CN206925501U - Probe fixed arm for probe welding - Google Patents
Probe fixed arm for probe welding Download PDFInfo
- Publication number
- CN206925501U CN206925501U CN201720738248.7U CN201720738248U CN206925501U CN 206925501 U CN206925501 U CN 206925501U CN 201720738248 U CN201720738248 U CN 201720738248U CN 206925501 U CN206925501 U CN 206925501U
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- slide rail
- sliding shoe
- probe
- screw rod
- fixed
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Abstract
The utility model provides a kind of probe fixed arm for probe welding, including base, it is provided with base along X, Y, the protruding block and sliding shoe corresponding with protruding block of three direction extensions of Z axis, the slide rail of protruding block is corresponding with sliding shoe slide rail, elastic component is connected between protruding block and sliding shoe, one of sliding shoe connects contiguous block, the mobile flexible connection tumbler of contiguous block, the holder of the first end connection clamping probe of tumbler, second end of tumbler is provided adjacent to the screw rod on contiguous block, utilize the height of screw rod connection holder, using above structure, the angle and height of the holder of clamping probe are adjusted using multi-dimensional free, enable the probe to the chip on accurate contact wafer, the accuracy for being easy to probe to weld, ensure the precision of chip testing and the precision of probe welding position.
Description
Technical field
Technical field of manufacturing semiconductors is the utility model is related to, is especially for the probe fixed arm of probe welding.
Background technology
Wafer refers to the stock of silicon semiconductor chip, and wafer can be understood as to the concentration body of chip.Carrying out crystalline substance
, it is necessary to unqualified using the contacts on elongated probe and chip, the electrical characteristic of test chip during circle test
Chip can be marked with mark, in follow-up wafer dicing process, just eliminate with the chip for not conforming to case marking, reduce as far as possible
Manufacturing cost.During test wafer, test the probe used and fix on the probe card, it is necessary to fix during On-Wafer Measurement
Probe card, and with wafer accurate contraposition, ensure test accuracy.Therefore, it is necessary to probe on probe clamp before On-Wafer Measurement
Welding and test, because probe is elongated and probe welding position requires high accuracy, it is necessary to which welder carries out angle, position
High-precision control, but the equipment degree of regulation of fixed probe of the prior art is not high.
The content of the invention
Main purpose of the present utility model is to provide a kind of high probe fixed arm for being used for probe welding of degree of regulation.
To realize above-mentioned main purpose, the probe fixed arm provided by the utility model for probe welding includes bottom
Seat, base are provided with the first fixed plate, and the first fixed plate is provided with the first protruding block, and the side of the first protruding block is equipped with Y-axis
Slide rail, the first fixed plate are connected with the first end of the first elastic component, and the second end of the first elastic component connects the first sliding shoe, and first
Sliding shoe is provided with the first slide rail, and the first slide rail abuts with Y-axis slide rail, and the side of the first sliding shoe is provided with first bearing seat, the
The first screw rod of connection in one bearing block；
One side of first sliding shoe away from the first fixed plate is provided with the second protruding block, and the side of the second protruding block is provided with X-axis
Slide rail, the first sliding shoe are connected with the first end of the second elastic component, the second end connection the second sliding shoe of the second elastic component, and second
Sliding shoe is provided with the second slide rail, and the second slide rail abuts with X-axis slide rail, and the side of the second sliding shoe is provided with second bearing seat, the
The second screw rod of connection in two bearing bracket；
One side of the second sliding shoe away from the first sliding shoe is provided with the second L-shaped fixed plate, the second fixed plate and the
Two sliding shoes are vertical, and the first end of the second fixed plate is provided with the 3rd protruding block, and the side of the 3rd protruding block is equipped with Z axis cunning
Rail, the 3rd protruding block are connected with the first end of the 3rd elastic component, and the second end of the 3rd elastic component connects the 3rd sliding shoe, and the 3rd slides
Motion block is provided with the 3rd slide rail, and the 3rd slide rail abuts with Z axis slide rail, and the first end of the second fixed plate is additionally provided with fixed seat, fixed
It is connected with the 3rd screw rod in plate, the 3rd screw rod is towards simultaneously adjacent 3rd sliding shoe, Y-axis slide rail, X-axis slide rail and Z axis slide rail
Bearing of trend is mutually perpendicular to；
The first end of contiguous block is connected on 3rd sliding shoe, the second end of contiguous block connects tumbler, set on contiguous block
There is groove, groove is interior through there is the 4th screw rod, and the first end of tumbler is flexibly connected holder, the 4th screw rod direction and adjoining turn
Second end of moving part.
