CN114074916A - Micro-electronic packaging self-adaptive parallel sealing and welding mechanism in high vacuum state - Google Patents
Micro-electronic packaging self-adaptive parallel sealing and welding mechanism in high vacuum state Download PDFInfo
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- CN114074916A CN114074916A CN202111553893.9A CN202111553893A CN114074916A CN 114074916 A CN114074916 A CN 114074916A CN 202111553893 A CN202111553893 A CN 202111553893A CN 114074916 A CN114074916 A CN 114074916A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
- B23K31/02—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/02—Carriages for supporting the welding or cutting element
- B23K37/0252—Steering means
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- Microelectronics & Electronic Packaging (AREA)
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- Optics & Photonics (AREA)
- Arc Welding In General (AREA)
Abstract
The invention discloses a microelectronic packaging self-adaptive parallel sealing and welding mechanism in a high vacuum state, which solves the problem of how to complete high-quality parallel sealing and welding of a thin-shell device cover plate and a tube shell in a vacuum environment at low cost so as to improve the sealing and welding yield; the floating parallel welding wheel support is arranged, so that two parallel welding wheels on the support are in floating pressure joint with a parallel welding line between the cover plate and the tube shell, weights are arranged at the top end of the parallel welding wheel support, and the welding pressure of the parallel welding wheels on the welding line is adjusted by increasing or reducing the number of the weights, so that the adjustment of the self-adaptive welding pressure in the welding process is realized; a shoulder-pole-shaped half-square jacking frame body is arranged between the left and right parallel welding wheel brackets, and the floating parallel welding wheel brackets are lifted and lowered through the jacking connection of the eccentric wheel to the half-square jacking frame body, so that the conversion between the welding state of the two parallel welding wheels and the waiting welding state is completed; the sealing quality of the packaging assembly is greatly improved.
Description
Technical Field
The present invention relates to microelectronic packaging devices, and more particularly, to a mechanism and a method for parallel welding a thin-shell device cover plate and a shell in a microelectronic package assembly in a high vacuum chamber.
Background
Microelectronic package assembly (MEMS device), i.e. a technical process of arranging, sticking, fixing and connecting chips and other elements on a frame or a substrate by using a membrane technology and a micro-machining technology, leading out a wiring terminal, potting and fixing the wiring terminal through a plastic insulating medium, and then assembling the microelectronic device and a micro-miniature element into a suitable producible electronic component, part or a system by using a microelectronic technology and a high-density assembly technology according to an electrical schematic diagram or a logic diagram; at present, vacuum packaging equipment is changed from a single machine to a multi-cavity production line capable of carrying out multiple processes (such as baking, activating, aligning, sealing and welding and testing), and a high-vacuum multi-cavity production line is produced, so that the transfer efficiency of microelectronic packaging components under high vacuum is greatly improved; in a high vacuum state, the packaging of a thin shell cover plate and a tube shell in microelectronic packaging is completed by a parallel welding mechanism; after the thin-shell cover plate is accurately aligned and placed on the tube shell, the parallel welding mechanism can drive the welding head to descend for a certain stroke, the two parallel welding wheels are pressed on a welding seam at the welding position of the cover plate and the tube shell, and then the parallel welding mechanism drives the two parallel welding wheels to horizontally move along the welding seam, so that the cover plate and the tube shell are welded; the existing parallel welding mechanism has the following defects: (1) the driving motors of the parallel welding mechanism are all vacuum motors which have the defects of high price and short service life, so that the equipment cost is greatly improved, and the equipment maintenance cost is high; (2) for packaging cover plates of different models, the pressing stroke of the parallel welding mechanism needs to be repeatedly and accurately adjusted, so that the problems of time and labor consumption are caused, and the production rhythm and efficiency on site are influenced; (3) the thin-shell cover plate inevitably has processing errors in machining, the pressing stroke of the fixed parallel welding mechanism cannot completely meet the requirement of the pressing stroke when all the cover plates are welded with the tube shell, and the improper pressing stroke of the cover plate with larger errors can cause the displacement of a packaging window arranged on the tube shell and directly cause the reduction of the finished product rate of packaged components due to the uneven force application of welding seams at two sides when parallel welding wheels are used for welding the cover plate with larger errors; (4) the driving mechanism for pressing and lifting the welding head of the welding mechanism is complex and has high maintenance cost.
