CN214046173U - Substrate holding device for substrate conveying equipment - Google Patents
Substrate holding device for substrate conveying equipment Download PDFInfo
- Publication number
- CN214046173U CN214046173U CN202022981360.8U CN202022981360U CN214046173U CN 214046173 U CN214046173 U CN 214046173U CN 202022981360 U CN202022981360 U CN 202022981360U CN 214046173 U CN214046173 U CN 214046173U
- Authority
- CN
- China
- Prior art keywords
- holding
- substrate
- conveying
- displacement
- displaced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 183
- 238000006073 displacement reaction Methods 0.000 claims description 42
- 230000033001 locomotion Effects 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 2
- 230000006835 compression Effects 0.000 description 7
- 238000007906 compression Methods 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
一种基板输送设备的基板持承装置，包括多个持承构件及导引构件，各个该持承构件被设置为在持承位置与释放位置之间位移而持承基板或是解除对于该基板的持承，该导引构件被设置为使该持承构件进入持承状态切换区域时，切换至该持承位置或是该释放位置，以控制对于该基板的持承。
A substrate holding device of a substrate conveying equipment, comprising a plurality of holding members and guide members, each of the holding members is arranged to be displaced between a holding position and a releasing position to hold the substrate or release the substrate The guide member is configured to switch to the holding position or the releasing position when the holding member enters the holding state switching area, so as to control the holding of the substrate.
Description
Technical Field
The utility model relates to a base plate conveying equipment especially relates to a base plate of base plate conveying equipment holds device.
Background
Printed circuit substrates need to be processed through several stages in the manufacturing process, for example: baking and drying are performed, and the substrate is often transferred by a substrate transfer apparatus during each stage of processing or between adjacent stages of processing. The substrate transport apparatus generally includes: a transmission mechanism (e.g., a transmission wheel), a conveying component (e.g., a conveying chain and a conveying belt) driven by the transmission mechanism, and a bearing frame (e.g., a U-shaped frame and a rectangular frame) for bearing the substrate.
However, the substrate transportation apparatus does not only transport along a flat horizontal path, but along with the requirements of each stage of processing and the mechanical design of the substrate transportation apparatus itself, there are various changes such as the ascending and descending of the slope, the upward or downward movement of the carrying frame, etc. in the transportation path, which easily causes the substrate to slide undesirably during the transportation process, thereby causing the substrate to slip, collide, and even be damaged.
SUMMERY OF THE UTILITY MODEL
Therefore, the present invention is directed to a substrate supporting device of a substrate conveying apparatus, which can assist in supporting a substrate to effectively reduce or prevent the substrate from slipping, colliding, and being damaged during the conveying process.
The utility model discloses a technical means who solves prior art's problem and adopts holds device for providing a base plate of base plate conveying equipment, wherein this base plate conveying equipment has the conveying component, moves along conveying path, and it is provided with a plurality of bearing frames to arrange on this conveying component, and a plurality of these bearing frames have base plate bearing space separately for bearing substrate to carry this base plate along with this conveying component's removal, this base plate holds the device and contains: a plurality of holding members arranged on the conveying member in an aligned manner corresponding to the plurality of carrying frames, respectively, and moving with the conveying member, each of the holding members being configured to be displaced between a holding position at which the holding member of the holding member is displaced to hold the substrate in the substrate holding space of the corresponding carrying frame and a release position at which the holding member of the holding member is displaced to release the holding of the substrate; and a guide member fixedly disposed corresponding to a preset holding state switching region on the conveying path, the guide member having a guide track structure configured to cause the holding member to move from the release position to the holding position or from the holding position to the release position when the holding member enters the holding state switching region by moving along with the conveying member and being guided by the guide track structure.
An embodiment of the present invention provides a substrate supporting device, wherein the supporting member includes a displacement member and a reset member, the supporting member is located on the displacement member, the reset member is connected to the displacement member in a manner such that the displacement member is biased toward the release position under a normal condition, so as to displace the displacement member from the supporting position to the release position through the reset member when the supporting member is not in the supporting state switching region.
An embodiment of the present invention provides a substrate supporting device, wherein the supporting member includes a displacement member and a reset member, the supporting member is located on the displacement member, the reset member is connected to the displacement member in a manner such that the displacement member is biased toward the supporting position under a normal state, so as to move the displacement member from the releasing position to the supporting position through the reset member when the supporting member is not in the supporting state switching region.
