CN114405887B - Friction scraping method for testing probe cleaning method - Google Patents

Friction scraping method for testing probe cleaning method Download PDF

Info

Publication number
CN114405887B
CN114405887B CN202210126256.1A CN202210126256A CN114405887B CN 114405887 B CN114405887 B CN 114405887B CN 202210126256 A CN202210126256 A CN 202210126256A CN 114405887 B CN114405887 B CN 114405887B
Authority
CN
China
Prior art keywords
probe
test
scraping
piece
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202210126256.1A
Other languages
Chinese (zh)
Other versions
CN114405887A (en
Inventor
贺涛
金永斌
丁宁
朱伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Fatedi Technology Co ltd
Original Assignee
FTdevice Technology Suzhou Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FTdevice Technology Suzhou Co Ltd filed Critical FTdevice Technology Suzhou Co Ltd
Priority to CN202210126256.1A priority Critical patent/CN114405887B/en
Publication of CN114405887A publication Critical patent/CN114405887A/en
Application granted granted Critical
Publication of CN114405887B publication Critical patent/CN114405887B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B08B1/165
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Abstract

The invention discloses a friction scraping method for a cleaning method of a test probe, and relates to the technical field of semiconductors; the method specifically comprises the following steps: the gas is input into the air inlet hole formed in the side wall of the upper end of the sleeve through the air inlet pipe, the piston is pushed to move downwards under the action of pressure, the transmission rod is pushed to overcome the elastic action of the reset spring, the moving sheet is further driven to move downwards, the scraping piece is pushed to move downwards through the elastic piece, the scraping piece moving downwards corresponds to the edge of the upper end face of the plum blossom probe, the lower end face of the scraping piece is tightly attached to the edge end face of the plum blossom probe under the action of the elastic force of the elastic piece, when the scraping piece moves downwards to the bottom of the plum blossom probe along the edge, the air inlet hole formed in the side wall of the upper end of the sleeve is sucked through the air inlet pipe, and the previous process is repeated in a reverse direction; the method is applied to a test probe cleaning method, can effectively replace manual cleaning, and ensures the cleaning quality and the test efficiency.

