JP5027468B2 - Probe cleaning or probe processing sheet and probe processing method - Google Patents
Probe cleaning or probe processing sheet and probe processing method Download PDFInfo
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- JP5027468B2 JP5027468B2 JP2006250342A JP2006250342A JP5027468B2 JP 5027468 B2 JP5027468 B2 JP 5027468B2 JP 2006250342 A JP2006250342 A JP 2006250342A JP 2006250342 A JP2006250342 A JP 2006250342A JP 5027468 B2 JP5027468 B2 JP 5027468B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
- B24D13/145—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face having a brush-like working surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools, brushes, or analogous members
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
Description
本発明は、電気特性検査用の針（プローブ）、医療用の針、縫製用の針などのような針状物の製造工程における先端部分の仕上げ加工又は針状物の使用前後においてその先端部分をクリーニングするためのプローブクリーナー及びクリーニング方法に関し、特に、半導体装置の検査工程における電気特性検査等に用いられるプローブの先端部分に付着した異物を除去するためのプローブクリーナー及びクリーニング方法に関するものである。 The present invention relates to a tip end portion in a manufacturing process of a needle-like object such as an electrical characteristic inspection needle (probe), a medical needle, a sewing needle or the like before or after use of the needle-like object. In particular, the present invention relates to a probe cleaner and a cleaning method for removing foreign matter adhering to a tip portion of a probe used for electrical characteristic inspection or the like in an inspection process of a semiconductor device.
半導体装置の製造工程では、その製造効率を向上させるため、半導体ウエハ上に組み立てた複数個のチップの電極パッドにプローブを接触させ、このプローブを通じて試験信号を印加し、また検出して、各チップの電気特性を検査している。 In the manufacturing process of a semiconductor device, in order to improve the manufacturing efficiency, a probe is brought into contact with electrode pads of a plurality of chips assembled on a semiconductor wafer, a test signal is applied and detected through the probe, and each chip is detected. The electrical characteristics are being inspected.
一般に、プローブは、タングステン、ベリリウムなどの硬質の材料から形成されている。一方、電極パッドは、アルミニウムなどの比較的軟質の材料から形成されており、電極パッドにプローブを接触させた際に、プローブの先端部分（先端と先端付近の側面）に電極パッドのアルミニウムなどの異物が付着し、これにより検査精度が低下する。また、プローブに大きい異物が付着すると、隣接するプローブ同士が短絡し、チップを破壊することがある。このため、プローブの先端部分をクリーニングして、異物を除去している。 In general, the probe is made of a hard material such as tungsten or beryllium. On the other hand, the electrode pad is formed from a relatively soft material such as aluminum, and when the probe is brought into contact with the electrode pad, the electrode pad aluminum or the like is placed on the tip of the probe (the tip and the side surface near the tip). Foreign matter adheres and this reduces the inspection accuracy. Moreover, when a large foreign substance adheres to the probe, adjacent probes may be short-circuited to destroy the chip. For this reason, the tip portion of the probe is cleaned to remove foreign matters.
プローブの先端部分のクリーニングには、従来、砥粒（酸化アルミニウム、炭化ケイ素、ダイヤモンドなどからなる硬質の粒子）を混入したシリコンゴム、ウレタンゴムなどの弾性材からなるクリーナーシートから成るプローブクリーナーが使用され（例えば、特許文献１、２参照）、プローブの先端部分をこのプローブクリーナーの弾性材の表面から内部に突き刺し、弾性材に固定されている砥粒をプローブの先端部分に作用させて、異物を除去している。 To clean the tip of the probe, a probe cleaner consisting of a cleaner sheet made of an elastic material such as silicon rubber or urethane rubber mixed with abrasive grains (hard particles made of aluminum oxide, silicon carbide, diamond, etc.) has been used. (For example, refer to Patent Documents 1 and 2), the tip of the probe is pierced from the surface of the elastic material of the probe cleaner to the inside, and abrasive particles fixed to the elastic material are applied to the tip of the probe to cause foreign matter. Has been removed.
また、表面に微小な凹凸を形成した板の表面に、粘着性を有するゲル層を形成したクリーナーシートから成るプローブクリーナーが使用され、このプローブクリーナーでは、プローブの先端部分をゲル層の表面から内部に突き刺し、プローブの先端を板表面の凹凸に接触させながらプローブを移動させて、プローブの先端部分から異物を除去している（例えば、特許文献３参照）。 In addition, a probe cleaner consisting of a cleaner sheet with an adhesive gel layer formed on the surface of a plate with minute irregularities on the surface is used. In this probe cleaner, the tip of the probe is moved from the surface of the gel layer to the inside. The foreign matter is removed from the tip portion of the probe by moving the probe while bringing the tip of the probe into contact with the unevenness of the plate surface (see, for example, Patent Document 3).
近年、チップのサイズの小型化に伴い、チップ上に形成される電極パッドのサイズも小さくなり、電極パッド同士も近接して設けられるようになってきた。このため、プローブのサイズもより細くする必要が生じ、また検査精度を向上又は少なくとも維持させるため、プローブは、例えば、ベリリウム−銅の合金のように高い電気特性を有する比較的軟質な材料から形成されるようになってきた。 In recent years, as the size of the chip has been reduced, the size of the electrode pad formed on the chip has been reduced, and the electrode pads have been provided close to each other. For this reason, it is necessary to reduce the size of the probe, and in order to improve or at least maintain the inspection accuracy, the probe is formed from a relatively soft material having high electrical characteristics such as a beryllium-copper alloy. It has come to be.
しかし、このようなプローブは、上記のような従来のプローブクリーナーを使用すると、クリーニング時に容易に摩耗し、プローブの寿命が短くなるという問題があり、またこの摩耗によりチップの電気特性検査に誤差が生じるという問題も生じる。 However, when such a conventional probe cleaner as described above is used, there is a problem that the probe is easily worn during cleaning, and the life of the probe is shortened. The problem of occurring also arises.
また、チップの電極パッドとの接触を確実にするために、図５Ａ及び図５Ｂに示すように、プローブの先端３０、３３に凹部３２、３５又は凸部３１、３４を形成したものが使用されている（例えば、特許文献４参照）。 Further, in order to ensure contact with the electrode pads of the chip, as shown in FIGS. 5A and 5B, the probe tips 30, 33 with the concave portions 32, 35 or the convex portions 31, 34 formed are used. (For example, see Patent Document 4).
