CN113903703A - Horizontal adjusting device of thimble mechanism - Google Patents
Horizontal adjusting device of thimble mechanism Download PDFInfo
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- CN113903703A CN113903703A CN202111502482.7A CN202111502482A CN113903703A CN 113903703 A CN113903703 A CN 113903703A CN 202111502482 A CN202111502482 A CN 202111502482A CN 113903703 A CN113903703 A CN 113903703A
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- adjusting unit
- ejector pin
- thimble
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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Abstract
The invention provides a horizontal adjusting device of an ejector pin mechanism, which comprises a plurality of ejector pin mechanisms and a plurality of ejector pin adjusting components, wherein each ejector pin mechanism comprises an ejector pin and an ejector structure; the ejector pin adjusting assembly comprises a vertical displacement adjusting unit and an angle adjusting unit, and the vertical displacement adjusting unit is connected with the fixed part of the jacking structure through a connecting piece to realize the adjustment of the top point of the ejector pin on the height; the upper end of the angle adjusting unit is fixedly connected with the cavity, and the lower end of the angle adjusting unit is fixedly connected with the vertical displacement adjusting unit and used for adjusting the angle between the thimble and the bottom surface of the cavity. The device is convenient for the installation of the thimble mechanism and adjustable in levelness, and can realize the quick adjustment of the angle between the thimble and the bottom surface of the cavity during installation, so that the plane where the vertexes of the thimbles are positioned is in a horizontal state; after the cavity is adjusted to be horizontal, the deviation of the top point of the thimble on the levelness caused by low processing precision of each device or assembly error can be compensated by adjusting the angle between the support and the bottom surface of the cavity, and the requirement on the processing precision of the device is reduced.
Description
Technical Field
The invention belongs to the technical field of semiconductor equipment, and particularly relates to a horizontal adjusting device of an ejector pin mechanism.
Background
In a semiconductor manufacturing process, particularly in the field of vacuum coating, a robot is generally used to transfer wafers between chambers, and in order to meet the need of the robot to grasp wafers, a pin mechanism is generally used in each chamber, the pin mechanism in the prior art is shown in fig. 1, the pin mechanism is connected to a chamber 102, the pin mechanism includes three pins 101, the three pins 101 are uniformly distributed on a base 103 and are vertically arranged with the base 103, the base 103 is arranged at the bottom inside the chamber 102, a jacking structure is arranged at the bottom of the base 103, the jacking structure includes a movable end 104 and a fixed end 105, the movable end 104 can move in the vertical direction, the movable end 104 penetrates through the chamber 102 and is fixedly connected to the bottom of the base 103, the bottom of the fixed end 105 is connected to a jacking support 106, and the jacking support 106 is connected to the bottom outside the chamber 102 through a bolt 107.
When the lifting mechanism is in use, the movable end 104 of the lifting structure drives the base 103 to move up and down along the vertical direction, so that the thimble 101 drives the wafer to move up and down, the manipulator can grab the wafer, when the thimble 101 is in a lifting state, the wafer is ensured to be in a horizontal state, otherwise, the wafer can be deviated, and a subsequent technological process is influenced, therefore, when the thimble 101 is in the lifting state, the levelness of the plane where the vertex is located is one of important indexes for ensuring the stability of the process.
However, the jacking structure is connected with the cavity through bolts or other fixing methods, so that the following problems exist: (1) the requirement on the machining precision of equipment is high, and the levelness can be influenced by the machining precision of a base, a jacking support and the like; (2) the levelness is difficult to adjust during installation; (3) wear or aging of the equipment over time can also cause the above-mentioned levelness to vary, making it difficult to adjust.
Therefore, there is a need to provide an improved solution to the above-mentioned deficiencies of the prior art.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a horizontal adjustment device for an ejector pin mechanism, which is used to solve the problems that the ejector pin mechanism in the prior art has high requirements for the machining precision of the equipment and it is difficult to adjust the levelness of the plane where the ejector pin is located during installation.
