CN114481299A - 一种石英坩埚及其制作方法 - Google Patents
一种石英坩埚及其制作方法 Download PDFInfo
- Publication number
- CN114481299A CN114481299A CN202210147702.7A CN202210147702A CN114481299A CN 114481299 A CN114481299 A CN 114481299A CN 202210147702 A CN202210147702 A CN 202210147702A CN 114481299 A CN114481299 A CN 114481299A
- Authority
- CN
- China
- Prior art keywords
- side part
- quartz
- sand
- outer side
- quartz sand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 158
- 239000010453 quartz Substances 0.000 title claims abstract description 57
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 239000006004 Quartz sand Substances 0.000 claims abstract description 72
- 238000000465 moulding Methods 0.000 claims abstract description 22
- 239000000155 melt Substances 0.000 claims abstract description 7
- 239000004576 sand Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 16
- 239000002245 particle Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 abstract description 18
- 229910052710 silicon Inorganic materials 0.000 abstract description 10
- 239000010703 silicon Substances 0.000 abstract description 10
- 235000019580 granularity Nutrition 0.000 description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210147702.7A CN114481299A (zh) | 2022-02-17 | 2022-02-17 | 一种石英坩埚及其制作方法 |
Applications Claiming Priority (1)
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---|---|---|---|
CN202210147702.7A CN114481299A (zh) | 2022-02-17 | 2022-02-17 | 一种石英坩埚及其制作方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN114481299A true CN114481299A (zh) | 2022-05-13 |
Family
ID=81482138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202210147702.7A Pending CN114481299A (zh) | 2022-02-17 | 2022-02-17 | 一种石英坩埚及其制作方法 |
Country Status (1)
Country | Link |
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CN (1) | CN114481299A (zh) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4632686A (en) * | 1986-02-24 | 1986-12-30 | Gte Products Corporation | Method of manufacturing quartz glass crucibles with low bubble content |
CN101983262A (zh) * | 2008-03-31 | 2011-03-02 | 日本超精石英株式会社 | 石英玻璃坩埚及其制造方法 |
CN102730946A (zh) * | 2012-07-25 | 2012-10-17 | 江西中昱新材料科技有限公司 | 热喷涂生长石英坩埚的熔制设备及其熔制方法 |
JP2015127287A (ja) * | 2013-12-28 | 2015-07-09 | 株式会社Sumco | 石英ガラスルツボ及びその製造方法 |
CN109111102A (zh) * | 2018-11-02 | 2019-01-01 | 宁夏富乐德石英材料有限公司 | 一种半导体级石英坩埚及其制造方法 |
CN209098511U (zh) * | 2018-11-02 | 2019-07-12 | 宁夏富乐德石英材料有限公司 | 一种复合层式半导体级石英坩埚 |
CN112064112A (zh) * | 2020-09-15 | 2020-12-11 | 晶科能源有限公司 | 坩埚及其制备方法和用于制备硅晶体的装置 |
CN113510824A (zh) * | 2020-04-09 | 2021-10-19 | 隆基绿能科技股份有限公司 | 一种复合石英坩埚的制备方法及复合石英坩埚 |
CN113735421A (zh) * | 2020-05-28 | 2021-12-03 | 隆基绿能科技股份有限公司 | 一种石英坩埚制造方法和成型装置 |
-
2022
- 2022-02-17 CN CN202210147702.7A patent/CN114481299A/zh active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4632686A (en) * | 1986-02-24 | 1986-12-30 | Gte Products Corporation | Method of manufacturing quartz glass crucibles with low bubble content |
CN101983262A (zh) * | 2008-03-31 | 2011-03-02 | 日本超精石英株式会社 | 石英玻璃坩埚及其制造方法 |
CN102730946A (zh) * | 2012-07-25 | 2012-10-17 | 江西中昱新材料科技有限公司 | 热喷涂生长石英坩埚的熔制设备及其熔制方法 |
JP2015127287A (ja) * | 2013-12-28 | 2015-07-09 | 株式会社Sumco | 石英ガラスルツボ及びその製造方法 |
CN109111102A (zh) * | 2018-11-02 | 2019-01-01 | 宁夏富乐德石英材料有限公司 | 一种半导体级石英坩埚及其制造方法 |
CN209098511U (zh) * | 2018-11-02 | 2019-07-12 | 宁夏富乐德石英材料有限公司 | 一种复合层式半导体级石英坩埚 |
CN113510824A (zh) * | 2020-04-09 | 2021-10-19 | 隆基绿能科技股份有限公司 | 一种复合石英坩埚的制备方法及复合石英坩埚 |
CN113735421A (zh) * | 2020-05-28 | 2021-12-03 | 隆基绿能科技股份有限公司 | 一种石英坩埚制造方法和成型装置 |
CN112064112A (zh) * | 2020-09-15 | 2020-12-11 | 晶科能源有限公司 | 坩埚及其制备方法和用于制备硅晶体的装置 |
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PB01 | Publication | ||
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TA01 | Transfer of patent application right |
Effective date of registration: 20230425 Address after: 313000 Shunyuan Road, Dong'er District, Shangyu Economic and Technological Development Zone, Hangzhou Bay, Hangzhou City, Zhejiang Province Applicant after: Zhejiang Meijing New Materials Co.,Ltd. Address before: 014030 room 807, building a, management committee of Qingshan District equipment manufacturing industrial park, Baotou City, Inner Mongolia Autonomous Region Applicant before: Inner Mongolia Xinjing New Material Co.,Ltd. |
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Application publication date: 20220513 |