As can be seen here, by driving the screw rod on X, Y, Z axis direction, shift the bearing block that is connected with screw rod onto so as to shift onto with
The sliding shoe or screw rod of bearing block connection push directly on sliding shoe so that the slide rail on sliding shoe is relative with the slide rail on protruding block
It is mobile, so as to clamp the movement of the holder of probe；4th screw rod direction and adjacent tumbler, can drive the 4th screw rod, further
The height of fixture is adjusted, is further ensured that the precision of probe welding.Due to probe is elongated and wafer on chip it is tiny, precision
Adjustable range is small, is limited using movement of the elastic component to sliding shoe, avoids slide rail from stripped thread phenomenon, sliding shoe movement model occur
Unmanageable situation is enclosed, ensures the precision of probe welding.
Further scheme is that the first fixed plate is provided with the first fixed block, the first fixed block close to the side of the first screw rod
Be provided with the first perforate, the first screw rod is connected through the first perforate with first bearing seat, the first fixed block away from bearing block one
Side is provided with the first action bars, and the first screw rod is fixed in the first action bars；
First protruding block is provided with the second fixed block close to the side of the second screw rod, and the second fixed block is provided with the second perforate,
Second screw rod is connected through the second perforate with second bearing seat, and side of second fixed block away from bearing block is provided with the second operation
Bar, the second screw rod are fixed in the second action bars；
3rd screw rod is fixed in the 3rd action bars；
4th screw rod is fixed in the 4th action bars.
It can be seen that using action bars drive screw turns, be easy to during welding can quick regulation sliding shoe position.
Further scheme is that the first sliding shoe is provided with the first fluting close to the side of the first slide rail, is passed through in the first fluting
It is installed with the first fastener, the first fastener adjoining Y-axis slide rail；
The second sliding shoe is provided with the second fluting close to the side of the second slide rail, and running through in the second fluting has the second fastener,
Second fastener abuts X-axis slide rail；
3rd sliding shoe is provided with the 3rd fluting close to the side of the 3rd slide rail, and running through in the 3rd fluting has the 3rd fastener,
3rd fastener abuts Z axis slide rail.
It can be seen that after the position of sliding shoe is adjusted, rotatable fastener, fastener is close to slide rail, make sliding shoe without
Method moves, and avoids the occurrence of the situation that sliding shoe moves suddenly in probe welding process, causes probe can not accurately correspond to wafer
Position.
Further scheme is that holder includes fixture and moving member, and moving member connects the 5th screw rod.
It can be seen that the 5th screw rod of rotation, makes moving member be moved towards fixture, so as to clamp probe.
Further scheme is to be equipped with quarter on the first action bars, the second action bars, the 3rd action bars and the 4th action bars
Degree.
It can be seen that the distance that operator can slide according to the scale control sliding shoe on action bars.
Further scheme is that the angle between the first end of tumbler and the second end is obtuse angle.
Brief description of the drawings
Fig. 1 is the structure of the wafer tester for the probe fixed arm embodiment application that the utility model is used for probe welding
Figure.
Fig. 2 is the front view of the bottom plate in Fig. 1 wafer tester and wafer mounting table.
Fig. 3 is Fig. 2 structure chart of the bottom plate with wafer mounting table.