To achieve the above and other related objects, the present invention provides a horizontal adjustment device for a thimble mechanism, the horizontal adjustment device comprising:
the ejector pins penetrate through the bottom of the cavity and are positioned in the cavity, the jacking structure is arranged corresponding to the ejector pins, the bottom of each ejector pin is connected with a movable part of the jacking structure, and the movable part is used for driving the ejector pins to jack or fall;
the ejector pin adjusting assemblies are respectively arranged corresponding to the ejector pin mechanisms and comprise vertical displacement adjusting units and angle adjusting units;
the vertical displacement adjusting unit is connected with the fixing part of the jacking structure through a connecting piece and displaces along the vertical direction, so that the height of the top point of the thimble is adjusted;
the angle adjusting unit is located between the vertical displacement adjusting unit and the cavity, the upper end of the angle adjusting unit is fixedly connected with the bottom of the cavity, the lower end of the angle adjusting unit is fixedly connected with the vertical displacement adjusting unit, and the angle adjusting unit adjusts the angle between the plane where the vertical displacement adjusting unit and the cavity are located so as to adjust the angle between the thimble and the bottom surface of the cavity.
Preferably, the vertical displacement adjusting unit comprises a screw rod sliding block mechanism, the screw rod sliding block mechanism comprises a sliding block and a screw rod, one end of the sliding block is fixedly connected with the connecting piece, the other end of the sliding block is sleeved on the screw rod, the screw rod is vertically arranged below the cavity, and the screw rod rotates to drive the sliding block to slide along the screw rod.
Preferably, the vertical displacement adjusting unit further comprises a driving motor, an output end of the driving motor is connected with the lower end of the screw rod, and the driving motor drives the screw rod to rotate.
Preferably, the angle adjusting unit includes: the bottom of the top plate is provided with a groove and a plurality of threaded holes respectively; the support is positioned below the top plate, a plurality of through holes corresponding to the threaded holes are formed in the support, a supporting part is fixed on the support, and the supporting part is in a spherical convex shape and is connected with the groove in a matched manner; and the fastening bolts are respectively arranged in the through holes in a penetrating way and are matched and connected with the threaded holes.
Preferably, the output end of the driving motor and the screw rod are provided with a coupler therebetween, the input end of the coupler is connected with the output end of the driving motor, the output end of the coupler is connected with the screw rod, and the coupler is used for transmitting the power provided by the driving motor.
Preferably, a limiting structure is arranged on the connecting piece along the vertical direction, and two ends of the limiting structure extend out of the connecting piece.
Preferably, a first limiting plate is arranged at the top end of the driving motor and used for limiting the lower limit of the stroke of the jacking structure, and when the jacking structure moves to the lower limit of the stroke, the limiting structure is in contact with the first limiting plate;
the bottom of the cavity is connected with a second limiting plate, the second limiting plate is used for limiting the upper limit of the stroke of the jacking structure, and when the jacking structure moves to the upper limit of the stroke, the limiting structure is in contact with the second limiting plate.
Preferably, a first distance sensor is mounted on the thimble and used for measuring the distance between the top point of the thimble and an obstacle above the thimble.
Preferably, the horizontal adjusting device further comprises a bracket arranged at the lower end of the angle adjusting unit, a horizontal sensor is arranged on the bracket, and the horizontal sensor is used for measuring an angle between a plane where the lower end of the angle adjusting unit is located and a horizontal plane.
Preferably, a second distance sensor is further installed at the lower end of the angle adjusting unit, and the second distance sensor is used for measuring the relative distance between the top end of the movable part and the bottom end of the cavity.
As described above, the thimble mechanism horizontal adjusting device of the present invention has the following beneficial effects:
the invention provides a horizontal adjusting device of an ejector pin mechanism, which is convenient for the installation of the ejector pin mechanism and can adjust the levelness of the plane of the top point of an ejector pin, the horizontal adjusting device comprises a plurality of ejector pin mechanisms and a plurality of ejector pin adjusting components, each ejector pin mechanism comprises an ejector pin and an ejecting structure, each ejector pin adjusting component comprises a vertical displacement adjusting unit and an angle adjusting unit, when the whole device is installed, a plurality of ejector pins are all adjusted to ejecting positions, and the angle between each ejector pin and the bottom surface of a cavity is quickly adjusted by adjusting a support in the angle adjusting unit to a proper angle, so that the plane of the top point of each ejector pin is in a horizontal state, and the problem that the levelness of the plane of the ejector pin is difficult to adjust when equipment is installed in the prior art is solved; when the processing precision of each device in the device is not high or assembly errors cause the levelness deviation of the plane where the top point of each thimble is located, the levelness deviation can be compensated by adjusting the angle between the support and the bottom surface of the cavity after the cavity is adjusted to be horizontal, so that the processing precision requirement of each device is reduced.