しかし、このようなプローブの先端部分のクリーニングは、上記のような従来のプローブクリーナーを使用しても、その先端の凹部内に付着している異物を十分に除去できず、またクリーニング時に、プローブ先端の凸部を摩耗させてしまうという問題が生じている。
したがって、本発明は、クリーニング時にプローブを容易に摩耗させることなく、プローブの先端部分をクリーニングできるプローブクリーナーを提供することを目的とするものであり、特に、先端に凹部又は凸部が形成されているプローブの先端部分をクリーニングできるプローブクリーナーを提供することを目的とするものである。 Therefore, an object of the present invention is to provide a probe cleaner capable of cleaning the tip portion of the probe without easily wearing the probe during cleaning, and in particular, a concave or convex portion is formed at the tip. An object of the present invention is to provide a probe cleaner that can clean the tip of a probe.
本発明は、プローブの先端部分に付着している異物を除去するためのプローブクリーナー及びクリーニング方法であり、特に、先端に凹部又は凸部が形成されているプローブの先端部分に付着している異物を除去するのに適したプローブクリーナー及びクリーニング方法である。 The present invention relates to a probe cleaner and a cleaning method for removing foreign matter adhering to the tip portion of a probe, and in particular, foreign matter adhering to the tip portion of a probe in which a concave portion or a convex portion is formed at the tip. A probe cleaner and a cleaning method suitable for removing water.
＜プローブクリーナー＞ 上記目的を達成する本発明のプローブクリーナーは、マイクロファイバーからなる表面部分を有するクリーナーシートから成り、このクリーナーシートの少なくとも表面部分に位置するマイクロファイバーの表面に砥粒が固定されている。 <Probe Cleaner> The probe cleaner of the present invention that achieves the above object comprises a cleaner sheet having a surface portion made of microfiber, and abrasive grains are fixed to the surface of the microfiber located at least on the surface portion of the cleaner sheet. Yes.
クリーニング中、このクリーナーシートの表面部分に位置するマイクロファイバーに固定されている砥粒が、プローブの先端部分に作用して、プローブの先端部分に付着している異物が除去される。 During cleaning, the abrasive grains fixed to the microfiber located on the surface portion of the cleaner sheet act on the tip portion of the probe, and the foreign matter adhering to the tip portion of the probe is removed.
マイクロファイバーの繊維径は、０．１μｍ以上、２０μｍ以下の範囲、好適に、０．１μｍ以上、１０μｍ以下の範囲にある。 The fiber diameter of the microfiber is in the range of 0.1 μm to 20 μm, and preferably in the range of 0.1 μm to 10 μm.
マイクロファイバーの表面に固定される砥粒の平均粒径は、０．０５μｍ以上、３．０μｍ以下の範囲にあり、砥粒として、アルミナ、炭化ケイ素、酸化ケイ素、ジルコニア、水酸化アルミニウム又はダイヤモンドからなる粒子が含まれる。 The average grain size of the abrasive grains fixed on the surface of the microfiber is in the range of 0.05 μm or more and 3.0 μm or less, and the abrasive grains are alumina, silicon carbide, silicon oxide, zirconia, aluminum hydroxide or diamond. Particles are included.
上記のクリーナーシートは、ベースシートの表面に植毛したマイクロファイバーからなる植毛シートであり、この植毛シートのマイクロファイバーの表面に上記の砥粒が固定されている。そして、表面に砥粒を固定したマイクロファイバー同士は固着していない状態にある。すなわち、砥粒を固定したマイクロファイバーの１本づつが互いに他のマイクロファイバーから独立して自由に動ける状態にある。 The cleaner sheet is a flocked sheet made of microfibers planted on the surface of the base sheet, and the abrasive grains are fixed to the surface of the microfibers of the flocked sheet. And the microfiber which fixed the abrasive grain to the surface is in the state which is not adhering. That is, each of the microfibers to which the abrasive grains are fixed can move freely independently of the other microfibers.
変形的に、上記のクリーナーシートは、マイクロファイバーからなる織布又は不織布シートであり、このクリーナーシートのマイクロファイバーの表面に上記の砥粒が固定されている。 As a modification, the cleaner sheet is a woven or non-woven sheet made of microfiber, and the abrasive grains are fixed to the surface of the microfiber of the cleaner sheet.
＜プローブクリーニング方法＞ プローブの先端部分に付着している異物は、上記本発明のプローブクリーナーをテーブルの表面に取り付け、プローブの先端部分をクリーナーシートの表面部分の内部に刺し込み、プローブをクリーナーシートの表面部分の厚さ方向で往復移動させることにより除去する。 <Probe cleaning method> For foreign matters adhering to the tip of the probe, the probe cleaner of the present invention is attached to the surface of the table, the tip of the probe is inserted into the surface of the cleaner sheet, and the probe is attached to the cleaner sheet. It is removed by reciprocating in the thickness direction of the surface portion.
プローブの先端部分は、クリーナーシートの表面部分の内部に刺し込んだ後、この表面部分から抜き出してもよいしクリーナーシートの表面部分の内部に刺し込んだままの状態で、プローブをクリーナーシートの表面部分の厚さ方向で往復移動させてもよい。 The tip of the probe may be inserted into the surface portion of the cleaner sheet and then removed from the surface portion, or the probe may be inserted into the surface portion of the cleaner sheet and the probe placed on the surface of the cleaner sheet. You may reciprocate in the thickness direction of a part.
本発明が以上のように構成されるので、先端に凹部又は凸部が形成されているプローブであっても、クリーニング時にプローブを容易に摩耗させることなく、プローブの先端部分をクリーニングできるという効果を奏する。 Since the present invention is configured as described above, even if the probe has a concave or convex portion at the tip, the tip of the probe can be cleaned without easily wearing the probe during cleaning. Play.
＜プローブクリーナー＞ 図１Ａ及び図１Ｂに示すように、プローブ（図２に符号１２で示す）の先端部分に付着している異物を除去するための本発明のプローブクリーナー２０は、マイクロファイバー２５からなる表面部分２４を有するクリーナーシート２１から成り、このクリーナーシート２１の少なくとも表面部分２４に位置するマイクロファイバー２５の表面に砥粒２６が固定されている。 <Probe Cleaner> As shown in FIGS. 1A and 1B, the probe cleaner 20 of the present invention for removing foreign matter adhering to the tip of a probe (indicated by reference numeral 12 in FIG. 2) is a microfiber 25. The cleaner sheet 21 has a surface portion 24, and abrasive grains 26 are fixed to the surface of the microfiber 25 positioned at least on the surface portion 24 of the cleaner sheet 21.
