CN114353618A - PVD process cavity assembly auxiliary calibration jig and method - Google Patents
PVD process cavity assembly auxiliary calibration jig and method Download PDFInfo
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- CN114353618A CN114353618A CN202210279659.XA CN202210279659A CN114353618A CN 114353618 A CN114353618 A CN 114353618A CN 202210279659 A CN202210279659 A CN 202210279659A CN 114353618 A CN114353618 A CN 114353618A
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Abstract
The invention provides an auxiliary calibration jig and method for assembling a PVD (physical vapor deposition) process chamber. The jig comprises a calibration rod tip and at least three groups of calibration modules, the diameter of the calibration rod tip is consistent with the aperture of a calibration rod hole arranged in the center of the jig, in the using process, the at least three groups of calibration modules are mutually contacted, and the calibration rod tip passes through the calibration rod hole and can be inserted into a circle center positioning hole of a module to be calibrated, which is positioned below the jig; the calibration module comprises a supporting part, a calibration structure and a fixing structure, the calibration structure is connected with the supporting part and can move on the supporting part along the horizontal direction, the fixing structure is connected with one end of the supporting part, the calibration structure comprises a lifting rod, and the lifting rod penetrates through the supporting part and can lift vertically. The invention can be used for calibrating the mould. In the installation of piece, supplementary calibration level degree ensures that installation and calibration are accomplished in step, and can realize accurate location in center, helps improving the processing procedure technology yield of cavity, and convenient to use helps improving calibration efficiency.
Description
Technical Field
The invention relates to the field of semiconductor equipment, in particular to an auxiliary calibration jig and method for assembling a PVD (physical vapor deposition) process cavity.
Background
The magnet assembly on the Physical Vapor Deposition (PVD) equipment is an important module for forming a sputtering magnetic field and controlling the sputtering direction of target particles, the magnetic field effect is different due to different parameters such as shape, size and magnetism of the magnet assembly, the various types of magnet assemblies on the market are numerous, and the magnetic field formed by the spiral magnet assembly 5 (shown in fig. 1) through the special structural design can enable the sputtering particles to be distributed more uniformly, the effect of depositing a film is better, and the PVD magnetic field is widely used by various equipment manufacturers. The helical magnet assembly 5 is mounted in a position that is relatively parallel to the wafer pedestal 4 (as shown in fig. 2), and thus one of the tasks that must be performed during the mounting process is to adjust the parallelism (leveling) of the helical magnet assembly to the wafer pedestal.
In the prior art, a leveling method usually adopted by those skilled in the art is to use an aluminum strip tiled on a target mounting surface as a leveling reference, select three non-coincident points on a spiral magnet assembly, measure the vertical distance from the selected point to the aluminum strip by using a magnet adsorption caliper, and make the vertical distances measured by the three points completely the same by fine-adjusting the inclination angle of the spiral magnet assembly, thereby indicating that the leveling is completed. The method has the following problems: in the process of measuring the vertical distance by adopting the magnet adsorption caliper, the surface of the spiral magnet assembly is easily scratched; when the aluminum strip is matched with the caliper for measurement, whether the contact surface of the caliper and the aluminum strip is vertical or not needs to be continuously confirmed, the operation mode is very troublesome, the accuracy is not high enough, the efficiency is low, and the actual operation is very inconvenient due to the need of multi-point measurement data; a certain operation error exists in the leveling result, so that a certain included angle is still formed between the wafer base and the spiral magnet assembly instead of being parallel after leveling.
The wafer pedestal mounting within the chamber also requires leveling and centering. The original method is that a wafer base is installed after a spiral magnet assembly is installed and adjusted in place, the levelness of the wafer base is measured by a GAP Gauge (GAP) which is used for assisting a feeler gauge and fine adjustment is carried out until the wafer base is relatively parallel to the spiral magnet assembly, then the wafer base is fixedly installed, and the fine adjustment mode is that the clearance in four directions of the wafer base is measured by the feeler gauge by taking the spiral magnet assembly as a reference. The method has the following problems: the use of the feeler gauge can generate friction, and particles generated by the friction can pollute the process; the wafer base can not be centered when being installed, the installation screw needs to be adjusted repeatedly, and the process effect is influenced by the misalignment of the center.
