KR20080025326A - Probe cleaner and cleaning method - Google Patents

Abstract

A probe cleaner and a cleaning method thereof are provided to clean a tip of probe without causing wear of the probe while cleaning, particularly for the tip of probe with unevenness. A cleaning method of a probe cleaner(20) for removing foreign substances attached onto a tip of probe, comprises the steps of: installing the probe cleaner on a surface of a table, wherein the probe cleaner comprises a cleaner sheet(21) having a surface(24) made of micro fibers(25) and abrading particles(26) fixed onto a surface of the micro fibers at the surface; poking the tip of the probe into the surface, and reciprocating the prove in a direction of thickness of the surface.

Description

Probe Cleaners and Cleaning Methods {PROBE CLEANER AND CLEANING METHOD}

The present invention is a probe cleaner for cleaning the tip portion before or after finishing processing of the tip portion in the manufacturing process of the needle shape, such as an electrical property test needle (probe), a medical needle, a sewing needle or the like. And a cleaning method, and more particularly, to a probe cleaner and a cleaning method for removing foreign matter adhering to a tip portion of a probe used for inspecting electrical characteristics in a semiconductor device inspection step.

In the manufacturing process of a semiconductor device, in order to improve the manufacturing efficiency, a probe is brought into contact with electrode pads of a plurality of chips assembled on a semiconductor wafer, and a test signal is applied and detected through the probe to further detect electrical characteristics of each chip. Checking

In general, the probe is formed of a hard material such as tungsten or beryllium. On the other hand, the electrode pad is formed of a relatively soft material such as aluminum, and when foreign matter such as aluminum of the electrode pad adheres to the tip portion of the probe (a side of the tip and the vicinity of the tip) when the probe is brought into contact with the electrode pad. This reduces the inspection accuracy. In addition, when a large foreign matter adheres to a probe, adjacent probes may short-circuit and a chip may be destroyed. For this reason, foreign substances are removed by cleaning the tip portion of the probe.

For the cleaning of the tip portion of the probe, a probe cleaner comprising a cleaner sheet made of an elastic material is conventionally used, such as silicone rubber, urethane rubber, or the like in which abrasive grains (hard particles made of aluminum oxide, silicon carbide, diamond, etc.) are used (eg, See, for example, Patent Documents 1 and 2), the tip end portion of the probe is punctured from the surface of the elastic material of the probe cleaner to the inside, and the abrasive grain fixed to the elastic material is acted on the tip end portion of the probe to remove foreign substances.

Moreover, the probe cleaner which consists of a cleaner sheet which formed the gel layer which has the adhesiveness on the surface of the board which formed the minute unevenness | corrugation on the surface is used, In this probe cleaner, the tip part of a probe is stuck inward from the surface of a gel layer, and a probe The foreign material is removed from the tip end portion of the probe by moving the probe while contacting the tip end portion with the concave-convex surface of the plate surface (see Patent Document 3, for example).

In recent years, with the miniaturization of the size of the chip, the size of the electrode pad formed on the chip is also reduced, and the electrode pads have been provided in close proximity. As a result, the size of the probe needs to be made thinner, and in order to improve or at least maintain the inspection accuracy, the probe may be formed of a relatively soft material having high electrical properties such as, for example, an alloy of beryllium-copper. Has been.

However, such a probe has a problem in that when the conventional probe cleaner is used as described above, the probe is easily worn during cleaning and the life of the probe is shortened. In addition, the wear causes an error in the inspection of the electrical characteristics of the chip. Problems arise.

In addition, in order to ensure contact between the electrode pads of the chip, as shown in Figs. 5A and 5B, the recesses 32 and 35 or the convex portions at the tip ends 30 and 33 of the probe. What formed the part 31, 34 is used (for example, refer patent document 4).

However, such a cleaning of the tip portion of the probe is not sufficient to remove foreign matter adhering to the recessed portion of the tip even when using the conventional probe cleaner as described above, and wears the convex portion of the probe tip during cleaning. Is happening.

[Patent Document 1] Japanese Patent Application Laid-Open No. 7-244074

[Patent Document 2] Japanese Patent Application Laid-Open No. 2004-140013

[Patent Document 3] Japanese Patent Publication No. 2005-515645

[Patent Document 4] Japanese Patent Application Laid-Open No. 8-306749

Accordingly, an object of the present invention is to provide a probe cleaner capable of cleaning a tip portion of a probe without easily wearing the probe during cleaning, and in particular, a tip portion of a probe having a recess or a convex portion formed at the tip portion thereof. It is an object of the present invention to provide a probe cleaner capable of cleaning a part.

