CN114212753B - Automatic alignment parallel sealing welding method for microelectronic package under high vacuum state - Google Patents
Automatic alignment parallel sealing welding method for microelectronic package under high vacuum state Download PDFInfo
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- CN114212753B CN114212753B CN202111551516.1A CN202111551516A CN114212753B CN 114212753 B CN114212753 B CN 114212753B CN 202111551516 A CN202111551516 A CN 202111551516A CN 114212753 B CN114212753 B CN 114212753B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention discloses an automatic alignment parallel sealing method of microelectronic package under high vacuum state, which solves the problem of how to finish high quality parallel sealing of a thin shell device cover plate and a tube shell with low cost under vacuum environment; the method comprises the steps of arranging a floating parallel welding wheel bracket, enabling two parallel welding wheels on the bracket to be in floating press connection with a parallel welding seam between a cover plate and a tube shell, arranging weights at the top end of the parallel welding wheel bracket, and adjusting the welding pressure of the parallel welding wheels on the welding seam by increasing or reducing the number of the weights so as to realize the adjustment of the self-adaptive welding pressure in the welding process; and a shoulder pole-shaped semi-square jacking frame body is arranged between the left and right parallel welding wheel brackets, lifting and lowering of the floating parallel welding wheel brackets are realized through jacking connection of the semi-square jacking frame body by the eccentric wheel, and the tray conveying driving motor is arranged outside the closed cavity, so that the tray conveying in the cavity and the accurate alignment of the cover plate and the tube shell are completed at low cost.
Description
Technical Field
The invention relates to microelectronic packaging equipment, in particular to a mechanism and a welding method for automatically aligning and parallel welding a thin-shell device cover plate and a tube shell in a microelectronic packaging assembly in a high vacuum chamber.
Background
Microelectronic packaging assembly (MEMS device), namely, arranging, pasting, fixing and connecting chips and other elements on a frame or a substrate by utilizing a film technology and a micro-machining technology, leading out connecting wire terminals, encapsulating and fixing the connecting wire terminals through a plastic insulating medium, and then assembling the microelectronic device and the micro-miniature element into a suitable producible electronic assembly, component or technical process of a system by utilizing a microelectronic technology and a high-density assembly technology according to an electrical schematic diagram or a logic diagram; currently, vacuum packaging equipment is being changed from a single machine to multiple chambers capable of performing multiple processes (such as baking, activating, aligning, sealing and testing), and a high-vacuum multiple chamber production line is generated, so that the transfer efficiency of microelectronic packaging components under high vacuum is greatly improved; in a high vacuum state, the packaging of the thin shell cover plate and the tube shell in the microelectronic package is completed through a parallel welding mechanism; when the thin shell cover plate is accurately aligned and placed on the tube shell, the parallel welding mechanism drives the welding head to descend for a certain stroke, the two parallel welding wheels are pressed onto a welding line at the welding position of the cover plate and the tube shell, and then the parallel welding mechanism drives the two parallel welding wheels to horizontally move along the welding line to realize the welding of the cover plate and the tube shell; the existing parallel welding mechanism has the following defects: (1) The driving motors of the parallel welding mechanisms are all vacuum motors, and the vacuum motors have the defects of high price and short service life, so that the equipment cost is greatly improved, and the equipment maintenance cost is high; (2) For packaging cover plates of different types, the pressing stroke of the parallel welding mechanism needs to be repeatedly and accurately adjusted, so that the problems of time and labor consumption exist, and the production rhythm and efficiency of the site are affected; (3) Because the thin shell cover plate inevitably has processing errors in machining, the pressing stroke of a fixed parallel welding mechanism cannot completely meet the requirements of the pressing stroke when all cover plates are welded with a pipe shell, and for cover plates with larger errors, the improper pressing stroke can lead to the shift of a packaging window arranged on the pipe shell due to uneven force application of welding seams at two sides when the parallel welding wheels weld, and directly lead to the reduction of the yield of packaged parts; (4) In the welding process of carrying out X-direction parallel seal welding and Y-direction parallel seal welding on a rectangular cover plate and a rectangular tube shell, how to realize the simple, efficient and high-quality completion of the welding process in a limited high-vacuum environment.
Disclosure of Invention
The invention provides an automatic alignment parallel sealing mechanism for microelectronic packaging in a high vacuum state, which solves the technical problems of how to finish high-quality parallel sealing of a thin-shell device cover plate and a tube shell with low cost in a vacuum environment and realize automatic alignment.
The invention solves the technical problems by the following technical proposal:
the general conception of the invention is as follows: the common motor is arranged in the closed independent cavity, and vacuum transmission outside the independent cavity is realized through magnetic fluid isolation, so that the common motor is used for replacing the vacuum motor, and the driving task of the welding mechanism is completed; the method comprises the steps of arranging a floating parallel welding wheel bracket, enabling two parallel welding wheels on the bracket to be in floating press connection with a parallel welding seam between a cover plate and a tube shell, arranging weights at the top end of the parallel welding wheel bracket, and adjusting the welding pressure of the parallel welding wheels on the welding seam by increasing or reducing the number of the weights, so as to realize the adjustment of the self-adaptive welding pressure in the welding process; a shoulder pole-shaped half-mouth-shaped jacking frame body is arranged between the left and right parallel welding wheel brackets, and the floating parallel welding wheel brackets are lifted and lowered through jacking connection of the half-mouth-shaped jacking frame body by the eccentric wheel, so that the welding state and the waiting welding state of the two parallel welding wheels are converted; the invention eliminates the procedures of setting and adjusting the prepressing stroke of the welding head mechanism in the traditional parallel welding, and greatly improves the sealing quality of the packaging assembly; and the tray conveying driving motor is arranged outside the closed cavity, so that the tray conveying in the cavity and the accurate alignment of the cover plate and the tube shell are completed at low cost.
