CN206931563U - Wafer tester - Google Patents
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- CN206931563U CN206931563U CN201720738272.0U CN201720738272U CN206931563U CN 206931563 U CN206931563 U CN 206931563U CN 201720738272 U CN201720738272 U CN 201720738272U CN 206931563 U CN206931563 U CN 206931563U
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Abstract
The utility model provides a kind of wafer tester, including bottom plate, is provided with microscope assembly, probe fixed arm and wafer mounting table on bottom plate, and microscope assembly is towards wafer mounting table, and the holder of probe fixed arm is towards wafer mounting table；Wafer mounting table includes rotatable holding tray and rotating disc, and holding tray can all around move back and forth, and one side of the bottom plate away from wafer mounting table is provided with connecting rod, the vacuum tube that connecting rod jacking is connected with holding tray；Probe fixed arm is provided with the slide rail in three directions of X, Y, Z axis, makes the welding position of probe more accurate；Correcting plate is additionally provided with wafer mounting table, check whether the position of wafer is correct using correcting plate before probe welds, the welding of probe is carried out again to ensure chip that probe can accurately on wafer, wafer tester of the present utility model, which designs wafer sort and probe weldedization, make it that between pin blocking work and wafer sort that volume is connected and is simplified, and effectively improves operating efficiency.
Description
Technical field
Field of semiconductor manufacture is the utility model is related to, more particularly, to a kind of wafer tester.
Background technology
Wafer refers to the stock of silicon semiconductor chip, and wafer can be understood as to the concentration body of chip.Carrying out crystalline substance
, it is necessary to unqualified using the contacts on elongated probe and chip, the electrical characteristic of test chip during circle test
Chip can be marked with mark, in follow-up wafer dicing process, just eliminate with the chip for not conforming to case marking, reduce as far as possible
Manufacturing cost.Large-scale wafer sort platform can only provide the free degree of three upper and lower all around dimensions, for short grained
Wafer can not imitate the angle of the identification of complete slice and feeding position of standardizing accurately to ensure that wafer position and angle completion are high-precision
Degree test.Cause to go out in test process in addition, the small-sized test device of the wafer of experiment can not provide enough adsorption capacities
The situation of existing offset deviation, influence to test effect.
The probe of test wafer is fixed on the probe card, it is necessary to fix probe card during On-Wafer Measurement, and with crystalline substance
Circle accurate contraposition, ensure the accuracy of test.Therefore, it is necessary to the welding and test of probe on probe clamp before On-Wafer Measurement；
Because probe is elongated and wafer correspondence position requires high accuracy, the high-precision control of angle, position need to be carried out.
In the prior art, most wafer sort platform welds without the function of making pin card, wafer sort with probe
Connect and correspond to different equipment respectively.
The content of the invention
Main purpose of the present utility model is to provide the wafer tester that a kind of wafer sort is welded as a whole with probe.
To realize above-mentioned main purpose, wafer tester provided by the utility model includes bottom plate, and bottom plate is provided with
Microscope assembly, wafer mounting table and probe fixed arm；
Microscope assembly includes microscope, and microscopical object lens are towards wafer mounting table；
Wafer mounting table includes rotating disc, and rotating disc can be rotatably set on bottom plate, and two silks are provided with rotating disc
Bar, the bearing of trend of two screw mandrels are mutually perpendicular to, and are rotatably provided with holding tray on rotating disc, holding tray close to rotating disc one
Face is provided with protruding block, and screw mandrel abuts with protruding block, and the end face of holding tray is provided with adsorption tank, run through in rotating disc and holding tray
There is vacuum tube, vacuum tube connects with adsorption tank, and one side of the bottom plate away from rotating disc is provided with connecting rod, the first end connection of connecting rod the
One rotating bar, the first rotating bar connecting bottom board, the second end adjoining vacuum tube of connecting rod, the both sides of rotating disc are provided with fixation
Frame, holding tray are arranged between fixed mount；
Probe fixed arm includes base, and base is provided with the first protruding block provided with first the first fixed plate of fixed plate, the
The side of one protruding block is equipped with Y-axis slide rail, and the first fixed plate is connected with the first end of the first elastic component, and the of the first elastic component
Two ends connect the first sliding shoe, and the first sliding shoe is provided with the first slide rail, and the first slide rail abuts with Y-axis slide rail, the first sliding shoe