図１Ｂに示すように、砥粒２６は、バインダー２７により、マイクロファイバー２５の表面に固定されている。 As shown in FIG. 1B, the abrasive grains 26 are fixed to the surface of the microfiber 25 by a binder 27.
表面部分２４は、プローブ１２の先端部分に作用する部分をいう（図２Ａ及び図２Ｂを参照）。この表面部分２４の厚さ（又は高さ）は、特に限定されるものではなく、少なくとも、クリーニングされるべきプローブ１２の先端部分の長さ分だけあればよく、１００μｍ以上、１０００μｍの範囲にあり、図２Ａ及び図２Ｂに示すように、プローブ１２の先端部分（先端及び先端付近の側面）のクリーニングは、プローブ１２の先端部分をクリーナーシート２１の表面部分２４に刺し込み（テーブル１１を矢印Ｔ２の方向に移動させるか、又はプローブ１２を矢印Ｔ１の方向に移動させる）、引き抜く（テーブル１１を矢印Ｔ１の方向に移動させるか、又はプローブ１２を矢印Ｔ２の方向に移動させる）ことにより行われる。このクリーニング中、このクリーナーシート２１の表面部分２４に位置するマイクロファイバー２５に固定されている砥粒２６が、プローブ１２の先端部分に作用して、プローブ１２の先端部分に付着している異物が除去される。 The surface portion 24 refers to a portion that acts on the tip portion of the probe 12 (see FIGS. 2A and 2B). The thickness (or height) of the surface portion 24 is not particularly limited, and may be at least as long as the length of the tip portion of the probe 12 to be cleaned, and is in the range of 100 μm or more and 1000 μm. As shown in FIGS. 2A and 2B, the tip of the probe 12 (the tip and the side surface near the tip) is cleaned by inserting the tip of the probe 12 into the surface portion 24 of the cleaner sheet 21 (the table 11 is moved to the arrow T2). Or the probe 12 is moved in the direction of the arrow T1) and pulled out (the table 11 is moved in the direction of the arrow T1 or the probe 12 is moved in the direction of the arrow T2). . During this cleaning, the abrasive grains 26 fixed to the microfibers 25 located on the surface portion 24 of the cleaner sheet 21 act on the tip portion of the probe 12 so that the foreign matter adhering to the tip portion of the probe 12 is removed. Removed.
マイクロファイバー２５の繊維径は、０．１μｍ以上、２０μｍ以下の範囲、好適に、０．１μｍ以上、１０μｍ以下の範囲にある。 The fiber diameter of the microfiber 25 is in the range of 0.1 μm or more and 20 μm or less, and preferably in the range of 0.1 μm or more and 10 μm or less.
マイクロファイバー２５として、ナイロン、ポリプロピレン、ポリエチレン、ポリエチレンテレフタレート、ポリウレタン、アクリル、ポリ塩化ビニル、ビニロン又はレーヨンなどからなる合成繊維が使用される。 As the microfiber 25, a synthetic fiber made of nylon, polypropylene, polyethylene, polyethylene terephthalate, polyurethane, acrylic, polyvinyl chloride, vinylon, rayon, or the like is used.
マイクロファイバー２５の表面に固定される砥粒２６のサイズは、マイクロファイバー２５の繊維径よりも小さく、繊維径の２分の１以下の範囲にあることが好ましい。これは、砥粒２６のサイズが大きいと、繊維の表面（曲面）に対する砥粒の固定力が低下し、クリーニング中に、プローブ１２の先端部分に作用した砥粒２６がマイクロファイバー２５から脱粒し、脱粒した砥粒がプローブ１２の先端部分異物として付着することがあるからである。好適に、砥粒２６として、平均粒径が０．０５μｍ以上、３．０μｍ以下の範囲にあるものが使用される。 The size of the abrasive grains 26 fixed to the surface of the microfiber 25 is preferably smaller than the fiber diameter of the microfiber 25 and in a range of half or less of the fiber diameter. This is because if the size of the abrasive grains 26 is large, the fixing force of the abrasive grains on the surface (curved surface) of the fiber is reduced, and the abrasive grains 26 that acted on the tip portion of the probe 12 are separated from the microfibers 25 during cleaning. This is because the shed abrasive grains may adhere as foreign matter at the tip of the probe 12. Preferably, the abrasive grains 26 having an average particle diameter in the range of 0.05 μm or more and 3.0 μm or less are used.
砥粒２６の材料は、特に限定されるものではなく、研磨に一般的に使用されている砥粒が使用でき、好適に、アルミナ、炭化ケイ素、酸化ケイ素、ジルコニア、水酸化アルミニウム又はダイヤモンドからなる粒子が使用される。 The material of the abrasive grains 26 is not particularly limited, and abrasive grains generally used for polishing can be used, and preferably made of alumina, silicon carbide, silicon oxide, zirconia, aluminum hydroxide or diamond. Particles are used.
クリーナーシート２１は、図３及び図４に示すように、ベースシート２８の表面に植毛したマイクロファイバー２５からなる植毛シートであり、この植毛シートのマイクロファイバー２５の表面に上記の砥粒２６が固定されている。そして、表面に砥粒２６を固定したマイクロファイバー２５同士は固着していない状態にある。 As shown in FIGS. 3 and 4, the cleaner sheet 21 is a flocked sheet composed of microfibers 25 planted on the surface of the base sheet 28, and the abrasive grains 26 are fixed to the surface of the microfibers 25 of the flocked sheet. Has been. And the microfibers 25 which fixed the abrasive grain 26 on the surface are in the state which is not adhering.
すなわち、砥粒２６を固定したマイクロファイバー２５の１本づつが互いに他のマイクロファイバー２５から独立して自由に動ける状態にある。 That is, each of the microfibers 25 to which the abrasive grains 26 are fixed is in a state of being freely movable independently of the other microfibers 25.
植毛シートのマイクロファイバー２５の長さは、１００μｍ以上、１０００μｍ（１.０mm）の範囲、好適に、４００μｍ以上、６００μｍ以下の範囲にある。これは、長さが短くなると、繊維の動きが低下し、長すぎたりするとマイクロファイバー２５の各々が１本づつ独立できず、相互に絡み合い、マイクロファイバー２５の各々に砥粒２６を個別に付着させることが難しくなるからである。 The length of the microfiber 25 of the flocked sheet is in the range of 100 μm or more and 1000 μm (1.0 mm), preferably in the range of 400 μm or more and 600 μm or less. This is because if the length is shortened, the movement of the fiber is reduced, and if the length is too long, the microfibers 25 cannot be separated one by one, but are entangled with each other, and the abrasive grains 26 are individually attached to each of the microfibers 25. This is because it becomes difficult.