The automatic alignment parallel seal welding mechanism for the microelectronic package in the high vacuum state comprises a high vacuum airtight welding cavity, wherein a welding mechanism walking portal frame is arranged in the high vacuum airtight welding cavity, an alignment grabbing cover plate transverse guide rail is horizontally arranged on the front side surface of a beam of the welding mechanism walking portal frame, a grabbing mechanism installation sliding block is movably arranged on the alignment grabbing cover plate transverse guide rail, a grabbing alignment nut connecting block is connected to the grabbing mechanism installation sliding block, the grabbing alignment nut connecting block is in threaded connection with a grabbing horizontal alignment screw rod through a grabbing alignment nut, one end of the grabbing horizontal alignment screw rod is connected with a vertical screw rod after reversing through a 90-degree reversing device, and the other end of the vertical screw rod after reversing is connected with a grabbing alignment driving motor outside the high vacuum airtight welding cavity through sealing magnetic fluid; a welding transverse guide rail is horizontally arranged on the rear side surface of a beam of a welding mechanism walking portal frame, a welding mechanism installation sliding block is movably arranged on the welding transverse guide rail, a welding alignment nut connecting block is connected to the welding mechanism installation sliding block, the welding alignment nut connecting block is in threaded connection with a welding horizontal alignment screw rod through a welding alignment nut, one end of the welding horizontal alignment screw rod is connected with another reversing vertical screw rod through another 90-degree reverser, and the other end of the other reversing vertical screw rod is connected with a high-vacuum airtight welding cavity external welding alignment driving motor through another sealing magnetic fluid; a rotary table and a vision system are respectively installed on the grabbing alignment nut connecting block, a grabbing mechanism is connected to the lower bottom surface of the rotary table, and the rotary table is connected with a rotary driving motor sealed in the cavity; a parallel welding mechanism is connected to the welding counterpoint nut connecting block; a welding station tray is arranged right below the cross beam of the walking portal frame of the welding mechanism, and a welding station cover plate and a welding station pipe shell are respectively arranged in the welding station tray.
A box-shaped frame body is arranged on the welding alignment nut connecting block, an eccentric wheel is arranged on the front vertical face of a front vertical plate of the box-shaped frame body, a closed shell of an eccentric wheel driving motor is arranged in the box-shaped frame body, the eccentric wheel driving motor is arranged in the closed shell, air is sealed in the closed shell, and an output shaft of the eccentric wheel driving motor is connected with an eccentric wheel shaft of the eccentric wheel after magnetic fluid is sealed; the front vertical face of the front vertical plate is buckled with a U-shaped frame plate, an eccentric wheel is movably arranged in a frame of the U-shaped frame plate, a left lifting guide rail block and a right lifting guide rail block are respectively and fixedly arranged on the front vertical face of the U-shaped frame plate in parallel, a left guide rail groove in the up-down direction is fixedly arranged on the front vertical plate on the left side of the U-shaped frame plate, a right guide rail groove in the up-down direction is fixedly arranged on the front vertical plate on the right side of the U-shaped frame plate, a left upright post of a half-mouth-shaped lifting frame is arranged in the left guide rail groove in the up-down direction, a right upright post of the half-mouth-shaped lifting frame is arranged in the right guide rail groove in the up-down direction, a lifting frame jacking block is fixedly connected on the lower bottom surface of the middle part of the half-mouth-shaped lifting frame beam, a jacking guide wheel shaft is connected with a jacking guide wheel, a jacking guide wheel is arranged on the jacking guide wheel shaft, and the jacking guide wheel is jacked with the side face of the outer edge of the eccentric wheel; the left lifting guide rail block is provided with a left lifting slide block, the right lifting guide rail block is provided with a right lifting slide block, the left lifting slide block is fixedly connected with a left parallel welding wheel mechanism, the right lifting slide block is fixedly connected with a right parallel welding wheel mechanism, and the structure of the left parallel welding wheel mechanism is identical to that of the right parallel welding wheel mechanism; the left lifting sliding block is connected with a left parallel welding wheel bracket of a left parallel welding wheel mechanism, the lower end of the left parallel welding wheel bracket is connected with a left welding wheel assembly, the left welding wheel assembly is connected with a left welding wheel, the upper end of the left parallel welding wheel bracket is fixedly connected with a weight left support plate, a left weight penetrating rod is arranged on the weight left support plate, and a left weight is placed on the weight left support plate through a penetrating hole on the left weight penetrating rod; and a seal welding assembly is arranged right below the space between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, and the left welding wheel is in press connection with a left welding line of the seal welding assembly.
The left welding wheel assembly is connected to the lower end of the left parallel welding wheel bracket through a left L-shaped hanging plate, and a connecting bolt is arranged between the left L-shaped hanging plate and the lower end of the left parallel welding wheel bracket; an insulating washer and a second connecting bolt are arranged between the left parallel welding wheel bracket and the left lifting sliding block; the weight of the left weight placed on the left parallel welding wheel mechanism is the same as the weight of the right weight placed on the right parallel welding wheel mechanism; the nylon jacking screw is arranged on the lower bottom surface of the weight left supporting plate, and the lifting frame jacking block is arranged right below the nylon jacking screw.