Side be provided with first bearing seat, first bearing seat connects the first screw rod；
One side of first sliding shoe away from the first fixed plate is provided with the second protruding block, and the side of the second protruding block is provided with X-axis
Slide rail, the first sliding shoe are connected with the first end of the second elastic component, the second end connection the second sliding shoe of the second elastic component, and second
Sliding shoe is provided with the second slide rail, and the second slide rail abuts with X-axis slide rail, and the side of the second sliding shoe is provided with second bearing seat, the
Two bearing bracket connects the second screw rod；
One side of the second sliding shoe away from the first sliding shoe is provided with the second L-shaped fixed plate, the second fixed plate and the
Two sliding shoes are vertical, and the first end of the second fixed plate is provided with the 3rd protruding block, and the side of the 3rd protruding block is equipped with Z axis cunning
Rail, the 3rd protruding block are connected with the first end of the 3rd elastic component, and the second end of the 3rd elastic component connects the 3rd sliding shoe, and the 3rd slides
Motion block is provided with the 3rd slide rail, and the 3rd slide rail abuts with Z axis slide rail, and the first end of the second fixed plate is additionally provided with fixed seat, fixed
It is connected with the 3rd screw rod in plate, the 3rd screw rod is towards simultaneously adjacent 3rd sliding shoe, Y-axis slide rail, X-axis slide rail and Z axis slide rail
Bearing of trend is mutually perpendicular to；
The first end of contiguous block is connected on 3rd sliding shoe, the second end of contiguous block connects tumbler, set on contiguous block
There is groove, groove is interior through there is the 4th screw rod, and the first end of tumbler is flexibly connected holder, the 4th screw rod direction and adjoining turn
Second end of moving part；
Holder is towards holding tray.
As can be seen here, during On-Wafer Measurement, the protruding block for promoting holding tray by rotary screw rod is placed so as to promote
Disk, orthogonal screw mandrel can adjust the holding tray position in horizontal direction all around, make company by rotating the first rotating bar
Bar rises or falls, so as to jack the vacuum tube with connecting rod adjoining, vacuum tube connection holding tray, so as to realize that regulation holding tray erects
The upward position of Nogata；Wafer on vacuum tube connection vacuum tank absorption holding tray, ensures the firm of in test process wafer；
During probe test, between probe card to be welded is placed on into fixed mount, probe card is determined using wafer on holding tray
The welding position of upper probe, ensure that wafer testing procedure middle probe can accurately contact the chip on wafer, ensure wafer sort
Accuracy, and after the position of probe card is fixed, utilize the slide rail and screw rod on X, Y and Z axis on probe fixed arm
Promotion is connected bearing block with screw rod so as to promote sliding shoe so that the holder for clamping probe obtains moving in three dimensions, protects
Demonstrate,prove the precision of probe welding.
Further scheme is that the side that fixed mount is located remote from disk is provided with locating piece, and correcting plate is provided with fixed mount,
The first end of correcting plate and the second end are equipped with positioning hole, and locating piece run through positioning hole, the first end of correcting plate and the second end it
Between be provided with correction unit, correction unit is arranged between fixed mount, and correction unit is provided with perforate, the center of perforate and the center of holding tray
It is conllinear to set.
It can be seen that during probe welds, quickly check whether the position of wafer on holding tray is correct using correcting plate,
After adjusting wafer position, between the probe card of probe to be welded is placed on into fixed mount, can using the wafer on holding tray come
The position of probe on probe clamp is determined, ensures that wafer testing procedure probe can accurately contact the chip on wafer, to ensure crystalline substance
The accuracy of circle test.
Further scheme is that microscope is provided with transparency cover towards one end of holding tray, and illuminating lamp is provided with transparency cover, shines
Bright lamp connects electric switch.
It can be seen that because the chip on wafer is extremely tiny, the illuminating lamp set in transparency cover is advantageous to improve test environment
Brightness, be easy to observe wafer.
Further scheme is that clearance portion is provided between the fixed mount of the both sides of rotating disc, is provided with fixed mount and is in
The fixture of " L " shape, the first end of fixture are fixed on fixed mount, and clearance portion is run through at the second end of fixture, fixture
First end is provided with and screws part.
It can be seen that the clearance portion between fixed mount is used for the probe card for placing probe to be welded, by " L " shape fixture to visiting
The fixation of pin card, it is easy to when adjusting wafer angle, probe card is unaffected.