Disclosure of Invention
The invention provides a microelectronic packaging self-adaptive parallel sealing and welding mechanism in a high vacuum state, which solves the technical problem of how to complete high-quality parallel sealing and welding of a thin-shell device cover plate and a tube shell in a vacuum environment at low cost so as to improve the sealing and welding yield.
The invention solves the technical problems by the following technical scheme:
the general concept of the invention is as follows: the common motor is arranged in the closed independent cavity and is isolated by the magnetic fluid, so that vacuum transmission outside the independent cavity is realized, and the common motor is used for replacing the vacuum motor to complete the driving task of the welding mechanism; the floating parallel welding wheel support is arranged, so that two parallel welding wheels on the support are in floating pressure joint with a parallel welding line between the cover plate and the tube shell, weights are arranged at the top end of the parallel welding wheel support, and the welding pressure of the parallel welding wheels on the welding line is adjusted by increasing or reducing the number of the weights, so that the adjustment of the self-adaptive welding pressure in the welding process is realized; a shoulder-pole-shaped half-square jacking frame body is arranged between the left and right parallel welding wheel brackets, and the floating parallel welding wheel brackets are lifted and lowered through the jacking connection of the eccentric wheel to the half-square jacking frame body, so that the conversion between the welding state of the two parallel welding wheels and the waiting welding state is completed; the invention abandons the setting and adjusting procedures of the prepressing stroke of the welding head mechanism in the traditional parallel welding, and greatly improves the sealing and welding quality of the packaging assembly.
A micro-electronic packaging self-adaptive parallel sealing and welding mechanism in a high vacuum state comprises a high vacuum sealed cavity, wherein a box-shaped frame body is arranged in the high vacuum sealed cavity, an eccentric wheel is arranged on the front vertical surface of a front side vertical plate of the box-shaped frame body, a sealed shell of an eccentric wheel driving motor is arranged in the box-shaped frame body, the eccentric wheel driving motor is arranged in the sealed shell, air is sealed in the sealed shell, and an output shaft of the eccentric wheel driving motor is connected with an eccentric wheel shaft of the eccentric wheel after passing through a sealed magnetic fluid; a U-shaped frame plate is buckled on the front vertical face of the front side vertical plate, an eccentric wheel is movably arranged in the frame of the U-shaped frame plate, a left lifting guide rail block and a right lifting guide rail block are respectively and fixedly arranged on the front side vertical face of the U-shaped frame plate in parallel, a left guide rail groove in the vertical direction is fixedly arranged on a front vertical plate on the left side of the U-shaped frame plate, a right guide rail groove in the vertical direction is fixedly arranged on a front vertical plate on the right side of the U-shaped frame plate, a left upright post of the half-square lifting frame is arranged in the left guide rail groove in the vertical direction, a right upright post of the half-square lifting frame is arranged in the right guide rail groove in the vertical direction, a lifting frame jacking block is fixedly connected on the lower bottom surface of the middle part of the half-square-shaped lifting frame cross beam, a jacking guide wheel shaft is connected on the lifting frame jacking block, a jacking guide wheel is arranged on a wheel shaft of the jacking guide wheel, and the jacking guide wheel is connected with the side surface of the outer edge of the eccentric wheel in a jacking mode; a left lifting slide block is arranged on the left lifting guide rail block, a right lifting slide block is arranged on the right lifting guide rail block, a left parallel welding wheel mechanism is fixedly connected onto the left lifting slide block, a right parallel welding wheel mechanism is fixedly connected onto the right lifting slide block, and the structure of the left parallel welding wheel mechanism is completely the same as that of the right parallel welding wheel mechanism; a left parallel welding wheel support of a left parallel welding wheel mechanism is connected to the left lifting slide block, a left welding wheel assembly is connected to the lower end of the left parallel welding wheel support, a left welding wheel is connected to the left welding wheel assembly, a weight left support plate is fixedly connected to the upper end of the left parallel welding wheel support, a left weight through connecting rod is arranged on the weight left support plate, and a left weight is placed on the weight left support plate through a through connecting hole in the weight left support plate; and a sealing assembly is arranged right below the space between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, and the left welding wheel is pressed on a left welding line of the sealing assembly.