Description

Friction scraping method for testing probe cleaning method
The application is a divisional application of the invention patent application of 'cleaning method of test probe and friction scraping, adhesive adsorption and probe fixing method'.
Application date of the original case: 2020-11-28.
Original application No.: 2020113656141.
the name of the original invention is: a test probe cleaning method and a friction scraping, adhesive adsorption and probe fixing method.
Technical Field
The invention discloses a friction scraping method for a cleaning method of a test probe, and relates to the technical field of semiconductors.
Background
The last process of semiconductor manufacturing is testing, which can be divided into preliminary testing and final testing, and the main purpose of which is to classify semiconductor devices according to specifications, in addition to finding defects of the semiconductor devices. In the process of testing a semiconductor device such as a chip, a probe makes electrical contact with a pin, such as a solder ball, on the semiconductor device to test the related electrical properties of the semiconductor device and evaluate whether the function of the semiconductor device is normal, but since the solder ball on the bottom surface of the chip to be tested is made of a metal material, after the probe tip repeatedly contacts the solder ball in the repeated testing process, metal oxide and other organic materials on the solder ball are accumulated on the probe tip. When these impurity accumulations are in a certain amount, need in time clear up, otherwise can influence the characteristic of probe tip for the test result becomes inaccurate, still need to change the test probe on the whole test socket even when the deposit is serious, the probe of the comparatively extensive probe of current application is mostly plum blossom form, and especially four-jaw plum blossom probe is used and extensive, and the cleaning work to four-jaw plum blossom probe mainly has following problem:
the first and the main cleaning modes are that the brush is manually used for cleaning, and the cleaning quality is uneven, so that the test result is influenced;
secondly, even if manual cleaning is adopted, the test socket needs to be detached from the test base, the probes are detached and separated from the test socket and then cleaned, and after the cleaning is finished, the probes are installed one by one, so that the production line is stopped, and the test efficiency and the output are influenced;
thirdly, removing impurities deposited on the edge and corner end faces of the plum blossom probe according to the shape of the plum blossom probe;
and fourthly, how to completely remove the removed foreign dust from the probe so as to maintain the accuracy of the test result of the probe.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a test probe cleaning method, which is used for solving the problems of how to effectively replace manual cleaning and how to thoroughly clean a probe.
The technical scheme of the invention is as follows:
a test probe cleaning device comprises a cleaning member, a clamping member, a test socket, a test base and a test probe; the cleaning device comprises a cleaning component, a test socket, a clamping component and a test base, wherein the clamping component is arranged above the cleaning component, the test socket is arranged below the cleaning component, the clamping component can control the cleaning component above the test socket through a transmission mechanical arm in a moving mode, the cleaning component can move into the test socket and abut against a probe of a test probe in the test socket, and therefore the work of scraping accumulated impurities from the test probe and adsorbing and removing the impurities and dust from the test socket is completed;
the cleaning component comprises a sleeve, a sealing sheet, a mounting plate, a limiting sheet, a piston, a driving trapezoidal gear, a driven trapezoidal gear, a transmission rod, a moving sheet, an elastic piece, a scraping piece, a threaded sleeve, a transmission shaft, a fixing sheet, a cleaning soft rubber, a reset spring and an output long shaft; the utility model discloses a socket, including mounting panel, casing, upper spacing piece, flexible glue piece, mounting panel, drive trapezoidal gear, driven trapezoidal gear, transmission rod, transmission shaft, output long axis, driven trapezoidal gear, flexible glue piece, the casing passes through the gasket array and sets up under the mounting panel on the terminal surface, but the portable piston that is provided with between upper spacing piece and the gasket, and the initiative trapezoidal gear and the driven trapezoidal gear of piston lower extreme mesh mutually, driven trapezoidal gear both ends symmetry is provided with the transfer line, and the one end of transfer line links to each other with the one end of piston, and the other end of transfer line passes two spacing pieces and links to each other with the removal of limiting piece up and down, and be provided with reset spring on being located the transmission shaft between two spacing pieces through the elastic part display, the transmission motor sets up on the casing lateral wall of one side, and the output long axis links to each other, the output long axis passes the casing that the array set up, and the driven trapezoidal gear setting on the output long axis, the scraping the flexible glue piece can carry out the piston up and down reciprocating motion to the lower terminal surface of scraping the piece and leaning on the probe of piece through the elastic part to offset the impurity of plum blossom point to the clean socket that offsets on the plum blossom point, clean impurity that just can inhale the clean dust and glue the clean impurity of plum blossom from the clean surface and glue the socket.
Preferably, the clamping member comprises a clamping body, an air pipeline and a sealing plate; the air suction device is characterized in that an adsorption port is formed in the lower portion of an inner cavity of the clamping body, an air pipeline is arranged in the clamping body, an air suction end of the air pipeline is connected to the adsorption port, the clamping body can provide air suction through the adsorption port in the lower end of the air pipeline to suck a cleaning component, the cleaning component is adsorbed on a sealing plate in the lower end of the clamping body, and a plurality of positioning holes are symmetrically formed in the two ends of the clamping body.
Preferably, the test base comprises a base body, a first limit clamping piece, a second limit clamping piece, a first lead screw nut, a second lead screw nut, a first adjusting bolt, a second adjusting bolt and a positioning pin; the utility model discloses a test socket, including base body, base body lateral wall, first spacing clamping piece, first adjusting bolt, second adjusting bolt, locating pin, locating hole, locating socket, base body lateral wall symmetry is opened there is the bar through-hole, and first spacing clamping piece and the activity of the spacing clamping piece of second set up in the bar through-hole, the left end of first spacing clamping piece is connected with first lead screw nut, the spacing clamping piece of second is connected with second lead screw nut, first adjusting bolt passes first lead screw nut and rotates the setting on the left end lateral wall of base body, second adjusting bolt passes second lead screw nut and rotates the setting on the right-hand member lateral wall of base body, the locating pin symmetry sets up in the base body upper end, and with the locating hole cooperate, equal array is opened on first spacing clamping piece and the spacing clamping piece of second has circular through-hole, and the plum blossom probe of test probe can pass circular through-hole, sets up at the test base body originally internally, and the test socket is installed on the base body.
Preferably, the side wall of the sleeve is provided with an air inlet hole, the air inlet hole is positioned between the piston and the upper limiting sheet, and the air inlet hole is connected with the air inlet pipe.
Preferably, the center of the movable plate is provided with a through hole, and the transmission shaft penetrates through the through hole in the center of the movable plate to be connected with the upper end face of the fixed plate.
Preferably, the inner diameter of the sleeve matches the outer diameter of the test probe.
Preferably, the first limit clamping piece and the second limit clamping piece are respectively provided with an inner diameter with circular through holes in an array mode, and the inner diameter is matched with the outer diameter of the test probe.
A clamping component of a test probe cleaning device comprises a clamping body, an air pipeline and a sealing plate; the air suction device is characterized in that an adsorption port is formed in the lower portion of an inner cavity of the clamping body, an air pipeline is arranged in the clamping body, an air suction end of the air pipeline is connected to the adsorption port, the clamping body can provide air suction through the adsorption port in the lower end of the air pipeline to suck a cleaning component, the cleaning component is adsorbed on a sealing plate in the lower end of the clamping body, and a plurality of positioning holes are symmetrically formed in the two ends of the clamping body.
A test base of a test probe cleaning device comprises a base body, a first limit clamping piece, a second limit clamping piece, a first lead screw nut, a second lead screw nut, a first adjusting bolt and a second adjusting bolt; the utility model discloses a test socket, including base body, base body lateral wall, first spacing clamping piece, second spacing clamping piece, first adjusting bolt, second adjusting bolt, locating pin, locating socket, base body lateral wall symmetry open there are two sets of bar through-holes, and first spacing clamping piece and the activity of the spacing clamping piece of second set up in two sets of bar through-holes, the left end of first spacing clamping piece is connected with first lead screw nut, the spacing clamping piece of second is connected with second lead screw nut, first adjusting bolt passes first lead screw nut and rotates the setting on the left end lateral wall of base body, second adjusting bolt passes second lead screw nut and rotates the setting on the right-hand member lateral wall of base body, the locating pin symmetry sets up in base body upper end, and with the locating hole cooperate, equal array division has circular through-hole on first spacing clamping piece and the spacing clamping piece of second, the plum blossom probe of test probe can pass circular through-hole, sets up at the test base body originally internally, the test socket is installed on the base body.
A test probe cleaning method comprising the steps of:
step a, fixing the probe, adjusting a first adjusting bolt and a second adjusting bolt which are symmetrically arranged on a base body corresponding to a test probe to be cleaned, simultaneously rotating the first adjusting bolt clockwise and the second adjusting bolt counterclockwise, and rotating the first adjusting bolt and the second adjusting bolt for the same number of turns, wherein the first adjusting bolt and the first lead screw nut have screw thread action, so that the first lead screw nut pulls a first limit clamping piece to move outwards for a certain distance along the axial direction of the first adjusting bolt, and simultaneously the second adjusting bolt and the second lead screw nut have screw thread action, so that the second lead screw nut pulls a second limit clamping piece to move outwards for the distance from the base body to the first limit clamping piece along the axial direction of the second adjusting bolt, the side walls of the corresponding circular through holes on the first limit clamping piece and the second limit clamping piece have relative displacement, the side walls of the circular through holes which have relative displacement are staggered, and abut against the outer wall of the test probe arranged in the corresponding circular through holes in an equivalent manner, and the test probe is fixed;
b, performing adsorption installation, namely sucking air through an air pipeline arranged in the clamping body, and forming a suction effect on the cleaning component through an adsorption port so as to adsorb the cleaning component on the bottom surface of the sealing plate;
c, alignment adjustment, namely, placing the cleaning component which is subjected to adsorption installation right above the test socket by controlling the transmission mechanical arm, enabling a positioning pin on the test base to correspond to a positioning hole formed in the clamping body, pushing the clamping component to drive the cleaning component to move downwards by controlling the transmission mechanical arm, enabling the positioning pin to be inserted into the positioning hole, enabling the test probe to be inserted into a corresponding sleeve pipe, and enabling the lowest end of the sleeve pipe and the lower end surface of the quincuncial probe of the test probe to be located on the same horizontal plane so as to complete alignment adjustment work;
d, scraping by friction resistance, inputting gas into the gas inlet hole formed in the side wall of the upper end of the sleeve through the gas inlet pipe to increase the air pressure of a closed space between the sealing sheet and the piston, pushing the piston to move downwards under the action of the pressure, pushing the transmission rod by the piston which moves downwards to overcome the elastic action of the return spring so as to drive the movable sheet to move downwards, pushing the scraping piece to move downwards through the elastic piece by the movable sheet which moves downwards, wherein the scraping piece which moves downwards corresponds to the edge of the upper end face of the plum blossom probe, and under the action of the elastic force of the elastic piece, the lower end face of the scraping piece is tightly attached to the edge end face of the plum blossom probe and moves downwards along the edge, and when the scraping piece moves to the bottom of the plum blossom probe, the gas inlet hole formed in the side wall of the upper end of the sleeve is sucked through the gas inlet pipe, the pneumatic pressure of a sealed space between the sealing sheet and the piston is reduced, the piston is driven to move upwards under the action of the pressure, the piston moving upwards and the elastic force of the reset spring drive the transmission rod to move upwards, and further drive the moving sheet to move upwards, the moving sheet moving upwards pushes the scraping piece to move upwards through the elastic piece, the lower end face of the scraping piece is tightly attached to the edge end face of the plum blossom probe and moves upwards along the edge end face under the action of the elastic force of the elastic piece, after the preset reciprocating times are finished, the friction scraping is finished, at the moment, the scraping piece is separated from the test probe through the pneumatic pressure control between the sealing sheet and the piston and the transmission rod and the moving sheet, and at the moment, the gas input or output to the gas inlet pipe is stopped;