In the long-term use process of the device, the levelness of the plane where the top point of the thimble is located is changed due to aging, abrasion or fatigue of equipment, the screw rod can be driven to rotate through the driving motor so as to drive the sliding block to displace on the screw rod, the levelness of the plane where the top point of the thimble is located is calibrated by accurately controlling the revolution number of the screw rod, the equipment in the whole device does not need to be disassembled and assembled again, and the stability of the whole device can be kept.
The vertical displacement adjusting unit and the angle adjusting unit are matched with each other, so that the height and the levelness of the top point of a single thimble can be adjusted at the same time, the more complicated levelness adjusting condition can be met, and the horizontal adjusting device is further provided with the first distance sensor, the second distance sensor and the horizontal sensor, so that the quick and automatic adjustment of the levelness of the plane where the top points of the multiple thimbles are located can be realized through a preset adjusting program.
Drawings
Fig. 1 is a schematic sectional view showing the installation of a thimble mechanism in the prior art.
FIG. 2 is a schematic structural diagram of a needle adjustment assembly according to an embodiment of the present invention.
Fig. 3 is a schematic view illustrating a first view angle structure of the horizontal adjustment device of the thimble mechanism according to an embodiment of the present invention.
Fig. 4 is a schematic view illustrating a second perspective structure of the horizontal adjustment device of the thimble mechanism according to the embodiment of the present invention.
Fig. 5 is a schematic cross-sectional view of an angle adjustment unit according to an embodiment of the present invention.
FIG. 6 is a schematic partial cross-sectional view of a thimble according to an embodiment of the invention.
Description of the element reference numerals
101. A thimble; 102. a cavity; 103. a base; 104. a movable end; 105. a fixed end; 106. jacking a support; 107. a bolt; 200. a thimble adjusting component; 210. a thimble; 211. a thimble body; 212. a first distance sensor; 220. a jacking structure; 231. a connecting member; 232. a slider; 233. a coupling; 234. a drive motor; 235. a screw rod; 241. a support; 242. a support portion; 243. a top plate; 244. fastening a bolt; 250. a support; 251. a second distance sensor; 260. a level sensor; 270. a limiting structure; 300. a cavity.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure.
Please refer to fig. 2 to 6. It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the conditions under which the present invention can be implemented, so that the present invention has no technical significance, and any structural modification, ratio relationship change, or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention. In addition, the terms "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for clarity of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the terms is not to be construed as a scope of the present invention.
It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the drawings only show the components related to the present invention rather than being drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of each component in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.
The jacking structure is connected with a cavity through a bolt in the prior art, the requirement on the machining precision of equipment is high, the machining precision of a base, a jacking support and the like can influence the levelness of the plane where the vertex of the thimble is located, the levelness of the plane where the vertex of the thimble is located is difficult to adjust during equipment installation, equipment aging, abrasion or fatigue caused by long-term use of the equipment can also cause the change of the levelness, and the levelness is difficult to adjust.
The invention provides a horizontal adjusting device of an ejector pin mechanism, which is convenient for the installation of the ejector pin mechanism and can adjust the levelness of the plane of the top point of an ejector pin, the horizontal adjusting device comprises a plurality of ejector pin mechanisms and a plurality of ejector pin adjusting components, each ejector pin mechanism comprises an ejector pin and an ejecting structure, each ejector pin adjusting component comprises a vertical displacement adjusting unit and an angle adjusting unit, when the whole device is installed, a plurality of ejector pins are all adjusted to ejecting positions, and the angle between each ejector pin and the bottom surface of a cavity is quickly adjusted by adjusting a support in the angle adjusting unit to a proper angle, so that the plane of the top point of each ejector pin is in a horizontal state, and the problem that the levelness of the plane of the ejector pin is difficult to adjust when equipment is installed in the prior art is solved; when the processing precision of each device in the device is not high or assembly errors cause the levelness deviation of the plane where the top point of each thimble is located, the levelness deviation can be compensated by adjusting the angle between the support and the bottom surface of the cavity after the cavity is adjusted to be horizontal, so that the processing precision requirement of each device is reduced; in the long-term use process of the device, the levelness of the plane where the top point of the thimble is located is changed due to aging, abrasion or fatigue of equipment, the screw rod can be driven to rotate through the driving motor so as to drive the sliding block to displace on the screw rod, and the levelness of the plane where the top point of the thimble is located is calibrated by accurately controlling the revolution number of the screw rod, so that the equipment in the whole device is not required to be disassembled and assembled again, and the stability of the whole device can be kept; in addition, the vertical displacement adjusting unit and the angle adjusting unit are matched with each other, so that the adjustment of the height and the levelness of the top point of a single thimble can be realized simultaneously, the more complicated levelness adjusting condition can be met, and the quick automatic adjustment of the levelness of the plane where the top points of the multiple thimbles are located is realized through a preset adjusting program by the aid of the first distance sensor, the second distance sensor and the horizontal sensor.