Disclosure of Invention
In view of the above drawbacks of the prior art, an object of the present invention is to provide a calibration jig and a calibration method for assembling a PVD process chamber, which are used to solve the problems in the prior art that the spiral magnet assembly is easily scratched, the accuracy is low, and the efficiency is low, and/or the method of using a gap gauge to measure the levelness of the wafer pedestal by using a clearance gauge as an auxiliary filler gauge is easily cause particle contamination, and the measurement is also inaccurate.
In order to achieve the above and other related objects, the present invention provides an auxiliary calibration jig for PVD process chamber assembly, comprising a calibration rod tip and at least three calibration modules, wherein the diameter of the calibration rod tip is consistent with the aperture of a calibration rod hole arranged at the center of the jig, in the using process, the at least three calibration modules contact with each other, and the calibration rod tip passes through the calibration rod hole and can be inserted into a circle center positioning hole of a module to be calibrated located below the jig; the calibration module comprises a supporting part, a calibration structure and a fixed structure, the calibration structure is connected with the supporting part and can move on the supporting part along the horizontal direction, and the fixed structure is connected with one end of the supporting part, which is far away from the calibration rod hole; the calibration structure comprises a lifting rod, a translation block and a positioning block, the lifting rod penetrates through the supporting part and can be lifted in the longitudinal direction, the translation block is arranged on the supporting part and is connected with the supporting part in a sliding mode and can move in the horizontal direction to adjust the position of the calibration structure, the lifting rod penetrates through the translation block up and down and is movably connected with the translation block through threads, and the positioning block is located on the lifting rod and is fixedly connected with the lifting rod; the supporting part comprises a supporting main body, a moving groove and a reserved operation opening, wherein the moving groove and the reserved operation opening are positioned on the supporting main body; the shifting chute does the calibration structure provides the space that horizontal direction and vertical direction removed, it is located to reserve the operation mouth the supporting part is kept away from the one end that central point put, and is located the top of fixed knot structure's movable block fastener, through reserve the operation mouth right fixed knot structure's movable block carries out the fixed operation, be provided with assembly breach and breach supplementary piece on the shifting chute, the assembly breach does link up on the shifting chute extremely the marginal reservation assembly space of supporting part, the size with the breach supplyes the piece unanimity, set up on the breach supplyes the piece with the movable chute that the shifting chute corresponds, the movable chute with assembly breach size is unanimous, the movable chute with the horizontal migration space of calibration structure is constituteed jointly to the movable chute.
Optionally, the material of the calibration rod tip includes any one of metal and ceramic, and a positioning mark scale is arranged on the calibration rod tip for marking an insertion position of the calibration rod tip.
Optionally, the fixing structure further comprises a threaded rod and a lifting block, the threaded rod penetrates through the supporting part and extends downwards to be in threaded connection with the lifting block below the supporting part, and the lifting block can be driven to move up and down by rotating the threaded rod; the movable block is positioned on the lifting block and fixedly connected with the lifting block, and a space for stretching and moving in the horizontal direction is reserved on the movable block.
Optionally, the fixed knot constructs still includes the lift rail, the lift rail set up in the lift piece with the intermediate position on supporting part top, and with supporting part fixed connection, the lift piece cover is located on the lift rail, and can follow the lift rail reciprocates.
Optionally, the support part is further provided with a first scale on the surface of the support body for measuring the moving distance of the calibration structure in the horizontal direction.
Optionally, a sliding member may be further disposed on the translation block, and the sliding member is located inside the translation block and movably connected to the translation block, so as to ensure that the translation block moves smoothly in the moving slot.
Optionally, the positioning block includes a fixing portion and an extending portion, one end of the fixing portion is fixedly connected to the translation block, the other end of the fixing portion is fixedly connected to the extending portion, and the extending portion is located in the moving groove and penetrates through the moving groove, and is located on one side of the translation block away from the center of the jig.
Optionally, the bottom of the lifting rod is provided with a non-magnetic flexible abutting contact, and the upper part of the lifting rod is provided with a rotating handle.
Optionally, the jig further comprises an auxiliary support structure stretching over the calibration rod hole, an auxiliary positioning hole is formed in the auxiliary support structure, the size of the auxiliary positioning hole is consistent with that of the calibration rod hole and is located on the same vertical line, and when the jig is used, the calibration rod tip sequentially penetrates through the auxiliary positioning hole and the calibration rod hole.
