CN114043065A - Hot isostatic pressing diffusion welding method for aluminum rotary target - Google Patents
Hot isostatic pressing diffusion welding method for aluminum rotary target Download PDFInfo
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- CN114043065A CN114043065A CN202111415498.4A CN202111415498A CN114043065A CN 114043065 A CN114043065 A CN 114043065A CN 202111415498 A CN202111415498 A CN 202111415498A CN 114043065 A CN114043065 A CN 114043065A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/021—Isostatic pressure welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
- B23K20/026—Thermo-compression bonding with diffusion of soldering material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/24—Preliminary treatment
Abstract
The invention provides a hot isostatic pressing diffusion welding method of an aluminum rotary target, which comprises the following steps: (1) threads are machined on the surface of the stainless steel pipe, the high-purity aluminum pipe, the stainless steel pipe and the low-carbon steel pipe are assembled to obtain a sleeve, the sleeve is sequentially provided with the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe from inside to outside, and gaps are reserved among the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe respectively; (2) the sleeve is welded by a stainless steel ring to seal two ends; (3) degassing the welded and sealed sleeve; (4) carrying out hot isostatic pressing treatment on the degassed sleeve to obtain a welded and combined aluminum rotary target and a stainless steel pipe; the method obtains the aluminum rotary target without obvious welding seams and with good bonding force through the processes of machining threads, degassing and hot isostatic pressing diffusion.
Description
Technical Field
The invention belongs to the fields of semiconductor electronics, flat panel displays, decorative coating and the like, and particularly relates to a hot isostatic pressing diffusion welding method of an aluminum rotating target.
Background
The sputtering coating technique usually utilizes gas discharge to generate gas ionization, positive ions of the gas ionization bombard a cathode target at a high speed under the action of an electric field to knock out atoms or molecules of the cathode target, and the atoms or molecules fly to the surface of a coated substrate to deposit a film. The prior sputtering technology comprises radio frequency sputtering, three-stage sputtering and magnetron sputtering, and the magnetron sputtering has higher coating rate compared with other sputtering technologies. At present, magnetron sputtering is one of the mainstream techniques for coating. With the rapid development of artificial intelligence, 5G technology, consumer electronics and other terminal application markets, the market scale of semiconductor chips is gradually enlarged, and the application range of the magnetron sputtering technology is more and more extensive.
The rotary target material is widely applied to the fields of communication, electronics, plane display and the like at present, and the high-purity aluminum target is an indispensable coating material in the thin film transistor industry. Magnetron sputtering coating manufacturers mostly use planar targets as high-purity aluminum targets, the utilization rate of the planar targets is low, only about 20% of materials are utilized in sputtering, but the utilization rate of the high-purity aluminum rotary targets can reach over 75%, and the rotary targets are more practical than the planar targets along with the gradual increase of the size of a liquid crystal screen in recent years. However, the rotary target material also faces some challenges, the tubular aluminum tube is not easy to process, the rotary target material of high-purity aluminum is soft in texture and is easy to deform in the use process, and the temperature of the rotary target of high-purity aluminum in a use cavity is higher in a high-power state of the coating equipment, so that the end position of the assembly of the aluminum tube target material and the coating equipment is easy to deform, and sputtering of the target material is influenced.
CN112475802A discloses an assembling method of an aluminum target and an aluminum alloy backing plate, which comprises the following steps: (1) carrying out solid solution treatment and aging treatment on the aluminum alloy back plate to obtain a hardness-enhanced aluminum alloy back plate; (2) performing thread turning on the welding surface of the hardness-enhanced aluminum alloy backboard obtained in the step (1), and performing acid washing treatment on the aluminum target material and the aluminum alloy backboard to obtain a pretreated aluminum target material and an pretreated aluminum alloy backboard; (3) assembling the pretreated aluminum target material and the aluminum alloy back plate, placing the aluminum target material and the aluminum alloy back plate in a sheath, vacuumizing, and performing hot isostatic pressing welding; the assembly method enables the backing plate and the aluminum target material to have high welding bonding strength, but is only suitable for the plate-shaped aluminum target material.
CN112743075A discloses a binding method of tubular target, which comprises the following steps: performing thread turning on the outer surface of the sheathed inner tube, then filling target material powder into a cavity formed by the outer surface of the sheathed inner tube and the inner surface of the sheathed outer tube, sequentially performing degassing treatment and hot isostatic pressing treatment, and removing the sheathed outer tube to obtain the tubular target binding the sheathed inner tube and the target tube. The binding method omits the original intermediate layer by performing thread turning treatment on the outer surface of the sheath inner tube, but the opening method is suitable for chromium target materials and is not suitable for binding high-purity aluminum rotary targets.
CN109807452A discloses a welding method of a high-purity aluminum rotary target, which solves the problem that a flange end of an aluminum rotary target is easy to deform by using an aluminum alloy end and the aluminum rotary target through vacuum electron beam welding, but the whole welding process is difficult, and may not be suitable for sputtering the aluminum rotary target under high power, while some domestic manufacturers adopt a high-purity aluminum rotary target welded by using a back tube stainless steel indium to be only suitable for sputtering the target under low power, and sputtering under high power, the indium is melted due to too high temperature in a target cavity, so that the sputtering efficiency of the target cannot be improved, and the yield of the target sputtering product can be realized.