Referring to fig. 2-6, the present invention provides a horizontal adjustment device for a thimble mechanism, which comprises a plurality of thimble mechanisms and a plurality of thimble adjustment assemblies 200; the ejector pin mechanism comprises an ejector pin 210 and a jacking structure 220, the ejector pin 210 penetrates through the bottom of the cavity 300 and is positioned in the cavity 300, the jacking structure 220 is arranged corresponding to the ejector pin 210, the bottom of the ejector pin 210 is connected with a movable part of the jacking structure 220, and the movable part is used for driving the ejector pin 210 to jack or fall; the plurality of ejector pin adjusting assemblies 200 are respectively arranged corresponding to the plurality of ejector pin mechanisms, each ejector pin adjusting assembly 200 comprises a vertical displacement adjusting unit and an angle adjusting unit, each vertical displacement adjusting unit is connected with the fixed part of the jacking structure 220 through a connecting piece 231, and each vertical displacement adjusting unit is displaced along the vertical direction, so that the height of the top point of the ejector pin 210 is adjusted; the angle adjusting unit is located between the vertical displacement adjusting unit and the cavity 300, the upper end of the angle adjusting unit is fixedly connected with the bottom of the cavity 300, the lower end of the angle adjusting unit is fixedly connected with the vertical displacement adjusting unit, and the angle adjusting unit adjusts the angle between the plane where the vertical displacement adjusting unit and the cavity 300 are located so as to adjust the angle between the ejector pin 210 and the bottom surface of the cavity 300.
Specifically, referring to fig. 2, the jacking structure 220 includes a movable portion and a fixed portion, one end of the movable portion is connected to the bottom of the thimble 210, the other end of the movable portion is inserted into the fixed portion, the position of the fixed portion is relatively fixed, the movable portion moves in a vertical direction under a driving action with respect to the fixed portion, and the movable portion is lifted or lowered by a driving device.
Further, when the thimble 210 is in the jacking state, the thimble 210 penetrates through the bottom of the cavity 300 and is located in the cavity 300, and the thimble 210 is used for jacking up the wafer, at this time, whether the movable portion of the jacking structure 220 penetrates through the bottom of the cavity 300 or not is also comprehensively considered according to the length of the thimble 210 and the requirement of the actual use condition, which is not limited excessively herein.
Further, adjust the angle between vertical displacement regulating unit and the plane of cavity 300 bottom place through angle regulating unit, the change of angle drives the fixed part of jacking structure 220 and takes place the change of angle and height to adjust the angle of thimble 210 and cavity 300 bottom surface, a plurality of angle regulating units and/or a plurality of vertical displacement regulating unit cooperation can be used for adjusting the planar levelness in a plurality of thimbles 210 summits place.
In practical application, when the whole device is installed, the thimble 210 is adjusted to the jacking position, the angle between the vertical displacement adjusting unit and the plane where the bottom of the cavity 300 is located is adjusted through the angle adjusting unit, and as the jacking structure 220 is connected with the vertical displacement adjusting unit, the levelness of the plane where the vertex of the thimble 210 is located and the position of the vertex of the thimble 210 can be changed along with the adjustment of the angle between the vertical displacement adjusting unit and the plane where the bottom of the cavity 300 is located, so that the plane where the vertex of the thimble 210 is located can be quickly adjusted to be in a horizontal state, and then the installation of the whole device is completed through the fixed angle adjusting unit; when the whole device is used, if the levelness of the plane where the top points of the ejector pins 210 are located needs to be adjusted again, the whole device does not need to be disassembled, and only the vertical displacement adjusting unit needs to be adjusted, so that the heights of the ejector pins 210 of different ejector pin 210 mechanisms are adjusted, and the levelness of the plane where the top points of the ejector pins 210 are located is adjusted.