Optionally, the module to be calibrated includes any one of a wafer pedestal and a screw-type magnet assembly.
The invention also provides an auxiliary calibration method for assembling the PVD process chamber, which is carried out by using the auxiliary calibration jig for assembling the PVD process chamber in any scheme.
As mentioned above, the PVD process chamber assembly auxiliary calibration jig and the method of the invention have the following beneficial effects: the improved structural design of the invention can assist the calibration horizontal degree in the installation process of the module to be calibrated, ensure the synchronous completion of installation and calibration, realize accurate center positioning, contribute to improving the process yield of the cavity, and is convenient to use and beneficial to improving the calibration efficiency.
Drawings
FIG. 1 is a schematic diagram of a spiral magnet assembly in a PVD process chamber.
FIG. 2 is a schematic diagram of a wafer pedestal within a PVD process chamber.
Fig. 3 is a schematic structural view of an auxiliary calibration jig for PVD process chamber assembly according to the present invention.
FIG. 4 is a partially enlarged view of an auxiliary calibration fixture for assembling a PVD process chamber according to the invention.
Fig. 5 is a schematic view illustrating the PVD process chamber with the auxiliary calibration jig installed therein according to the present invention.
FIG. 6 is a schematic view of a wafer pedestal calibrated by the auxiliary calibration jig for PVD process chamber assembly according to the present invention.
Fig. 7 is a schematic view illustrating the spiral magnet assembly being calibrated by the auxiliary calibrating jig for PVD process chamber assembly according to the present invention.
Description of the element reference numerals
1-calibrating the rod tip; 2-a calibration module; 21-a support part; 211-a support body; 212-moving slot; 213-a first scale; 214-reserved operation port; 215-gap supplement block; 22-a calibration structure; 221-a lifting rod; 222-a translation block; 223-positioning blocks; 2231-a fixed part; 2232-an extension; 224-abutting contacts; 225-rotating handle; 23-a fixed structure; 231-a threaded rod; 232-lifting block; 233-movable block; 24-an auxiliary support structure; 3-calibrating the rod hole; 4-a wafer pedestal; 5-a helical magnet assembly; 61-cavity opening; 62-edge of the cavity opening.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. As in the detailed description of the embodiments of the present invention, the cross-sectional views illustrating the device structures are not partially enlarged in general scale for convenience of illustration, and the schematic views are only examples, which should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.
For convenience in description, spatial relational terms such as "below," "beneath," "below," "under," "over," "upper," and the like may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that these terms of spatial relationship are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the figures. Further, when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present.
In the context of this application, a structure described as having a first feature "on" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed in between the first and second features, such that the first and second features may not be in direct contact.
It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated. In order to keep the drawings as concise as possible, not all features of a single figure may be labeled in their entirety.
Please refer to fig. 3 to 7.