Further scheme is that the first rotation annulus is provided between holding tray and rotating disc, and the first rotation annulus is fixed
The second rotation annulus is provided with holding tray, between rotating disc and bottom plate, the second rotation annulus is fixed on rotating disc, vacuum
Pipe is simultaneously through the first inner ring and the second inner ring for rotating annulus for rotating annulus.
It can be seen that first rotates the test angle of annulus and the second rotation annulus person's regulation wafer easy to operation
Further scheme is that vacuum tube is connected with the first placement annulus and second close to one end of connecting rod and places annulus,
Simultaneously through the first inner ring and the second inner ring for placing annulus for placing annulus, the second end of connecting rod is placed on first and put vacuum tube
Put between annulus and the second placement annulus.
It can be seen that the second end progress of the first placement annulus and the second placement annulus to connecting rod is spacing, it is easy to connecting rod to vacuum
The accurate regulation determined body, ensure holding tray in the vertical direction height of pipe.
Further scheme is that the first sliding shoe is provided with the first fluting close to the side of the first slide rail, is passed through in the first fluting
It is installed with the first fastener, the first fastener adjoining Y-axis slide rail；
The second sliding shoe is provided with the second fluting close to the side of the second slide rail, and running through in the second fluting has the second fastener,
Second fastener abuts X-axis slide rail；
3rd sliding shoe is provided with the 3rd fluting close to the side of the 3rd slide rail, and running through in the 3rd fluting has the 3rd fastener,
3rd fastener abuts Z axis slide rail.
It can be seen that after the position of sliding shoe is adjusted, rotatable fastener, fastener is close to slide rail, make sliding shoe without
Method moves, and avoids the occurrence of the situation that sliding shoe moves suddenly in probe welding process, causes probe can not accurately correspond to wafer
Position
Further scheme is that holder includes fixed block and movable block, and movable block connects the 5th screw rod.
It can be seen that the 5th screw rod of rotation, makes movable block be moved towards fixed block, so as to clamp probe
Further scheme is that the angle between the first end of tumbler and the second end is obtuse angle.
Further scheme is that the first fixed plate is provided with the first fixed block, the first fixed block close to the side of the first screw rod
Be provided with the first perforate, the first screw rod is connected through the first perforate with first bearing seat, the first fixed block away from bearing block one
Side is provided with the first action bars, and the first screw rod is fixed in the first action bars；
First protruding block is provided with the second fixed block close to the side of the second screw rod, and the second fixed block is provided with the second perforate,
Second screw rod is connected through the second perforate with second bearing seat, and side of second fixed block away from bearing block is provided with the second operation
Bar, the second screw rod are fixed in the second action bars；
3rd screw rod is fixed in the 3rd action bars；
4th screw rod is fixed in the 4th action bars；
Scale is equipped with first action bars, the second action bars, the 3rd action bars and the 4th action bars.
It can be seen that using action bars drive screw turns, be easy to during welding can quick regulation sliding shoe position,
The distance that operator can slide according to the scale control sliding shoe on action bars.
Brief description of the drawings
Fig. 1 is the structure chart of the utility model wafer tester embodiment.
Fig. 2 is the front view of the utility model wafer tester embodiment bottom plate and wafer sort platform.
Fig. 3 is the stereogram of the utility model wafer tester embodiment bottom plate and wafer sort platform.
Fig. 4 is the front view of correcting plate in the utility model wafer tester embodiment.
Fig. 5 is the structure chart of the utility model wafer tester embodiment middle probe fixed arm.
Fig. 6 is the structure chart at another visual angle of the utility model wafer tester embodiment middle probe fixed arm.
Below in conjunction with drawings and Examples, the utility model is described in further detail.
Embodiment
Wafer tester of the present utility model is applied in wafer production process, is controlled to adjust by multi-dimensional free, is protected
Position and the angle of wafer sort are demonstrate,proved, and in addition to completing wafer sort, moreover it is possible to as weldering chuck, complete the weldering of probe card
Connect.
Referring to Fig. 1, wafer tester of the present utility model includes bottom plate 1, and bottom plate 1 is provided with microscope assembly 2, wafer
Mounting table 3 and probe fixed arm 4.