ベースシート２８として、温度変化による熱変形が小さいものが好ましく、機械的特性として、熱収縮率が、２５℃以上、１５０℃以下の範囲で、２％以下の範囲にあるシートが使用される。ベースシート２８のサイズ及び材料は、特に限定されるものではなく、厚さが５０μｍ以上、１８８μｍ以下の範囲にあり、ベースシートとして、ＰＥＴ（ポリエチレンテレフタレート）、ＰＥＮ（ポリエチレンナフタレート）、ＰＰＳ（ポリフェニレンサルファイド）、ＰＥＩ（ポリエーテルイミド）、ＰＩ（ポリイミド）、ＰＣ（ポリカーボネート）、ＰＶＣ（ポリ塩化ビニル）、ＰＰ（ポリプロピレン）、ＰＶＤＣ（ポリ塩化ビニリデン）、ナイロン、ＰＥ（ポリエチレン）、又はＰＥＳ（ポリエーテルスルホン）などからなるシートが使用され、好適に、ＰＥＴシートが使用される。 As the base sheet 28, one having a small thermal deformation due to a temperature change is preferable, and a sheet having a thermal shrinkage rate in the range of 25 ° C. or more and 150 ° C. or less and 2% or less is used. The size and material of the base sheet 28 are not particularly limited, and the thickness is in the range of 50 μm or more and 188 μm or less. As the base sheet, PET (polyethylene terephthalate), PEN (polyethylene naphthalate), PPS (polyphenylene) Sulfide), PEI (polyetherimide), PI (polyimide), PC (polycarbonate), PVC (polyvinyl chloride), PP (polypropylene), PVDC (polyvinylidene chloride), nylon, PE (polyethylene), or PES (poly) A sheet made of ether sulfone) or the like is used, and a PET sheet is preferably used.
実用的には、ベースシート２８の裏面に粘着剤層（図１Ａに符号２２で示す）が形成され、この粘着剤層２２の表面に離型紙（図１Ａに符号２３で示す）が着脱可能に貼り付けられる。そして、この離型紙２３は、粘着剤層２２の表面から剥がされ、本発明のプローブクリーナー２０は、この粘着剤層２２を介して、図２Ｃに示すように、プローブクリーニング装置１０のテーブル１１上に貼り付けられる。 Practically, an adhesive layer (indicated by reference numeral 22 in FIG. 1A) is formed on the back surface of the base sheet 28, and a release paper (indicated by reference numeral 23 in FIG. 1A) can be attached to and detached from the surface of the adhesive layer 22. It is pasted. The release paper 23 is peeled off from the surface of the pressure-sensitive adhesive layer 22, and the probe cleaner 20 of the present invention is placed on the table 11 of the probe cleaning device 10 through the pressure-sensitive adhesive layer 22 as shown in FIG. 2C. Is pasted.
変形的に、本発明のプローブクリーナー２０のクリーナーシート２１として、上記のマイクロファイバー２５からなる織布又は不織布シートを使用することができ、少なくとも、このクリーナーシート２１の表面部分２４に位置するマイクロファイバー２５の表面には上記の砥粒２６が固定されている（図１Ｂを参照）。 Alternatively, a woven or non-woven sheet made of the above-described microfiber 25 can be used as the cleaner sheet 21 of the probe cleaner 20 of the present invention, and at least the microfiber located on the surface portion 24 of the cleaner sheet 21. The abrasive grains 26 are fixed to the surface of 25 (see FIG. 1B).
このクリーナーシート２１は、その裏面に粘着剤層２２を形成し、この粘着剤層２２を介して、クリーニング装置１０のテーブル１１上に貼り付けてもよいし、また、このクリーナーシート２１をベースシート（図示せず）の表面に固定し、このベースシートの裏面に粘着剤層（図１Ａに符号２２で示すような粘着剤層）を形成し、この粘着剤層を介して、クリーニング装置１０のテーブル１１上に貼り付けてもよい。 The cleaner sheet 21 may have an adhesive layer 22 formed on the back surface thereof, and may be attached to the table 11 of the cleaning device 10 via the adhesive layer 22, or the cleaner sheet 21 may be attached to the base sheet. (Not shown) is fixed to the surface of the base sheet, and an adhesive layer (adhesive layer as indicated by reference numeral 22 in FIG. 1A) is formed on the back surface of the base sheet. You may affix on the table 11. FIG.
このベースシートとして、上記の植毛シートのものと同様に、温度変化による熱変形が小さいものが好ましく、機械的特性として、上記の熱収縮率を有するシートが使用される。上記の植毛シートのものと同様に、ベースシートのサイズ及び材料は、特に限定されるものではなく、厚さが５０μｍ以上、１８８μｍ以下の範囲にあり、ベースシートとして、ポリプロピレン、ポリエチレンなどの合成樹脂からなるシートが使用される。 As the base sheet, a sheet having a small thermal deformation due to a temperature change is preferable as in the above-described flocked sheet, and a sheet having the above-described thermal contraction rate is used as a mechanical property. Similar to the above-mentioned flocked sheet, the size and material of the base sheet are not particularly limited, the thickness is in the range of 50 μm to 188 μm, and the base sheet is a synthetic resin such as polypropylene or polyethylene. A sheet consisting of
実用的には、ベースシートの裏面に形成した粘着剤層の表面に離型紙（図１Ａに符号２３で示すような離型紙）が着脱可能に貼り付けられる。この離型紙は、粘着剤層の表面から剥がされ、本発明のプローブクリーナー２０は、上記の植毛シートと同様に、この粘着剤層を介して、図２Ｃに示すように、プローブクリーニング装置１０のテーブル１１上に貼り付けられる。 Practically, release paper (release paper as indicated by reference numeral 23 in FIG. 1A) is detachably attached to the surface of the pressure-sensitive adhesive layer formed on the back surface of the base sheet. The release paper is peeled off from the surface of the pressure-sensitive adhesive layer, and the probe cleaner 20 of the present invention is connected to the probe cleaning device 10 through the pressure-sensitive adhesive layer as shown in FIG. Affixed on the table 11.