The present invention is a probe cleaner and a cleaning method for removing foreign matter adhering to a tip end portion of a probe, and is particularly suitable for removing foreign matter adhering to a tip end portion of a probe in which a recess or a convex part is formed at the tip end. Cleaner and cleaning method.

<Probe cleaner>

The probe cleaner of this invention which achieves the said objective consists of a cleaner sheet which has a surface part which consists of microfibers, and an abrasive grain is fixed to the surface of the microfiber located in at least the surface part of this cleaner sheet.

During the cleaning, the abrasive grains fixed to the microfibers located on the surface portion of the cleaner sheet act on the tip portion of the probe to remove foreign substances adhering to the tip portion of the probe.

The fiber diameter of the microfibers is in the range of 0.1 m or more and 20 m or less, preferably in the range of 0.1 m or more and 10 m or less.

The average particle diameter of the abrasive grains fixed to the surface of the microfiber is in the range of 0.05 µm or more and 3.0 µm or less, and the particles include particles made of alumina, silicon carbide, silicon oxide, zirconia, aluminum hydroxide or diamond.

The above-mentioned cleaner sheet is a woolen sheet which consists of microfibers implanted on the surface of a base sheet, and said abrasive grain is being fixed to the surface of the microfiber of this woolen sheet. And the microfibers which fixed the abrasive grain on the surface are in the state which is not stuck. That is, one by one of the microfibers fixing the abrasive grains is in a state capable of freely moving independently of the different microfibers.

Alternatively, the above-mentioned cleaner sheet is a woven or nonwoven sheet made of microfibers, and the abrasive grains are fixed to the surface of the microfibers of the cleaner sheet.

<Probe cleaning method>

The foreign matter adhering to the tip portion of the probe is provided with the probe cleaner of the present invention on the surface of the table, the tip portion of the probe is inserted into the surface portion of the cleaner sheet, and the probe is placed in the thickness direction of the surface portion of the cleaner sheet. It is removed by reciprocating.

The tip portion of the probe may be pierced inside the surface portion of the cleaner sheet, and then extracted from this surface portion, or the probe may be reciprocated in the thickness direction of the surface portion of the cleaner sheet as it is stuck inside the surface portion of the cleaner sheet. You may have to.

Since the present invention is constituted as described above, even a probe having a concave portion or a convex portion formed at the tip portion has an effect that the tip portion portion of the probe can be cleaned without easily wearing the probe during cleaning.

In the above embodiment, the probe cleaner and the cleaning method of the tip portion of the needle (probe) for the electrical property inspection have been disclosed, but the present invention is not only for the probe, but also for the manufacturing process of needle-shaped objects such as a medical needle, a sewing needle, and the like. It can also be used to remove foreign matter adhering to the tip portion before or after finishing the tip portion or using the needle-shaped material.

<Probe cleaner>

As shown in Figs. 1A and 1B, the probe cleaner 20 of the present invention for removing foreign matter adhering to the tip portion of the probe (indicated by reference numeral 12 in Fig. 2) is The abrasive grain 26 consists of the cleaner sheet 21 which has the surface part 24 which consists of the microfibers 25, and is located in the surface of the microfiber 25 located in at least the surface part 24 among these cleaner sheets 21. ) Is fixed.

As shown in FIG. 1B, the abrasive grains 26 are fixed to the surface of the microfiber 25 by the binder 27.

The surface portion 24 refers to a portion that acts on the tip portion of the probe 12 (see Figs. 2A and 2B). The thickness (or height) of the surface portion 24 is not particularly limited, and may be at least as long as the length of the tip portion of the probe 12 to be cleaned, and is in the range of 100 µm or more and 1000 µm, and FIG. 2. As shown in (a) and (b) of FIG. 2, the cleaning of the tip portion (the side of the tip and the vicinity of the tip portion) of the probe 12 is performed by removing the tip portion of the probe 12 from the surface portion of the cleaner sheet 21. Insert into table 24 (move table 11 in the direction of arrow T2, or move probe 12 in the direction of arrow T1), draw (move table 11 in the direction of arrow T1). Or move the probe 12 in the direction of an arrow T2]. During this cleaning, the abrasive grains 26 fixed to the microfiber 25 located on the surface portion 24 of the cleaner sheet 21 act on the tip portion of the probe 12, and the tip portion of the probe 12 Foreign matter attached to the part is removed.