Microscope assembly 2 includes microscope 21, and the object lens of microscope 21 are towards wafer mounting table 3, and microscope 21 is towards crystalline substance
One end of circle mounting table 3 is provided with transparency cover 22, and illuminating lamp, illuminating lamp connection electric switch, due on wafer are provided with transparency cover 22
Chip it is extremely tiny, the illuminating lamp set in transparency cover 22 is advantageous to improve the brightness of test environment, is easy to observe wafer.Its
In also microscope 21 with being respectively provided with the cunning that can be extended in different directions on the support 23 that microscope 21 is fixed on bottom plate 1
Rail, the slide rail on microscope 21 is corresponding with the slide rail on support 23, and person easy to operation adjusts position and the vision of microscope 21
Angle.
First through hole, the second through hole are arranged on bottom plate 1.Referring to Fig. 2, Fig. 3, wafer mounting table 3 includes rotating disc 31, turns
Moving plate 31 be can be rotatably set on bottom plate 1, and the second rotation annulus 32 is provided between rotating disc 31 and bottom plate 1, and second rotates
Annulus 32 is fixed on rotating disc 31, and screw mandrel 33 is provided with rotating disc 31, and in the present embodiment, the quantity of screw mandrel 33 is two
Root, the bearing of trend of screw mandrel 33 are mutually perpendicular to, and third through-hole is provided with rotating disc 31.Rotatably it is provided with and puts on rotating disc 31
Disk 34 is put, the first rotation annulus 35 is provided between holding tray 34 and rotating disc 31, the first rotation annulus 35 is fixed on holding tray
On 34, holding tray 34 is provided with perforate close to the one side of rotating disc 31, and perforate, first through hole and third through-hole are interconnected, and edge is opened
The marginal position in hole is provided with protruding block, and screw mandrel 33 abuts with protruding block, and vacuum tube 36 rotates the interior of annulus 35 through first simultaneously
Inner ring, perforate, first through hole and the third through-hole of ring, the second rotation annulus 32, first rotates the slewing circle of annulus 35 and second
The setting of ring 32 causes rotating disc 31 to be rotated with holding tray 34, and person easy to operation adjusts the test angle of wafer, the first slewing circle
Handle easy to operation is additionally provided with ring 35.The end face of holding tray 34 is provided with adsorption tank, and vacuum tube 36 is connected with adsorption tank, put
Put and vacuum hole is additionally provided with disk 34, vacuum hole connects with vacuum tube 36, adsorption tank.One side of the bottom plate 1 away from rotating disc 31 is set
Connecting rod 37 is equipped with, the first end of connecting rod 37 connects the first rotating bar 310, second through hole of first rotating bar 310 on bottom plate 1
Attended operation ring 311 afterwards, operator move the rotation of the first rotating bar by rotation process annulus, operate and are additionally provided with quarter on ring 311
Degree.Vacuum tube 36 also places annulus 38 and second through first simultaneously close to one end of connecting rod 37 and places annulus 39, connecting rod 37
Second end is placed on the first placement annulus 38 and second and placed between annulus 39 and adjacent vacuum tube 36, first place annulus 38 with
Second end progress of the second placement annulus 39 to connecting rod 37 is spacing, is easy to accurate jacking of the connecting rod 37 to vacuum tube 36, ensures to put
Put the regulation of the in the vertical direction height of disk 34.Connecting rod 37 is provided with fourth hole, and bottom plate 1 is provided with limit close to the one side of connecting rod 37
Position block 312, the second rotating bar 313, the rotating bar 313 of limited block 312 and second run through fourth hole.
The both sides of rotating disc 31 are provided with fixed mount 314, and holding tray 34 is arranged between fixed mount 314.Rotating disc 31
Both sides fixed mount 314 between be provided with clearance portion 315, L-shaped fixture 316 is provided with fixed mount 314, it is fixed
The first end of part 316 is fixed on fixed mount 314, and clearance portion 315 is run through at the second end of fixture 316, and the first of fixture 316
End is provided with and screws part, and it can be screw 317 to screw part, and screw 317 runs through and connected the spiral shell being located in the first end of fixture 316
Hole, the clearance portion 315 between fixed mount 314 is used for the probe card for placing probe to be welded, by " L " shape fixture 316 to visiting
The fixation of pin card, it is easy to when adjusting wafer angle, probe card is unaffected.