The left welding wheel and the right welding wheel are in floating compression joint on two welding lines of the sealing assembly, and the adjustment and the setting of the pre-pressure of the two parallel welding lines of the sealing assembly are realized by adjusting the quantity and the weight of left weights placed on a left supporting plate of the weights and the quantity and the weight of right weights placed on a right parallel welding wheel mechanism.
The automatic alignment parallel seal welding method for the microelectronic package in the high vacuum state comprises a high vacuum airtight welding cavity, wherein a welding mechanism walking portal frame is arranged in the high vacuum airtight welding cavity, an alignment grabbing cover plate transverse guide rail is horizontally arranged on the front side surface of a beam of the welding mechanism walking portal frame, a grabbing mechanism installation sliding block is movably arranged on the alignment grabbing cover plate transverse guide rail, a grabbing alignment nut connecting block is connected to the grabbing mechanism installation sliding block, the grabbing alignment nut connecting block is in threaded connection with a grabbing horizontal alignment screw rod through a grabbing alignment nut, one end of the grabbing horizontal alignment screw rod is connected with a vertical screw rod after the reversing through a 90-degree reversing device, and the other end of the vertical screw rod after the reversing is connected with a grabbing alignment driving motor outside the high vacuum airtight welding cavity through sealing magnetic fluid; a welding transverse guide rail is horizontally arranged on the rear side surface of a beam of a welding mechanism walking portal frame, a welding mechanism installation sliding block is movably arranged on the welding transverse guide rail, a welding alignment nut connecting block is connected to the welding mechanism installation sliding block, the welding alignment nut connecting block is in threaded connection with a welding horizontal alignment screw rod through a welding alignment nut, one end of the welding horizontal alignment screw rod is connected with another reversing vertical screw rod through another 90-degree reverser, and the other end of the other reversing vertical screw rod is connected with a high-vacuum airtight welding cavity external welding alignment driving motor through another sealing magnetic fluid; a rotary table and a vision system are respectively installed on the grabbing alignment nut connecting block, a grabbing mechanism is connected to the lower bottom surface of the rotary table, and the rotary table is connected with a rotary driving motor sealed in the cavity; a parallel welding mechanism is connected to the welding counterpoint nut connecting block; a welding station tray is arranged right below a beam of the walking portal frame of the welding mechanism, and a welding station cover plate and a welding station tube shell are respectively arranged in the welding station tray; the welding alignment nut connecting block is provided with a box frame body, a front vertical face of a front vertical plate of the box frame body is buckled with a U-shaped frame plate, a left lifting guide rail block and a right lifting guide rail block are respectively and fixedly arranged on the front vertical face of the U-shaped frame plate in parallel, a left lifting sliding block is arranged on the left lifting guide rail block, a right lifting sliding block is arranged on the right lifting guide rail block, a left parallel welding wheel mechanism is fixedly connected on the left lifting sliding block, a right parallel welding wheel mechanism is fixedly connected on the right lifting sliding block, and the structure of the left parallel welding wheel mechanism is completely identical with that of the right parallel welding wheel mechanism; the left lifting sliding block is connected with a left parallel welding wheel bracket of a left parallel welding wheel mechanism, the lower end of the left parallel welding wheel bracket is connected with a left welding wheel assembly, the left welding wheel assembly is connected with a left welding wheel, the upper end of the left parallel welding wheel bracket is fixedly connected with a weight left support plate, a left weight penetrating rod is arranged on the weight left support plate, and a left weight is placed on the weight left support plate through a penetrating hole on the left weight penetrating rod; a seal welding assembly is arranged right below the space between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, the left welding wheel is pressed on the left welding line of the seal welding assembly, the right welding wheel on the right parallel welding wheel mechanism is pressed on the right welding line of the seal welding assembly, and the steps are as follows:
the vision system photographs a welding station cover plate and a welding station tube shell which are respectively arranged in the welding station tray, and according to the photographing position, the external grabbing and aligning driving motor of the sealing cavity drives the grabbing and aligning nut connecting block to accurately align the welding station cover plate, and the grabbing mechanism grabs the welding station cover plate; the welding alignment driving motor outside the sealing cavity drives the grabbing alignment nut connecting block to accurately align the grabbed welding station cover plate above the welding station pipe shell, and the welding station cover plate is placed on the welding station pipe shell;
the vision system photographs the welding station pipe shell with the welding station cover plate, the welding counterpoint driving motor outside the sealing cavity drives the welding counterpoint nut connecting block according to the photographing position, the parallel welding mechanism is driven to accurately counterpoint to the upper side of the welding station pipe shell with the welding station cover plate, and then the parallel welding mechanism performs parallel seal welding on the welding station pipe shell with the welding station cover plate.