As an example, the lifting mechanism comprises a screw rod slider mechanism, the screw rod slider mechanism comprises a slider 232 and a screw rod 235, one end of the slider 232 is fixedly connected with the connecting piece 231, the other end of the slider 232 is sleeved on the screw rod 235, the screw rod 235 is vertically arranged below the cavity 300, and the screw rod 235 rotates to drive the slider 232 to slide along the screw rod 235, so that the lifting structure 220 is driven to move, and the adjustment of the vertex of a single thimble on the height is realized.
As an example, the vertical displacement adjusting unit further includes a driving motor 234, an output end of the driving motor 234 is connected with a lower end of the screw rod 235, and the driving motor 234 drives the screw rod 235 to rotate.
Further, in the using process of the whole device, the driving motor 234 rotates to drive the screw rod 235 to rotate, the screw rod 235 drives the sliding block 232 to move along the direction of the screw rod 235, thereby driving the jacking structure 220 to move through the fixing part, through the arrangement, the height of the jacking structure 220 is adjusted by the vertical displacement adjusting unit, the accuracy of the levelness of the plane where the top point of the thimble 210 is positioned depends on the accuracy of the vertical displacement adjusting unit, therefore, the precision of the structures of the driving motor 234, the screw rod 235 and the slide block 232 in the vertical displacement adjusting unit directly affects the levelness of the plane where the top point of the thimble 210 is located, the number of rotations of the lead screw can be precisely controlled by controlling the driving motor 234, thereby precisely controlling the adjustment distance, the method has the advantages of avoiding errors of manual operation, having excellent expansibility, greatly improving the precision of the vertical displacement adjusting unit, and theoretically reaching the precision of less than 0.025 mm.
Preferably, the sliding block 232 is in threaded fit connection with the screw rod 235, the screw rod-sliding block mechanism in the embodiment is mainly used for converting the rotary motion of the screw rod 235 into the linear motion of the sliding block 232, and the displacement change of the vertical displacement adjusting unit can be accurately controlled according to the rotation number of the screw rod 235 and the thread pitch of the thread, so that the displacement is quantized, and the adjustment of the height of the top point of the thimble 210 can be more accurately controlled.
As an example, a coupling 233 is disposed between an output end of the driving motor 234 and the lead screw 235, an input end of the coupling 233 is connected to the output end of the driving motor 234, an output end of the coupling 233 is connected to the lead screw 235, and the coupling 233 is configured to transmit power provided by the driving motor 234.
Specifically, the coupling 233 is a mechanical component for firmly coupling the driving shaft and the driven shaft of different mechanisms to rotate together and transmitting motion and torque, and the coupling 233 can compensate for displacement caused by inaccurate manufacture and installation, deformation or thermal expansion during operation, so that the coupling 233 is provided in the present embodiment, which can further improve the use accuracy of the whole apparatus. The type and specific type of coupler 233 is not overly limited herein.
As an example, the angle adjusting unit includes: a top plate 243, a holder 241, and a plurality of fastening bolts 244; the bottom of the top plate 243 is respectively provided with a groove and a plurality of threaded holes; the support 241 is located below the top plate 243, a plurality of through holes corresponding to the threaded holes are formed in the support 241, a support part 242 is fixed on the support 241, and the support part 242 is in a spherical convex shape and is connected with the groove in a matched mode; the fastening bolts 244 are respectively inserted into the through holes and are connected with the threaded holes in a matching manner.
Specifically, the vertical displacement adjusting unit and the angle adjusting unit may be fixedly connected to the bottom of the support 241 through a screw rod 235, and rotatably connected to the screw rod 235 through a bearing at the bottom of the support 241, and if the upper end of the screw rod 235 is not connected to the bottom of the support 241, the vertical displacement adjusting unit and the support 241 need to be fixedly connected through other methods.