The side that the fixed mount 314 of the both sides of rotating disc 31 is located remote from disk 34 is equipped with locating piece 318, on fixed mount 314
Correcting plate 319 is provided with, referring to Fig. 4, the first end of correcting plate 319 is equipped with positioning hole 320 with the second end, and locating piece 318 passes through
Positioning hole 320 is worn, correction unit 321 is provided between the first end of correcting plate 319 and the second end, correction unit 321 is arranged on rotating disc
Between the fixed mount 314 of 31 both sides, correction unit 321 is provided with perforate 322, and the center of perforate 322 exists with the center of holding tray 34
Collinearly set on vertical direction, during probe welds, the position of wafer on holding tray is quickly checked using correcting plate 319
It is whether correct, after adjusting wafer position, between the probe card of probe to be welded is placed on into fixed mount 314, using placement
Wafer on disk determines the position of probe on probe clamp, ensures that wafer testing procedure probe can accurately contact the core on wafer
Piece, to ensure the accuracy of wafer sort.
Referring to Fig. 5, Fig. 6, probe fixed arm 4 includes base 40, and base 40 is provided with the first fixed plate 41, the first fixed plate
41 are provided with the first protruding block 42, and in the present embodiment, the quantity of the first protruding block 42 is two, the side of the first protruding block 42
It is equipped with Y-axis slide rail 43, the Y-axis slide rail 43 on the first protruding block of two of which 42 is arranged on the side away from other side and court
Round about.First fixed plate 41 is provided with the first groove 44, and the first groove 44 is arranged between two the first protruding blocks 42,
The first end of the first elastic component 45 is connected with first groove 44, the second end of the first elastic component 45 connects the first sliding shoe 46,
Side on first sliding shoe 46 close to the first protruding block 42 is provided with the second groove 47, and the both sides of the second groove 47 are equipped with first
Slide rail 48, the first slide rail 48 abut with Y-axis slide rail 43, and the side of the first sliding shoe 46 is provided with first bearing seat 49, clutch shaft bearing
The first screw rod 410 of connection in seat 49.
One side of first sliding shoe 46 away from the first fixed plate 41 is provided with the second protruding block 411, in the present embodiment, second
The quantity of protruding block 411 is two, and the side of the second protruding block 411 is provided with X-axis slide rail 412, the second protruding block of two of which 411
On X-axis slide rail 412 be arranged on the side away from other side and towards opposite direction.It is recessed that first sliding shoe 46 is provided with the 3rd
Groove 413, the first end of the second elastic component 414, the second end connection second of the second elastic component 414 are connected with the 3rd groove 413
Sliding shoe 415, the side on the second sliding shoe 415 close to the second protruding block 411 are provided with the 4th groove 416, the 4th groove 416
Both sides are equipped with the second slide rail 417, and the second slide rail 417 abuts with X-axis slide rail 412, and the side of the second sliding shoe 415 is provided with second
Bearing block 418, the second screw rod 419 of interior connection of second bearing seat 418.
One side of the second sliding shoe 415 away from the first sliding shoe 46 is provided with the second L-shaped fixed plate 420, and second is solid
Fixed board 420 is vertical with the second sliding shoe 415, and the first end of the second fixed plate 420 connects the 3rd protruding block 421, in the present embodiment
In, the quantity of the 3rd protruding block 421 is two, and the side of the 3rd protruding block 421 is equipped with Z axis slide rail 422, two of which the 3rd
Z axis slide rail 422 on protruding block 421 is arranged on the side away from other side and towards opposite direction, on the 3rd protruding block 421
Provided with the 5th groove, the first end of the 3rd elastic component is connected with the 5th groove, the second end connection the 3rd of the 3rd elastic component is slided
Motion block 423, the 6th groove is provided with close to the 3rd protruding block 421 on the 3rd sliding shoe 423, the both sides of the 6th groove are equipped with the 3rd
Slide rail, the 3rd slide rail abut with Z axis slide rail 422, and the first end of the second fixed plate 420 is additionally provided with fixed seat 424, fixed seat 424
Inside be connected with the 3rd screw rod 425, the 3rd screw rod 425 towards and adjacent 3rd sliding shoe 423.
The bearing of trend of Y-axis slide rail 43, X-axis slide rail 412 and Z axis slide rail 422 is mutually perpendicular to, realize fixed arm can X,
Y, the regulation of the position on tri- different directions of Z.