When the left welding wheel and the right welding wheel are welded on two parallel welding seams of the sealing and welding assembly, the lifting frame lifting block on the half-square lifting frame is arranged right below the nylon lifting screw, and at the moment, the left parallel welding wheel mechanism and the right parallel welding wheel mechanism are in a separation state with the half-square lifting frame; when the left welding wheel and the right welding wheel pair seal welding assembly are used for welding two parallel welding lines of the seal welding assembly, an eccentric wheel driving motor arranged in the airtight shell is started, the eccentric wheel jacks up the half-mouth-shaped lifting frame through the jacking guide wheel, and the half-mouth-shaped lifting frame lifts up the left welding wheel and the right welding wheel through the jacking weight left support plate and the weight right support plate in the right parallel welding wheel mechanism, so that the left welding wheel and the right welding wheel are separated from the seal welding assembly after being lifted up.
The driving motor of the welding mechanism is sealed in the air chamber to work, and a common linear motor can be selected, so that the investment cost of the motor is greatly saved, and the defect of short service life of the linear motor is overcome; the parallel welding head mechanism is designed to be a floating mechanism, the welding down force is controlled through the weight adjustment of the weight on the floating mechanism, the self-adaption of the welding wheel and the seal welding assembly is realized in the welding process, and the welding quality is improved; the whole process is carried out in a high vacuum airtight cavity, so that accurate automatic alignment is realized.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
fig. 2 is a schematic structural view of a welding mechanism walking gantry 330 of the present invention;
FIG. 3 is a schematic structural view of the adaptive parallel seal welding mechanism of the present invention;
fig. 4 is a schematic diagram of the structure of the lifting rail seat of the half-square lifting frame 317 of the two parallel welding wheel mechanism of the present invention;
fig. 5 is a schematic structural diagram of a half-square lifting frame 317 according to the present invention;
fig. 6 is a schematic structural view of a U-shaped frame plate 313 of the present invention;
FIG. 7 is a diagram showing the relationship of the eccentric 323, lift pulley 324, lift frame lift block 326 and half-square lift frame 317 of the present invention;
FIG. 8 is a diagram showing the mating relationship among the lifting frame lifting block 326, the weight left support plate 306 and the nylon lifting screw 327 of the present invention;
FIG. 9 is a schematic view of the structure of the left parallel welding wheel mechanism bracket of the present invention;
fig. 10 is a schematic structural view of the left welding wheel assembly 301 of the present invention.
Description of the embodiments
The invention is described in detail below with reference to the attached drawing figures:
the automatic alignment parallel seal welding mechanism for the microelectronic package in the high vacuum state comprises a high vacuum airtight welding cavity, wherein a welding mechanism walking portal frame 330 is arranged in the high vacuum airtight welding cavity, an alignment grabbing cover plate transverse moving guide rail 331 is horizontally arranged on the front side surface of a beam of the welding mechanism walking portal frame 330, a grabbing mechanism installation slider 332 is movably arranged on the alignment grabbing cover plate transverse moving guide rail 331, a grabbing alignment nut connecting block 333 is connected to the grabbing mechanism installation slider 332, the grabbing alignment nut connecting block 333 is in threaded connection with a grabbing horizontal alignment lead screw 335 through a grabbing alignment nut 334, one end of the grabbing horizontal alignment lead screw 335 is connected with a vertical lead screw after the reversing through a 90-degree reversing device 336, and the other end of the vertical lead screw after the reversing is connected with a grabbing alignment driving motor outside the sealing cavity through sealing magnetic fluid; a welding transverse guide rail 337 is horizontally arranged on the rear side surface of the beam of the welding mechanism walking portal frame 330, a welding mechanism installation slide block 338 is movably arranged on the welding transverse guide rail 337, a welding alignment nut connecting block 339 is connected to the welding mechanism installation slide block 338, the welding alignment nut connecting block 339 is in threaded connection with a welding horizontal alignment screw 341 through a welding alignment nut 340, one end of the welding horizontal alignment screw 341 is connected with another reversing vertical screw through another 90-degree reverser 342, and the other end of the other reversing vertical screw is connected with a sealing cavity welding alignment driving motor through another sealing magnetic fluid; a rotary table 343 and a vision system 346 are respectively installed on the grabbing alignment nut connecting block 333, a grabbing mechanism 344 is connected to the lower bottom surface of the rotary table 343, and the rotary table 343 is connected with a rotary driving motor 345 sealed in the cavity; a parallel welding mechanism 347 is connected to the welding alignment nut connecting block 339; a welding station tray 348 is provided directly below the cross beam of the welding mechanism walking gantry 330, and a welding station cover plate 349 and a welding station cartridge 350 are provided in the welding station tray 348, respectively.