Referring to fig. 2, in the present embodiment, the top plate 243 coincides with the bottom of the cavity 300, the top plate 243 is the cavity 300 in the present embodiment, the bottom of the cavity 300 is provided with a groove and a plurality of threaded holes, the supporting portion 242 of the spherical convex shape on the support 241 is correspondingly matched and connected with the groove, when in use, the support 241 is adjusted to a proper angle, the fastening bolt 244 is inserted into the through hole and matched with the threaded hole, so as to realize rapid adjustment and fixation of the angle, even if the deviation of the levelness is generated due to low processing precision of the cavity 300, only the cavity 300 needs to be adjusted to be horizontal, and then the angle of the plane where the support 241 and the bottom of the cavity 300 are located is adjusted, so that the deviation of the levelness can be compensated.
In another embodiment, referring to fig. 5, the top plate 243 is a single component, when in use, the top plate 243 is fixed to the bottom of the cavity 300, and the bottom of the top plate 243 is provided with a groove and a threaded hole, so that the top plate 243, the support 241 and the plurality of fastening bolts 244 in the angle adjusting unit can be independently machined, the requirement on machining precision of the cavity 300 can be further reduced, and the rejection rate of the cavity 300 can be reduced.
The size of the through hole is slightly larger than the outer diameter of the fastening bolt 244, so that the fastening bolt 244 can pass through the through hole and can be adjusted in the through hole in a small range, the size of the through hole can meet actual requirements, and the number, size, distribution and the like of the through hole, the threaded hole and the fastening bolt 244 are not limited excessively; in addition, preferably, the depth of the shape of the groove may be slightly less than the height of the arc-shaped surface of the spherical convex-shaped supporting portion 242, and the radius of the groove is equal to the radius of the arc-shaped surface, so that the contact between the top plate 243 and the supporting portion 242 can be more stable, and the depth and the radius of the arc-shaped surface of the groove and the supporting portion 242 may be set according to actual needs, which is not limited herein.
As an example, the connecting member 231 is provided with a limiting structure 270 along the vertical direction, and both ends of the limiting structure 270 extend out of the connecting member 231.
Specifically, referring to fig. 2, the limiting structure 270 is rod-shaped, and the limiting structure 270 penetrates and extends out of the upper end and the lower end of the connecting element 231, and the specific shape and structure of the limiting structure 270 are not limited herein.
As an example, a top end of the driving motor 234 is provided with a first limiting plate, the first limiting plate is used for limiting a lower limit of a stroke of the jacking structure 220, and when the jacking structure 220 moves to the lower limit of the stroke, the limiting structure 270 contacts with the first limiting plate.
Specifically, when slider 232 passes through connecting piece 231 and drives jacking structure 220 downstream, limit structure 270's lower extreme and first limiting plate contact, slider 232 just can not continue downstream to restriction jacking structure 220 takes place the displacement downwards, and concrete shape, the structure about first limiting plate specifically do not excessively restrict here, can satisfy actual need can.
As an example, a second limiting plate is connected to the bottom of the cavity 300, and the second limiting plate is used for limiting the upper limit of the stroke of the jacking structure 220, and when the jacking structure 220 moves to the upper limit of the stroke, the limiting structure 270 contacts with the second limiting plate.
Specifically, when slider 232 passes through connecting piece 231 and drives jacking structure 220 rebound, limit structure 270's upper end and second limiting plate contact, slider 232 just can not continue rebound, and restriction jacking structure 220 upwards takes place the displacement this moment, and about the concrete shape of second limiting plate, structure, do not do too restriction here, can satisfy actual need can.
As an example, a first distance sensor 212 is installed on the thimble 210, and the first distance sensor 212 is used for measuring a distance between a vertex of the thimble 210 and an obstacle above the thimble 210.
Specifically, referring to fig. 6, which is a schematic view of a partial cross-sectional structure of a thimble, the thimble 210 includes a thimble body 211, the first distance sensor 212 is disposed on a top of the thimble body 211 and is parallel to a vertical direction of the thimble body 211, before a wafer is mounted, the first distance sensors 212 of different thimbles 210 obtain a distance between a vertex of the thimble 210 and a top of the cavity 300, and based on the distance, a levelness of a plane where the vertex of the thimble 210 is located is adjusted by the angle adjusting unit. In addition, in CVD (chemical vapor deposition), the first distance sensor 212 may further obtain the distance between the shower head and the top of the thimble 210 before the wafer is mounted, so as to adjust the parallelism between the shower head and the wafer based on the distance, thereby improving the uniformity of the coating.