The first end of contiguous block 426 is connected on 3rd sliding shoe 23, the second end connection tumbler 429 of contiguous block 426, is connected
Connect and groove 427 is provided with block 426, through there is the 4th screw rod 428 in groove 427, the first end of tumbler 429 is flexibly connected folder
Gripping member 430, the 4th screw rod 428 towards and adjacent tumbler 429 the second end, holder 430 includes fixed block and movable block, can
Slide rail is set on fixed block so that movable block can move on fixed block, and movable block connects the 5th screw rod 431, rotation the 5th
Screw rod 431, movable block is set to be moved towards fixed block, so as to clamp probe.Folder between the first end of tumbler 429 and the second end
Angle is obtuse angle, and the setting at obtuse angle is more convenient for the position of regulation holder 430.
First sliding shoe 46 is provided with the first fluting close to the side of the first slide rail 48, and running through in the first fluting has the first fastening
Part 432, the first fastener 432 adjoining Y-axis slide rail 43；The second sliding shoe 415 is opened close to the side of the second slide rail 417 provided with second
Groove 433, the second fluting 433 is interior through there is the second fastener 434, and the second fastener 434 abuts X-axis slide rail 412；3rd sliding shoe
423 are provided with the 3rd fluting 435 close to the side of the 3rd slide rail, and running through in the 3rd fluting 435 has the 3rd fastener 436, and the 3rd is tight
Firmware 436 abuts Z axis slide rail 422, after the position of sliding shoe is adjusted, rotatable fastener, fastener is close to slide rail, makes
Sliding shoe can not move, and avoid the occurrence of the situation that sliding shoe moves suddenly in probe welding process, cause probe accurate
Corresponding wafer position.
First fixed plate 41 is provided with the first fixed block 437 close to the side of the first screw rod 410, is set on the first fixed block 437
There are the first perforate, the first screw rod 410 to be connected after running through the first perforate with first bearing seat 49, the first fixed block 437 is away from first
The side of bearing block 49 is provided with the first action bars 438, and the first screw rod 410 is fixed in the first action bars 438.Second protruding block
411 are provided with the second fixed block 439 close to the side of the second screw rod 419, and 439 are provided with the second perforate, the second spiral shell on the second fixed block
Bar 419 is connected after running through the second perforate with second bearing seat 418, and the second side of the fixed block 439 away from second bearing seat 418 is set
There is the second action bars 440, the second screw rod 419 is fixed in the second action bars 440.3rd screw rod 425 is fixed on the 3rd action bars
In 441, the 4th screw rod 428 is fixed in the 4th action bars 442.First action bars 438, the second action bars 440, the 3rd action bars
441 and the 4th scale is equipped with action bars 442, using action bars drive screw turns, being easy to can be fast during welding
The position of velocity modulation section sliding shoe, the distance that operator can slide according to the scale control sliding shoe on action bars.
Holder 430 is towards holding tray 34.
During On-Wafer Measurement, wafer is placed on holding tray 34, and the convex of holding tray 34 is promoted by rotary screw 33
It is bittiness that so as to promote holding tray 34, orthogonal screw mandrel 33 can adjust position of the holding tray 34 all around in horizontal direction,
Drivening rod 37 is rotated by the rotating bar 310 of rotation process ring 311 first to rise or fall, it is adjacent with connecting rod 37 so as to jack
The vacuum tube 36 connect, vacuum tube 36 connect holding tray 34, so as to realize the position on the regulation vertical direction of holding tray 34；Vacuum tube
Wafer on 36 connection vacuum tanks absorption holding trays 34, ensures the firm of in test process wafer；, will during probe test
Probe card to be welded is placed between fixed mount 314, and the welding of probe on probe clamp is determined using wafer on holding tray 34
Position, ensure that wafer testing procedure middle probe can accurately contact the chip on wafer, ensure the accuracy of wafer sort, and
After the position of probe card is fixed, promoted using the slide rail on X, Y and Z axis on probe fixed arm 4 and screw rod and connected with screw rod
Spindle bearing is so as to promoting sliding shoe so that the holder for clamping probe obtains moving in three dimensions, ensures probe welding
Precision.
Finally it is emphasized that the utility model is not limited to above-mentioned embodiment, such as the shape of rotating disc, holding tray,
Each through hole, the change such as the change of shape of perforate should also be included in the protection domain of the utility model claims.