step e, viscidity adsorption, starting a transmission motor arranged on the side wall of the sleeve to rotate clockwise, enabling the transmission motor to drive a driving trapezoidal gear to rotate clockwise through an output long shaft, enabling the driving trapezoidal gear to drive a threaded sleeve to rotate anticlockwise through a driven trapezoidal gear, enabling the internal thread of the threaded sleeve to rotate anticlockwise and the external thread of a transmission shaft to act on the external thread of the transmission shaft, driving the transmission shaft to move downwards, enabling the transmission shaft moving downwards to drive a cleaning soft rubber to move downwards to abut against the upper end face of the test probe through a fixing piece, enabling the cleaning soft rubber to contact with and abut against and roll the plum blossom probe part of the test probe to deform, enabling the deformed cleaning soft rubber to fully adapt to the complex edge angle end face of the upper end face of the plum blossom probe of the test probe, completely adhering impurities and dust on the upper end face of the plum blossom probe to the surface of the cleaning soft rubber, adjusting the sleeve transmission motor to rotate anticlockwise, enabling the transmission motor to drive the driving trapezoidal gear to rotate anticlockwise through the output long shaft, enabling the driving trapezoidal gear to drive the threaded sleeve to rotate clockwise through the driven trapezoidal gear to drive the external thread of the flexible sleeve to rotate clockwise, and completing the separation of the adhesion of the cleaning soft rubber from the upper end face of the adhesive.
Preferably, the test probe cleaning device is implemented on a test probe cleaning device.
A friction scraping method for cleaning test probe includes inputting gas to air inlet hole on side wall of top end of sleeve by air inlet pipe to increase air pressure in sealed space between sealing piece and piston, pushing piston to move down by pressure, pushing drive rod to overcome elastic force of reset spring by piston moving down to drive moving piece to move down, pushing scraping piece to move down by elastic piece, sucking air to air inlet hole on side wall of top end of sleeve by air inlet pipe to reduce air pressure in sealed space between sealing piece and piston, pushing piston to move up by elastic force of reset spring, controlling air inlet hole to move up by piston and air outlet of piston, controlling friction between sealing piece and piston, and controlling air inlet hole to move up by air inlet pipe.
Preferably, the test probe cleaning device is implemented on a test probe cleaning device.
The utility model provides a viscidity adsorption method of test probe cleaning method, the drive motor that sets up on the start sleeve lateral wall rotates clockwise, drive motor leads to the output major axis and drives initiative trapezoidal gear clockwise rotation, clockwise pivoted initiative trapezoidal gear drives the screw sleeve anticlockwise rotation through driven trapezoidal gear, the effect of the internal thread of anticlockwise pivoted screw sleeve and the external screw thread of transmission shaft, drive transmission shaft downstream, the transmission shaft of downstream drives clean flexible glue downstream through the stationary blade to lean on with the up end of test probe counterbalance, clean flexible glue is by the contact with the plum blossom probe part of test probe, the support, roll and take place deformation, the clean flexible glue that takes place deformation, can fully adapt to the complicated edges and corners terminal surface of plum blossom probe up end of test probe, completely glue the impurity and the dust of plum blossom probe up end on the surface of clean flexible glue, adjust sleeve transmission motor anticlockwise rotation, drive motor leads to the output major axis and drives initiative trapezoidal gear anticlockwise rotation, anticlockwise pivoted initiative trapezoidal gear drives screw sleeve through driven trapezoidal gear and rotates clockwise rotation, the internal thread of clockwise pivoted screw sleeve and the effect of transmission shaft drive the transmission shaft upward movement, the external screw sleeve drives the cleaning work phase separation on the test probe through driven by the stationary blade.
Preferably, the test probe cleaning device is implemented on a test probe cleaning device.
A first adjusting bolt and a second adjusting bolt which are symmetrically arranged on a base body corresponding to a test probe to be cleaned are adjusted, the first adjusting bolt is rotated clockwise and the second adjusting bolt is rotated anticlockwise at the same time, and the first adjusting bolt and the first lead screw nut rotate for the same number of turns, so that the first lead screw nut pulls a first limiting clamping piece to move outwards for a certain distance along the axial direction of the first adjusting bolt, meanwhile, the second adjusting bolt and the second lead screw nut are in threaded action, so that the second lead screw nut pulls a second limiting clamping piece to move outwards along the axial direction of the second adjusting bolt for a distance which is equal to that of the first limiting clamping piece, the side walls of the corresponding circular through holes on the first limiting clamping piece and the second limiting clamping piece are displaced relatively, the side walls of the circular through holes which are displaced relatively are dislocated and abut against the outer wall of the test probe arranged in the corresponding circular through holes, and the test probe is fixed.
Preferably, the test probe cleaning device is implemented on a test probe cleaning device.
The invention has the beneficial effects that:
first, the centre gripping component can be through the clean component of transmission arm mobility control test socket top, can make clean component remove to in the test socket, and support and lean on with the probe laminating of the test probe in the test socket, with the completion striking off earlier the accumulation impurity to the test probe, adsorb the work of cleaing away from the test socket internal with the impurity dust again, can effectively thoroughly strike off sedimentary impurity, can thoroughly effectively clear away from the test probe surface with the impurity dust of cleaing away again simultaneously, need not to dismantle the installation test probe from the test socket in simultaneously, can effectively clear away, and the work efficiency is greatly improved.
Second, carry out input or output gas through the inlet port that the intake pipe opened on the lateral wall of sleeve pipe upper end, in order to increase or reduce the atmospheric pressure in the airtight space between gasket and the piston, promote the piston and move downwards or upward, and then under the effect of elasticity through the elastic component, make the lower terminal surface of scraping off the piece closely lean on the edges and corners terminal surface of plum blossom probe, and along its downward or upward movement, after waiting to accomplish predetermined reciprocal number of times, accomplish the friction and hinder and strike off, in order to realize reciprocating motion and in order to contact repeatedly in the determinand such as the tin ball that awaits measuring with the probe tip, the impurity that forms at the probe tip carries out effectual striking off, in the in-process of striking off repeatedly, can effectually clear away the impurity of deposit on the plum blossom probe of test probe, need artifical dismantlement after-separation to wash promptly, guarantee the characteristic of the probe of test probe again, make the measuring result more accurate, the degree of accuracy and the test yield have been guaranteed.
Third, the drive motor who sets up on the starting sleeve lateral wall rotates clockwise, drive motor leads to the output major axis and drives initiative trapezoidal gear clockwise, it rotates to drive the threaded sleeve through driven trapezoidal gear, and then drive the transmission shaft downstream, the transmission shaft of downstream passes through the stationary blade and drives clean flexible glue downstream to the up end with and offset and lean on, clean flexible glue is by the contact action with the plum blossom probe part, support and lean on, it takes place deformation to roll, take place the clean flexible glue of deformation, can fully adapt to the complicated edges and corners terminal surface of plum blossom probe up end of test probe, glue the impurity and the dust of plum blossom probe up end on the surface of clean flexible glue completely, can effectually will persist the bottom at the plum blossom probe, impurity and the dust after striking off the component clearance adsorb completely, make the cleaning work clean more clean thoroughly, further guaranteed the characteristic of test probe, make the measuring result more accurate effective.
Fourthly, gas is input into an air inlet hole formed in the side wall of the upper end of the sleeve through an air inlet pipe, when the piston is pushed to drive the movable piece to move downwards, the transmission motor is not started to rotate at the moment, the cleaning soft rubber is positioned right above the test probe and is not in contact with the test probe, the situation that deposited impurities on the plum blossom-shaped probe of the test probe are effectively removed by the scraping piece is fully guaranteed at the moment, after the scraping is finished, the air pressure of a sealed cavity between the cleaning soft rubber and the scraping piece is controlled to be reduced, the upward moving piston drives the scraping piece to move upwards to be completely separated from the plum blossom-shaped probe, the downward moving of the cleaning soft rubber is controlled to be abutted against the plum blossom-shaped end face of the test probe through the transmission motor, necessary conditions are provided for achieving the viscous adsorption, the purpose that the deposited impurities of the probe are firstly scraped and then adsorbed through the viscous adsorption, the two are not interfered with each other, the working efficiency is greatly improved, the deposited impurities are thoroughly removed, the problem that the measurement result is not thorough due to the fact that the cleaning action of the deposited impurities are carried out by the traditional manual work through a brush, namely the replacement of the manual cleaning action, and the test efficiency and the output are guaranteed.
Fifthly, relative displacement takes place through the lateral wall of the corresponding circular through-hole of first spacing clamping piece and the spacing clamping piece of second, the dislocation takes place for the lateral wall of the circular through-hole that takes place relative displacement, and lean on with the outer wall counterbalance of the test probe that sets up in the circular through-hole that corresponds, in order to fix the test probe, guaranteed the clean in-process of plum blossom probe to the test probe, the test probe is under the effect of pressure, avoid taking place decurrent displacement, keep abundant stability, strike off the effect that frictional resistance strikes off and viscidity is absorbent in order to guarantee.
Drawings
FIG. 1 is a schematic view of the overall installation of a test probe cleaning apparatus;
FIG. 2 is a schematic diagram of the operation of a test probe cleaning apparatus;
FIG. 3 is a front view of the cleaning member;
FIG. 4 is a front view of the internal structure of the sleeve;
FIG. 5 is a side view of the internal structure of the sleeve;
FIG. 6 is a schematic view of the butt joint, scraping and adsorption;
FIG. 7 is a front view of the test base when not secured;
FIG. 8 is a front view of the test base as it is being secured;
fig. 9 is an overall schematic view of the holding member.
In the figure: 1-cleaning component, 1-1-sleeve, 1-2-sealing sheet, 1-3-mounting plate, 1-4-limiting sheet, 1-5-piston, 1-6-driving trapezoidal gear, 1-7-driven trapezoidal gear, 1-8-transmission rod, 1-9-moving sheet, 1-10-elastic piece, 1-11-scraping piece, 1-12-threaded sleeve, 1-13-transmission shaft, 1-14-fixing piece, 1-15-cleaning soft rubber, 1-16-reset spring, 1-17-output long shaft, 2-clamping component, 2-1-clamping body, 2-2-adsorption port, 2-3-air pipeline, 2-4-sealing plate, 2-5-positioning hole, 3-test socket, 4-test base, 4-1-base body, 4-3-first limiting clamping sheet, 4-4-second limiting clamping sheet, 4-5-first lead screw nut, 4-6-second lead screw nut, 4-7-first adjusting bolt, 4-8-adjusting bolt, 4-5-second adjusting probe and 4-5-adjusting probe.
Detailed Description
The following detailed description of embodiments of the invention is provided in connection with the accompanying drawings.
Detailed description of the invention
The following is a specific embodiment of a test probe cleaning apparatus of the present invention.
The test probe cleaning apparatus in this embodiment, as shown in fig. 1 to 9, includes a cleaning member 1, a holding member 2, a test socket 3, a test base 4, and a test probe 5; a clamping component 2 is arranged above the cleaning component 1, a test socket 3 is arranged below the cleaning component 1, the test socket 3 is installed on a test base 4, the clamping component 2 can control the cleaning component 1 above the test socket 3 in a moving mode through a transmission mechanical arm, the cleaning component 1 can be moved into the test socket 3 and abutted against a probe of a test probe 5 in the test socket 3, accumulated impurities are firstly scraped off from the test probe 5, and then impurity dust is adsorbed and removed from the test socket 3, so that deposited impurities can be effectively and thoroughly scraped off, and meanwhile, the removed impurity dust can be effectively and thoroughly removed from the surface of the test probe;