Fig. 4 is the front view of the correcting plate in Fig. 2 wafer mounting table.
Fig. 5 is the structure chart for the probe fixed arm embodiment that the utility model is used for probe welding.
Fig. 6 is the structure chart at another visual angle of probe fixed arm embodiment that the utility model is used for probe welding.
Below in conjunction with drawings and Examples, the utility model is described in further detail.
Embodiment
Probe fixed arm of the present utility model for probe welding is applied in weld probe, is convenient for probe location
Test and probe welding, utilize multi-dimensional free regulation clamping probe holder angle with height so that probe
The chip on wafer can be accurately contacted, the accuracy for being easy to probe to weld, ensures precision and the probe weldering of chip testing
Connect the precision of position.
Referring to Fig. 1, the probe fixed arm application On-Wafer Measurement device of the present utility model for probe welding, wafer
Test device includes bottom plate 1, and bottom plate 1 is provided with microscope assembly 2, wafer mounting table 3 and probe fixed arm 4.
Microscope assembly 2 includes microscope 21, and the object lens of microscope 21 are towards wafer mounting table 3, and microscope 21 is towards crystalline substance
One end of circle mounting table 3 is provided with transparency cover 22, and illuminating lamp, illuminating lamp connection electric switch, due on wafer are provided with transparency cover 22
Chip it is extremely tiny, the illuminating lamp set in transparency cover 22 is advantageous to improve the brightness of test environment, is easy to observe wafer.Its
In also microscope 21 with being respectively provided with the cunning that can be extended in different directions on the support 23 that microscope 21 is fixed on bottom plate 1
Rail, the slide rail on microscope 21 is corresponding with the slide rail on support 23, and person easy to operation adjusts position and the vision of microscope 21
Angle.
First through hole, the second through hole are arranged on bottom plate 1.Referring to Fig. 2, Fig. 3, wafer mounting table 3 includes rotating disc 31, turns
Moving plate 31 be can be rotatably set on bottom plate 1, and the second rotation annulus 32 is provided between rotating disc 31 and bottom plate 1, and second rotates
Annulus 32 is fixed on rotating disc 31, and screw mandrel 33 is provided with rotating disc 31, and in the present embodiment, the quantity of screw mandrel 33 is two
Root, the bearing of trend of screw mandrel 33 are mutually perpendicular to, and third through-hole is provided with rotating disc 31.Rotatably it is provided with and puts on rotating disc 31
Disk 34 is put, the first rotation annulus 35 is provided between holding tray 34 and rotating disc 31, the first rotation annulus 35 is fixed on holding tray
On 34, holding tray 34 is provided with perforate close to the one side of rotating disc 31, and perforate, first through hole and third through-hole are interconnected, and edge is opened
The marginal position in hole is provided with protruding block, and screw mandrel 33 abuts with protruding block, and vacuum tube 36 rotates the interior of annulus 35 through first simultaneously
Inner ring, perforate, first through hole and the third through-hole of ring, the second rotation annulus 32, first rotates the slewing circle of annulus 35 and second
The setting of ring 32 causes rotating disc 31 to be rotated with holding tray 34, and person easy to operation adjusts the test angle of wafer, the first slewing circle
Handle easy to operation is additionally provided with ring 35.The end face of holding tray 34 is provided with adsorption tank, and vacuum tube 36 is connected with adsorption tank, put
Put and vacuum hole is additionally provided with disk 34, vacuum hole connects with vacuum tube 36, adsorption tank.One side of the bottom plate 1 away from rotating disc 31 is set
Connecting rod 37 is equipped with, the first end of connecting rod 37 connects the first rotating bar 310, second through hole of first rotating bar 310 on bottom plate 1
Attended operation ring 311 afterwards, operator move the rotation of the first rotating bar by rotation process annulus, operate and are additionally provided with quarter on ring 311
Degree.Vacuum tube 36 also places annulus 38 and second through first simultaneously close to one end of connecting rod 37 and places annulus 39, connecting rod 37
Second end is placed on the first placement annulus 38 and second and placed between annulus 39 and adjacent vacuum tube 36, first place annulus 38 with
Second end progress of the second placement annulus 39 to connecting rod 37 is spacing, is easy to accurate jacking of the connecting rod 37 to vacuum tube 36, ensures to put
Put the regulation of the in the vertical direction height of disk 34.Connecting rod 37 is provided with fourth hole, and bottom plate 1 is provided with limit close to the one side of connecting rod 37
Position block 312, the second rotating bar 313, the rotating bar 313 of limited block 312 and second run through fourth hole.