＜製造方法＞ 上記本発明のプローブクリーナー２０は、クリーナーシート２１の表面部分に、樹脂溶液中に砥粒を分散させ、さらに硬化剤を添加した塗料を、リバース塗工、グラビア塗工などの既知の塗工方法を利用して塗布し、乾燥させて製造される。 <Manufacturing method> The probe cleaner 20 of the present invention is a known coating such as reverse coating or gravure coating, in which abrasive particles are dispersed in a resin solution on the surface portion of the cleaner sheet 21 and a curing agent is added. The coating method is applied and dried.
樹脂溶液は、ポリエステル樹脂、ポリウレタン樹脂、共重合ビニル系樹脂、エポキシ樹脂、フェノール樹脂などから選択される一種又は二種以上の樹脂を溶剤で溶解したものである。溶剤として、トルエン、キシレン、ＭＥＫ（メチルエチルケトン）、酢酸エチル、シクロヘキサノン、アセトン、アルコールなどが含まれる。硬化剤として、イソシアネート系のものが含まれる。 The resin solution is obtained by dissolving one or more resins selected from a polyester resin, a polyurethane resin, a copolymerized vinyl resin, an epoxy resin, a phenol resin, and the like with a solvent. Examples of the solvent include toluene, xylene, MEK (methyl ethyl ketone), ethyl acetate, cyclohexanone, acetone, alcohol and the like. As the curing agent, an isocyanate-based one is included.
塗料の粘度は、２０ｃｐ以上、３００ｃｐ以下の範囲、好ましくは５０ｃｐ以上、１５０ｃｐ以下の範囲にある。 The viscosity of the paint is in the range of 20 cp to 300 cp, preferably in the range of 50 cp to 150 cp.
塗料の粘度が低すぎると（２０ｃｐ未満の範囲）、塗料がクリーナーシートの表面部分の下層側に落ちて、クリーナーシート２１の表面部分２４に位置するマイクロファイバー２５の表面に十分な量の砥粒２６が固定されず、クリーニング中、プローブの先端部分に砥粒を十分に作用させることができなくなる。一方、塗料の粘度が高すぎる（３００ｃｐを超える）と、塗料がクリーナーシート２１の表面部分２４の上層に停滞し、クリーナーシート２１の表面部分２４に、樹脂（バインダー２７）で砥粒２６を固定した層が、隣接するマイクロファイバー２５同士を固着させるように形成され、この層が、プローブ１２の先端部分を摩耗させる原因となる。 If the viscosity of the paint is too low (in the range of less than 20 cp), the paint falls to the lower layer side of the surface portion of the cleaner sheet, and a sufficient amount of abrasive grains on the surface of the microfiber 25 located on the surface portion 24 of the cleaner sheet 21 26 is not fixed, and the abrasive grains cannot sufficiently act on the tip portion of the probe during cleaning. On the other hand, if the viscosity of the paint is too high (over 300 cp), the paint stagnates in the upper layer of the surface portion 24 of the cleaner sheet 21, and the abrasive grains 26 are fixed to the surface portion 24 of the cleaner sheet 21 with resin (binder 27). This layer is formed so as to fix the adjacent microfibers 25 to each other, and this layer causes the tip portion of the probe 12 to wear.
塗料中の砥粒２６の配合割合は、６０重量％以上の範囲、好適に８０重量％以上、９８重量％以下の範囲にある。これは、砥粒２６の割合が少なすぎる（６０重量％未満）と、隣接するマイクロファイバー２５同士が固着し、上記のような層が形成されるからである。 The blending ratio of the abrasive grains 26 in the paint is in the range of 60% by weight or more, preferably in the range of 80% by weight or more and 98% by weight or less. This is because if the proportion of the abrasive grains 26 is too small (less than 60% by weight), the adjacent microfibers 25 adhere to each other, and the above layer is formed.
塗料の組成を下記の表１に示す。 The composition of the paint is shown in Table 1 below.
好適に、塗料として、６０重量％〜９８重量％の炭化ケイ素からなる砥粒を加熱し、乾燥させた後、１重量％〜３５重量％の飽和ポリエステル樹脂をトルエン、キシレン、酢酸エチル及びＭＥＫの混合溶媒に溶解した樹脂溶液と混合し、撹拌して砥粒を樹脂溶液中に分散させた後、濾過し、クリーナーシート上に塗布する直前に１重量％〜５重量％のイソシアネート系の硬化剤を添加して、塗料の粘度を３０ｃｐ〜１５０ｃｐに調整したものが使用される。 Preferably, as a paint, abrasive grains composed of 60% to 98% by weight of silicon carbide are heated and dried, and then 1% to 35% by weight of a saturated polyester resin is made of toluene, xylene, ethyl acetate and MEK. It is mixed with a resin solution dissolved in a mixed solvent, and stirred to disperse the abrasive grains in the resin solution, followed by filtration and 1 wt% to 5 wt% of an isocyanate-based curing agent immediately before application on a cleaner sheet. To which the viscosity of the paint is adjusted to 30 cp to 150 cp is used.
＜プローブクリーニング方法＞ 図２Ｃに示すように、粘着材層（図１Ａに符号２２で示す）を介して、上記本発明のプローブクリーナー２０をテーブル１１の表面に貼り付ける。図２Ａ〜図２Ｃに示すように、プローブ１２の先端部分をこのクリーナーシート２１の表面上に配置し、テーブル１１を矢印Ｔ２の方向に移動させて、プローブ１２の先端部分をクリーナーシート２１の表面部分２４内に刺し込む。そして、プローブ１２の先端部分をクリーナーシート２１の表面部分２４内に刺し込んだ後に引き抜く（テーブル１１を矢印Ｔ１の方向に移動させる）。この矢印Ｔ１、Ｔ２の方向の往復移動により、プローブ１２の先端部分に付着している異物を表面部分で除去する。 <Probe Cleaning Method> As shown in FIG. 2C, the probe cleaner 20 of the present invention is attached to the surface of the table 11 through an adhesive layer (indicated by reference numeral 22 in FIG. 1A). 2A to 2C, the distal end portion of the probe 12 is disposed on the surface of the cleaner sheet 21, the table 11 is moved in the direction of the arrow T2, and the distal end portion of the probe 12 is moved to the surface of the cleaner sheet 21. Insert into portion 24. Then, the tip portion of the probe 12 is inserted into the surface portion 24 of the cleaner sheet 21 and then pulled out (the table 11 is moved in the direction of the arrow T1). By the reciprocating movement in the directions of the arrows T1 and T2, the foreign matter adhering to the tip portion of the probe 12 is removed at the surface portion.