A box-shaped frame body 315 is arranged on the welding alignment nut connecting block 339, an eccentric wheel 323 is arranged on the front vertical surface of a front vertical plate 316 of the box-shaped frame body 315, a closed shell 328 of an eccentric wheel driving motor is arranged in the box-shaped frame body 315, the eccentric wheel driving motor is arranged in the closed shell 328, air is closed in the closed shell 328, and an output shaft of the eccentric wheel driving motor is connected with an eccentric wheel shaft 322 of the eccentric wheel 323 after magnetic fluid is sealed; a U-shaped frame plate 313 is fastened on the front vertical surface of the front vertical plate 316, an eccentric wheel 323 is movably arranged in a frame of the U-shaped frame plate 313, a left lifting guide rail block 312 and a right lifting guide rail block 314 are respectively fixedly arranged on the front vertical surface of the U-shaped frame plate 313 in parallel, a left lifting guide rail groove 318 in the up-down direction is fixedly arranged on the front vertical plate 316 at the left side of the U-shaped frame plate 313, a right lifting guide rail groove 319 in the up-down direction is fixedly arranged on the front vertical plate 316 at the right side of the U-shaped frame plate 313, a left upright post 320 of a half-mouth-shaped lifting frame 317 is arranged in the left guide rail groove 318 in the up-down direction, a right upright post 321 of the half-mouth-shaped lifting frame 317 is arranged in the right guide rail groove 319 in the up-down direction, a lifting frame lifting block 326 is fixedly connected on the lower bottom surface of the middle part of a beam of the half-mouth-shaped lifting frame 317, a lifting guide wheel shaft 325 is fixedly arranged on the lifting guide wheel shaft 325, and the lifting guide wheel 324 is propped with the outer edge side surface of the eccentric wheel 323; a left lifting slide block 304 is arranged on the left lifting guide rail block 312, a right lifting slide block is arranged on the right lifting guide rail block 314, a left parallel welding wheel mechanism is fixedly connected on the left lifting slide block 304, a right parallel welding wheel mechanism is fixedly connected on the right lifting slide block, and the structure of the left parallel welding wheel mechanism is identical with that of the right parallel welding wheel mechanism; a left parallel welding wheel bracket 305 of a left parallel welding wheel mechanism is connected to a left lifting sliding block 304, a left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305, a left welding wheel 302 is connected to the left welding wheel assembly 301, a weight left support plate 306 is fixedly connected to the upper end of the left parallel welding wheel bracket 305, a left weight penetrating rod 307 is arranged on the weight left support plate 306, and a left weight 308 is placed on the weight left support plate 306 through a penetrating hole 309 on the left weight penetrating rod; a seal welding assembly 329 is provided directly below between the left and right parallel welding wheel mechanisms.
The left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305 through a left L-shaped hanging plate 303, and a connecting bolt is arranged between the left L-shaped hanging plate 303 and the lower end of the left parallel welding wheel bracket 305; an insulating washer 310 and a second connecting bolt 311 are arranged between the left parallel welding wheel bracket 305 and the left lifting slide block 304; the weight of the left weight 308 placed on the left parallel wheel mechanism is the same as the weight of the right weight placed on the right parallel wheel mechanism; a nylon jacking screw 327 is provided on the lower bottom surface of the weight left support plate 306, and a lifting frame jacking block 326 is provided directly under the nylon jacking screw 327.
A box-shaped frame body 315 is arranged in the high vacuum airtight cavity, a U-shaped frame plate 313 is buckled on the front vertical surface of a front vertical plate 316 of the box-shaped frame body 315, a left lifting guide rail block 312 and a right lifting guide rail block 314 are respectively and fixedly arranged on the front vertical surface of the U-shaped frame plate 313 in parallel, a left lifting sliding block 304 is arranged on the left lifting guide rail block 312, a right lifting sliding block is arranged on the right lifting guide rail block 314, a left parallel welding wheel mechanism is fixedly connected on the left lifting sliding block 304, a right parallel welding wheel mechanism is fixedly connected on the right lifting sliding block, and the structure of the left parallel welding wheel mechanism is identical with that of the right parallel welding wheel mechanism; a left parallel welding wheel bracket 305 of a left parallel welding wheel mechanism is connected to a left lifting sliding block 304, a left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305, a left welding wheel 302 is connected to the left welding wheel assembly 301, a weight left support plate 306 is fixedly connected to the upper end of the left parallel welding wheel bracket 305, a left weight penetrating rod 307 is arranged on the weight left support plate 306, and a left weight 308 is placed on the weight left support plate 306 through a penetrating hole 309 on the left weight penetrating rod; a seal welding assembly 329 is arranged right below the position between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, the left welding wheel 302 is pressed on a left welding line of the seal welding assembly 329, and a right welding wheel on the right parallel welding wheel mechanism is pressed on a right welding line of the seal welding assembly 329; the method comprises the following steps: the left welding wheel 302 and the right welding wheel are in floating compression joint on two welding lines of the sealing and welding assembly 329, and the adjustment and the setting of the precompression of the two parallel welding lines of the sealing and welding assembly 329 are realized by adjusting the number and the weight of the left weights 308 placed on the left supporting plate 306 of the weights and the number and the weight of the right weights placed on the right parallel welding wheel mechanism.