the cleaning component 1 comprises a sleeve 1-1, a sealing sheet 1-2, a mounting plate 1-3, a limiting sheet 1-4, a piston 1-5, a driving trapezoidal gear 1-6, a driven trapezoidal gear 1-7, a transmission rod 1-8, a moving sheet 1-9, an elastic piece 1-10, a scraping piece 1-11, a threaded sleeve 1-12, a transmission shaft 1-13, a fixing sheet 1-14, a cleaning soft rubber 1-15, a return spring 1-16 and an output long shaft 1-17; the sleeve 1-1 is arranged on the lower end face of the mounting plate 1-3 through a sealing sheet 1-2 array, a piston 1-5 is movably arranged between an upper limiting sheet 1-4 and the sealing sheet 1-2, a driving trapezoidal gear 1-6 at the lower end of the piston 1-5 is meshed with a driven trapezoidal gear 1-7, transmission rods 1-8 are symmetrically arranged at two ends of the driven trapezoidal gear 1-7, one end of each transmission rod 1-8 is connected with one end of the piston 1-5, the other end of each transmission rod 1-8 penetrates through the two limiting sheets 1-4 to be connected with the upper end face of a movable sheet 1-9, a plurality of scraping pieces 1-11 are arranged on the lower end face of the movable sheet 1-9 through elastic pieces 1-10 in an array manner, the driven trapezoidal gear 1-7 is rotatably arranged on the lower limiting sheet 1-4 through a threaded sleeve 1-12, the upper end of the transmission shaft 1-13 penetrates through the threaded sleeve 1-12 and is matched with the threaded sleeve 1-12, the other end of the transmission shaft 1-13 is connected with a fixed piece 1-14, the lower end of the fixed piece 1-14 is provided with cleaning soft glue 1-15, a reset spring 1-16 is arranged on the transmission shaft 1-13 between two limiting pieces 1-4, the transmission motor is arranged on the side wall of the sleeve 1-1 on one side, the output end of the transmission motor is connected with an output long shaft 1-17, the output long shaft 1-17 penetrates through the sleeve 1-1 arranged in an array, a driven trapezoidal gear 1-7 in the sleeve 1-1 is arranged on the output long shaft 1-17, and the scraping piece 1-11 can do up-and-down reciprocating motion through a piston 1-5, and the lower end face of the scraping piece 1-11 is abutted against the quincuncial tip of the probe of the test probe 5 through the elastic piece 1-10 so as to scrape the impurities accumulated on the quincuncial tip, and the cleaning soft rubber 1-15 can stick and absorb the clean impurities and dust on the surface of the cleaning soft rubber 1-15, so that the impurities and dust are removed from the test socket 3.
The probe of the test probe 5 in the embodiment is a plum blossom-shaped probe, and the embodiment mainly aims at a four-claw plum blossom-shaped probe with a large application amount, and can correspondingly and correspondingly produce corresponding claw numbers aiming at the plum blossom-shaped claw number of the probe of the test probe 5;
a sealing sheet 1-2 arranged at the upper end of the sleeve 1-1 and a movable piston 1-5 arranged in the sleeve form a sealed chamber, and gas is input or output to an air inlet hole formed in the side wall of the sleeve 1-1 through an air inlet pipe so as to control the air pressure change in the sealed chamber and push the piston to move downwards or upwards;
gas is input into an air inlet hole formed in the side wall of the upper end of the sleeve 1-1 through an air inlet pipe, so that the air pressure of a closed space between the sealing sheet 1-2 and the piston 1-5 is increased, the piston 1-5 is pushed to move downwards under the action of the pressure, the piston 1-5 which moves downwards pushes the transmission rod 1-8 to overcome the elastic action of the reset spring 1-16, so as to drive the moving sheet 1-9 to move downwards, the moving sheet 1-9 which moves downwards pushes the scraping piece 1-11 to move downwards through the elastic piece 1-10, the scraping piece 1-11 which moves downwards corresponds to the edge of the upper end face of the plum blossom probe, and the lower end face of the scraping piece 1-11 is tightly attached to the edge end face of the plum blossom probe and moves downwards along the edge under the action of the elastic piece 1-10, when the probe moves to the bottom of the quincuncial probe, the air inlet hole formed in the side wall of the upper end of the sleeve 1-1 is sucked through the air inlet pipe so as to reduce the air pressure of a closed space between the sealing sheet 1-2 and the piston 1-5, the piston 1-5 is pulled to move upwards under the action of the pressure, the elastic force of the piston 1-5 and the reset spring 1-16 which move upwards drives the transmission rod 1-8 to move upwards and further drives the moving sheet 1-9 to move upwards, the moving sheet 1-9 which moves upwards pushes the scraping piece 1-11 to move upwards through the elastic piece 1-10, and under the action of the elastic force of the elastic piece 1-10, the lower end face of the scraping piece 1-11 is tightly attached to the edge end face of the quincuncial probe and moves upwards along the edge end face of the quincuncial probe, and after the preset reciprocating times are finished, friction scraping is completed, at the moment, the scraping piece 1-11 is separated from the test probe 5 through air pressure control between the sealing piece 1-2 and the piston 1-5 through the transmission rod 1-8 and the moving piece 1-9, at the moment, gas input or output to the air inlet pipe is stopped, reciprocating motion is realized, so that a probe tip is repeatedly contacted with an object to be tested such as a tin ball to be tested, impurities formed at the probe tip are effectively scraped, in the repeated scraping process, impurities deposited on a plum blossom probe of the test probe 5 can be effectively removed, namely, the problem that cleaning is carried out after manual disassembly and separation is needed is solved, the characteristics of the probe of the test probe 5 are ensured, the working efficiency is improved, the operation is carried out at any time, the cleaning is carried out at any time, the measurement result is more accurate, and the test accuracy and the test yield are ensured;
the lower end face of the scraping piece 1-11, which is abutted against the test probe 5, is provided with a cleaning sheet, and the cleaning sheet can be purchased from the market, such as a precision cleaning sheet manufactured in Japan and America;
the method comprises the steps that a transmission motor arranged on the side wall of a starting sleeve 1-1 rotates clockwise, the transmission motor drives a driving trapezoidal gear 1-6 to rotate clockwise through an output long shaft 1-17, the driving trapezoidal gear 1-6 rotating clockwise drives a threaded sleeve 1-12 to rotate anticlockwise through a driven trapezoidal gear 1-7, the internal thread of the threaded sleeve 1-12 rotating anticlockwise and the external thread of a transmission shaft 1-13 drive the transmission shaft 1-13 to move downwards, the transmission shaft 1-13 moving downwards drives a cleaning soft rubber 1-15 to move downwards to abut against the upper end face of a test probe 5 through a fixing piece 1-14, the cleaning soft rubber 1-15 contacts, abuts and rolls and deforms with a quincuncial probe part of the test probe 5 to form a cleaning soft rubber 1-15 deformed through a fixing piece 1-14, the impurities and dust on the upper end face of the quincuncial probe of the test probe 5 can be fully adhered to the surface of the cleaning soft rubber 1-15, the impurities and the dust on the upper end face of the quincuncial probe can be effectively accumulated at the bottom of the test probe, the bottom of the test probe can be fully scraped off, the impurities and dust, the top face of the quincuncial probe can be fully adhered to the surface of the top face of the clean soft rubber 1-15, the transmission sleeve 1-6, the transmission sleeve, the transmission motor can be more effectively enabled to rotate clockwise through the transmission motor to drive the transmission motor to rotate clockwise through the transmission motor to rotate the transmission motor to drive the transmission sleeve 1-6, the transmission sleeve 1-13, the transmission sleeve 1-6, the external thread of the transmission sleeve 1-13, the transmission shaft 1-13 is driven to move upwards, and the transmission shaft 1-13 which moves upwards drives the cleaning soft glue 1-15 to move upwards through the fixing sheet 1-14 to be separated from the upper end surface of the test probe 5;
the method comprises the steps that gas is input through an air inlet pipe to an air inlet hole formed in the side wall of the upper end of a sleeve 1-1, when a piston is pushed to drive a moving piece 1-9 to move downwards, a transmission motor is not started to rotate at the moment, a cleaning soft rubber 1-15 is positioned right above a test probe 5, and the test probe 5 is not in contact with the cleaning soft rubber, so that deposited impurities on a quincuncial probe of the test probe 5 are fully removed by a scraping piece 1-11, after scraping is finished, the air pressure of a sealed cavity between the cleaning soft rubber 1-2 and the cleaning soft rubber 1-5 is controlled to be reduced, the upward moving piston 1-5 drives the scraping piece 1-11 to move upwards until the scraping piece is completely separated from the quincuncial probe, so that the cleaning soft rubber 1-15 is controlled to move downwards through the transmission motor to abut against the quincuncial end face of the test probe 5, necessary conditions are provided for completing viscous adsorption, the purpose that the deposited impurities are firstly scraped and then pass through the viscous adsorption, and the two are not interfered with each other, the working efficiency is greatly improved, deposited impurities are thoroughly removed, and the problems that the cleaning of the traditional dust and the traditional brushes are completely are overcome that the cleaning action is performed through manual brushes, and the tiny friction and the result of the deposited impurities is not completely inaccurate measurement is caused by the inaccurate result of removing of the deposited impurities is caused by the small friction of the removal of the instruments are solved;
meanwhile, the probes of the plurality of test probes 5 are cleaned, one test probe of one test probe 5 corresponds to one sleeve 1-1, and the cleaning work is ensured to be independently carried out without mutual influence.
An air inlet is formed in the side wall of the sleeve 1-1 and located between the piston 1-5 and the upper limiting piece 1-4, and the air inlet is connected with an air inlet pipe.
A through hole is arranged in the center of the movable plate 1-9, and the transmission shaft 1-13 penetrates through the through hole in the center of the movable plate 1-9 to be connected with the upper end surface of the fixed plate 1-14.
The inner diameter of the sleeve 1-1 matches the outer diameter of the test probe 5.
The size of the scraping pieces 1-11 can be produced according to the size and the acting position of a tin ball abutting against the probe of the test probe 5 and the size of the plum blossom probe, when the plum blossom probe is removed, the corresponding probe determines the shape of the corresponding scraping pieces 1-11, the four-claw plum blossom probe which is widely applied is adopted in the embodiment, and the corresponding scraping pieces 1-11 are inverted V-shaped so as to fully match the edge end faces of the plum blossom probe.
Detailed description of the invention
The following is a detailed embodiment of a test base of a test probe cleaning apparatus of the present invention.
It should be noted that the test base of the test probe cleaning apparatus according to the present embodiment may be implemented independently, that is, may exist independently as a component of the test probe cleaning apparatus, and the test probe cleaning apparatus according to the first embodiment may be further limited.
As shown in fig. 1, 2, 7 and 8, the test base of the test probe cleaning device in the embodiment comprises a base body 4-1, a first limiting clamping piece 4-3, a second limiting clamping piece 4-4, a first lead screw nut 4-5, a second lead screw nut 4-6, a first adjusting bolt 4-7 and a second adjusting bolt 4-8; the side wall of the base body 4-1 is symmetrically provided with two groups of strip-shaped through holes, a first limiting clamping piece 4-3 and a second limiting clamping piece 4-4 are movably arranged in the two groups of strip-shaped through holes, the left end of the first limiting clamping piece 4-3 is connected with a first lead screw nut 4-5, the second limiting clamping piece 4-4 is connected with a second lead screw nut 4-6, a first adjusting bolt 4-7 penetrates through the first lead screw nut 4-5 to be rotatably arranged on the side wall of the left end of the base body 4-1, a second adjusting bolt 4-8 penetrates through the second lead screw nut 4-6 to be rotatably arranged on the side wall of the right end of the base body 4-1, positioning pins 4-9 are symmetrically arranged at the upper end of the base body 4-1 and matched with the positioning holes 2-5, circular through holes are formed in the first limiting clamping piece 4-3 and the second limiting clamping piece 4-4 in an array mode, probes of the test probes 5 can penetrate through the circular through holes and are arranged in the test base body 4-1, and the test socket 3 is installed on the base body 4-1.
The first limiting clamping piece 4-3 and the second limiting clamping piece 4-4 are both provided with circular through holes in array, and the inner diameters of the circular through holes are matched with the outer diameter of the test probe 5.
Adjusting a first adjusting bolt 4-7 and a second adjusting bolt 4-8 which are symmetrically arranged on a base body 4-1 corresponding to a test probe 5 to be cleaned, simultaneously rotating the first adjusting bolt 4-7 clockwise and the second adjusting bolt 4-8 anticlockwise, and rotating the same number of turns, wherein the first adjusting bolt 4-7 and the first lead screw nut 4-5 are in threaded action, so that the first lead screw nut 4-5 pulls a first limit clamping piece 4-3 to move outwards for a certain distance along the axial direction of the first adjusting bolt 4-7, and simultaneously the second adjusting bolt 4-8 and a second lead screw nut 4-6 are in threaded action, so that the second limit clamping piece 4-4 is pulled outwards from the base body 4-1 by the second lead screw nut 4-6 along the axial direction of the second adjusting bolt 4-8, so that the distance between the first limit clamping piece 4-3 and the first limit clamping piece 4-1 is moved outwards from the base body, the first limit clamping piece 4-3 and the second limit clamping piece 4-4 are in threaded action, so that the side walls of the corresponding circular through holes on the first limit clamping piece 4-4 and the second limit clamping piece 4-4 move towards the outer wall of the base body, thereby ensuring that the probe 5 is in a stable and the test probe 5 is scraped, and the side wall is in a staggered way, thereby ensuring that the probe is in a test probe is in a stable and a test probe.