The fiber diameter of the microfiber 25 is 0.1 micrometer or more and 20 micrometers or less, Preferably it is 0.1 micrometer or more and 10 micrometers or less.

As the microfiber 25, synthetic fibers made of nylon, polypropylene, polyethylene, polyethylene terephthalate, polyurethane, acrylic, polyvinyl chloride, vinylon, rayon, or the like are used.

The size of the abrasive grains 26 fixed to the surface of the microfiber 25 is preferably smaller than the fiber diameter of the microfiber 25 and is in the range of 1/2 or less of the fiber diameter. This means that when the size of the abrasive grains 26 is large, the fixing force of the abrasive grains on the surface (curved surface) of the fiber is reduced, and the abrasive grains 26 acting on the tip portion of the probe 12 during cleaning are separated from the microfiber 25 ( Iii) The detached abrasive grains may adhere to the tip portion of the probe 12 as foreign matter. Preferably, as the abrasive grains 26, those having an average particle diameter in the range of 0.05 µm or more and 3.0 µm or less are used.

The material of the abrasive grains 26 is not specifically limited, The abrasive grain generally used for grinding | polishing can be used, The particle | grains which consist of alumina, silicon carbide, silicon oxide, zirconia, aluminum hydroxide, or diamond are used suitably.

3 and 4, the cleaner sheet 21 is a woolen sheet composed of microfibers 25 implanted on the surface of the base sheet 28, and on the surface of the microfibers 25 of the woolen sheet. The abrasive grain 26 mentioned above is being fixed. And the microfibers 25 which fixed the abrasive grains 26 on the surface are in the state which is not stuck.

That is, each of the microfibers 25 fixing the abrasive grains 26 is in a state capable of freely moving independently of the different microfibers 25.

The length of the microfiber 25 of the woolen sheet is in the range of 100 µm or more and 1000 µm (1.0 mm), preferably in the range of 400 µm or more and 600 µm or less. This means that the shorter the length, the lower the movement of the fibers, and if the length is too long, each of the microfibers 25 cannot be separated one by one, and the fibers are entangled with each other, and the abrasive grains 26 are individually attached to each of the microfibers 25. Because it becomes difficult.

As the base sheet 28, it is preferable that the thermal deformation by temperature change is small, and as a mechanical property, the sheet | seat in the range of 2% or less in the range of 25 degreeC or more and 150 degrees C or less is used. The size and material of the base sheet 28 are not particularly limited, and the thickness is in the range of 50 µm or more and 188 µm or less, and as the base sheet, PET (polyethylene terephthalate), PEN (polyethylene naphthalate), and PPS ( Polyphenylene sulfide), PEI (polyetherimide), PI (polyimide), PC (polycarbonate), PVC (polyvinyl chloride), PP (polypropylene), PVDC (polyvinylidene chloride), nylon, PE A sheet made of (polyethylene) or PES (polyether sulfone) or the like is used, and a PET sheet is suitably used.

Practically, an adhesive layer (indicated by reference numeral 22 in Fig. 1A) is formed on the back surface of the base sheet 28, and a release paper [indicated by Fig. 1A on the surface of the adhesive layer 22). Denoted by 23] is detachably bonded. The release paper 23 is peeled off from the surface of the pressure-sensitive adhesive layer 22, and the probe cleaner 20 of the present invention is probe-cleaned as shown in Fig. 2C through the pressure-sensitive adhesive layer 22. Glued onto the table 11 of the device 10.

Alternatively, as the cleaner sheet 21 of the probe cleaner 20 of the present invention, a woven or nonwoven sheet made of the microfiber 25 described above can be used, and at least the surface portion 24 of the cleaner sheet 21 is provided. The above abrasive grains 26 are fixed to the surface of the microfibers 25 located in Fig. 1 (see Fig. 1B).