The left welding wheel assembly is connected to the lower end of the left parallel welding wheel bracket through a left L-shaped hoisting plate, and the left L-shaped hoisting plate and the lower end of the left parallel welding wheel bracket are connected together through an insulating washer and an insulating screw; the weight of a left weight placed on the left parallel welding wheel mechanism is the same as the weight of a right weight placed on the right parallel welding wheel mechanism; the lower bottom surface of the weight left supporting plate is provided with a nylon jacking screw, and the lifting frame jacking block is arranged right below the nylon jacking screw.
The left welding wheel and the right welding wheel are in floating pressure joint with two welding lines of the sealing and welding assembly, and pre-pressure of the two parallel welding lines of the sealing and welding assembly is adjusted and set by adjusting the number and the weight of left weights placed on a weight left supporting plate and the number and the weight of right weights placed on a right parallel welding wheel mechanism.
When the left welding wheel and the right welding wheel weld two parallel welding lines of the sealing and welding assembly, the lifting block of the lifting frame in the shape of a half square is arranged right below the nylon lifting screw, and at the moment, the left parallel welding wheel mechanism and the right parallel welding wheel mechanism are in a separation state with the lifting frame in the shape of a half square; when the left welding wheel and the right welding wheel are used for sealing the welding assembly, after two parallel welding seams of the sealing assembly are welded, an eccentric wheel driving motor arranged in the closed shell is started, the eccentric wheel jacks up a half-square-shaped lifting frame through a jacking guide wheel, the half-square-shaped lifting frame jacks up a left top-connected weight support plate and a right top-connected weight support plate in a right parallel welding wheel mechanism, and the left welding wheel and the right welding wheel are lifted up and separated from the sealing assembly.
The driving motor of the welding mechanism is sealed in the air cavity to work, and a common linear motor can be selected, so that the investment cost of the motor is greatly saved, and the defect of short service life of the linear motor is overcome; the parallel welding head mechanism is designed into the floating mechanism, the weight of a weight on the floating mechanism is adjusted to control the downward pressure of welding, the self-adaptation of a welding wheel and a seal welding assembly is realized in the welding process, and the quality of a welding seam is improved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural diagram of the vertical guide rail seat of the two parallel welding wheel mechanisms and the lifting guide rail seat of the half-square lifting frame 317 of the invention;
FIG. 3 is a schematic structural view of a half-square lifting frame 317 of the present invention;
FIG. 4 is a schematic structural view of the U-shaped frame plate 313 of the present invention;
FIG. 5 is a diagram showing the relationship between the eccentric 323, the lift roller 324, the lift frame lift block 326 and the half-square shaped lift frame 317 according to the present invention;
fig. 6 is a diagram of the matching relationship among the lifting block 326 of the lifting frame, the left support plate 306 of the weight and the nylon lifting screw 327 of the present invention;
FIG. 7 is a schematic structural view of a left parallel weld wheel mechanism bracket of the present invention;
fig. 8 is a schematic structural view of a left weld wheel assembly 301 of the present invention.