As an example, the horizontal adjusting device further includes a bracket 250 disposed at the bottom of the lower end of the angle adjusting unit, a horizontal sensor 260 is mounted on the bracket 250, and the horizontal sensor 260 is used for measuring an angle between a plane where the lower end of the angle adjusting unit is located and a horizontal plane.
Specifically, the horizontal sensor 260 is disposed at the bottom of the support 241 through the bracket 250, and is used for measuring an angle between a plane where the support 241 is located and a horizontal plane, so as to obtain an angle between the thimble 210 and a plane where the bottom surface of the cavity 300 is located, thereby implementing that a plane where vertexes of the plurality of thimbles 210 are located is in a horizontal state. In this embodiment, the specific structure of the bracket 250 and the connection manner with other components are not limited herein.
As an example, a second distance sensor 251 is further installed at the lower end of the angle adjusting unit, and the second distance sensor 251 is used for measuring the relative distance between the top end of the movable part and the bottom end of the cavity 300.
Specifically, when the thimble 210 is in the jacking operating state, the stroke of the movable portion of the jacking structure 220 is fixed, the length of the fixed portion is also fixed, and the distance from the second distance sensor 251 to the bottom of the cavity 300 is also fixed, so that the distance between the second distance sensor 251 and the bottom end of the fixed portion is measured by the second distance sensor 251, the relative distance between the top end of the movable portion and the bottom end of the cavity 300 is obtained, and the height of the thimble 210 is obtained. As to the specific installation position of the second distance sensor 251 at the lower end of the angle adjusting unit, it is preferable that the second distance sensor is installed at one side of the bracket without being excessively limited herein.
As an example, the level adjustment device further includes a controller electrically connected to the first distance sensor 212, the second distance sensor 251, and the level sensor 260, respectively.
Specifically, the first distance sensor 212, the second distance sensor 251 and the level sensor 260 are qualitatively connected to the controller, and the quick and automatic adjustment of the levelness of the vertexes of the plurality of thimbles 210 is realized through a preset adjustment program.
In summary, the invention provides a horizontal adjusting device of a thimble mechanism, which is convenient for the installation of the thimble mechanism and the levelness of the plane of the top point of the thimble is adjustable, and the horizontal adjusting device comprises a plurality of thimble mechanisms and a plurality of thimble adjusting components, wherein each thimble mechanism comprises a thimble and a jacking structure, each thimble adjusting component comprises a vertical displacement adjusting unit and an angle adjusting unit, when the whole device is installed, a plurality of thimbles are all adjusted to jacking positions, and the angle between each thimble and the bottom surface of a cavity is rapidly adjusted by adjusting a support in the angle adjusting unit to a proper angle, so that the plane of the top points of the plurality of thimbles is in a horizontal state, and the problem that the levelness of the plane of the thimbles is difficult to adjust when the device is installed in the prior art is solved; when the processing precision of each device in the device is not high or assembly errors cause the levelness deviation of the plane where the top point of each thimble is located, the levelness deviation can be compensated by adjusting the angle between the support and the bottom surface of the cavity after the cavity is adjusted to be horizontal, so that the processing precision requirement of each device is reduced; in the long-term use process of the device, the levelness of the plane where the top point of the thimble is located is changed due to aging, abrasion or fatigue of equipment, the screw rod can be driven to rotate through the driving motor so as to drive the sliding block to displace on the screw rod, and the levelness of the plane where the top point of the thimble is located is calibrated by accurately controlling the revolution number of the screw rod, so that the equipment in the whole device is not required to be disassembled and assembled again, and the stability of the whole device can be kept; in addition, the vertical displacement adjusting unit and the angle adjusting unit are matched with each other, so that the adjustment of the height and the levelness of the top point of a single thimble can be realized simultaneously, the more complicated levelness adjusting condition can be met, and the quick automatic adjustment of the levelness of the plane where the top points of the multiple thimbles are located is realized through a preset adjusting program by the aid of the first distance sensor, the second distance sensor and the horizontal sensor. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. The horizontal adjusting device of the thimble mechanism is characterized by comprising:
the ejector pins penetrate through the bottom of the cavity and are positioned in the cavity, the jacking structure is arranged corresponding to the ejector pins, the bottom of each ejector pin is connected with a movable part of the jacking structure, and the movable part is used for driving the ejector pins to jack or fall;
the ejector pin adjusting assemblies are respectively arranged corresponding to the ejector pin mechanisms and comprise vertical displacement adjusting units and angle adjusting units;
the vertical displacement adjusting unit is connected with the fixed part of the jacking structure through a connecting piece and drives the connecting piece to displace along the vertical direction, so that the height of the top point of the thimble is adjusted;
the angle adjusting unit is located between the vertical displacement adjusting unit and the cavity, the upper end of the angle adjusting unit is fixedly connected with the bottom of the cavity, the lower end of the angle adjusting unit is fixedly connected with the vertical displacement adjusting unit, and the angle adjusting unit adjusts the angle between the vertical displacement adjusting unit and the plane where the bottom of the cavity is located so as to adjust the angle between the thimble and the bottom surface of the cavity.