In an embodiment of the present invention, there is provided a substrate holding and supporting device, wherein the holding member is configured to: in the holding position, the holding member of the holding member is displaced into the corresponding substrate holding space of the holding frame to hold the substrate, and in the release position, the holding member of the holding member is displaced out of the substrate holding space to release the holding of the substrate.
In an embodiment of the present invention, there is provided a substrate supporting device, wherein the supporting member is a bar, the supporting member is configured to: in the holding position, the holding member is displaced to be spaced apart from the carrying frame by a predetermined holding interval in the direction of the conveying path, and holds the substrate in such a manner that the end portion of the substrate is limited in the holding interval.
In an embodiment of the present invention, there is provided a substrate supporting device, wherein the supporting member is a clamp, the supporting member is configured to: in the holding position, the holding member is displaced to cause the holding opening of the holding member to clamp and move, and the substrate is held so as to hold the end portion of the substrate.
In one embodiment of the present invention, a substrate supporting apparatus is provided, wherein the conveying member is an annular conveying member, a plurality of the supporting frames are arranged outside the annular conveying member, and the guiding member is fixedly disposed inside the annular conveying member.
In an embodiment of the present invention, a substrate supporting device is provided, wherein the guiding member is a fixed cam, the guiding track structure is a cam surface of the fixed cam, and the cam surface is configured to push an inner end of the supporting member in a lift forming manner when the supporting member enters the supporting state switching region along with the conveying member, so that the supporting member is moved to the supporting position or the releasing position.
In an embodiment of the present invention, there is provided a substrate holding and supporting device, wherein the holding state switching region is a gradient change region on the conveying path corresponding to the substrate conveying apparatus.
In an embodiment of the present invention, a substrate supporting device is provided, wherein the supporting state switching area is set to correspond to a substrate lead-in area and/or a substrate lead-out area on the conveying path of the substrate conveying apparatus.
Through the utility model discloses the technical means who adopts, this base plate holds the bearing device and can hold this base plate on this transfer path to reduce effectively or restrain slippage, collision, and the damage of this base plate in transportation process. Further, the substrate holding device can hold the substrate in a specific holding state switching region on the transport path and does not hold the substrate in a region other than the holding state switching region, or hold the substrate in the transport path at all times and release the holding of the substrate only in the holding state switching region, depending on the design. In the preferred embodiment, the substrate holding and supporting device can hold and support the substrate in various manners such as a position limitation and a clamping according to various types of conveyance.
Drawings
Fig. 1 is a schematic perspective view of a substrate holding device of a substrate transport apparatus according to an embodiment of the present invention;
fig. 2 is an exploded schematic view of a substrate holding device of a substrate transport apparatus according to an embodiment of the present invention;
fig. 3 is a schematic side view of a substrate holding device of a substrate transport apparatus according to an embodiment of the present invention;
fig. 4 is a schematic view of a substrate supporting device of a substrate conveying apparatus according to an embodiment of the present invention in a release position;
fig. 5 is a schematic view of a substrate supporting device of a substrate conveying apparatus according to an embodiment of the present invention in a supporting position;
fig. 6 is a schematic side view of a substrate holding device of a substrate transport apparatus according to another embodiment of the present invention;
fig. 7 is a schematic view of a substrate supporting device of a substrate conveying apparatus according to another embodiment of the present invention in a supporting position;
fig. 8 is a schematic view of a substrate supporting device of a substrate transport apparatus according to another embodiment of the present invention in a release position.
Reference numerals:
1-substrate holder device, 1 a-substrate holder device, 11-holder member, 110-base member, 110 a-clamping counterpart, 111-holder, 112-displacement member, 112 a-vertical rod, 112B-link, 112C-link, 112D-push rod, 113-reset member, 12-guide member, 121-guide track structure, 2-transport member, 3-carrier frame, B-substrate, C-clamp opening, D-holder gap, E-holder state switching region, E1-substrate lead-in region, E2-substrate lead-out region, P-transport path, S-substrate holding space.
Detailed Description
The following describes an embodiment of the present invention with reference to fig. 1 to 8. The description is not intended to limit the embodiments of the present invention, but is one example of the embodiments of the present invention.