Detailed Description
The invention is described in detail below with reference to the accompanying drawings:
a micro-electronic packaging self-adaptive parallel sealing and welding mechanism in a high vacuum state comprises a high vacuum sealed cavity, wherein a box-shaped frame body 315 is arranged in the high vacuum sealed cavity, an eccentric wheel 323 is arranged on a front vertical surface of a front side vertical plate 316 of the box-shaped frame body 315, a sealed shell 328 of an eccentric wheel driving motor is arranged in the box-shaped frame body 315, the sealed shell 328 is internally provided with the eccentric wheel driving motor, air is sealed in the sealed shell 328, and an output shaft of the eccentric wheel driving motor is connected with an eccentric wheel shaft 322 of the eccentric wheel 323 after passing through a sealed magnetic fluid; a U-shaped frame plate 313 is buckled on the front vertical face of the front vertical plate 316, an eccentric wheel 323 is movably arranged in the frame of the U-shaped frame plate 313, a left lifting guide rail block 312 and a right lifting guide rail block 314 are respectively and fixedly arranged on the front vertical face of the U-shaped frame plate 313 in parallel, a left vertical guide rail groove 318 in the vertical direction is fixedly arranged on the front vertical plate 316 at the left side of the U-shaped frame plate 313, a right vertical guide rail groove 319 in the vertical direction is fixedly arranged on the front vertical plate 316 at the right side of the U-shaped frame plate 313, a left vertical column 320 of a half-square lifting frame 317 is arranged in the left vertical guide rail groove 318 in the vertical direction, a right vertical column 321 of the half-square lifting frame 317 is arranged in the right vertical guide rail groove 319 in the vertical direction, a lifting frame jacking block 326 is fixedly connected on the lower bottom surface of the middle part of the half-square lifting frame beam, a jacking guide wheel shaft 325 is connected on the lifting frame jacking block 326, a jacking guide wheel shaft 324 is arranged on the jacking guide wheel shaft 325, the jacking guide wheel 324 is in jacking connection with the side surface of the outer edge of the eccentric wheel 323; a left lifting slide block 304 is arranged on the left lifting guide rail block 312, a right lifting slide block is arranged on the right lifting guide rail block 314, a left parallel welding wheel mechanism is fixedly connected to the left lifting slide block 304, a right parallel welding wheel mechanism is fixedly connected to the right lifting slide block, and the structure of the left parallel welding wheel mechanism is completely the same as that of the right parallel welding wheel mechanism; a left parallel welding wheel bracket 305 of a left parallel welding wheel mechanism is connected to the left lifting slide block 304, a left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305, a left welding wheel 302 is connected to the left welding wheel assembly 301, a weight left support plate 306 is fixedly connected to the upper end of the left parallel welding wheel bracket 305, a left weight through connection rod 307 is arranged on the weight left support plate 306, and a left weight 308 is placed on the weight left support plate 306 through a through connection hole 309 on the weight left support plate; a sealing assembly 329 is arranged right below the space between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, and the left welding wheel 302 is pressed on a left welding line of the sealing assembly 329.
The left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305 through a left L-shaped hanging plate 303, and the left L-shaped hanging plate 303 and the lower end of the left parallel welding wheel bracket 305 are connected together through an insulating washer 310 and an insulating screw 311; the weight of the left weight 308 placed on the left parallel weld wheel mechanism is the same as the weight of the right weight placed on the right parallel weld wheel mechanism; a nylon jacking screw 327 is arranged on the lower bottom surface of the weight left supporting plate 306, and a lifting frame jacking block 326 is arranged right below the nylon jacking screw 327.