＜クリーニング試験＞ 実施例及び比較例のプローブクリーナーを製造し、これらプローブクリーナー使用して、先端に凹凸部を有するプローブの先端部分のクリーニング試験を行った。クリーニング後のプローブの先端の凹部と凸部からの異物除去率とこれら凹部と凸部の摩耗の有無について比較した。異物除去率とこれら凹部と凸部の摩耗の有無は、顕微鏡を使用して観察した。 <Cleaning Test> The probe cleaners of Examples and Comparative Examples were manufactured, and using these probe cleaners, a cleaning test of the tip portion of the probe having an uneven portion at the tip was performed. The removal rate of foreign matter from the concave and convex portions at the tip of the probe after cleaning and the presence or absence of wear of these concave and convex portions were compared. The foreign matter removal rate and the presence or absence of wear of these concave and convex portions were observed using a microscope.
クリーニング試験には、図５Ａ及び図５Ｂにそれぞれ示すような先端を有する二種類のプローブを使用した。以下、これらプローブを「試験プローブＡ」及び「試験プローブＢ」という。 The cleaning test were used two types of probe having a tip as shown in FIGS. 5 A and FIG. 5 B. Hereinafter, these probes are referred to as “test probe A” and “test probe B”.
試験プローブＡは、図５Ａに示す先端の形状を有するものに対応するものであり、先端に凹凸部（底面のサイズ：約９０μｍ×約９０μｍ、高さ：約７０μｍ、凹部口径：約５０μｍ、凹部深さ：約７０μｍ）を有する。（この「試験プローブＡ」では、凹部を形成している外輪部分が凸部となっている。） The test probe A corresponds to the one having the shape of the tip shown in FIG. 5A, and has a concavo-convex portion (bottom size: about 90 μm × about 90 μm, height: about 70 μm, recess diameter: about 50 μm, recess) Depth: about 70 μm). (In this “test probe A”, the outer ring portion forming the concave portion is a convex portion.)
試験プローブＢは、図５Ｂに示す先端の形状を有するものに対応するものであり、先端に凹凸部（底面：約３０μｍ×約３０μｍ、高さ：約１００μｍ）を複数有するものである。（この「試験プローブＢ」では、凸部と凸部との間の谷間が凹部となっている。） The test probe B corresponds to the one having the shape of the tip shown in FIG. 5B, and has a plurality of uneven portions (bottom surface: about 30 μm × about 30 μm, height: about 100 μm) at the tip. (In this “test probe B”, the valley between the convex portions is a concave portion.)
クリーニング試験は、図２Ｃに示すようなクリーニング装置を使用して行った。クリーニング条件は、各実施例及び比較例で同一であり、各実施例及び比較例のプローブクリーナーのクリーナーシートの表面部分への試験プローブＡ、Ｂの接触回数が１０００回、１万回及び１０万回となった時点でプローブの先端の凹凸部の摩耗の有無について観察し、接触回数が１０万回に達した時点でプローブの先端の凹凸部に付着している異物の有無について観察した。 The cleaning test was performed using a cleaning device as shown in FIG. 2C. The cleaning conditions are the same in each example and comparative example, and the number of times the test probes A and B contact the surface portion of the cleaner sheet of the probe cleaner in each example and comparative example is 1000 times, 10,000 times, and 100,000. When the number of contact was reached, the presence or absence of wear on the uneven portion at the tip of the probe was observed, and when the number of contacts reached 100,000 times, the presence or absence of foreign matter adhering to the uneven portion at the tip of the probe was observed.
＜実施例１＞ 実施例１のプローブクリーナーを製造した。 <Example 1> The probe cleaner of Example 1 was manufactured.
塗料は、炭化ケイ素からなる平均粒径０．０５μｍの砥粒（１Ｋｇ）を加熱し、乾燥させた後、飽和ポリエステル樹脂（３１０ｇ）をトルエン、キシレン、酢酸エチル及びＭＥＫの混合溶媒に溶解した樹脂溶液と混合し、撹拌して砥粒を樹脂溶液中に分散させた後、濾過し、クリーナーシート上に塗布する直前にイソシアネート系の硬化剤（６０ｇ）を添加して調整して製造した。塗料の粘度は５０ｃｐであった。 The paint is a resin in which abrasive grains (1 kg) made of silicon carbide having an average particle diameter of 0.05 μm are heated and dried, and then a saturated polyester resin (310 g) is dissolved in a mixed solvent of toluene, xylene, ethyl acetate and MEK. After mixing with the solution and stirring to disperse the abrasive grains in the resin solution, the mixture was filtered and prepared by adding an isocyanate-based curing agent (60 g) immediately before coating on the cleaner sheet. The viscosity of the paint was 50 cp.
この塗料を植毛シートの表面部分のマイクロファイバーの各々の表面に塗布し、乾燥させて、実施例１のプローブクリーナーを製造した。 This paint was applied to each surface of the microfibers on the surface portion of the flocked sheet and dried to produce the probe cleaner of Example 1.
ここで、塗料の塗布は、＃５０のグラビアローラー（４５度をなす等間隔の直線状の溝が形成されている）を使用して行った。 Here, the coating was applied using a # 50 gravure roller (equally spaced linear grooves of 45 degrees were formed).
また、植毛シートとして、平均繊維径１０μｍ、平均長さ５００μｍ（５００μｍ±１００μｍ）のナイロンからなるマイクロファイバーを厚さ５０μｍのＰＥＴシートに植毛したものを使用した。 Moreover, as a flocking sheet, a microfiber made of nylon having an average fiber diameter of 10 μm and an average length of 500 μm (500 μm ± 100 μm) was planted on a 50 μm thick PET sheet.
＜実施例２＞ 実施例２のプローブクリーナーを製造した。実施例２のプローブクリーナーは、砥粒の平均粒径を０．３μｍに変更した以外は上記実施例１と同じ材料及び方法で製造した。 <Example 2> The probe cleaner of Example 2 was manufactured. The probe cleaner of Example 2 was manufactured using the same materials and methods as in Example 1 except that the average grain size of the abrasive grains was changed to 0.3 μm.