The both sides of rotating disc 31 are provided with fixed mount 314, and holding tray 34 is arranged between fixed mount 314.Rotating disc 31
Both sides fixed mount 314 between be provided with clearance portion 315, L-shaped fixture 316 is provided with fixed mount 314, it is fixed
The first end of part 316 is fixed on fixed mount 314, and clearance portion 315 is run through at the second end of fixture 316, and the first of fixture 316
End is provided with and screws part, and it can be screw 317 to screw part, and screw 317 runs through and connected the spiral shell being located in the first end of fixture 316
Hole, the clearance portion 315 between fixed mount 314 is used for the probe card for placing probe to be welded, by " L " shape fixture 316 to visiting
The fixation of pin card, it is easy to when adjusting wafer angle, probe card is unaffected.
The side that the fixed mount 314 of the both sides of rotating disc 31 is located remote from disk 34 is equipped with locating piece 318, on fixed mount 314
Correcting plate 319 is provided with, referring to Fig. 4, the first end of correcting plate 319 is equipped with positioning hole 320 with the second end, and locating piece 318 passes through
Positioning hole 320 is worn, correction unit 321 is provided between the first end of correcting plate 319 and the second end, correction unit 321 is arranged on rotating disc
Between the fixed mount 314 of 31 both sides, correction unit 321 is provided with perforate 322, and the center of perforate 322 exists with the center of holding tray 34
Collinearly set on vertical direction, during probe welds, the position of wafer on holding tray is quickly checked using correcting plate 319
It is whether correct, after adjusting wafer position, between the probe card of probe to be welded is placed on into fixed mount 314, using placement
Wafer on disk determines the position of probe on probe clamp, ensures that wafer testing procedure probe can accurately contact the core on wafer
Piece, to ensure the accuracy of wafer sort.
Referring to Fig. 5, Fig. 6, probe fixed arm 4 includes base 40, and base 40 is provided with the first fixed plate 41, the first fixed plate
41 are provided with the first protruding block 42, and in the present embodiment, the quantity of the first protruding block 42 is two, the side of the first protruding block 42
It is equipped with Y-axis slide rail 43, the Y-axis slide rail 43 on the first protruding block of two of which 42 is arranged on the side away from other side and court
Round about.First fixed plate 41 is provided with the first groove 44, and the first groove 44 is arranged between two the first protruding blocks 42,
The first end of the first elastic component 45 is connected with first groove 44, the second end of the first elastic component 45 connects the first sliding shoe 46,
Side on first sliding shoe 46 close to the first protruding block 42 is provided with the second groove 47, and the both sides of the second groove 47 are equipped with first
Slide rail 48, the first slide rail 48 abut with Y-axis slide rail 43, and the side of the first sliding shoe 46 is provided with first bearing seat 49, clutch shaft bearing
The first screw rod 410 of connection in seat 49.