As shown in fig. 1 to 5, a substrate holding device 1 of a substrate transport apparatus according to an embodiment of the present invention is provided in the substrate transport apparatus. The substrate conveying apparatus has a conveying member 2 moving along a conveying path P, a plurality of carrying frames 3 are arranged on the conveying member 2, and each of the plurality of carrying frames 3 has a substrate carrying space S for carrying a substrate B to convey the substrate B along with the movement of the conveying member 2.
As shown in fig. 1 to 5, in an embodiment of the present invention, the substrate supporting apparatus 1 includes: a plurality of support members 11 and guide members 12.
As shown in fig. 1 to 5, in the substrate supporting device 1 according to the embodiment of the present invention, a plurality of the supporting members 11 are arranged on the conveying member 2 in a manner corresponding to a plurality of the supporting frames 3, respectively, and move along with the conveying member 2, each of the supporting members 11 is configured to be displaced between a supporting position (shown in fig. 5) in which the supporting member 111 of the supporting member 11 is displaced to support the substrate B in the substrate supporting space S of the corresponding supporting frame 3 and a releasing position (shown in fig. 4) in which the supporting member 111 of the supporting member 11 is displaced to release the supporting of the substrate B.
As shown in fig. 1 to 5, in the substrate supporting device 1 according to the embodiment of the present invention, the guiding member 12 is fixedly disposed corresponding to the predetermined supporting state switching region E on the conveying path P, the guiding member 12 has a guiding track structure 121, and the guiding track structure 121 is configured to make the supporting member 11 move from the releasing position to the supporting position or from the supporting position to the releasing position when the supporting member 11 enters the supporting state switching region E through the movement of the conveying member 2 and the guidance of the guiding track structure 121.
Specifically, as shown in fig. 3 to 5, according to the substrate supporting apparatus 1 of the embodiment of the present invention, the supporting member 11 includes a displacement member 112 and a reset member 113, the supporting member 111 is located on the displacement member 112, and the reset member 113 is connected to the displacement member 112 in a manner that the displacement member 112 is normally biased toward the release position (fig. 4), so that when the supporting member 11 is not in the supporting state switching region E, the displacement member 111 is shifted from the supporting position (fig. 5) to the release position (fig. 4) by the reset member 113.
In the present embodiment, the restoring member 113 is a spring, more specifically, a compression spring. One end of the compression spring abuts against the base part 110 of the holding member 11, and the other end abuts against the inner end (lower end in the figure) of the displacement member 112, and the holding member 111 is disposed at the outer end (upper end in the figure) of the displacement member 112. Accordingly, the spring force of the compression spring pushes the displacement member 112 downward in the drawing, so that the displacement member 112 moves downward in a normal state where the displacement member is not biased by a force other than the compression spring, and the holder 111 also moves to the release position where the substrate is not held as the displacement member 112 moves downward (fig. 4). Of course, the present invention is not limited thereto. The reset member 113 may be disposed to achieve the reset effect by other means (e.g., gravity). The return member 113 may be replaced with a mechanism other than a spring (e.g., a pull cord).
As shown in fig. 3 to 5, according to the substrate holding device 1 of the embodiment of the present invention, the holding member 11 is configured to: in the holding position (fig. 5), the holder 111 of the holding member 11 is displaced into the corresponding substrate holding space S of the holding frame 3 to hold the substrate B, and in the release position (fig. 4), the holder 111 of the holding member 11 is displaced out of the substrate holding space S to release the holding of the substrate B.
Specifically, in the present embodiment, in order to avoid the interference of the support 111 with other components or substrates in the substrate supporting space S, the support 111 is withdrawn from the substrate supporting space S in the release position. Of course, the present invention is not limited thereto, and the support 111 may just leave the substrate B without exiting the substrate carrying space S for other reasons.
As shown in fig. 3 to 5, according to the substrate supporting device 1 of the embodiment of the present invention, the supporting member 111 is a stopper, and the supporting member 11 is configured to: in the holding position (fig. 5), the holding member 111 is displaced so as to be spaced apart from the carrier frame 3 by a predetermined holding interval D in the direction of the conveying path P, and holds the substrate B in such a manner that the end portion of the substrate B is held in the holding interval D.
Specifically, in the present embodiment, the support 111 does not directly clamp the substrate B, and the support 111 is used for blocking the end of the substrate B to prevent the substrate B from greatly sliding in the direction of the conveying path P, so as to prevent the substrate B from slipping off the carrying frame 3.