As shown in fig. 3 and 4, the invention provides an auxiliary calibration jig for PVD process chamber assembly, which includes a calibration rod tip 1 and at least three calibration modules 2, wherein the diameter of the calibration rod tip 1 is consistent with the aperture of a calibration rod hole 3 formed in the center of the jig, in the using process, the at least three calibration modules 2 are in contact with each other, for example, a plurality of calibration modules 2 may be an integral connection structure or a detachable combination structure, and are spliced together in use, and the plurality of calibration modules 2 are generally arranged in central symmetry, and the calibration rod hole 3 is located in the middle of the plurality of calibration modules 2, for example, 3 calibration modules 2 are provided, and the included angle between two adjacent calibration modules 2 is 120 °; or the calibration modules 2 are 4 groups, and two groups of calibration modules are positioned on the same straight line and are perpendicular to each other, in this specification, the calibration modules 2 are taken as 4 groups as an example; preferably, the calibration module 2 is a detachable structure, so that the calibration module is convenient to carry; the calibration rod tip 1 penetrates through the calibration rod hole 3 and can be inserted into a circle center positioning hole of a module to be calibrated, which is positioned below the jig (depending on whether the module to be calibrated has the circle center positioning hole, if so, the calibration rod tip 1 is inserted into the circle center positioning hole of the module to be calibrated, the aperture of the calibration rod hole 3 is consistent with that of the circle center positioning hole of the module to be calibrated, and if not, the calibration rod tip 1 abuts against the central surface of the module to be calibrated); the calibration module 2 comprises a support part 21, a calibration structure 22 and a fixing structure 23, wherein the calibration structure 22 is connected with the support part 21 and can move on the support part 21 along the horizontal direction, the fixing structure 23 is connected with one end of the support part 21 far away from the calibration rod hole 3, the calibration structure 22 comprises a lifting rod 221, and the lifting rod 221 penetrates through the support part 21 and can lift in the longitudinal direction; specifically, in an example, the support portion 21 includes a rod-shaped or columnar support main body 211 (the support main body 211 has a certain lateral extension), a moving groove 212 and a reserved operation opening 214, which are located on the support main body 211, and a first scale 213 located on the surface of the support main body 211 may be further provided, the moving groove 212 provides a space for the calibration structure 22 to move in the horizontal direction and the vertical direction, the first scale is used for accurately measuring the moving distance of the calibration structure 22 in the horizontal direction, and the scale accuracy thereof may be determined according to actual needs; the reserved operation opening 214 is located at one end of the support portion 21 away from the center position and above the fastener of the movable block 233 of the fixed structure 23, the movable block 233 of the fixed structure 23 is fixed through the reserved operation opening 214 (that is, the fixed structure 23 at least includes the movable block 233), the movable block 233 needs to be fixed after moving in place, and the reserved operation opening 214 is arranged above the fastener, so that the fastener is conveniently fixed; in a further example, the moving slot 212 is provided with an assembly notch (not shown) and a notch supplement block 215; the assembly gap is a reserved assembly space which is arranged on the movable groove 212 and penetrates to the edge of the supporting part 21, the size of the assembly gap is consistent with that of the gap supplement block 215, the gap supplement block 215 is fixed in the assembly gap, and the assembly gap is just filled; the arrangement of the assembly gap facilitates the installation of the calibration structure 22 into the moving slot 212; the gap supplement block 215 is provided with a movable groove corresponding to the movable groove 212, the size of the movable groove is consistent with that of the assembly gap, and the movable groove 212 together form a horizontal moving space of the calibration structure 22, so that the calibration structure 22 can freely move horizontally in the movable groove 212; the calibration structure 22 further comprises a translation block 222 and a positioning block 223, wherein the translation block 222 is disposed on the support portion 21 and is slidably connected with the support portion 21, and can move in the horizontal direction to adjust the position of the calibration structure 22; the lifting rod 221 vertically penetrates through the translation block 222 and is movably connected with the translation block 222 through threads (that is, the lifting rod 221 is provided with threads), a second scale can be further arranged on the lifting rod 221, the lifting distance can be judged through the number of the threads of the lifting rod 221, for example, the thread pitch is set to 0.5mm, and the downward extending length of the lifting rod 221 can be accurately controlled through the vertical movement of the lifting rod 221 and the scale value of the second scale; the positioning block 223 is located on the lifting rod 221 and fixedly connected with the lifting rod 221, and when the wafer base is installed and calibrated, the positioning block can assist in positioning the circle center of the wafer base, so that the calibration rod tip 1 can be inserted vertically, and the calibration efficiency of the circle center of the wafer base can be improved. The auxiliary calibration jig for assembling the PVD process chamber can be used for horizontal calibration and center position determination of a wafer base of the PVD process chamber and horizontal calibration of a spiral magnet assembly. During the use, will PVD process chamber assembly assists the calibration tool to be assembled the back and places in PVD process chamber, and each fixed knot constructs 23 card and locates the edge of PVD process chamber in order to fix, adjust each lifter 221 the same distance until with wait to calibrate the surface of module and offset and realize treating the leveling of calibrating the module, then pass calibration rod tip 1 from top to bottom calibrate pole hole 3 until to wait to calibrate the surface of module or insert to wait to calibrate the centre of a circle locating hole of module, wait to calibrate after the completion, treat that to calibrate the module and install fixedly. The improved structural design of the invention can assist the calibration horizontal degree in the installation process of the module to be calibrated, ensure the synchronous completion of installation and calibration, realize accurate center positioning, contribute to improving the process yield of the cavity, and is convenient to use and beneficial to improving the calibration efficiency.