An eccentric wheel 323 is arranged on the front vertical surface of the front vertical plate 316 of the box-shaped frame body 315, a closed shell 328 of an eccentric wheel driving motor is arranged in the box-shaped frame body 315, the eccentric wheel driving motor is arranged in the closed shell 328, air is closed in the closed shell 328, and an output shaft of the eccentric wheel driving motor is connected with an eccentric wheel shaft 322 of the eccentric wheel 323 after magnetic fluid is sealed; a left guide rail groove 318 in the up-down direction is fixedly arranged on a front vertical plate 316 on the left side of the U-shaped frame plate 313, a right guide rail groove 319 in the up-down direction is fixedly arranged on a front vertical plate 316 on the right side of the U-shaped frame plate 313, a left vertical column 320 of a half-mouth-shaped lifting frame 317 is arranged in the left guide rail groove 318 in the up-down direction, a right vertical column 321 of the half-mouth-shaped lifting frame 317 is arranged in the right guide rail groove 319 in the up-down direction, a lifting frame lifting block 326 is fixedly connected to the lower bottom surface of the middle part of a beam of the half-mouth-shaped lifting frame 317, a lifting guide wheel axle 325 is connected to the lifting frame lifting block 326, a lifting guide wheel 324 is arranged on the lifting guide wheel axle 325, and the lifting guide wheel 324 is propped against the side surface of the outer edge of an eccentric wheel 323;
when the two parallel welding seams of the sealing and welding assembly 329 are welded by the left welding wheel 302 and the right welding wheel, the lifting frame lifting block 326 on the half-square lifting frame 317 is arranged right below the nylon lifting screw 327, and at this time, the left parallel welding wheel mechanism and the right parallel welding wheel mechanism are in a separation state with the half-square lifting frame 317;
when the welding of the left welding wheel 302 and the right welding wheel set is completed, the eccentric wheel driving motor arranged in the sealed shell 328 is started, the eccentric wheel 323 jacks up the half-square lifting frame 317 through the jacking guide wheel 324, and the half-square lifting frame 317 lifts up the left welding wheel 302 and the right welding wheel through the jacking weight left support plate 306 and the weight right support plate in the right parallel welding wheel mechanism, and then is separated from the sealing assembly 329.
The automatic alignment parallel seal welding method for the microelectronic package in the high vacuum state comprises a high vacuum airtight welding cavity, wherein a welding mechanism walking portal frame 330 is arranged in the high vacuum airtight welding cavity, an alignment grabbing cover plate transverse guide rail 331 is horizontally arranged on the front side surface of a beam of the welding mechanism walking portal frame 330, a grabbing mechanism installation slider 332 is movably arranged on the alignment grabbing cover plate transverse guide rail 331, a grabbing alignment nut connecting block 333 is connected to the grabbing mechanism installation slider 332, the grabbing alignment nut connecting block 333 is in threaded connection with a grabbing horizontal alignment lead screw 335 through a grabbing alignment nut 334, one end of the grabbing horizontal alignment lead screw 335 is connected with a vertical lead screw after the reversing through a 90-degree reversing device 336, and the other end of the vertical lead screw after the reversing is connected with a grabbing alignment driving motor outside the sealing cavity through sealing magnetic fluid; a welding transverse guide rail 337 is horizontally arranged on the rear side surface of the beam of the welding mechanism walking portal frame 330, a welding mechanism installation slide block 338 is movably arranged on the welding transverse guide rail 337, a welding alignment nut connecting block 339 is connected to the welding mechanism installation slide block 338, the welding alignment nut connecting block 339 is in threaded connection with a welding horizontal alignment screw 341 through a welding alignment nut 340, one end of the welding horizontal alignment screw 341 is connected with another reversing vertical screw through another 90-degree reverser 342, and the other end of the other reversing vertical screw is connected with a high-vacuum airtight welding chamber external welding alignment driving motor through another sealing magnetic fluid; a rotary table 343 and a vision system 346 are respectively installed on the grabbing alignment nut connecting block 333, a grabbing mechanism 344 is connected to the lower bottom surface of the rotary table 343, and the rotary table 343 is connected with a rotary driving motor 345 sealed in the cavity; a parallel welding mechanism 347 is connected to the welding alignment nut connecting block 339; a welding station tray 348 is arranged right below the cross beam of the welding mechanism walking portal frame 330, and a welding station cover plate 349 and a welding station tube shell 350 are respectively arranged in the welding station tray 348; a box-shaped frame body 315 is arranged on the welding alignment nut connecting block 339, a U-shaped frame plate 313 is buckled on the front vertical surface of a front vertical plate 316 of the box-shaped frame body 315, a left lifting guide rail block 312 and a right lifting guide rail block 314 are respectively and fixedly arranged on the front vertical surface of the U-shaped frame plate 313 in parallel, a left lifting slide block 304 is arranged on the left lifting guide rail block 312, a right lifting slide block is arranged on the right lifting guide rail block 314, a left parallel welding wheel mechanism is fixedly connected on the left lifting slide block 304, a right parallel welding wheel mechanism is fixedly connected on the right lifting slide block, and the structure of the left parallel welding wheel mechanism is identical with that of the right parallel welding wheel mechanism; a left parallel welding wheel bracket 305 of a left parallel welding wheel mechanism is connected to a left lifting sliding block 304, a left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305, a left welding wheel 302 is connected to the left welding wheel assembly 301, a weight left support plate 306 is fixedly connected to the upper end of the left parallel welding wheel bracket 305, a left weight penetrating rod 307 is arranged on the weight left support plate 306, and a left weight 308 is placed on the weight left support plate 306 through a penetrating hole 309 on the left weight penetrating rod; a seal welding assembly 329 is arranged right below the position between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, the left welding wheel 302 is pressed on a left welding line of the seal welding assembly 329, and a right welding wheel on the right parallel welding wheel mechanism is pressed on a right welding line of the seal welding assembly 329; the method comprises the following steps:
the vision system 346 photographs the welding station cover plate 349 and the welding station tube shell 350 which are respectively arranged in the welding station tray 348, and according to the photographing position, the external grabbing and aligning driving motor of the sealing cavity drives the grabbing and aligning nut connecting block 333 to accurately align the welding station cover plate 349, and the grabbing mechanism 344 grabs the welding station cover plate 349; the welding alignment driving motor outside the sealing cavity drives the grabbing alignment nut connecting block 333 to accurately align the grabbed welding station cover plate 349 to the upper part of the welding station pipe shell 350, and places the welding station cover plate 349 on the welding station pipe shell 350;
the vision system 346 photographs the welding station pipe shell 350 with the welding station cover plate 349 placed, the welding alignment driving motor outside the sealing cavity drives the welding alignment nut connecting block 339 according to the photographing position, the parallel welding mechanism 347 is driven to accurately align to the upper side of the welding station pipe shell 350 with the welding station cover plate 349 placed, and then the parallel welding mechanism 347 performs parallel seal welding on the welding station pipe shell 350 with the welding station cover plate 349 placed.