The cleaning component 1 which is adsorbed and installed is arranged right above the test socket 3 by the control transmission mechanical arm, the positioning pins 4-9 on the test base 4 correspond to the positioning holes 2-5 formed in the clamping body 2-1, and the clamping component 2 is pushed by the control transmission mechanical arm to drive the cleaning component 1 to move downwards, so that the positioning pins 4-9 are inserted into the positioning holes 2-5, and accurate butt joint is achieved.
Detailed description of the invention
The following is a specific embodiment of a clamping member of a test probe cleaning apparatus of the present invention.
It should be noted that the holding member of the test probe cleaning apparatus according to the present embodiment may be implemented separately, that is, may exist separately as a component of the test probe cleaning apparatus, or may be further limited to the test probe cleaning apparatus according to the first embodiment.
As shown in fig. 1, 2 and 9, the clamping member of the test probe cleaning device in the embodiment comprises a clamping body 2-1, an air pipeline 2-3 and a sealing plate 2-4; an adsorption port 2-2 is formed in the lower portion of an inner cavity of the clamping body 2-1, an air pipeline 2-3 is arranged inside the clamping body 2-1, an air suction end of the air pipeline 2-3 reaches the adsorption port 2-2, the clamping body 2-1 can provide air suction through the adsorption port 2-2 in the lower end of the air pipeline 2-3 to suck the cleaning component 1, the cleaning component 1 is adsorbed on a sealing plate 2-4 in the lower end of the clamping body 2-1, and a plurality of positioning holes 2-5 are symmetrically formed in two ends of the clamping body 2-1.
Through holding and fixing, the original driving device in the detection process can be fully utilized, more driving components are not needed, the cleaning cost is greatly saved, and meanwhile, the resources are utilized to the maximum extent.
Detailed description of the invention
The following is a specific embodiment of a test probe cleaning method of the present invention.
The method for cleaning a test probe in this embodiment includes the following steps:
a, fixing and adjusting a probe, namely, a first adjusting bolt 4-7 and a second adjusting bolt 4-8 which are symmetrically arranged on a base body 4-1 corresponding to a test probe 5 to be cleaned are fixed and adjusted, the first adjusting bolt 4-7 is simultaneously rotated clockwise, the second adjusting bolt 4-8 is rotated anticlockwise and rotates for the same number of turns, and the first adjusting bolt 4-7 and the first lead screw nut 4-5 have screw thread action, so that the first lead screw nut 4-5 pulls a first limiting clamping piece 4-3 to move outwards for a certain distance towards the base body 4-1 along the axial direction of the first adjusting bolt 4-7, and simultaneously, the second adjusting bolt 4-8 and a second lead screw nut 4-6 have screw thread action, so that the second lead screw nut 4-6 pulls a second limiting clamping piece 4-4 to move outwards from the base body 4-1 for a distance equal amount with the first limiting clamping piece 4-3 along the axial direction of the second adjusting bolt 4-8, the first limiting clamping piece 4-3 and the corresponding side wall of the circular through hole are relatively displaced, and the circular through hole is correspondingly fixed and offset against the through hole 5 for testing;
b, performing adsorption installation, namely sucking air through an air pipeline 2-3 arranged inside the clamping body 2-1, and forming a suction effect on the cleaning member 1 through an adsorption port 2-2 so as to adsorb the cleaning member 1 on the bottom surface of the sealing plate 2-4;
c, aligning and adjusting, namely placing the cleaning component 1 which is subjected to adsorption installation right above the test socket 3 by controlling the transmission mechanical arm, corresponding a positioning pin 4-9 on the test base 4 to a positioning hole 2-5 formed in the clamping body 2-1, pushing the clamping component 2 to drive the cleaning component 1 to move downwards by controlling the transmission mechanical arm, inserting the positioning pin 4-9 into the positioning hole 2-5, simultaneously inserting the test probe 5 into the corresponding sleeve 1-1, and enabling the lowest end of the sleeve 1-1 and the lower end face of the quincuncial probe of the test probe 5 to be on the same horizontal plane so as to finish aligning and adjusting work;
d, scraping by friction resistance, inputting gas into an air inlet hole formed in the side wall of the upper end of the sleeve 1-1 through an air inlet pipe to increase the air pressure of a closed space between the sealing sheet 1-2 and the piston 1-5, pushing the piston 1-5 to move downwards under the action of the pressure, pushing the transmission rod 1-8 by the piston 1-5 moving downwards to overcome the elastic force of the return spring 1-16 so as to drive the moving sheet 1-9 to move downwards, pushing the scraping member 1-11 to move downwards through the elastic member 1-10 by the moving sheet 1-9 moving downwards, corresponding the scraping member 1-11 moving downwards to the edge of the upper end face of the plum blossom probe, enabling the lower end face of the scraping member 1-11 to be tightly attached to the edge end face of the plum blossom probe under the action of the elastic member 1-10, enabling the scraping member 1-11 to move downwards along the edge of the plum blossom probe when moving to the bottom of the plum blossom probe, sucking the air into the air inlet hole formed in the side wall of the upper end of the sleeve 1-1 through the air inlet pipe so as to reduce the air pressure between the piston 1-5 and the air pressure between the sealing sheet 1-5, pulling the piston 1-5 to move upwards and drive the elastic member 1-10 to move upwards along the elastic member 1-10 moving spring 1-1 moving part to move upwards, after the preset reciprocating times are finished, friction scraping is finished, at the moment, the scraping piece 1-11 is separated from the test probe 5 through air pressure control between the sealing piece 1-2 and the piston 1-5 and the transmission rod 1-8 and the moving piece 1-9, and at the moment, gas input or gas output to the gas inlet pipe is stopped;
e, the viscous adsorption and starting of the transmission motor arranged on the side wall of the sleeve 1-1 rotates clockwise, the transmission motor drives the driving trapezoidal gear 1-6 to rotate clockwise through the output long shaft 1-17, the driving trapezoidal gear 1-6 rotating clockwise drives the threaded sleeve 1-12 to rotate anticlockwise through the driven trapezoidal gear 1-7, the internal thread of the threaded sleeve 1-12 rotating anticlockwise and the external thread of the transmission shaft 1-13 drive the transmission shaft 1-13 to move downwards, the transmission shaft 1-13 moving downwards drives the cleaning soft rubber 1-15 to move downwards to abut against the upper end face of the test probe 5 through the fixing piece 1-14, the cleaning soft rubber 1-15 deforming through contact, abutting and rolling under the contact action of the quincuncial probe part of the test probe 5, the deformed cleaning soft rubber 1-15 can fully adapt to the complex quincuncial end face of the upper end face of the quincuncial probe of the test probe 5, impurities and dust on the surface of the cleaning soft rubber 1-15 are completely adhered to the surface of the cleaning soft rubber 1-15, the transmission motor is adjusted to rotate anticlockwise, the transmission motor outputs the transmission shaft, the transmission motor, the transmission shaft 1-17 drives the external thread of the trapezoidal gear 1-6 to rotate anticlockwise through the external thread of the transmission shaft 1-13, the helical gear 1-13, the external thread of the trapezoidal gear 1-13, the helical gear 1-13 drives the cleaning soft rubber 1 to rotate clockwise, so as to finish the viscous adsorption cleaning work and ensure that the cleaning is cleaner and more thorough.
Detailed description of the invention
The following is a specific embodiment of a friction scraping method of a test probe cleaning method according to the present invention.
It should be noted that the friction scraping method of the test probe cleaning method according to the present embodiment may be implemented separately, that is, exists separately as a key step of the test probe cleaning method.
In the friction scraping method for the test probe cleaning method under the embodiment, gas is input to the air inlet hole formed in the side wall of the upper end of the sleeve 1-1 through the air inlet pipe to increase the air pressure of the closed space between the sealing sheet 1-2 and the piston 1-5, the piston 1-5 is pushed to move downwards under the action of the pressure, the piston 1-5 which moves downwards pushes the transmission rod 1-8 to overcome the elastic force of the return spring 1-16 so as to drive the moving sheet 1-9 to move downwards, the moving sheet 1-9 which moves downwards pushes the scraping member 1-11 to move downwards through the elastic member 1-10, the scraping member 1-11 which moves downwards corresponds to the edge of the upper end face of the plum blossom probe, the lower end face of the scraping member 1-11 is tightly attached to the edge of the plum blossom probe under the action of the elastic member 1-10, the lower end face of the scraping member 1-11 is tightly attached to the edge of the plum blossom probe and moves downwards along the plum blossom probe, when the scraping member moves to the bottom of the probe, the air inlet pipe sucks air in the air inlet hole formed in the upper end wall of the sleeve 1-1, the sealing sheet 1, the elastic member 1-5 and the piston 1-5, the piston 1-5 moves upwards under the action of the elastic member 1-10, the elastic force, the elastic member 1-10, the elastic member pushes the elastic member 1-10, the elastic member to move upwards, and drives the elastic member to move upwards, and move upwards along the scraper, after finishing the preset reciprocating times, finishing friction scraping, controlling the air pressure between the sealing sheet 1-2 and the piston 1-5, separating the scraping piece 1-11 from the test probe 5 through the transmission rod 1-8 and the moving sheet 1-9, and stopping inputting or outputting air to the air inlet pipe.
Detailed description of the invention
The following is a specific embodiment of the viscous absorption method of a test probe cleaning method of the present invention.
It should be noted that the viscous adsorption method of the test probe cleaning method according to the present embodiment may be implemented separately, that is, exists separately as a key step of the test probe cleaning method.
In the method for cleaning the adhesive adsorption of the test probe in the embodiment, a transmission motor arranged on the side wall of a sleeve 1-1 is started to rotate clockwise, the transmission motor drives a driving trapezoidal gear 1-6 to rotate clockwise through an output long shaft 1-17, the driving trapezoidal gear 1-6 rotating clockwise drives a threaded sleeve 1-12 to rotate anticlockwise through a driven trapezoidal gear 1-7, the internal thread of the threaded sleeve 1-12 rotating anticlockwise and the external thread of a transmission shaft 1-13 drive the transmission shaft 1-13 to move downwards, the transmission shaft 1-13 moving downwards drives a cleaning soft rubber 1-15 to move downwards to abut against the upper end face of the test probe 5 through a fixing piece 1-14, the cleaning soft rubber 1-15 deforms by contact, abutting and rolling under the contact action of the cleaning soft rubber 1-15 and a quincuncial probe part of the test probe 5, the deformed clean soft rubber 1-15 can fully adapt to the complex edge end face of the upper end face of the plum blossom probe of the test probe 5, impurities and dust on the upper end face of the plum blossom probe are completely stuck on the surface of the clean soft rubber 1-15, the adjusting sleeve 1-1 is driven by a transmission motor to rotate anticlockwise, the transmission motor drives a driving trapezoidal gear 1-6 to rotate anticlockwise through an output long shaft 1-17, the driving trapezoidal gear 1-6 which rotates anticlockwise drives a threaded sleeve 1-12 to rotate clockwise through a driven trapezoidal gear 1-7, the internal threads of the threaded sleeve 1-12 which rotates clockwise and the external threads of the transmission shaft 1-13 drive the transmission shaft 1-13 to move upwards, and the transmission shaft 1-13 which moves upwards drives the clean soft rubber 1-15 to move upwards to be matched with the test probe 5 through a fixing sheet 1-14 The upper end surfaces of the two plates are separated to complete the viscous adsorption cleaning work.
Detailed description of the invention
The following is a specific embodiment of a probe fixing method of a test probe cleaning apparatus according to the present invention.
It should be noted that the probe fixing method of the test probe cleaning method according to the present embodiment may be implemented separately, that is, may exist separately as a key step of the test probe cleaning method.
In the fixing method for cleaning the test probe in this embodiment, a first adjusting bolt 4-7 and a second adjusting bolt 4-8 which are symmetrically arranged on a base body 4-1 corresponding to a test probe 5 to be cleaned are adjusted, the first adjusting bolt 4-7 is simultaneously rotated clockwise and the second adjusting bolt 4-8 is simultaneously rotated counterclockwise, and the same number of turns are rotated, the first adjusting bolt 4-7 and the first lead screw nut 4-5 have a screw thread effect, so that the first lead screw nut 4-5 pulls a first limiting clamping piece 4-3 to move outwards towards the base body 4-1 for a certain distance along the axial direction of the first adjusting bolt 4-7, the second adjusting bolt 4-8 and a second lead screw nut 4-6 have a screw thread effect, so that the second limiting clamping piece 4-6 pulls a second limiting clamping piece 4-4 to move outwards towards the base body 4-1 for a distance from the first limiting clamping piece 4-3 along the axial direction of the second adjusting bolt 4-8, the first limiting clamping piece 4-3 and the corresponding upper limiting clamping piece 4-4 are pulled towards the outer wall of the base body 4-1 to move outwards, and the circular through hole is fixed by the circular through hole, and the circular through hole 5 is dislocated and abutted against the circular through hole.
The above embodiments are merely illustrative of the present patent and do not limit the scope of the patent, and those skilled in the art can make modifications to the parts thereof without departing from the spirit and scope of the patent.