A box-shaped frame body 315 is arranged in the high-vacuum sealed cavity, a U-shaped frame plate 313 is buckled on the front vertical surface of a front vertical plate 316 of the box-shaped frame body 315, a left lifting guide rail block 312 and a right lifting guide rail block 314 are respectively and fixedly arranged on the front vertical surface of the U-shaped frame plate 313 in parallel, a left lifting slide block 304 is arranged on the left lifting guide rail block 312, a right lifting slide block is arranged on the right lifting guide rail block 314, a left parallel welding wheel mechanism is fixedly connected on the left lifting slide block 304, a right parallel welding wheel mechanism is fixedly connected on the right lifting slide block, and the structure of the left parallel welding wheel mechanism is completely the same as that of the right parallel welding wheel mechanism; a left parallel welding wheel bracket 305 of a left parallel welding wheel mechanism is connected to the left lifting slide block 304, a left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305, a left welding wheel 302 is connected to the left welding wheel assembly 301, a weight left support plate 306 is fixedly connected to the upper end of the left parallel welding wheel bracket 305, a left weight through rod 307 is arranged on the weight left support plate 306, and a left weight 308 is placed on the weight left support plate 306 through a through hole 309 on the weight left support plate; a sealing assembly 329 is arranged right below the space between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, the left welding wheel 302 is pressed on a left welding line of the sealing assembly 329, and the right welding wheel on the right parallel welding wheel mechanism is pressed on a right welding line of the sealing assembly 329; the method is characterized by comprising the following steps: the left welding wheel 302 and the right welding wheel are in floating pressure joint with two welding lines of the sealing and welding assembly 329, and the pre-pressure of the two parallel welding lines of the sealing and welding assembly 329 is adjusted and set by adjusting the number and the weight of the left weight 308 placed on the weight left supporting plate 306 and the number and the weight of the right weight placed on the right parallel welding wheel mechanism.
An eccentric wheel 323 is arranged on the front vertical face of a front side vertical plate 316 of the box-shaped frame body 315, a closed shell 328 of an eccentric wheel driving motor is arranged in the box-shaped frame body 315, the eccentric wheel driving motor is arranged in the closed shell 328, air is sealed in the closed shell 328, and an output shaft of the eccentric wheel driving motor is connected with an eccentric wheel shaft 322 of the eccentric wheel 323 after passing through a sealed magnetic fluid; a left guide rail groove 318 in the vertical direction is fixedly arranged on a front vertical plate 316 on the left side of the U-shaped frame plate 313, a right guide rail groove 319 in the vertical direction is fixedly arranged on the front vertical plate 316 on the right side of the U-shaped frame plate 313, a left upright post 320 of the half-square lifting frame 317 is arranged in the left guide rail groove 318 in the vertical direction, a right upright post 321 of the half-square lifting frame 317 is arranged in the right guide rail groove 319 in the vertical direction, a lifting frame jacking block 326 is fixedly connected on the lower bottom surface of the middle part of a cross beam of the half-square lifting frame 317, a jacking guide wheel shaft 325 is connected on the lifting frame jacking block 326, a jacking guide wheel 324 is arranged on the jacking guide wheel shaft 325, and the jacking guide wheel 324 is abutted against the side surface of the outer edge of the eccentric wheel 323;
when the left welding wheel 302 and the right welding wheel weld two parallel welding lines of the sealing assembly 329, the lifting block 326 of the lifting frame 317 in the shape of a half square is arranged right below the nylon lifting screw 327, and at the moment, the left parallel welding wheel mechanism and the right parallel welding wheel mechanism are in a separation state with the lifting frame 317 in the shape of a half square;
when the left welding wheel 302 and the right welding wheel are used for welding the sealing assembly 329 and two parallel welding lines of the sealing assembly 329 are welded, an eccentric wheel driving motor arranged in a closed shell 328 is started, an eccentric wheel 323 jacks up a half-square-shaped lifting frame 317 through a jacking guide wheel 324, and the half-square-shaped lifting frame 317 is separated from the sealing assembly 329 after the left welding wheel 302 and the right welding wheel are lifted through a jacking weight left supporting plate 306 and a weight right supporting plate in a right parallel welding wheel mechanism.