Claims (10)
1. wafer tester, it is characterised in that including：
Bottom plate, the bottom plate are provided with microscope assembly, wafer mounting table and probe fixed arm；
The microscope assembly includes microscope, and the microscopical object lens are towards the wafer mounting table；
The wafer mounting table includes rotating disc, and the rotating disc can be rotatably set on the bottom plate, in the rotating disc
Two screw mandrels are provided with, the bearing of trend of two screw mandrels is mutually perpendicular to, and holding tray is rotatably provided with the rotating disc,
The holding tray is provided with protruding block close to the one side of the rotating disc, and the screw mandrel abuts with the protruding block, the holding tray
End face be provided with adsorption tank, through having vacuum tube, the vacuum tube and the suction in the rotating disc and the holding tray
Attached groove connection, one side of the bottom plate away from the rotating disc are provided with connecting rod, and the first end connection first of the connecting rod rotates
Bar, first rotating bar connect the bottom plate, and the second end of the connecting rod abuts the vacuum tube, the both sides of the rotating disc
Fixed mount is provided with, the holding tray is arranged between the fixed mount；
The probe fixed arm includes base, and the base is provided with the first fixed plate, and first fixed plate is provided with first
Protruding block, the side of first protruding block are equipped with Y-axis slide rail, and first fixed plate is connected with the first of the first elastic component
End, the second end of first elastic component connect the first sliding shoe, and first sliding shoe is provided with the first slide rail, and described first
Slide rail and the Y-axis slide rail abut, and the side of first sliding shoe is provided with first bearing seat, and the first bearing seat connects the
One screw rod；
One side of first sliding shoe away from first fixed plate is provided with the second protruding block, the side of second protruding block
Provided with X-axis slide rail, first sliding shoe is connected with the first end of the second elastic component, the second end connection of second elastic component
The second sliding shoe, the second sliding shoe are provided with the second slide rail, and second slide rail abuts with the X-axis slide rail, and described the
The side of two sliding shoes is provided with second bearing seat, and the second bearing seat connects the second screw rod；
One side of the second sliding shoe away from first sliding shoe is provided with the second L-shaped fixed plate, and described second is solid
Fixed board is vertical with the second sliding shoe, and the first end of second fixed plate is provided with the 3rd protruding block, and the described 3rd is raised
The side of block is equipped with Z axis slide rail, and the 3rd protruding block is connected with the first end of the 3rd elastic component, the 3rd elastic component
Second end connects the 3rd sliding shoe, and the 3rd sliding shoe is provided with the 3rd slide rail, and the 3rd slide rail is adjacent with the Z axis slide rail
Connect, the first end of second fixed plate is additionally provided with fixed seat, and the 3rd screw rod, the 3rd screw rod are connected with the fixed plate
Direction simultaneously abuts the 3rd sliding shoe, and the bearing of trend of the Y-axis slide rail, the X-axis slide rail and the Z axis slide rail is mutual
Vertically；
The first end of contiguous block, the second end connection tumbler of the contiguous block, the connection are connected on 3rd sliding shoe
Groove is provided with block, running through in the groove has the 4th screw rod, and the first end of the tumbler is flexibly connected holder, described
Second end of the 4th screw rod direction and the adjacent tumbler；
The holder is towards the holding tray.
2. wafer tester according to claim 1, it is characterised in that：
Side of the fixed mount away from the holding tray is provided with locating piece, and correcting plate, the school are provided with the fixed mount
The first end of positive plate is equipped with positioning hole with the second end, and the locating piece runs through the positioning hole, the first end of the correcting plate
Correction unit is provided between the second end, the correction unit is arranged between the fixed mount, and the correction unit is provided with perforate, institute
The center of perforate is stated collinearly to set with the center of the holding tray.
3. wafer tester according to claim 2, it is characterised in that：
The microscope is provided with transparency cover towards one end of the holding tray, and illuminating lamp, the illumination are provided with the transparency cover
Lamp connects electric switch.
4. wafer tester according to claim 3, it is characterised in that：
Clearance portion is provided between the fixed mount of the both sides of the rotating disc, is provided with the fixed mount L-shaped
Fixture, the first end of the fixture are fixed on the fixed mount, and the clearance portion is run through at the second end of the fixture,
The first end of the fixture is provided with and screws part.
5. wafer tester according to claim 4, it is characterised in that：
The first rotation annulus is provided between the holding tray and the rotating disc, the first rotation annulus is fixed on described put
Put on disk, the second rotation annulus is provided between the rotating disc and the bottom plate, the second rotation annulus is fixed on described
On rotating disc, the vacuum tube is simultaneously through the described first inner ring and the described second inner ring for rotating annulus for rotating annulus.