The alignment rod tip 1 is preferably a hard and corrosion resistant material, such as, but not limited to, any one of metal and ceramic. In an example, a positioning mark scale is arranged on the calibration rod tip 1 for identifying an insertion position of the calibration rod tip 1, for example, for identifying whether the calibration rod tip 1 is inserted into a circle center positioning hole of a wafer pedestal, and the calibration rod tip 1 vertically penetrates through the calibration rod hole 3 until being inserted into the circle center positioning hole, so as to achieve calibration positioning of the center of the wafer pedestal.
As shown in fig. 4, in an example, the fixing structure 23 further includes a threaded rod 231 and a lifting block 232, the threaded rod 231 is a rod with a threaded surface, which can rotate but cannot move up and down directly, and which penetrates through the supporting portion 21 and extends downward to be in threaded connection with the lifting block 232 located below the supporting portion 21 (i.e. the surface of the lifting block 232 in contact with the threaded rod 231 is correspondingly provided with a matching threaded structure), and the lifting block 232 can be driven to move up and down by rotating the threaded rod 231; the movable block 233 is located on the lifting block 232 and is fixedly connected with the lifting block 232, a space for telescopic movement in the horizontal direction is reserved on the movable block 233, the movable block 233 can be movably adjusted before fixing, and after moving to a required position, the movable block 233 is fixed with the lifting block 232 through a fastener. The fixed structure 23 can conveniently extend into the edge of the cavity and be fixed by adjusting the telescopic state of the movable block 233, and the jig can conveniently extend into the cavity before being fixed by the movable block 233, so that the jig provided by the invention can be suitable for assembling and calibrating PVD process cavities with various specifications by the structural arrangement.
In a further example, a positioning groove is further disposed on the threaded rod 231, the positioning groove is located at a connection position of the lifting block 232 of the fixing structure 23 and the threaded rod 231, and is shaped as a circular groove (not shown) recessed inwards and arranged around the circumferential direction of the threaded rod 231, and the connection position has a corresponding protrusion extending into the positioning groove, so that the threaded rod 231 can rotate circumferentially but cannot move up and down. The threaded rod 231 can also be provided with a rotating handle (not shown), and the rotating handle is sleeved on the threaded rod 231 and fixedly connected with the threaded rod 231, so as to provide power for driving the threaded rod 231 to rotate, and the threaded rod 231 can be conveniently rotated.
In a further example, the fixing structure 23 further includes a lifting rail (not shown), the lifting rail is disposed at a middle position between the lifting block 232 and the top end of the supporting portion 21 and is fixedly connected to the supporting portion 21, the lifting block 232 is sleeved on the lifting rail and can move up and down along the lifting rail, and the number of the lifting rails is preferably more than 2. The lifting rail can make the lifting process of the lifting block 232 more stable.
In an example, a sliding member (not shown) may be further disposed on the translation block 222, and the sliding member is located inside the translation block 222 and movably connected to the translation block 222 for ensuring smooth movement of the translation block 222 in the movement slot 212.
In an example, the positioning block 223 includes a fixed portion 2231 and an extending portion 2232 (which may also be defined as a horizontal portion and a vertical portion, respectively), one end of the fixed portion 2231 is fixedly connected to the translation block 222, and the other end of the fixed portion 2232 is fixedly connected to the extending portion 2232, the extending portion 2232 is located in the moving slot 212 and penetrates through the moving slot 212, and is located on a side of the translation block 222 away from the center of the fixture, a circular hole is formed in the fixed portion 2231 for being fastened to the translation block 222 by a fastener to play a role in fixed connection, and the extending portion 2232 is connected to the fixed portion 2231, or directly connected to a side surface of the translation block 222, and may be used for calibrating and positioning a center of the wafer pedestal.
In an example, a non-magnetic flexible contact 224 is disposed at the bottom of the lifting rod 221, during the calibration operation, the flexible contact 224 abuts against the surface of the module to be calibrated, the flexible contact 224 is made of rubber, and is designed into a smooth spherical surface, which can prevent the surface of the module to be calibrated from being scratched, and a rotating handle 225 may be disposed at the upper portion of the lifting rod 221, for applying a force to the lifting rod 221 to rotate the lifting rod 221.