This cleaner sheet 21 may form the adhesive layer 22 on the back surface, and may adhere to the table 11 of the cleaning apparatus 10 via this adhesive layer 22, and this cleaner sheet 21 may be Is fixed to the surface of a base sheet (not shown), and an adhesive layer (an adhesive layer as indicated by reference numeral 22 in Fig. 1 (a)) is formed on the back surface of the base sheet, and the cleaning apparatus is formed through the adhesive layer. You may adhere on the table 11 of (10).

As this base sheet, it is preferable that the thermal deformation according to a temperature change is small similarly to the above-mentioned woolen sheet, and the sheet | seat which has said thermal contraction rate is used as a mechanical characteristic. Similarly to the above-mentioned woolen sheet, the size and material of the base sheet are not particularly limited, the thickness is in the range of 50 µm or more and 188 µm or less, and the sheet is made of synthetic resin such as polypropylene and polyethylene as the base sheet. Is used.

Practically, release paper (release paper as indicated by reference numeral 23 in Fig. 1A) is detachably attached to the surface of the pressure-sensitive adhesive layer formed on the back surface of the base sheet. The release paper is peeled off from the surface of the pressure-sensitive adhesive layer, and the probe cleaner 20 of the present invention is similar to the above-described woolen sheet, and through this pressure-sensitive adhesive layer, as shown in FIG. It is bonded on the table 11.

<Manufacturing method>

The probe cleaner 20 of the present invention disperses the abrasive grains in the resin solution on the surface of the cleaner sheet 21, and applies a coating material to which a curing agent is added using known coating methods such as reverse coating and gravure coating. It is prepared by drying.

The resin solution is obtained by dissolving one or more resins selected from polyester resins, polyurethane resins, copolymer vinyl resins, epoxy resins, phenol resins, and the like with a solvent. Toluene, xylene, MEK (methyl ethyl ketone), ethyl acetate, cyclohexanone, acetone, alcohol, etc. are contained as a solvent. As a hardening | curing agent, an isocyanate type is contained.

The viscosity of the paint is in the range of 20 cp or more and 300 cp or less, preferably in the range of 50 cp or more and 150 cp or less.

If the viscosity of the paint is too low (range less than 20 cp), the paint falls to the lower layer side of the surface portion of the cleaner sheet and is sufficient for the surface of the microfiber 25 located at the surface portion 24 of the cleaner sheet 21. The positive abrasive grains 26 are not fixed, and during the cleaning, the abrasive grains cannot be sufficiently applied to the tip portion of the probe. On the other hand, if the viscosity of the paint is too high (greater than 300 cps), the paint stagnates on the upper layer of the surface portion 24 of the cleaner sheet 21, and the resin (binder is applied to the surface portion 24 of the cleaner sheet 21). (27)], the layer in which the abrasive grains 26 are fixed is formed to fix adjacent microfibers 25 to each other, and this layer causes the tip portion of the probe 12 to wear out.

The blending ratio of the abrasive grains 26 in the paint is in the range of 60% by weight or more, preferably 80% by weight or more and 98% by weight or less. This is because when the ratio of the abrasive grains 26 is too small (less than 60% by weight), adjacent microfibers 25 are bonded to each other to form the above layers.

The composition of the paint is shown in Table 1 below.

Table 1

The composition of the paint

Abrasive 60 wt% to 98 wt% Resin solvent 1 wt% to 35 wt% Hardener 1 wt% to 5 wt%

Suitably, as a paint, after heating and drying the abrasive grain which consists of 60 weight%-98 weight% of silicon carbide, 1 weight%-35weight% of saturated polyester resin are made of toluene, xylene, ethyl acetate, and MEK. After mixing with the resin solution dissolved in the mixed solvent, stirring to disperse the abrasive grains in the resin solution, 1% by weight to 5% by weight of isocyanate-based curing agent is added immediately before filtration and coating on the cleaner sheet, and the viscosity of the paint Is adjusted to 30 cp to 150 cp.

<Probe cleaning method>

As shown in Fig. 2C, the probe cleaner 20 of the present invention is adhered to the surface of the table 11 through an adhesive layer (indicated by reference numeral 22 in Fig. 1A). As shown in Figs. 2A-2C, the tip portion of the probe 12 is disposed on the surface of the cleaner sheet 21, and the table 11 is placed in the direction of the arrow T2. The tip portion of the probe 12 is inserted into the surface portion 24 of the cleaner sheet 21. Then, the tip end portion of the probe 12 is inserted into the surface portion 24 of the cleaner sheet 21 and then drawn out (the table 11 is moved in the direction of the arrow T1). By the reciprocating movement of the direction of arrow T1, T2, the foreign material adhering to the front-end | tip part of the probe 12 is removed from the surface part.