An eccentric wheel 323 is arranged on the front vertical surface of the front vertical plate 316 of the box-shaped frame body 315, a closed shell 328 of an eccentric wheel driving motor is arranged in the box-shaped frame body 315, the eccentric wheel driving motor is arranged in the closed shell 328, air is closed in the closed shell 328, and an output shaft of the eccentric wheel driving motor is connected with an eccentric wheel shaft 322 of the eccentric wheel 323 after magnetic fluid is sealed; a left guide rail groove 318 in the up-down direction is fixedly arranged on a front vertical plate 316 on the left side of the U-shaped frame plate 313, a right guide rail groove 319 in the up-down direction is fixedly arranged on a front vertical plate 316 on the right side of the U-shaped frame plate 313, a left vertical column 320 of a half-mouth-shaped lifting frame 317 is arranged in the left guide rail groove 318 in the up-down direction, a right vertical column 321 of the half-mouth-shaped lifting frame 317 is arranged in the right guide rail groove 319 in the up-down direction, a lifting frame lifting block 326 is fixedly connected to the lower bottom surface of the middle part of a beam of the half-mouth-shaped lifting frame 317, a lifting guide wheel axle 325 is connected to the lifting frame lifting block 326, a lifting guide wheel 324 is arranged on the lifting guide wheel axle 325, and the lifting guide wheel 324 is propped against the side surface of the outer edge of an eccentric wheel 323;
when the two parallel welding seams of the sealing and welding assembly 329 are welded by the left welding wheel 302 and the right welding wheel, the lifting frame lifting block 326 on the half-square lifting frame 317 is arranged right below the nylon lifting screw 327, and at this time, the left parallel welding wheel mechanism and the right parallel welding wheel mechanism are in a separation state with the half-square lifting frame 317;
when the welding of the left welding wheel 302 and the right welding wheel set is completed, the eccentric wheel driving motor arranged in the sealed shell 328 is started, the eccentric wheel 323 jacks up the half-square lifting frame 317 through the jacking guide wheel 324, and the half-square lifting frame 317 lifts up the left welding wheel 302 and the right welding wheel through the jacking weight left support plate 306 and the weight right support plate in the right parallel welding wheel mechanism, and then is separated from the sealing assembly 329.
Claims (2)
1. The automatic alignment parallel seal welding method for the microelectronic package in the high vacuum state comprises a high vacuum airtight welding cavity, wherein a welding mechanism walking portal frame (330) is arranged in the high vacuum airtight welding cavity, an alignment grabbing cover plate transverse moving guide rail (331) is horizontally arranged on the front side surface of a cross beam of the welding mechanism walking portal frame (330), a grabbing mechanism installation sliding block (332) is movably arranged on the alignment grabbing cover plate transverse moving guide rail (331), a grabbing alignment nut connecting block (333) is connected to the grabbing mechanism installation sliding block (332), the grabbing alignment nut connecting block (333) is in threaded connection with a grabbing horizontal alignment screw rod (335) through a grabbing alignment nut (334), one end of the grabbing horizontal alignment screw rod (335) is connected with a vertical screw rod after reversing through a 90-degree reverser (336), and the other end of the vertical screw rod after reversing is connected with a grabbing alignment driving motor outside the high vacuum airtight welding cavity through a sealing magnetic fluid; a welding transverse guide rail (337) is horizontally arranged on the rear side surface of a beam of a welding mechanism walking portal frame (330), a welding mechanism installation slider (338) is movably arranged on the welding transverse guide rail (337), a welding contraposition nut connecting block (339) is connected to the welding mechanism installation slider (338), the welding contraposition nut connecting block (339) is in threaded connection with a welding horizontal contraposition screw rod (341) through a welding contraposition nut (340), one end of the welding horizontal contraposition screw rod (341) is connected with another reversing vertical screw rod through another 90-degree reverser (342), and the other end of the other reversing vertical screw rod is connected with a high-vacuum airtight welding contraposition driving motor through another sealing magnetic fluid; a rotary table (343) and a vision system (346) are respectively installed on the grabbing alignment nut connecting block (333), a grabbing mechanism (344) is connected to the lower bottom surface of the rotary table (343), and the rotary table (343) is connected with a rotary driving motor (345) which is sealed in a high-vacuum sealed welding cavity; a welding station tray (348) is arranged right below a cross beam of the welding mechanism walking portal frame (330), and a seal welding assembly (329) formed by a welding station cover plate (349) and a welding station tube shell (350) is arranged in the welding station tray (348); a box frame body (315) is arranged on a welding alignment nut connecting block (339), a U-shaped frame plate (313) is buckled on the front vertical surface of a front vertical plate (316) of the box frame body (315), a left lifting guide rail block (312) and a right lifting guide rail block (314) are respectively and fixedly arranged on the front vertical surface of the U-shaped frame plate (313) in parallel, a left lifting slide block (304) is arranged on the left lifting guide rail block (312), a right lifting slide block is arranged on the right lifting guide rail block (314), a left parallel welding wheel mechanism is fixedly connected on the left lifting slide block (304), a right parallel welding wheel mechanism is fixedly connected on the right lifting slide