2. The ejector pin mechanism level adjustment device according to claim 1, wherein: the vertical displacement adjusting unit comprises a screw rod sliding block mechanism, the screw rod sliding block mechanism comprises a sliding block and a screw rod, one end of the sliding block is fixedly connected with the connecting piece, the other end of the sliding block is sleeved on the screw rod, the screw rod is vertically arranged below the cavity, and the screw rod rotates to drive the sliding block to slide along the screw rod.
3. The ejector pin mechanism level adjustment device according to claim 2, wherein: the vertical displacement adjusting unit further comprises a driving motor, the output end of the driving motor is connected with the lower end of the screw rod, and the driving motor drives the screw rod to rotate.
4. The ejector pin mechanism level adjustment device according to claim 3, wherein: the output end of the driving motor and the screw rod are provided with a coupler, the input end of the coupler is connected with the output end of the driving motor, the output end of the coupler is connected with the screw rod, and the coupler is used for transmitting the power provided by the driving motor.
5. The ejector pin mechanism level adjustment device according to claim 1, wherein: the angle adjusting unit includes:
the bottom of the top plate is provided with a groove and a plurality of threaded holes respectively;
the support is positioned below the top plate, a plurality of through holes corresponding to the threaded holes are formed in the support, a supporting part is fixed on the support, and the supporting part is in a spherical convex shape and is connected with the groove in a matched manner;
and the fastening bolts are respectively arranged in the through holes in a penetrating way and are matched and connected with the threaded holes.
6. The ejector pin mechanism level adjustment device according to claim 3, wherein: the connecting piece is provided with a limiting structure along the vertical direction, and two ends of the limiting structure extend out of the connecting piece.
7. The ejector pin mechanism level adjustment device of claim 6, wherein: a first limiting plate is arranged at the top end of the driving motor and used for limiting the lower stroke limit of the jacking structure, and when the jacking structure moves to the lower stroke limit, the limiting structure is in contact with the first limiting plate;
the bottom of the cavity is connected with a second limiting plate, the second limiting plate is used for limiting the upper limit of the stroke of the jacking structure, and when the jacking structure moves to the upper limit of the stroke, the limiting structure is in contact with the second limiting plate.
8. The ejector pin mechanism level adjustment device according to claim 1, wherein: the thimble is provided with a first distance sensor, and the first distance sensor is used for measuring the distance between the top point of the thimble and an obstacle above the thimble.
9. The ejector pin mechanism level adjustment device according to claim 1, wherein: the horizontal adjusting device further comprises a support arranged at the lower end of the angle adjusting unit, a horizontal sensor is arranged on the support, and the horizontal sensor is used for measuring an angle between a plane where the lower end of the angle adjusting unit is located and a horizontal plane.
10. The ejector pin mechanism level adjustment device according to claim 1, wherein: and a second distance sensor is further installed at the lower end of the angle adjusting unit and used for measuring the relative distance between the top end of the movable part and the bottom end of the cavity.
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| CN202111502482.7A CN113903703B (en) | 2021-12-10 | 2021-12-10 | Horizontal adjusting device of thimble mechanism |
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| CN202111502482.7A CN113903703B (en) | 2021-12-10 | 2021-12-10 | Horizontal adjusting device of thimble mechanism |
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| CN113903703B (en) | 2022-04-12 |
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