Claims (2)
1. A micro-electronic packaging self-adaptive parallel sealing and welding mechanism in a high vacuum state comprises a high vacuum sealed cavity, wherein a box-shaped frame body (315) is arranged in the high vacuum sealed cavity, an eccentric wheel (323) is arranged on a front vertical face of a front side vertical plate (316) of the box-shaped frame body (315), a sealed shell (328) of an eccentric wheel driving motor is arranged in the box-shaped frame body (315), the eccentric wheel driving motor is arranged in the sealed shell (328), air is sealed in the sealed shell (328), and an output shaft of the eccentric wheel driving motor is connected with an eccentric wheel shaft (322) of the eccentric wheel (323) after a magnetic fluid is sealed; it is characterized in that a U-shaped frame plate (313) is buckled on the front vertical face of a front vertical plate (316), an eccentric wheel (323) is movably arranged in the frame of the U-shaped frame plate (313), a left lifting guide rail block (312) and a right lifting guide rail block (314) are respectively and fixedly arranged on the front vertical face of the U-shaped frame plate (313) in parallel, a left guide rail groove (318) in the vertical direction is fixedly arranged on the front vertical plate (316) on the left side of the U-shaped frame plate (313), a right guide rail groove (319) in the vertical direction is fixedly arranged on the front vertical plate (316) on the right side of the U-shaped frame plate (313), a left upright post (320) of a half-square lifting frame (317) is arranged in the left guide rail groove (318) in the vertical direction, a right upright post (321) of the half-square lifting frame (317) is arranged in the right guide rail groove (319) in the vertical direction, and the bottom surface of the middle part of a beam of the half-square lifting frame (317), the lifting frame jacking block (326) is fixedly connected, a jacking guide wheel axle (325) is connected to the lifting frame jacking block (326), a jacking guide wheel (324) is arranged on the jacking guide wheel axle (325), and the jacking guide wheel (324) is in jacking connection with the side face of the outer edge of the eccentric wheel (323); a left lifting slide block (304) is arranged on the left lifting guide rail block (312), a right lifting slide block is arranged on the right lifting guide rail block (314), a left parallel welding wheel mechanism is fixedly connected to the left lifting slide block (304), a right parallel welding wheel mechanism is fixedly connected to the right lifting slide block, and the structure of the left parallel welding wheel mechanism is identical to that of the right parallel welding wheel mechanism; a left parallel welding wheel support (305) of a left parallel welding wheel mechanism is connected to the left lifting slide block (304), a left welding wheel assembly (301) is connected to the lower end of the left parallel welding wheel support (305), a left welding wheel (302) is connected to the left welding wheel assembly (301), a weight left support plate (306) is fixedly connected to the upper end of the left parallel welding wheel support (305), a left weight through-connection rod (307) is arranged on the weight left support plate (306), and a left weight (308) is placed on the weight left support plate (306) through a through-connection hole (309) in the weight left support plate; and a sealing assembly (329) is arranged right below the space between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, and the left welding wheel (302) is pressed on a left welding line of the sealing assembly (329).
2. The adaptive parallel sealing mechanism for microelectronic packages under high vacuum conditions according to claim 1, wherein the left welding wheel assembly (301) is connected to the lower end of the left parallel welding wheel bracket (305) through a left L-shaped hanging plate (303), the left L-shaped hanging plate (303) and the lower end of the left parallel welding wheel bracket (305) are connected together through an insulating washer (310) and an insulating screw (311); the weight of a left weight (308) placed on the left parallel welding wheel mechanism is the same as the weight of a right weight placed on the right parallel welding wheel mechanism; a nylon jacking screw (327) is arranged on the lower bottom surface of the weight left supporting plate (306), and a lifting frame jacking block (326) is arranged right below the nylon jacking screw (327).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111553893.9A CN114074916A (en) | 2021-12-17 | 2021-12-17 | Micro-electronic packaging self-adaptive parallel sealing and welding mechanism in high vacuum state |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111553893.9A CN114074916A (en) | 2021-12-17 | 2021-12-17 | Micro-electronic packaging self-adaptive parallel sealing and welding mechanism in high vacuum state |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114074916A true CN114074916A (en) | 2022-02-22 |
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ID=80284493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111553893.9A Pending CN114074916A (en) | 2021-12-17 | 2021-12-17 | Micro-electronic packaging self-adaptive parallel sealing and welding mechanism in high vacuum state |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114074916A (en) |
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2021
- 2021-12-17 CN CN202111553893.9A patent/CN114074916A/en active Pending
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