<Cleaning examination>

The probe cleaners of Examples and Comparative Examples were prepared and cleaning tests of the tip portion of the probe having the uneven portion at the tip portion were performed using these probe cleaners. After the cleaning, the removal rate of foreign matters from the concave and convex portions of the tip of the probe and the presence or absence of wear of these concave and convex portions were compared. The foreign material removal rate and the presence or absence of the wear of these recessed parts and convex parts were observed using the microscope.

In the cleaning test, two types of probes having a tip portion as shown in Figs. 5A and 5B, respectively, were used. Hereinafter, these probes are called "test probe (A)" and "test probe (B)."

The test probe A corresponds to the one having the shape of the tip portion shown in Fig. 5A, and the uneven portion (the size of the bottom surface: about 90 µm × about 90 µm, the height: about 70 µm, Concave part diameter: about 50 micrometers, concave part depth: about 70 micrometers) (In this "test probe A", the outer ring part which forms a recess part becomes a convex part.).

The test probe B corresponds to the one having the shape of the tip portion shown in Fig. 5B, and the uneven portion (bottom surface: about 30 μm × about 30 μm, height: about 100 μm) is applied to the tip portion. It has two or more (in this "test probe B", the valley between a convex part and a convex part becomes a recessed part).

The cleaning test was performed using a cleaning device as shown in Fig. 2C. The cleaning conditions were the same in each of the examples and the comparative examples, and the number of times the test probes A and B contacted the surface portion of the cleaner sheet of the probe cleaner of each of the examples and the comparative examples became 1000, 10,000 and 100,000 times. At the time point, the presence or absence of wear and tear of the uneven portion of the tip of the probe was observed, and the presence or absence of foreign matter adhering to the uneven portion of the distal end of the probe was observed when the number of contacts reached 100,000 times.

<First Embodiment>

The probe cleaner of the first example was prepared.

The paint was heated with an average particle diameter of 0.05 µm (1 kg) made of silicon carbide, dried, and then mixed with a resin solution dissolved in a mixed solvent of toluene, xylene, ethyl acetate, and MEK in saturated polyester resin (310 g). After stirring and dispersing the abrasive grains in the resin solution, an isocyanate-based curing agent (60 g) was added and adjusted immediately before filtration was applied onto the cleaner sheet. The viscosity of the paint was 50 cps.

This paint was applied to the surface of each of the microfibers in the surface portion of the woolen sheet, and dried to prepare a probe cleaner of the first embodiment.

Here, coating was performed using # 50 gravure roller (the linear groove | channel of the equal interval which forms 45 degree | times is formed).

As the woolen sheet, one obtained by implanting microfibers made of nylon having an average fiber diameter of 10 μm and an average length of 500 μm (500 μm ± 100 μm) to a PET sheet having a thickness of 50 μm was used.

Second Embodiment

The probe cleaner of Example 2 was prepared. The probe cleaner of Example 2 was manufactured by the same material and method as Example 1 except having changed the average particle diameter of the abrasive grain into 0.3 micrometer.

Third Embodiment

The probe cleaner of the third example was prepared. The probe cleaner of the third example was manufactured by the same materials and methods as those of the first example except that the average particle diameter of the abrasive grains was changed to 3 m.

Fourth Example

The probe cleaner of Example 4 was prepared. The probe cleaner of Example 4 was manufactured by the same materials and methods as those of Example 1, except that microfibers having an average fiber diameter of 0.1 µm were used as the woolen sheets.

Fifth Embodiment

The probe cleaner of Example 5 was prepared. The probe cleaner of Example 5 was manufactured by the same materials and methods as those of Example 1, except that microfibers having an average fiber diameter of 3 µm were used as the woolen sheets.

Sixth Example

The probe cleaner of Example 6 was prepared. The probe cleaner of Example 6 was manufactured by the same materials and methods as those of Example 1 except that microfibers having an average fiber diameter of 20 µm were used as the woolen sheets.

Seventh Example

The probe cleaner of Example 7 was prepared. The probe cleaner of Example 7 was manufactured by the same materials and methods as those of Example 1 except that alumina was used as the abrasive grain.