In an example, the jig further includes an auxiliary support structure 24 spanning over the calibration rod hole 3, for example, the auxiliary support structure 24 includes a horizontal portion and two vertical portions connected to opposite ends of the horizontal portion, and the other ends of the two vertical portions are respectively fixed to the surfaces of the support portions 21 of the two sets of calibration modules 2, the auxiliary support structure 24 is provided with an auxiliary positioning hole (for example, disposed on the horizontal portion), the size of the auxiliary positioning hole is the same as that of the calibration rod hole 3 and is located on the same vertical line, and when in use, the calibration rod pin 1 sequentially passes through the auxiliary positioning hole and the calibration rod hole 3. Through setting up auxiliary stay structure 24 not only helps further fixing calibration rod tip 1 prevents that calibration rod tip 1 from taking place to rock and taking place the friction with the surface of treating the calibration module in calibration process, and the supplementary locating hole through auxiliary stay structure 24 and the location of calibration rod hole 3 can further realize the self calibration to the tool simultaneously.
By way of example, the module to be calibrated includes any one of a wafer pedestal and a screw-type magnet assembly, but is not limited thereto, and other modules related to horizontal calibration and circle center positioning can be calibrated by using the jig provided by the invention.
In order to make the technical scheme and advantages of the present invention more prominent, the following describes an exemplary calibration operation process of the jig provided by the present invention with reference to the accompanying drawings.
Referring to fig. 5, the fixture is fixed above the PVD chamber as follows:
the lifting block 232 is controlled to descend by rotating the threaded rod 231, and the bayonet of the fixing structure 23 is opened as much as possible until the width of the bayonet is larger than the thickness of the edge of the opening above the cavity;
all the movable blocks 233 on the fixed structure 23 are contracted towards the center of the jig until the bayonets of all the fixed structures 23 of the jig can be placed in the cavity opening 61;
the handheld jig vertically extends the lower bayonet of each fixing structure 23 below the opening edge 62 of the cavity;
all the movable blocks 233 extend in the direction away from the center of the jig until all the movable blocks 233 extend into the lower side of the cavity opening edge 62;
all the movable blocks 233 are fixed with the corresponding lifting blocks 232 through fasteners;
the lifting block 232 is controlled to ascend by rotating the threaded rod 231, the fixed movable block 233 is driven to ascend together until the movable block 233 abuts against the lower side of the opening edge above the cavity, at the moment, the bayonet A formed by the fixed structure 23 completely clamps the opening edge 62 of the cavity, and the jig is also fixed on the opening edge 62 of the cavity.
Referring to fig. 6, after the fixture is fixed, the process of horizontal calibration and centering of the wafer pedestal is as follows:
rotating the lifting rod 221 to ascend to a position away from the wafer pedestal 4 by a certain distance;
lifting the wafer pedestal lifting platform to enable the height of the upper surface of the wafer pedestal 4 to be higher than the height of the bottommost end of the extension part 2232 of the positioning block 223;
the translation blocks 222 drive the positioning blocks 223 to move towards the central position, and the accurate positions of the translation blocks 222 are adjusted through the first scale 213 to ensure that the distances between all the translation blocks 222 and the circle center are the same, so that the circle center of the wafer pedestal 4 is positioned;
rotating the lifting rod 221 to descend until abutting against the upper surface of the wafer pedestal 4;
adjusting the descending distances of all the lifting rods 221 to be consistent, and finishing the leveling of the wafer base 4 at the moment;
the position of the translation block 222 is fine-tuned for the second time to eliminate the circle center movement error generated in the leveling process;
the calibration rod pin 1 penetrates through the calibration rod hole 3 from top to bottom until being inserted into a positioning hole in the center of the wafer base 4;
and installing and fixing the wafer base 4.
As shown in fig. 7, the horizontal calibration process for the helical magnet assembly is as follows:
rotating the lifting rod 221 to ascend to a position away from the spiral magnet assembly 5 by a certain distance;
translating the translation block 222 on the support 21 to a position where the lifting rod 221 is above the helical magnet on the helical magnet assembly 5;
rotating the lifting rod 221 to descend until the lifting rod collides with the spiral magnet;
the descending distances of all the lifting rods 221 are adjusted to be consistent, and the leveling state is achieved at the moment;
the spiral magnet assembly 5 is fixedly installed.