＜実施例３＞ 実施例３のプローブクリーナーを製造した。実施例３のプローブクリーナーは、砥粒の平均粒径を３μｍに変更した以外は上記実施例１と同じ材料及び方法で製造した。 <Example 3> The probe cleaner of Example 3 was manufactured. The probe cleaner of Example 3 was manufactured using the same material and method as in Example 1 except that the average grain size of the abrasive grains was changed to 3 μm.
＜実施例４＞ 実施例４のプローブクリーナーを製造した。実施例４のプローブクリーナーは、植毛シートとして平均繊維径０．１μｍのマイクロファイバーを使用した以外は上記実施例１と同じ材料及び方法で製造した。 <Example 4> The probe cleaner of Example 4 was manufactured. The probe cleaner of Example 4 was manufactured by the same material and method as in Example 1 except that microfibers having an average fiber diameter of 0.1 μm were used as the flocked sheet.
＜実施例５＞ 実施例５のプローブクリーナーを製造した。実施例５のプローブクリーナーは、植毛シートとして平均繊維径３μｍのマイクロファイバーを使用した以外は上記実施例１と同じ材料及び方法で製造した。 <Example 5> The probe cleaner of Example 5 was manufactured. The probe cleaner of Example 5 was manufactured by the same material and method as in Example 1 except that microfibers having an average fiber diameter of 3 μm were used as the flocked sheet.
＜実施例６＞ 実施例６のプローブクリーナーを製造した。実施例６のプローブクリーナーは、植毛シートとして平均繊維径２０μｍのマイクロファイバーを使用した以外は上記実施例１と同じ材料及び方法で製造した。 <Example 6> The probe cleaner of Example 6 was manufactured. The probe cleaner of Example 6 was manufactured by the same material and method as in Example 1 except that microfibers having an average fiber diameter of 20 μm were used as the flocked sheet.
＜実施例７＞ 実施例７のプローブクリーナーを製造した。実施例７のプローブクリーナーは、砥粒としてアルミナを使用した以外は上記実施例１と同じ材料及び方法で製造した。 <Example 7> The probe cleaner of Example 7 was manufactured. The probe cleaner of Example 7 was manufactured using the same material and method as Example 1 except that alumina was used as the abrasive grains.
＜実施例８＞ 実施例８のプローブクリーナーを製造した。実施例８のプローブクリーナーは、砥粒としてダイヤモンドを使用した以外は上記実施例１と同じ材料及び方法で製造した。 <Example 8> The probe cleaner of Example 8 was manufactured. The probe cleaner of Example 8 was manufactured using the same material and method as in Example 1 except that diamond was used as the abrasive.
＜比較例１＞ 比較例１のプローブクリーナーを製造した。比較例１のプローブクリーナーは、砥粒の平均粒径を５μｍに変更した以外は上記実施例１と同じ材料及び方法で製造した。 <Comparative example 1> The probe cleaner of the comparative example 1 was manufactured. The probe cleaner of Comparative Example 1 was manufactured using the same materials and methods as in Example 1 except that the average grain size of the abrasive grains was changed to 5 μm.
＜比較例２＞ 比較例２のプローブクリーナーを製造した。 <Comparative Example 2> The probe cleaner of Comparative Example 2 was produced.
上記実施例３の塗料（炭化ケイ素からなる平均粒径３μｍの砥粒（１Ｋｇ）を加熱し、乾燥させた後、飽和ポリエステル樹脂（３１０ｇ）をトルエン、キシレン、酢酸エチル及びＭＥＫの混合溶媒に溶解した樹脂溶液と混合し、撹拌して砥粒を樹脂溶液中に分散させた後、濾過し、クリーナーシート上に塗布する直前にイソシアネート系の硬化剤（６０ｇ）を添加して調整して製造したものであり、塗料の粘度は５０ｃｐであった）を、＃５０のグラビアローラー（４５度をなす等間隔の直線状の溝が形成されている）を使用して、ＰＥＴフィルムの表面に塗布し、乾燥させて、比較例２のプローブクリーナーを製造した。 The paint of Example 3 (abrasive grains (1 kg) made of silicon carbide having an average particle diameter of 3 μm are heated and dried, and then a saturated polyester resin (310 g) is dissolved in a mixed solvent of toluene, xylene, ethyl acetate and MEK) It was mixed with the resin solution and stirred to disperse the abrasive grains in the resin solution, filtered, and prepared by adding an isocyanate-based curing agent (60 g) immediately before application on the cleaner sheet. The viscosity of the paint was 50 cp) and applied to the surface of the PET film using a # 50 gravure roller (equally spaced linear grooves forming 45 degrees). The probe cleaner of Comparative Example 2 was manufactured by drying.
＜比較例３＞ 比較例３のプローブクリーナーを製造した。 <Comparative example 3> The probe cleaner of the comparative example 3 was manufactured.
上記実施例３の塗料を、＃５０のグラビアローラー（４５度をなす等間隔の直線状の溝が形成されている）を使用して、発泡体フィルムの表面に塗布し、乾燥させて、比較例３のプローブクリーナーを製造した。 The coating material of Example 3 was applied to the surface of the foam film using a # 50 gravure roller (equally spaced linear grooves of 45 degrees were formed), dried, and compared. The probe cleaner of Example 3 was manufactured.
＜プローブクリーナーの構成材料＞ 実施例１〜８及び比較例１〜３のプローブクリーナーの構成材料を下記の表２にまとめる。 <Constituent Materials of Probe Cleaner> The constituent materials of the probe cleaners of Examples 1 to 8 and Comparative Examples 1 to 3 are summarized in Table 2 below.
＜試験結果＞ 試験結果を下記の表３に示す。 <Test Results> The test results are shown in Table 3 below.
実施例１〜３と比較例１との結果から、凹部異物除去率は、砥粒の粒径が小さくなると低下し、平均粒径０．０５μｍ（実施例１）において６０〜８０％となる。一方、凹部（及び凸部）摩耗量は、砥粒の粒径が大きくなると低下し、平均粒径３μｍ（実施例３）において１万コンタクトで摩耗がみられるようになり、平均粒径５μｍ（比較例１）では１０００コンタクトで摩耗がみられるようになる。 From the results of Example 1 and Comparative Example 1-3, the recess contaminant removal rate is decreased as the particle size of the abrasive grains decreases, the 60-80% in average particle size 0.05 .mu.m m (Example 1) . On the other hand, recesses (and protrusions) wear amount was reduced as the particle size of the abrasive grains increases, 10,000 contact at an average particle diameter of 3 mu m (Example 3) is as wear seen, the average particle size At 5 μm (Comparative Example 1), wear is observed at 1000 contacts.