Eighth Embodiment

The probe cleaner of Example 8 was prepared. The probe cleaner of Example 8 was manufactured by the same materials and methods as those of Example 1 except that diamond was used as the abrasive grain.

<First Comparative Example>

The probe cleaner of the first comparative example was prepared. The probe cleaner of the first comparative example was manufactured by the same materials and methods as those of the first example except that the average particle diameter of the abrasive grains was changed to 5 µm.

<2nd comparative example>

The probe cleaner of the second comparative example was prepared.

The paint of the third embodiment [1 kg of abrasive grains having an average particle diameter of 3 µm of silicon carbide] was heated and dried, and then saturated polyester resin (310 g) was dissolved in a mixed solvent of toluene, xylene, ethyl acetate, and MEK. The mixture was mixed with the resin solution, stirred to disperse the abrasive grains in the resin solution, and was prepared by adding and adjusting an isocyanate-based curing agent (60 g) immediately before filtration and coating on the cleaner sheet. The viscosity of the paint was 50 cp. ] Was applied to the surface of a PET film using the # 50 gravure roller (the 45-degree equally spaced linear groove | channel is formed), and it dried and manufactured the probe cleaner of the 2nd comparative example.

Third Comparative Example

The probe cleaner of the third comparative example was prepared.

The paint of Example 3 was applied to the surface of the foam film using a # 50 gravure roller (with a 45-degree equally spaced straight groove formed) and dried to prepare a probe cleaner of Comparative Example 3. It was.

<Constituent material of probe cleaner>

The constituent materials of the probe cleaners of the first to eighth examples and the first to third comparative examples are summarized in Table 2 below.

[Table 2]

Probe Cleaner Materials

Sheet Abrasive Kinds Fiber diameter (μm) material Average particle size (㎛) First embodiment Planting sheet 10 Silicon Carbide 0.05 Second embodiment Planting sheet 10 Silicon Carbide 0.3 Third embodiment Planting sheet 10 Silicon Carbide 3 Fourth embodiment Planting sheet 0.1 Silicon Carbide 0.05 Fifth Embodiment Planting sheet 3 Silicon Carbide 0.05 Sixth embodiment Planting sheet 20 Silicon Carbide 0.05 Seventh embodiment Planting sheet 10 Alumina 0.3 Eighth embodiment Planting sheet 10 Diamond 0.3 Comparative Example 1 Planting sheet 10 Silicon Carbide 5 2nd comparative example PET film - Silicon Carbide 3 Third Comparative Example Foam film - Silicon Carbide 3

<Test result>

The test results are shown in Table 3 below.

Table 3

Test result

Test Probe (A) Test probe (B) Debris Removal Rate Abrasion wear Debris Removal Rate Abrasion wear First embodiment △ ◎ △ ◎ Second embodiment ○ ○ ○ ○ Third embodiment ◎ △ ◎ △ Fourth embodiment ○ ◎ ○ ◎ Fifth Embodiment ◎ ◎ ◎ ◎ Sixth embodiment ○ ◎ ○ ◎ Seventh embodiment △ ◎ △ ◎ Eighth embodiment △ ◎ △ ◎ 9th Example ◎ △ ◎ △ Comparative Example 1 ◎ × ◎ × 2nd comparative example × ◎ × × Third Comparative Example × ○ × ×

Foreign body removal rate of concave: ◎ 95% or more

                       ○ 80-95%

                       △ 60 to 80%

                       × 60% or less

Abrasion Wear: ◎ No wear at 100,000 contacts

                        ○ You can see abrasion at 100,000 contacts.

                        △ Wear can be seen at 10,000 contacts

                        × 1000 contacts can see wear

From the results of the first to third examples and the first comparative example, the concave foreign matter removal rate decreases when the grain size of the abrasive grains decreases, and becomes 60 to 80% in an average particle diameter of 0.05 µ (first embodiment). On the other hand, the wear amount of the concave portion (and the convex portion) decreases as the grain size of the abrasive grains increases, so that wear can be seen at 10,000 contacts at an average particle diameter of 0.05 µ (third example), and the average particle diameter is 5 µm (first comparison). For example, wear can be seen at 1000 contacts.