One side of first sliding shoe 46 away from the first fixed plate 41 is provided with the second protruding block 411, in the present embodiment, second
The quantity of protruding block 411 is two, and the side of the second protruding block 411 is provided with X-axis slide rail 412, the second protruding block of two of which 411
On X-axis slide rail 412 be arranged on the side away from other side and towards opposite direction.It is recessed that first sliding shoe 46 is provided with the 3rd
Groove 413, the first end of the second elastic component 414, the second end connection second of the second elastic component 414 are connected with the 3rd groove 413
Sliding shoe 415, the side on the second sliding shoe 415 close to the second protruding block 411 are provided with the 4th groove 416, the 4th groove 416
Both sides are equipped with the second slide rail 417, and the second slide rail 417 abuts with X-axis slide rail 412, and the side of the second sliding shoe 415 is provided with second
Bearing block 418, the second screw rod 419 of interior connection of second bearing seat 418.
One side of the second sliding shoe 415 away from the first sliding shoe 46 is provided with the second L-shaped fixed plate 420, and second is solid
Fixed board 420 is vertical with the second sliding shoe 415, and the first end of the second fixed plate 420 connects the 3rd protruding block 421, in the present embodiment
In, the quantity of the 3rd protruding block 421 is two, and the side of the 3rd protruding block 421 is equipped with Z axis slide rail 422, two of which the 3rd
Z axis slide rail 422 on protruding block 421 is arranged on the side away from other side and towards opposite direction, on the 3rd protruding block 421
Provided with the 5th groove, the first end of the 3rd elastic component is connected with the 5th groove, the second end connection the 3rd of the 3rd elastic component is slided
Motion block 423, the 6th groove is provided with close to the 3rd protruding block 421 on the 3rd sliding shoe 423, the both sides of the 6th groove are equipped with the 3rd
Slide rail, the 3rd slide rail abut with Z axis slide rail 422, and the first end of the second fixed plate 420 is additionally provided with fixed seat 424, fixed seat 424
Inside be connected with the 3rd screw rod 425, the 3rd screw rod 425 towards and adjacent 3rd sliding shoe 423.
The bearing of trend of Y-axis slide rail 43, X-axis slide rail 412 and Z axis slide rail 422 is mutually perpendicular to, realize fixed arm can X,
Y, the regulation of the position on tri- different directions of Z.
The first end of contiguous block 426 is connected on 3rd sliding shoe 23, the second end connection tumbler 429 of contiguous block 426, is connected
Connect and groove 427 is provided with block 426, through there is the 4th screw rod 428 in groove 427, the first end of tumbler 429 is flexibly connected folder
Gripping member 430, the 4th screw rod 428 towards and adjacent tumbler 429 the second end, holder 430 includes fixed block and movable block, can
Slide rail is set on fixed block so that movable block can move on fixed block, and movable block connects the 5th screw rod 431, rotation the 5th
Screw rod 431, movable block is set to be moved towards fixed block, so as to clamp probe.Folder between the first end of tumbler 429 and the second end
Angle is obtuse angle, and the setting at obtuse angle is more convenient for the position of regulation holder 430.
First sliding shoe 46 is provided with the first fluting close to the side of the first slide rail 48, and running through in the first fluting has the first fastening
Part 432, the first fastener 432 adjoining Y-axis slide rail 43；The second sliding shoe 415 is opened close to the side of the second slide rail 417 provided with second
Groove 433, the second fluting 433 is interior through there is the second fastener 434, and the second fastener 434 abuts X-axis slide rail 412；3rd sliding shoe
423 are provided with the 3rd fluting 435 close to the side of the 3rd slide rail, and running through in the 3rd fluting 435 has the 3rd fastener 436, and the 3rd is tight
Firmware 436 abuts Z axis slide rail 422, after the position of sliding shoe is adjusted, rotatable fastener, fastener is close to slide rail, makes
Sliding shoe can not move, and avoid the occurrence of the situation that sliding shoe moves suddenly in probe welding process, cause probe accurate
Corresponding wafer position.