6. wafer tester according to claim 5, it is characterised in that：
The vacuum tube is connected with the first placement annulus and second close to one end of the connecting rod and places annulus, and the vacuum tube is same
When through first place annulus inner ring with second place annulus inner ring, the second end of the connecting rod is placed on described first and put
Put between annulus and the second placement annulus.
7. wafer tester according to claim 1, it is characterised in that：
First sliding shoe is provided with the first fluting close to the side of first slide rail, and running through in first fluting has first
Fastener, first fastener abut the Y-axis slide rail；
The second sliding shoe is provided with the second fluting close to the side of second slide rail, and running through in second fluting has second
Fastener, second fastener abut the X-axis slide rail；
3rd sliding shoe is provided with the 3rd fluting close to the side of the 3rd slide rail, and running through in the 3rd fluting has the 3rd
Fastener, the 3rd fastener abut the Z axis slide rail.
8. wafer tester according to claim 7, it is characterised in that：
The holder includes fixed block and movable block, and the movable block connects the 5th screw rod.
9. wafer tester according to claim 8, it is characterised in that：
Angle between the first end of the tumbler and the second end is obtuse angle.
10. wafer tester according to claim 9, it is characterised in that：
First fixed plate is provided with the first fixed block close to the side of first screw rod, and first fixed block is provided with the
One perforate, first screw rod are connected through first perforate with the first bearing seat, and first fixed block is away from institute
The side for stating bearing block is provided with the first action bars, and first screw rod is fixed in first action bars；
First protruding block is provided with the second fixed block close to the side of second screw rod, and second fixed block is provided with the
Two perforates, second screw rod are connected through second perforate with the second bearing seat, and second fixed block is away from institute
The side for stating bearing block is provided with the second action bars, and second screw rod is fixed in second action bars；
3rd screw rod is fixed in the 3rd action bars；
4th screw rod is fixed in the 4th action bars；
Quarter is equipped with first action bars, second action bars, the 3rd action bars and the 4th action bars
Degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720738272.0U CN206931563U (en) | 2017-06-22 | 2017-06-22 | Wafer tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720738272.0U CN206931563U (en) | 2017-06-22 | 2017-06-22 | Wafer tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206931563U true CN206931563U (en) | 2018-01-26 |
Family
ID=61345660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720738272.0U Active CN206931563U (en) | 2017-06-22 | 2017-06-22 | Wafer tester |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206931563U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110931381A (en) * | 2019-12-11 | 2020-03-27 | 杭州易正科技有限公司 | Integrated circuit packaging testing device for continuous testing |
| CN111007080A (en) * | 2019-12-25 | 2020-04-14 | 成都先进功率半导体股份有限公司 | Wafer crack inspection device |
| CN112114238A (en) * | 2019-06-19 | 2020-12-22 | 矽电半导体设备(深圳)股份有限公司 | Wafer test system |
| CN115825352A (en) * | 2022-12-09 | 2023-03-21 | 南京博克纳自动化系统有限公司 | Flaw detection equipment |
| CN115932342A (en) * | 2023-02-20 | 2023-04-07 | 天津伍嘉联创科技发展股份有限公司 | Adjustable testboard for detecting electronic components |
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2017
- 2017-06-22 CN CN201720738272.0U patent/CN206931563U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112114238A (en) * | 2019-06-19 | 2020-12-22 | 矽电半导体设备(深圳)股份有限公司 | Wafer test system |
| CN110931381A (en) * | 2019-12-11 | 2020-03-27 | 杭州易正科技有限公司 | Integrated circuit packaging testing device for continuous testing |
| CN110931381B (en) * | 2019-12-11 | 2021-12-14 | 深圳市英赛尔电子有限公司 | Integrated circuit packaging testing device for continuous testing |
| CN111007080A (en) * | 2019-12-25 | 2020-04-14 | 成都先进功率半导体股份有限公司 | Wafer crack inspection device |
| CN111007080B (en) * | 2019-12-25 | 2022-07-12 | 成都先进功率半导体股份有限公司 | Wafer crack inspection device |
| CN115825352A (en) * | 2022-12-09 | 2023-03-21 | 南京博克纳自动化系统有限公司 | Flaw detection equipment |
| CN115825352B (en) * | 2022-12-09 | 2024-03-26 | 南京博克纳自动化系统有限公司 | Flaw detection equipment |
| CN115932342A (en) * | 2023-02-20 | 2023-04-07 | 天津伍嘉联创科技发展股份有限公司 | Adjustable testboard for detecting electronic components |
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