Claims (1)

1. A friction scraping method of a test probe cleaning method is realized on a test probe cleaning device and is applied to the test probe cleaning method, and the test probe cleaning method comprises the following steps: step a, fixing a probe; b, adsorbing and mounting; step c, alignment adjustment; d, scraping friction resistance; step e, sticky adsorption; the method is characterized in that: the friction scraping method of the test probe cleaning method comprises the steps of inputting gas into an air inlet hole formed in the side wall of the upper end of a sleeve (1-1) through an air inlet pipe to increase the air pressure of a sealed space between a sealing sheet (1-2) and a piston (1-5), pushing the piston (1-5) to move downwards under the action of the pressure, pushing a transmission rod (1-8) through a piston (1-5) moving downwards to overcome the elastic force of a return spring (1-16) so as to drive a moving sheet (1-9) to move downwards, pushing the scraping member (1-11) to move downwards through an elastic member (1-10) by the moving sheet (1-9) moving downwards, enabling the lower end face of the scraping member (1-11) to be closely attached to the edge angle end face of a plum blossom probe and move downwards along the edge angle of the upper end face of the plum blossom probe, enabling the lower end face of the scraping member (1-11) to be closely attached to the edge angle end face of the plum blossom probe and to move downwards under the action of the elastic force of the elastic member (1-10) when the probe moves to the bottom of the sealed space, pulling the piston (1-5) to move upwards by the action of the air pressure, and reducing the action of the piston (1-5) moving upwards by the air inlet hole (1-5) and the piston (1-5) moving upwards, further driving the movable piece (1-9) to move upwards, pushing the scraping piece (1-11) to move upwards through the elastic piece (1-10) by the movable piece (1-9) which moves upwards, enabling the lower end face of the scraping piece (1-11) to be closely attached to the edge end face of the plum blossom probe and move upwards along the plum blossom probe under the action of elastic force of the elastic piece (1-10), completing friction scraping after preset reciprocating times are completed, enabling the scraping piece (1-11) to be separated from the test probe (5) through air pressure control between the sealing piece (1-2) and the piston (1-5) through the transmission rod (1-8) and the movable piece (1-9), and stopping inputting or outputting air to the air inlet pipe at the moment;
the test probe cleaning device comprises a cleaning component (1), a clamping component (2), a test socket (3), a test base (4) and a test probe (5); a clamping component (2) is arranged above the cleaning component (1), a test socket (3) is arranged below the cleaning component (1), the test socket (3) is installed on a test base (4), the clamping component (2) can control the cleaning component (1) above the test socket (3) through a transmission mechanical arm in a moving way, so that the cleaning component (1) can move into the test socket (3) and is abutted against a probe of a test probe (5) in the test socket (3) to scrape off and accumulate impurities in the test probe (5) first, and then the impurity and dust are adsorbed and removed from the test socket (3);
the cleaning component comprises a sleeve (1-1), a sealing sheet (1-2), a mounting plate (1-3), a limiting sheet (1-4), a piston (1-5), a driving trapezoidal gear (1-6), a driven trapezoidal gear (1-7), a transmission rod (1-8), a moving sheet (1-9), an elastic part (1-10), a scraping part (1-11), a threaded sleeve (1-12), a transmission shaft (1-13), a fixing sheet (1-14), a cleaning soft rubber (1-15), a reset spring (1-16) and an output long shaft (1-17); the sleeve (1-1) is arranged on the lower end face of the mounting plate (1-3) through a sealing sheet (1-2) array, a driving trapezoidal gear (1-6) at the lower end of the piston (1-5) is meshed with a driven trapezoidal gear (1-7), two ends of the driven trapezoidal gear (1-7) are symmetrically provided with transmission rods (1-8), one end of each transmission rod (1-8) is connected with one end of the piston (1-5), the other end of each transmission rod (1-8) penetrates through two limiting sheets (1-4) to be connected with the upper end face of the movable sheet (1-9), the lower end face of the movable sheet (1-9) is provided with a plurality of scraping pieces (1-11) through elastic pieces (1-10), the driven trapezoidal gear (1-7) is rotatably arranged on the lower limiting sheet (1-4) through a threaded sleeve (1-12), the upper end of each transmission shaft (1-13) penetrates through the threaded sleeve (1-12) and is matched with the threaded sleeve (1-12), the other end of the transmission shaft (1-13) is connected with a fixing piece (1-14), two reset springs (1-14) are arranged between the fixing pieces (1-4), the transmission motor is arranged on the side wall of the sleeve (1-1) on one side, the output end of the transmission motor is connected with the output long shaft (1-17), the output long shaft (1-17) penetrates through the sleeve (1-1) arranged in an array, the driven trapezoidal gear (1-7) in the sleeve (1-1) is arranged on the output long shaft (1-17), the scraping piece (1-11) can do up-and-down reciprocating motion through the piston (1-5), the lower end face of the scraping piece (1-11) abuts against the plum blossom tip of the probe of the test probe (5) through the elastic piece (1-10), so that accumulated impurities on the plum blossom tip can be scraped, and the clean soft rubber (1-15) can stick and absorb the clean impurities and dust on the surface of the clean soft rubber (1-15), and further remove the impurities and dust from the test socket (3).
CN202210126256.1A 2020-11-28 2020-11-28 Friction scraping method for testing probe cleaning method Active CN114405887B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210126256.1A CN114405887B (en) 2020-11-28 2020-11-28 Friction scraping method for testing probe cleaning method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202011365614.1A CN112462104B (en) 2020-11-28 2020-11-28 Test probe cleaning method
CN202210126256.1A CN114405887B (en) 2020-11-28 2020-11-28 Friction scraping method for testing probe cleaning method