From the results of the second, seventh and eighth examples, even if the type of abrasive grain is changed, there is no significant difference in the concave foreign matter removal rate and the concave (and convex) wear amount, and it can be seen that it is better than the result of any comparative example.

From the results of the first and fourth to sixth examples, the concave foreign matter removal rate decreases as the fiber diameter decreases, and becomes 80 to 95% in the fiber diameter of 0.1 m (first embodiment), and the fiber diameter is 10 m. If it exceeds 20 μm, wear can be seen at 10,000 contacts. On the other hand, the amount of concave (and convex) wear does not greatly depend on the fiber diameter, and wear is not seen even in 100,000 contacts in the range of the fiber diameter of 0.1 m to 20 m.

In view of the above, it is understood that it is appropriate to use a microfiber having a fiber diameter of 0.1 µm to 20 µm and use an average grain size of 0.05 µm to 3 µm as the abrasive grains fixed to the microfibers in the hair transplantation of the woolen sheet. have.

In addition, from the results shown in Table 3, the probe cleaners of the first to ninth embodiments showed that the foreign matter removal rate of the concave portions was better than that of the first to third comparative examples, and the wear amount of the concave portions and the convex portions was also lower. have.

Figure 1 (a) is a cross-sectional view of the probe cleaner of the present invention, Figure 1 (b) is a partially enlarged cross-sectional view of Figure 1 (a).

2 (a) and 2 (b) respectively show cleaning of the probe, and FIG. 2 (c) shows a cleaning apparatus.

3 is a micrograph of a cross section of a probe cleaner according to the present invention.

4 is a cross-sectional view of a suitable probe cleaner in accordance with the present invention.

5 (a) and 5 (b) are enlarged perspective views of the tip portion of the probe, respectively.

<Explanation of symbols for the main parts of the drawings>

10: probe cleaning device

11: table

12: Probe

20: probe cleaner

21: Cleaner Sheet

22: adhesive layer

23: release paper

24: surface part

25: microfiber

26: abrasive

27: binder

28: base sheet

30, 33: tip of the probe

31, 34: convex

32, 35: recess

T1, T2: direction of movement

Claims (12)

Probe cleaner to remove foreign matter attached to the tip of the probe, A probe cleaner comprising a cleaner sheet having a surface portion made of microfibers, wherein the probe cleaner comprises a cleaner sheet having abrasive grains fixed to a surface of a microfiber positioned at least on the surface portion. The probe cleaner according to claim 1, wherein the fiber diameter of the microfiber is in the range of 0.1 µm or more and 20 µm or less. The probe cleaner of claim 1, wherein a fiber diameter of the microfiber is in a range of 0.1 µm or more and 10 µm or less. The probe cleaner according to claim 1, wherein an average particle diameter of the abrasive grain is in a range of 0.05 µm or more and 3.0 µm or less. The probe cleaner of claim 1, wherein the abrasive contains particles made of alumina, silicon carbide, silicon oxide, zirconia, aluminum hydroxide, or diamond. The woolen sheet according to claim 1, wherein the cleaner sheet is a woolen sheet formed of the microfibers implanted on a surface of a base sheet The abrasive is fixed to the surface of the microfiber of the woolen sheet, The probe cleaner in the state in which the said microfibers which fixed the said abrasive grain to the surface are not stuck. The probe cleaner of claim 1, wherein the cleaner sheet is a woven or nonwoven sheet made of the microfibers. The probe cleaner of claim 1, wherein the probe has a concave portion or a convex portion at a distal end portion. It is a method for removing the foreign matter attached to the tip portion of the probe, A process for installing a probe cleaner on the surface of a table, wherein the probe cleaner is a cleaner sheet having a surface portion made of microfibers, and at least a process made of a cleaner sheet in which abrasive grains are fixed to a surface of a microfiber positioned at the surface portion. and, And inserting the tip portion of the probe into the interior of the surface portion, and reciprocating the probe in the thickness direction of the surface portion. The method of claim 9, wherein the step of reciprocating includes the step of extracting from the surface portion after inserting the tip portion of the probe into the surface portion. 10. The method of claim 9, wherein the step of reciprocating includes the step of reciprocating the probe in the thickness direction of the surface portion, while the tip portion of the probe is inserted into the interior of the surface portion. 10. The method of claim 9, wherein the probe has a recess or a convex portion at the tip portion.

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