As shown in fig. 3, according to the substrate supporting device 1 of the embodiment of the present invention, the supporting state switching area E is set to correspond to the gradient change area on the conveying path P of the substrate conveying apparatus.
Specifically, in the present embodiment, the substrate supporting apparatus 1 is mainly used to prevent the substrate B from slipping off the supporting frame 3. Since the carrying frame 3 and the substrate B on the conveying path P are rotated in addition to the original translational motion when being conveyed through a region where the gradient changes (i.e., a gradient change region), the slipping-off of the substrate is likely to occur in this region. By disposing the guide members 12 correspondingly to the slope varying regions, the slipping-off of the substrate B can be effectively reduced or suppressed.
Fig. 6 to 8 show a substrate supporting apparatus 1a according to another embodiment of the present invention, wherein the same or corresponding components are designated by the same reference numerals.
As shown in fig. 6 to 8, according to a substrate supporting device 1a of another embodiment of the present invention, the supporting member 11 includes a displacement member 112 and a reset member 113, the supporting member 111 is located on the displacement member 112, and the reset member 113 is connected to the displacement member 112 in a manner that the displacement member 112 is normally biased toward the supporting position (fig. 7), so that when the supporting member 11 is not in the supporting state switching region E, the displacement member 112 is shifted from the releasing position (fig. 8) to the supporting position (fig. 7) by the reset member 113.
In the present embodiment, the displacement member 112 is a linkage, and the restoring member 113 is a spring, more specifically a compression spring. One end of the compression spring abuts against the base element 110 of the holding member 11, and the other end abuts against the inner end (upper end in the figure) of the displacement element 112, so that the upright rod 112a of the linkage is biased upward in a normal state without being biased by a force other than the compression spring, and the push rod 112d of the linkage is pushed laterally by the action of the links 112b and 112c, so that the holding element 111 disposed on the push rod 112d is displaced to approach the corresponding clamping part 110a on the base element 110 for clamping. Of course, the present invention is not limited thereto. The reset member 113 may be disposed to achieve the reset effect by other means (e.g., gravity). The return member 113 may be replaced with a mechanism other than a spring (e.g., a pull cord).
As shown in fig. 6 to 8, according to the substrate supporting device 1a of another embodiment of the present invention, the supporting member 111 is a jig, and the supporting member 11 is configured to: in the holding position (fig. 7), the holder 111 is displaced to clamp the holding opening C of the holder member 11, and holds the substrate B so as to hold the end portion of the substrate B.
Specifically, in the present embodiment, the holder 111 directly holds the substrate B, and the holder 111 is capable of holding the substrate B so that the substrate B does not fall off even when being conveyed below the conveying member 2.
As shown in fig. 6 to 8, according to the substrate supporting device 1a of another embodiment of the present invention, the supporting state switching area E is set to correspond to the substrate lead-in area E1 and/or the substrate lead-out area E2 on the conveying path P of the substrate conveying apparatus.
Specifically, in the present embodiment, the substrate holding device 1a is mainly used to prevent the substrate B from falling off the carriage frame 3 in the entire course of the conveying path P, so it is desirable that the substrate holding device 1a continuously holds the substrate B except for the substrate introduction area E1 where the substrate B is introduced into the substrate conveying apparatus and the substrate lead-out area E2 where the substrate B is led out from the substrate conveying apparatus, and therefore, only the guide members 12 are provided correspondingly to the substrate introduction area E1 and the substrate lead-out area E2.
As shown in fig. 1, 3 and 6, according to the substrate supporting apparatus 1, 1a of the embodiment of the present invention, the conveying member 2 is an annular conveying member, a plurality of the supporting frames 3 are arranged outside the annular conveying member, and the guiding member 12 is fixedly disposed inside the annular conveying member. With this structure, the guide member 12 can be disposed without occupying an additional space, effectively avoiding the increase in volume of the substrate transport apparatus.
As shown in fig. 1 and 3 to 8, the guiding member 12 is a fixed cam, and the guiding track structure 121 is a cam surface of the fixed cam, which is configured to push against an inner end of the supporting member 11 in a lift-forming manner when the supporting member 11 enters the supporting state switching region E along with the conveying member 2, so as to lift (i.e., lift and move relative to the guiding member 12) the supporting member 11 to the supporting position (fig. 5) or the releasing position (fig. 8). Of course, the present invention is not limited thereto, the guiding member 12 can be other members, and the guiding track structure 121 can also be other structures, for example, the guiding track structure 121 can be a concave track formed on the fixed cam.
