresponding to a preset holding state switching region on the conveying path, the guide member having a guide track structure provided to cause the holding member to move from the release position to the holding position or from the holding position to the release position when the holding member enters the holding state switching region by being guided by the guide track structure along with movement of the conveying member.

2. The substrate holding and supporting apparatus according to claim 1, wherein the holding member includes a displacement member and a reset member, the holding member is located on the displacement member, and the reset member is connected to the displacement member in such a manner that the displacement member is normally biased toward the release position, so that the displacement member is displaced from the holding position to the release position by the reset member when the holding member is not in the holding-state switching region.

3. The substrate holding and supporting apparatus according to claim 1, wherein the holding member includes a displacement member and a reset member, the holding member is located on the displacement member, and the reset member is connected to the displacement member in such a manner that the displacement member is biased toward the holding position in a normal state, so that the displacement member is displaced from the release position to the holding position by the reset member when the holding member is not in the holding-state switching region.

4. The substrate holding apparatus of claim 1, wherein the holding member is configured to:

in the holding position, the holder of the holding member is displaced into the substrate receiving space of the corresponding receiving frame to hold the substrate, and in the release position, the holder of the holding member is displaced out of the substrate receiving space to release the holding of the substrate.

5. The substrate bearing apparatus according to any one of claims 1 to 4, wherein the bearing is a bar, the bearing member being arranged to:

in the holding position, the holding member is displaced so as to be spaced apart from the carrier frame by a predetermined holding interval in the direction of the conveyance path, and holds the substrate so that the end portion of the substrate is positioned in the holding interval.

6. The substrate bearing apparatus according to any one of claims 1 to 4, wherein the bearing is a clamp, the bearing member being configured to:

in the holding position, the holder is displaced to cause the clamping opening of the holder member to clamp, thereby holding the substrate so as to clamp the end portion of the substrate.

7. The substrate holding apparatus according to claim 1, wherein the transport member is an annular transport member, a plurality of the carrier frames are arranged outside the annular transport member, and the guide member is fixedly provided at an inner position of the annular transport member.

8. The substrate holding and supporting device according to claim 1 or 7, wherein the guide member is a fixed cam, and the guide track structure is a cam surface of the fixed cam, the cam surface being configured to push an inner end of the holding member in a lift-forming manner when the holding member enters the holding state switching region along with the conveying member, so that the holding member is lift-moved to the holding position or the release position.

9. The substrate holding and supporting device according to any one of claims 1 to 4, wherein the holding state switching region is provided so as to correspond to a gradient change region on the conveying path of the substrate conveying apparatus.

10. The substrate holding device according to any one of claims 1 to 4, wherein the holding state switching region is provided so as to correspond to a substrate lead-in area and/or a substrate lead-out area on the conveyance path of the substrate conveyance apparatus.