実施例２、７及び８の結果から、砥粒の種類を変更しても、凹部異物除去率と凹部（及び凸部）摩耗量に大きな差はなく、いずれの比較例の結果よりも良好であることがわかる。 From the results of Examples 2, 7 and 8, even if the type of abrasive grains is changed, there is no significant difference between the concave foreign matter removal rate and the concave (and convex) wear amount, which is better than the results of any comparative examples. I know that there is.
実施例１、４〜６の結果から、凹部異物除去率は、ファイバー径０．１μｍ（実施例４）においては８０〜９５％、ファイバー径１０μｍ（実施例１）においては６０〜８０パーセントとなった。一方、凹部（及び凸部）摩耗量は、ファイバー径に大きく依存せず、ファイバー径が０．１μｍ〜２０μｍの範囲において１０万コンタクトでも摩耗がみられない。 From the results of Examples 1 and 4 to 6, the concave foreign matter removal rate is 80 to 95% when the fiber diameter is 0.1 μm (Example 4 ) and 60 to 80 % when the fiber diameter is 10 μm ( Example 1). It was . On the other hand, the wear amount of the recesses (and the protrusions) does not greatly depend on the fiber diameter, and no wear is seen even with 100,000 contacts in the fiber diameter range of 0.1 μm to 20 μm.
以上のことから、植毛シートの植毛として、ファイバー径０．１μｍ〜２０μｍのマイクロファイバーを使用し、このマイクロファイバーに固定される砥粒として、平均粒径が０．０５μｍ〜３μｍのものを使用するのが好適であることがわかる。 From the above, as a flocked flocked sheet, using a microfiber fiber diameter 0.1Myuemu～20myuemu, as abrasive grains are fixed to the microfibers, the average particle diameter of 0.05μm~3μm It turns out that it is suitable to use.
また、上記表３に示す結果から、実施例１〜８のプローブクリーナーによると、比較例１〜３のものよりも凹部の異物除去率が良好であり且つ凹部と凸部の摩耗量も低いことがわかる。 Further, from the results shown in Table 3 above, according to the probe cleaners of Examples 1 to 8 , the foreign matter removal rate of the recesses is better than that of Comparative Examples 1 to 3, and the wear amount of the recesses and the projections is also low. I understand.
上記実施例において、電気特性検査用の針（プローブ）の先端部分のプローブクリーナー及びクリーニング方法について開示したが、本発明は、上記プローブだけでなく、医療用の針、縫製用の針などのような針状物の製造工程における先端部分の仕上げ加工又は針状物の使用前後においてその先端部分に付着した異物を除去することにも利用できるものである。 In the above embodiment, the probe cleaner and the cleaning method for the tip portion of the electrical property inspection needle (probe) have been disclosed. However, the present invention is not limited to the probe, but may be a medical needle, a sewing needle, or the like. It can also be used for finishing the tip part in the manufacturing process of a needle-like object or removing foreign matter adhering to the tip part before and after using the needle-like object.
１０・・・プローブクリーニング装置
１１・・・テーブル
１２・・・プローブ
２０・・・プローブクリーナー
２１・・・クリーナーシート
２２・・・粘着剤層
２３・・・離型紙
２４・・・表面部分
２５・・・マイクロファイバー
２６・・・砥粒
２７・・・バインダー
２８・・・ベースシート
３０、３３・・・プローブの先端
３１、３４・・・凸部
３２、３５・・・凹部
Ｔ１、Ｔ２・・・移動方向
DESCRIPTION OF SYMBOLS 10 ... Probe cleaning apparatus 11 ... Table 12 ... Probe 20 ... Probe cleaner 21 ... Cleaner sheet 22 ... Adhesive layer 23 ... Release paper 24 ... Surface part 25- .... Microfiber 26 ... Abrasive grain 27 ... Binder 28 ... Base sheet 30, 33 ... Probe tips 31, 34 ... Protrusions 32, 35 ... Concave parts T1, T2 ... ·Direction of movement
Claims (2)
前記マイクロファイバーの繊維径が０．１μｍ以上、２０μｍ以下の範囲にあり、
前記マイクロファイバーの表面に平均粒径が０．０５μｍ以上、３．０μｍ以下の範囲にある砥粒が固定され、
前記表面に前記砥粒が固定された前記マイクロファイバー同士が固着していない状態にある、
ことを特徴とするプローブクリーニング用又はプローブ加工用シート。 A probe cleaning or probe processing sheet comprising a flocking sheet comprising a base sheet and a microfiber planted on the base sheet for removing foreign matter adhering to the tip portion of the probe, or of the probe in order to perform the finishing in the manufacturing process at the tip portion of the probe, acting the said surface portion comprising a microfiber flocked sheets without pressing the flocked sheet to said tip portion of said probe to said tip portion of said probe A probe cleaning or probe processing sheet
The fiber diameter of the microfiber is in the range of 0.1 μm or more and 20 μm or less,
Abrasive grains having an average particle diameter of 0.05 μm or more and 3.0 μm or less are fixed to the surface of the microfiber,
The microfibers with the abrasive grains fixed on the surface are not fixed to each other.
A probe cleaning or probe processing sheet.
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| JP2006250342A JP5027468B2 (en) | 2006-09-15 | 2006-09-15 | Probe cleaning or probe processing sheet and probe processing method |
| TW096125737A TW200819756A (en) | 2006-09-15 | 2007-07-13 | Probe cleaner and cleaning method |
| US11/895,469 US20080070481A1 (en) | 2006-09-15 | 2007-08-24 | Probe cleaner and cleaning method |
| KR1020070093350A KR101381491B1 (en) | 2006-09-15 | 2007-09-14 | Probe cleaner and cleaning method |
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-
2006
- 2006-09-15 JP JP2006250342A patent/JP5027468B2/en active Active
-
2007
- 2007-07-13 TW TW096125737A patent/TW200819756A/en unknown
- 2007-08-24 US US11/895,469 patent/US20080070481A1/en not_active Abandoned
- 2007-09-14 KR KR1020070093350A patent/KR101381491B1/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008070280A (en) | 2008-03-27 |
| TW200819756A (en) | 2008-05-01 |
| KR20080025326A (en) | 2008-03-20 |
| US20080070481A1 (en) | 2008-03-20 |
| KR101381491B1 (en) | 2014-04-04 |
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