First fixed plate 41 is provided with the first fixed block 437 close to the side of the first screw rod 410, is set on the first fixed block 437
There are the first perforate, the first screw rod 410 to be connected after running through the first perforate with first bearing seat 49, the first fixed block 437 is away from first
The side of bearing block 49 is provided with the first action bars 438, and the first screw rod 410 is fixed in the first action bars 438.Second protruding block
411 are provided with the second fixed block 439 close to the side of the second screw rod 419, and 439 are provided with the second perforate, the second spiral shell on the second fixed block
Bar 419 is connected after running through the second perforate with second bearing seat 418, and the second side of the fixed block 439 away from second bearing seat 418 is set
There is the second action bars 440, the second screw rod 419 is fixed in the second action bars 440.3rd screw rod 425 is fixed on the 3rd action bars
In 441, the 4th screw rod 428 is fixed in the 4th action bars 442.First action bars 438, the second action bars 440, the 3rd action bars
441 and the 4th scale is equipped with action bars 442, using action bars drive screw turns, being easy to can be fast during welding
The position of velocity modulation section sliding shoe, the distance that operator can slide according to the scale control sliding shoe on action bars.
Holder 430 is towards holding tray 34.
During On-Wafer Measurement, wafer is placed on holding tray 34, and the convex of holding tray 34 is promoted by rotary screw 33
It is bittiness that so as to promote holding tray 34, orthogonal screw mandrel 33 can adjust position of the holding tray 34 all around in horizontal direction,
Drivening rod 37 is rotated by the rotating bar 310 of rotation process ring 311 first to rise or fall, it is adjacent with connecting rod 37 so as to jack
The vacuum tube 36 connect, vacuum tube 36 connect holding tray 34, so as to realize the position on the regulation vertical direction of holding tray 34；Vacuum tube
Wafer on 36 connection vacuum tanks absorption holding trays 34, ensures the firm of in test process wafer；, will during probe test
Probe card to be welded is placed between fixed mount 314, and the welding of probe on probe clamp is determined using wafer on holding tray 34
Position, ensure that wafer testing procedure middle probe can accurately contact the chip on wafer, ensure the accuracy of wafer sort, and
After the position of probe card is fixed, promoted using the slide rail on X, Y and Z axis on probe fixed arm 4 and screw rod and connected with screw rod
Spindle bearing is so as to promoting sliding shoe so that the holder for clamping probe obtains moving in three dimensions, ensures probe welding
Precision.
Finally it is emphasized that the utility model is not limited to above-mentioned embodiment, such as the shape of rotating disc, holding tray,
Each through hole, the change such as the change of shape of perforate should also be included in the protection domain of the utility model claims.
Claims (6)
1. the probe fixed arm for probe welding, it is characterised in that including：
Base, the base are provided with the first fixed plate, and first fixed plate is provided with the first protruding block, and described first is raised
The side of block is equipped with Y-axis slide rail, and first fixed plate is connected with the first end of the first elastic component, first elastic component
Second end connects the first sliding shoe, and first sliding shoe is provided with the first slide rail, and first slide rail is adjacent with the Y-axis slide rail
Connect, the side of first sliding shoe is provided with first bearing seat, and the first screw rod is connected in the first bearing seat；
One side of first sliding shoe away from first fixed plate is provided with the second protruding block, the side of second protruding block
Provided with X-axis slide rail, first sliding shoe is connected with the first end of the second elastic component, the second end connection of second elastic component
The second sliding shoe, the second sliding shoe are provided with the second slide rail, and second slide rail abuts with the X-axis slide rail, and described the
The side of two sliding shoes is provided with second bearing seat, and the second screw rod is connected in the second bearing seat；
One side of the second sliding shoe away from first sliding shoe is provided with the second L-shaped fixed plate, and described second is solid
Fixed board is vertical with the second sliding shoe, and the first end of second fixed plate is provided with the 3rd protruding block, and the described 3rd is raised
The side of block is equipped with Z axis slide rail, and the 3rd protruding block is connected with the first end of the 3rd elastic component, the 3rd elastic component
Second end connects the 3rd sliding shoe, and the 3rd sliding shoe is provided with the 3rd slide rail, and the 3rd slide rail is adjacent with the Z axis slide rail
Connect, the first end of second fixed plate is additionally provided with fixed seat, and the 3rd screw rod, the 3rd screw rod are connected with the fixed plate
Direction simultaneously abuts the 3rd sliding shoe, and the bearing of trend of the Y-axis slide rail, the X-axis slide rail and the Z axis slide rail is mutual
Vertically；
The first end of contiguous block, the second end connection tumbler of the contiguous block, the connection are connected on 3rd sliding shoe
Groove is provided with block, running through in the groove has the 4th screw rod, and the first end of the tumbler is flexibly connected holder, described
Second end of the 4th screw rod direction and the adjacent tumbler.