block, and the structure of the left parallel welding wheel mechanism is identical with that of the right parallel welding wheel mechanism; a left parallel welding wheel bracket (305) of a left parallel welding wheel mechanism is connected to the left lifting sliding block (304), a left welding wheel assembly (301) is connected to the lower end of the left parallel welding wheel bracket (305), a left welding wheel (302) is connected to the left welding wheel assembly (301), a weight left supporting plate (306) is fixedly connected to the upper end of the left parallel welding wheel bracket (305), a nylon jacking screw (327) is arranged on the weight left supporting plate (306) in a penetrating way, and the lower end of the nylon jacking screw (327) is arranged right above a lifting frame jacking block (326) after penetrating through the weight left supporting plate (306); a left weight penetrating rod (307) is arranged on the left weight supporting plate (306), and the left weight (308) is placed on the left weight supporting plate (306) through a penetrating hole (309) on the left weight; a seal welding assembly (329) is arranged right below the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, a left welding wheel (302) of the left parallel welding wheel mechanism is pressed on a left welding line of the seal welding assembly (329), and a right welding wheel of the right parallel welding wheel mechanism is pressed on a right welding line of the seal welding assembly (329); the method is characterized by comprising the following steps of:
the vision system (346) photographs a welding station cover plate (349) and a welding station tube shell (350) which are respectively arranged in the welding station tray (348), and the grabbing mechanism (344) grabs the welding station cover plate (349) according to the photographing position; the high-vacuum airtight welding cavity external grabbing alignment driving motor drives the grabbing alignment nut connecting block (333) to accurately align the grabbed welding station cover plate (349) above the welding station pipe shell (350), and the welding station cover plate (349) is placed on the welding station pipe shell (350);
the vision system (346) shoots a welding station pipe shell (350) on which a welding station cover plate (349) is placed, and according to the shooting position, a welding counterpoint driving motor outside a high-vacuum airtight welding cavity drives a welding counterpoint nut connecting block (339) to drive a left welding wheel (302) and a right welding wheel to accurately counterpoint to the upper part of the welding station pipe shell (350) on which the welding station cover plate (349) is placed, and then the left welding wheel (302) and the right welding wheel carry out parallel seal welding on the welding station pipe shell (350) on which the welding station cover plate (349) is placed.
2. The automatic alignment and parallel sealing method of microelectronic package under high vacuum state according to claim 1, characterized in that, on the front elevation of the front side vertical plate (316) of the box-shaped frame body (315), an eccentric wheel (323) is arranged, a closed shell (328) of an eccentric wheel driving motor is arranged in the box-shaped frame body (315), an eccentric wheel driving motor is arranged in the closed shell (328), air is sealed in the closed shell (328), and an output shaft of the eccentric wheel driving motor is connected with an eccentric wheel shaft (322) of the eccentric wheel (323) after magnetic fluid is sealed; a left guide rail groove (318) in the up-down direction is fixedly arranged on a front vertical plate (316) on the left side of the U-shaped frame plate (313), a right guide rail groove (319) in the up-down direction is fixedly arranged on a front vertical plate (316) on the right side of the U-shaped frame plate (313), a left vertical column (320) of a half-square lifting frame (317) is arranged in the left guide rail groove (318) in the up-down direction, a right vertical column (321) of the half-square lifting frame (317) is arranged in the right guide rail groove (319) in the up-down direction, a lifting frame lifting block (326) is fixedly connected to the lower bottom surface of the middle part of a cross beam of the half-square lifting frame (317), a lifting guide wheel axle (325) is connected to the lifting frame lifting block (326), a lifting guide wheel (324) is arranged on the lifting guide wheel axle (325), and the lifting guide wheel (324) is propped against the outer edge side surface of an eccentric wheel (323);
when two parallel welding lines of the left welding wheel (302) and the right welding wheel pair sealing welding assembly (329) are welded, a lifting frame lifting block (326) on the half-square lifting frame (317) is arranged right below the nylon lifting screw (327), and at the moment, the left parallel welding wheel mechanism and the right parallel welding wheel mechanism are in a separation state with the half-square lifting frame (317);
after welding of two parallel welding lines of a left welding wheel (302) and a right welding wheel pair sealing welding assembly (329) is completed, an eccentric wheel driving motor arranged in a closed shell (328) is started, an eccentric wheel (323) jacks up a half-mouth-shaped lifting frame (317) through a jacking guide wheel (324), and the half-mouth-shaped lifting frame (317) lifts up the left welding wheel (302) and the right welding wheel through a jacking weight left supporting plate (306) and a weight right supporting plate in a right parallel welding wheel mechanism and is separated from the sealing welding assembly (329).
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| CN111730185B (en) * | 2020-07-27 | 2020-11-20 | 烟台华创智能装备有限公司 | Automatic parallel sealing device and sealing method based on image recognition |
| CN214602469U (en) * | 2020-08-18 | 2021-11-05 | 天津伍嘉联创科技发展股份有限公司 | High-speed full-automatic vacuum sealing and welding machine |
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