Through the structure, the utility model discloses a base plate holds bearing device 1, 1a can hold this base plate B on this transfer path P to reduce effectively or restrain slippage, collision, and the damage of this base plate B in transportation process. Further, the substrate holding device can hold the substrate B in a specific holding state switching region E on the transport path P according to different designs, and does not hold the substrate B in a region other than the holding state switching region E (the substrate holding device 1 shown in fig. 3 to 5), or holds the substrate B in a normal state on the transport path P, and releases the holding of the substrate B only in the holding state switching region E (the substrate holding device 1a shown in fig. 6 to 8). In the preferred embodiment, the substrate holding device can hold the substrate in various manners such as a limit position (the substrate holding device 1 shown in fig. 3 to 5) and a clamp position (the substrate holding device 1a shown in fig. 6 to 8) according to various types of transport.
The above description and illustrations are only for the description of the preferred embodiments of the present invention, and other modifications may be made by those skilled in the art within the scope of the claims and the description above, and these modifications are still intended to be within the spirit of the present invention.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022981360.8U CN214046173U (en) | 2020-12-11 | 2020-12-11 | Substrate holding device for substrate conveying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022981360.8U CN214046173U (en) | 2020-12-11 | 2020-12-11 | Substrate holding device for substrate conveying equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214046173U true CN214046173U (en) | 2021-08-24 |
Family
ID=77335766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022981360.8U Withdrawn - After Issue CN214046173U (en) | 2020-12-11 | 2020-12-11 | Substrate holding device for substrate conveying equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214046173U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114630495A (en) * | 2020-12-11 | 2022-06-14 | 群翊工业股份有限公司 | Substrate holding device of substrate conveying apparatus |
-
2020
- 2020-12-11 CN CN202022981360.8U patent/CN214046173U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114630495A (en) * | 2020-12-11 | 2022-06-14 | 群翊工业股份有限公司 | Substrate holding device of substrate conveying apparatus |
| CN114630495B (en) * | 2020-12-11 | 2025-02-11 | 群翊工业股份有限公司 | Substrate holding device of substrate conveying equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101433516B1 (en) | Apparatus and Method for transferring substrate and tray to transfer the substrate | |
| KR20060081356A (en) | Apparatus and method for aligning devices on a carrier | |
| CN214046173U (en) | Substrate holding device for substrate conveying equipment | |
| JP7099245B2 (en) | Goods carrier | |
| JP2010285279A (en) | Automated warehouse fronting device | |
| JP2013067514A (en) | System and method for loading and/or unloading tray | |
| JP2004212081A (en) | Transfer arm mechanism, traveling probe card carrying apparatus using the same, and probe apparatus | |
| CN109205222B (en) | Material conveying device and method | |
| CN114435873A (en) | Carrying robot and tower type elevator comprising same | |
| JP6091867B2 (en) | Transport mechanism | |
| CN114630495B (en) | Substrate holding device of substrate conveying equipment | |
| TWI749946B (en) | Substrate holding device for substrate conveying equipment | |
| KR20190021861A (en) | Apparatus and method for transferring carrier | |
| KR102362251B1 (en) | Gripper for gripping a substrate and apparatus including the same | |
| TWM610024U (en) | Substrate holding device of substrate conveying equipment | |
| JPH01308034A (en) | Lead frame carrying device | |
| JP2825101B2 (en) | Wafer frame moving device | |
| CN108807246B (en) | Cartridge fixing device and vehicle having the same | |
| JPWO2017187503A1 (en) | Deposition equipment | |
| KR102221114B1 (en) | Overhead Hoist transport device | |
| CN222081879U (en) | Carrier transmission device and adjusting mechanism thereof | |
| JPH0719827B2 (en) | Wafer transfer device | |
| TW202014362A (en) | Sheet conveying method and device to reduce the risk of the sheet from being jammed | |
| CN215973519U (en) | Positioning and conveying device and positioning and conveying system | |
| KR102677117B1 (en) | Grip unit for OHT device with wafer shaking preventing function |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20210824 Effective date of abandoning: 20250211 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20210824 Effective date of abandoning: 20250211 |