Of course, the above process is only schematic, and the PVD process chamber may be adjusted accordingly according to the specific structure of the auxiliary calibration jig, and the PVD process chamber is not expanded one by one.
The invention also provides an auxiliary calibration method for assembling the PVD process chamber, which is carried out by using the auxiliary calibration jig for assembling the PVD process chamber in any scheme. The calibration method comprises the steps of placing the assembled auxiliary calibration jig for the PVD process cavity in the PVD process cavity, clamping each fixing structure at the edge of the PVD process cavity for fixing, adjusting each lifting rod to be the same distance until the lifting rod abuts against the surface of a module to be calibrated to achieve leveling of the module to be calibrated, then enabling a tip of the calibration rod to penetrate through a hole of the calibration rod from top to bottom until the tip of the calibration rod abuts against the surface of the module to be calibrated or is inserted into a circle center positioning hole of the module to be calibrated, and after calibration is completed, installing and fixing the module to be calibrated. For a more detailed process, please refer to the foregoing, which is not repeated for brevity.
In summary, the present invention provides an auxiliary calibration fixture and method for assembling a PVD process chamber. The jig comprises a calibration rod tip and at least three groups of calibration modules, the diameter of the calibration rod tip is consistent with the aperture of a calibration rod hole arranged in the center of the jig, in the using process, the at least three groups of calibration modules are mutually contacted, and the calibration rod tip passes through the calibration rod hole and can be inserted into a circle center positioning hole of a module to be calibrated, which is positioned below the jig; the calibration module comprises a supporting part, a calibration structure and a fixed structure, the calibration structure is connected with the supporting part and can move on the supporting part along the horizontal direction, and the fixed structure is connected with one end of the supporting part, which is far away from the calibration rod hole; the calibration structure comprises a lifting rod, a translation block and a positioning block, the lifting rod penetrates through the supporting part and can be lifted in the longitudinal direction, the translation block is arranged on the supporting part and is connected with the supporting part in a sliding mode and can move in the horizontal direction to adjust the position of the calibration structure, the lifting rod penetrates through the translation block up and down and is movably connected with the translation block through threads, and the positioning block is located on the lifting rod and is fixedly connected with the lifting rod; the supporting part comprises a supporting main body, a moving groove and a reserved operation opening, wherein the moving groove and the reserved operation opening are positioned on the supporting main body; the shifting chute does the calibration structure provides the space that horizontal direction and vertical direction removed, it is located to reserve the operation mouth the supporting part is kept away from the one end that central point put, and is located the top of fixed knot structure's movable block fastener, through reserve the operation mouth right fixed knot structure's movable block carries out the fixed operation, be provided with assembly breach and breach supplementary piece on the shifting chute, the assembly breach does link up on the shifting chute extremely the marginal reservation assembly space of supporting part, the size with the breach supplyes the piece unanimity, set up on the breach supplyes the piece with the movable chute that the shifting chute corresponds, the movable chute with assembly breach size is unanimous, the movable chute with the horizontal migration space of calibration structure is constituteed jointly to the movable chute. The improved structural design of the invention can assist the calibration horizontal degree in the installation process of the module to be calibrated, ensure the synchronous completion of installation and calibration, realize accurate center positioning, contribute to improving the process yield of the cavity, and is convenient to use and beneficial to improving the calibration efficiency. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. The auxiliary calibration jig for assembling the PVD process chamber is characterized by comprising a calibration rod tip and at least three groups of calibration modules, wherein the diameter of the calibration rod tip is consistent with the aperture of a calibration rod hole arranged in the center of the jig; the calibration module comprises a supporting part, a calibration structure and a fixed structure, the calibration structure is connected with the supporting part and can move on the supporting part along the horizontal direction, and the fixed structure is connected with one end of the supporting part, which is far away from the calibration rod hole; the calibration structure comprises a lifting rod, a translation block and a positioning block, the lifting rod penetrates through the supporting part and can be lifted in the longitudinal direction, the translation block is arranged on the supporting part and is connected with the supporting part in a sliding mode and can move in the horizontal direction to adjust the position of the calibration structure, the lifting rod penetrates through the translation block up and down and is movably connected with the translation block through threads, and the positioning block is located on the lifting rod and is fixedly connected with the lifting rod; the supporting part comprises a supporting main body, a moving groove and a reserved operating opening which are positioned on the supporting main body, the moving groove provides a space for the calibration structure to move in the horizontal direction and the vertical direction, the reserved operation opening is positioned at one end of the supporting part far away from the central position and is positioned above the movable block fastener of the fixed structure, the movable block of the fixed structure is fixed through the reserved operation opening, the movable groove is provided with an assembly gap and a gap supplement block, the assembly gap is a reserved assembly space which is arranged on the moving groove and penetrates to the edge of the supporting part, the size of the assembly gap is consistent with that of the gap supplement block, the gap supplement block is provided with a movable groove corresponding to the movable groove, the size of the movable groove is consistent with that of the assembly gap, and the movable groove jointly form a horizontal movement space of the calibration structure.