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN202011365614.1A Division CN112462104B (en) 2020-11-28 2020-11-28 Test probe cleaning method

Publications (2)

Publication Number Publication Date
CN114405887A CN114405887A (en) 2022-04-29
CN114405887B true CN114405887B (en) 2022-12-06

Family

ID=74809350

Family Applications (4)

Application Number Title Priority Date Filing Date
CN202210126256.1A Active CN114405887B (en) 2020-11-28 2020-11-28 Friction scraping method for testing probe cleaning method
CN202011365614.1A Active CN112462104B (en) 2020-11-28 2020-11-28 Test probe cleaning method
CN202210126255.7A Active CN114414862B (en) 2020-11-28 2020-11-28 Viscous adsorption method for test probe cleaning method
CN202210126254.2A Active CN114472252B (en) 2020-11-28 2020-11-28 Probe fixing method for testing probe cleaning method

Family Applications After (3)

Application Number Title Priority Date Filing Date
CN202011365614.1A Active CN112462104B (en) 2020-11-28 2020-11-28 Test probe cleaning method
CN202210126255.7A Active CN114414862B (en) 2020-11-28 2020-11-28 Viscous adsorption method for test probe cleaning method
CN202210126254.2A Active CN114472252B (en) 2020-11-28 2020-11-28 Probe fixing method for testing probe cleaning method