2. the probe fixed arm according to claim 1 for probe welding, it is characterised in that：
First fixed plate is provided with the first fixed block close to the side of first screw rod, and first fixed block is provided with the
One perforate, first screw rod are connected through first perforate with the first bearing seat, and first fixed block is away from institute
The side for stating bearing block is provided with the first action bars, and first screw rod is fixed in first action bars；
First protruding block is provided with the second fixed block close to the side of second screw rod, and second fixed block is provided with the
Two perforates, second screw rod are connected through second perforate with the second bearing seat, and second fixed block is away from institute
The side for stating bearing block is provided with the second action bars, and second screw rod is fixed in second action bars；
3rd screw rod is fixed in the 3rd action bars；
4th screw rod is fixed in the 4th action bars.
3. the probe fixed arm according to claim 2 for probe welding, it is characterised in that：
First sliding shoe is provided with the first fluting close to the side of first slide rail, and running through in first fluting has first
Fastener, first fastener abut the Y-axis slide rail；
The second sliding shoe is provided with the second fluting close to the side of second slide rail, and running through in second fluting has second
Fastener, second fastener abut the X-axis slide rail；
3rd sliding shoe is provided with the 3rd fluting close to the side of the 3rd slide rail, and running through in the 3rd fluting has the 3rd
Fastener, the 3rd fastener abut the Z axis slide rail.
4. the probe fixed arm according to claim 3 for probe welding, it is characterised in that：
The holder includes fixture and moving member, and the moving member connects the 5th screw rod.
5. the probe fixed arm according to claim 4 for probe welding, it is characterised in that：
Scale is equipped with first action bars, second action bars, the 3rd action bars and the 4th action bars.
6. the probe fixed arm according to claim 5 for probe welding, it is characterised in that：
Angle between the first end of the tumbler and the second end is obtuse angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720738248.7U CN206925501U (en) | 2017-06-22 | 2017-06-22 | Probe fixed arm for probe welding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720738248.7U CN206925501U (en) | 2017-06-22 | 2017-06-22 | Probe fixed arm for probe welding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206925501U true CN206925501U (en) | 2018-01-26 |
Family
ID=61345669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720738248.7U Active CN206925501U (en) | 2017-06-22 | 2017-06-22 | Probe fixed arm for probe welding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206925501U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109186451A (en) * | 2018-08-22 | 2019-01-11 | 西安工程大学 | A kind of multi-angle laser interferometry laser clamping adjusting device |
| CN110286307A (en) * | 2018-03-19 | 2019-09-27 | 科磊股份有限公司 | Probe detection system and method for detecting semiconductor element |
-
2017
- 2017-06-22 CN CN201720738248.7U patent/CN206925501U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110286307A (en) * | 2018-03-19 | 2019-09-27 | 科磊股份有限公司 | Probe detection system and method for detecting semiconductor element |
| CN110286307B (en) * | 2018-03-19 | 2022-04-08 | 科磊股份有限公司 | Probe detection system and method for detecting semiconductor element |
| CN109186451A (en) * | 2018-08-22 | 2019-01-11 | 西安工程大学 | A kind of multi-angle laser interferometry laser clamping adjusting device |
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