2. The jig of claim 1, wherein the material of the calibration rod tip comprises any one of metal and ceramic, and a positioning mark scale is arranged on the calibration rod tip for marking the insertion position of the calibration rod tip; the supporting part is further provided with a first graduated scale positioned on the surface of the supporting main body and used for measuring the moving distance of the calibration structure in the horizontal direction.
3. The jig of claim 1, wherein the fixing structure further comprises a threaded rod and a lifting block, the threaded rod penetrates through the supporting part and extends downwards to be in threaded connection with the lifting block below the supporting part, and the lifting block can be driven to move up and down by rotating the threaded rod; the movable block is positioned on the lifting block and fixedly connected with the lifting block, and a space for stretching and moving in the horizontal direction is reserved on the movable block.
4. The fixture according to claim 3, wherein the fixing structure further comprises a lifting rail, the lifting rail is disposed at a middle position between the lifting block and the top end of the supporting portion and is fixedly connected to the supporting portion, and the lifting block is sleeved on the lifting rail and can move up and down along the lifting rail.
5. The jig according to claim 1, wherein the translation block is further provided with a sliding member, and the sliding member is located inside the translation block and movably connected with the translation block, so as to ensure that the translation block moves smoothly in the moving groove.
6. The jig of claim 1, wherein the positioning block comprises a fixing portion and an extending portion, one end of the fixing portion is fixedly connected to the translation block, the other end of the fixing portion is fixedly connected to the extending portion, and the extending portion is located in the moving groove, penetrates through the moving groove, and is located on one side of the translation block away from the center of the jig.
7. The jig of claim 1, wherein the bottom of the lifting rod is provided with a non-magnetic flexible contact, and the upper part of the lifting rod is provided with a rotating handle.
8. The jig of claim 1, further comprising an auxiliary support structure spanning over the alignment rod hole, wherein the auxiliary support structure is provided with an auxiliary positioning hole having a size consistent with the alignment rod hole and located on the same vertical line, and when in use, the alignment rod tip sequentially passes through the auxiliary positioning hole and the alignment rod hole.
9. The fixture of any one of claims 1-8, wherein the module to be calibrated comprises any one of a wafer pedestal and a screw-type magnet assembly.
10. A PVD process chamber assembly assisted calibration method, wherein the calibration method is performed using the PVD process chamber assembly assisted calibration fixture of any of claims 1 to 9.
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| CN202210279659.XA CN114353618B (en) | 2022-03-22 | 2022-03-22 | PVD process cavity assembly auxiliary calibration jig and method |
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| CN202210279659.XA CN114353618B (en) | 2022-03-22 | 2022-03-22 | PVD process cavity assembly auxiliary calibration jig and method |
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Cited By (1)
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| CN117230421B (en) * | 2023-11-13 | 2024-01-26 | 上海陛通半导体能源科技股份有限公司 | Magnet assembly auxiliary installation jig and method in magnetron sputtering equipment |
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| CN114353618B (en) | 2022-06-03 |
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Inventor after: Ma Baoqun Inventor after: Chen Tao Inventor after: Cui Shijia Inventor after: Song Weicong Inventor before: Ma Baoqun Inventor before: Chen Tao Inventor before: Cui Shijia |