Country Status (1)

Country Link
CN (4) CN114405887B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113624936B (en) * 2021-09-15 2024-04-09 黑龙江省鸡西生态环境监测中心 Water quality analyzer
CN115144810B (en) * 2022-08-31 2022-11-15 深圳市睿智通科技有限公司 Intelligent ammeter testing device and method
CN116298123B (en) * 2023-03-20 2023-10-17 安徽瑞柏新材料有限公司 Methyl acetate purity detection device with self-cleaning function

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69832110T2 (en) * 1997-07-24 2006-07-20 Mitsubishi Denki K.K. Manufacturing method for a probe for semiconductor devices
JPH1187438A (en) * 1997-09-03 1999-03-30 Mitsubishi Electric Corp Member and method for cleaning of probe tip, and test method for semiconductor wafer
JP3842468B2 (en) * 1998-12-08 2006-11-08 株式会社日本マイクロニクス Probe cleaning method and apparatus
JP2001313317A (en) * 2000-04-28 2001-11-09 Ando Electric Co Ltd Method and device for cleaning probe
US6817052B2 (en) * 2001-11-09 2004-11-16 Formfactor, Inc. Apparatuses and methods for cleaning test probes
WO2003056346A1 (en) * 2001-12-25 2003-07-10 Sumitomo Electric Industries, Ltd. Contact probe
US6840374B2 (en) * 2002-01-18 2005-01-11 Igor Y. Khandros Apparatus and method for cleaning test probes
US6813804B2 (en) * 2002-06-06 2004-11-09 Samsung Electronics Co., Ltd. Apparatus and method for cleaning probe card contacts
KR20040004892A (en) * 2002-07-06 2004-01-16 삼성전자주식회사 Apparatus for cleaning test probe of probing system and method for cleaning thereof
JP2004305936A (en) * 2003-04-08 2004-11-04 Mitsubishi Electric Corp Probe pin cleaner
JP2004317272A (en) * 2003-04-16 2004-11-11 Japan Electronic Materials Corp Probe tip cleaning member, probe cleaning device, and probe tip cleaning method
JP5027468B2 (en) * 2006-09-15 2012-09-19 日本ミクロコーティング株式会社 Probe cleaning or probe processing sheet and probe processing method
TWI322720B (en) * 2007-04-25 2010-04-01 Advanced Semiconductor Eng Mechanism and method for automatic cleaning test interface of ic test socket
CN101249630B (en) * 2008-03-25 2011-03-30 日月光半导体制造股份有限公司 Automatically cleaning mechanism of test interface of integrated circuit test jack and cleaning method thereof
JP2012198024A (en) * 2009-07-31 2012-10-18 Wit Co Ltd Cleaning pad for test probe and method for cleaning test probe
CN202256598U (en) * 2011-09-27 2012-05-30 致茂电子(苏州)有限公司 Point measuring machine with probe cleaning function
US9138121B2 (en) * 2012-03-07 2015-09-22 Byron Keith Baarsch Scraper attachment for sponges
JP2014032035A (en) * 2012-08-01 2014-02-20 Sheru Electronics Kk Probe cleaning device and method of the same
JP2014181962A (en) * 2013-03-18 2014-09-29 Fujitsu Ltd Cleaning mechanism and cleaning method of probe pin and electrode
TWM461144U (en) * 2013-03-29 2013-09-01 Fittech Co Ltd Probe cleaning device
NL2011710C2 (en) * 2013-10-31 2015-05-04 F G J Lammertink Beheer B V Device for cleaning a stylus of a measuring probe.
CN103878150B (en) * 2014-03-05 2016-02-24 上海华虹宏力半导体制造有限公司 The clean method of probe and probe cleaning device
CN204479617U (en) * 2015-03-11 2015-07-15 法特迪精密科技(苏州)有限公司 For the test Connection Block of chip scale of mass production test
JP6556612B2 (en) * 2015-12-04 2019-08-07 ルネサスエレクトロニクス株式会社 Manufacturing method of semiconductor device
CN205263143U (en) * 2015-12-29 2016-05-25 苏州韬盛电子科技有限公司 A grip block for probe
JP6874583B2 (en) * 2017-08-02 2021-05-19 東京エレクトロン株式会社 Probe device
US10627426B2 (en) * 2018-03-12 2020-04-21 Aculon Inc. Method and kit for cleaning and coating a tip of a test probe utilized in a test system for an integrated circuit package
CN110389243B (en) * 2018-04-18 2022-05-06 台湾中华精测科技股份有限公司 Probe card device
CN208758223U (en) * 2018-07-05 2019-04-19 黄河科技学院 Cleaning air bag for computer keyboard fine crack
JP7129261B2 (en) * 2018-07-27 2022-09-01 キオクシア株式会社 test equipment
CN208568871U (en) * 2018-08-10 2019-03-01 浙江金连接科技有限公司 A kind of test probe phosphor bronze sleeve
CN109985753A (en) * 2019-02-21 2019-07-09 深圳市珍木舍家具有限公司 The coating cloud of bathroom cabinet spray painting based on the comprehensive paint removal of temperature absorbs drenching installation
CN210094480U (en) * 2019-03-20 2020-02-21 江苏三麦食品机械有限公司 Dough scraping mechanism of shortening machine
KR102174493B1 (en) * 2019-04-24 2020-11-05 리노공업주식회사 Probe Cleaner
CN210876421U (en) * 2019-09-03 2020-06-30 丁娟 LED chip photoelectric detection needle cleaning equipment
CN110743875A (en) * 2019-11-13 2020-02-04 宁波镇海合冰能源技术有限公司 Inside cleaning equipment of natural gas line
CN210879375U (en) * 2019-11-15 2020-06-30 申雕数控仿真技术(青岛)有限公司 False tooth carving clamp

Also Published As

Publication number Publication date
CN114414862A (en) 2022-04-29
CN114405887A (en) 2022-04-29
CN114472252B (en) 2023-03-24
CN112462104A (en) 2021-03-09
CN114472252A (en) 2022-05-13
CN114414862B (en) 2023-03-14
CN112462104B (en) 2022-03-04

Similar Documents

Publication Publication Date Title
CN114405887B (en) Friction scraping method for testing probe cleaning method
CN112462109B (en) Test probe cleaning device and clamping member and test base thereof
WO2015043312A1 (en) Cleaning device and linear coating machine provided with same
CN104652049B (en) Sewing machine automatic distributing single layer separates take method and mechanism
CN113334418B (en) Device is got to manipulator intelligent robot clamp
CN209393697U (en) Cleaning device after a kind of grinding of glassware
CN115673036B (en) Shape coalignment is pressed before steel sheet cutting
CN112475471A (en) Metal copper surface oxide skin treatment process
CN113561070B (en) Optical lens manufacturing system
CN207372892U (en) A kind of sanding apparatus that can adaptively follow steel nail
CN208450155U (en) Cookware cleaner for inner wall
CN209696985U (en) A kind of collection device for rice production line inlet
CN116352291A (en) Laser cutting machine and electronic chip processing system
CN113175567B (en) High-temperature-resistant flexible metal hose and manufacturing method thereof
CN213504580U (en) Isothermal furnace mesh belt scraping device
CN211938329U (en) Cleaning device for chemical equipment
CN211134888U (en) Device for automatically cleaning glass bulb shell
CN208928738U (en) A kind of device of environment-friendly type purging auto-parts surface debris
CN103908195A (en) Vacuum dust collector and cleaning method for filtering device thereof
CN116153803B (en) Semiconductor wafer test bench with cleaning structure and method
CN218572108U (en) Brush device for mounting automatic dust collector
CN220825189U (en) Copper-clad plate vacuum dust collector
CN219541207U (en) Coating device for preparing rare metal rolled material
CN220638909U (en) Dust collector of panel tectorial membrane production line
CN220328559U (en) High-viscosity chemical industry automatic feeding device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CP03 Change of name, title or address

Address after: 215000 Suzhou Industrial Park, Suzhou City, Jiangsu Province, No. 200 Xingpu Road, 5 # 101, 102, 201, 202

Patentee after: Suzhou Fatedi Technology Co.,Ltd.

Country or region after: China

Address before: 215000 Suzhou Industrial Park, Suzhou City, Jiangsu Province, No. 200 Xingpu Road, 5 # 101, 102, 201, 202

Patentee before: FTDEVICE TECHNOLOGY (SUZHOU) CO.,LTD.

Country or region before: China

CP03 Change of name, title or address