In order to overcome the problem of deformation of the end head of the high-purity aluminum rotary target in a high-power state, a new target material binding mode needs to be further explored.
Disclosure of Invention
Aiming at the problems of low hardness, easy deformation, low bonding force with high-hardness materials and the like of a high-purity aluminum rotary target in the prior art, the invention provides a hot isostatic pressing diffusion welding method of the aluminum rotary target, which solves the problem that an end used in a high-power state of the high-purity aluminum rotary target is easy to deform by utilizing thread processing and hot isostatic pressing.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the present invention provides a method of hot isostatic pressure diffusion welding of an aluminium rotary target, characterised in that the method comprises the steps of:
(1) threads are machined on the surface of the stainless steel pipe, the high-purity aluminum pipe, the stainless steel pipe and the low-carbon steel pipe are assembled to obtain a sleeve, the sleeve is sequentially provided with the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe from inside to outside, and gaps are reserved among the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe respectively;
(2) the sleeve is welded by a stainless steel ring to seal two ends;
(3) degassing the welded and sealed sleeve;
(4) and carrying out hot isostatic pressing treatment on the degassed sleeve to obtain the aluminum rotary target and the stainless steel pipe which are welded and combined.
According to the hot isostatic pressing diffusion welding method for the aluminum rotary target, the aluminum rotary target which is tightly combined with the stainless steel pipe and has no obvious welding line is obtained through the steps of thread machining, degassing and hot isostatic pressing diffusion welding, the problem that the end of the aluminum rotary target is easy to deform when the stainless steel material with high hardness is used as the end material under the high-power state can be solved, the technical problem of high-purity aluminum rotary target is solved, the sputtering efficiency of the high-purity aluminum rotary target is improved, and the yield of target sputtering is increased.
Preferably, the high purity aluminum pipe in step (1) is processed from a high purity aluminum ingot.
Preferably, the high purity aluminum ingot has an aluminum content of 99.9985 to 99.9995 wt%, such as 99.9985 wt%, 99.9988 wt%, 99.9990 wt%, 99.9992 wt%, or 99.9995 wt%, but is not limited to the recited values, and other values not recited within the range are also applicable.
Preferably, the high purity aluminum tube has a tube wall thickness of 6 to 8mm, and may be, for example, 6mm, 6.5mm, 7mm, 7.5mm or 8mm, but is not limited to the values recited, and other values not recited within the range of values are also applicable.
Preferably, the high-purity aluminum ingot processing comprises the steps of forging, extruding, boring, straightening and boring the high-purity aluminum ingot to obtain the high-purity aluminum pipe.
Preferably, the surface of the stainless steel tube is threaded to a depth of 0.49 to 0.51mm, such as 0.49mm, 0.50mm or 0.51mm, but not limited to the values recited, and other values not recited within this range are equally applicable.
Preferably, the surface thread of the stainless steel tube has a length of 0.8-1.2mm, for example, 0.8mm, 0.9mm, 1.0mm, 1.1mm or 1.2mm, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the stainless steel tube has a wall thickness of 5-7mm, such as 5mm, 5.5mm, 6mm, 6.5mm or 7mm, but not limited to the values listed, and other values not listed in the range are also applicable.
Preferably, the carbon content in the low carbon steel pipe is less than 0.25%.
Preferably, the low carbon steel pipe has a wall thickness of 3 to 5mm, such as 3mm, 3.5mm, 4mm, 4.5mm or 5mm, but not limited to the values listed, and other values not listed in the range are also applicable.
Preferably, the width of the gap between the stainless steel tube and the high purity aluminum tube is 0.49 to 0.51mm, and may be, for example, 0.49mm, 0.50mm or 0.51mm, but is not limited to the values recited, and other values not recited within the range of values are also applicable.
Preferably, the width of the gap between the high purity aluminum pipe and the low carbon steel pipe is 0.49 to 0.51mm, and may be, for example, 0.49mm, 0.50mm or 0.51mm, but is not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the pre-assembly cleaning is performed on stainless steel tubing, high purity aluminum tubing, and low carbon steel tubing.
Preferably, the clean areas include the inner and outer surfaces of stainless steel tubing, high purity aluminum tubing, and low carbon steel tubing.
Preferably, the cleaning detergent comprises ethanol and/or acetone.
Preferably, a stainless steel sheet is placed between the high-purity aluminum pipe and the low-carbon steel pipe.
Preferably, a stainless steel skin is placed between the high purity aluminum tube and the low carbon steel tube in order to prevent the aluminum tube and the low carbon steel from reacting under the high temperature conditions of hot isostatic pressing.
Preferably, the stainless steel sheet has a thickness of 0.09 to 0.11mm, for example 0.09mm, 0.095mm, 0.1mm, 0.105mm or 0.11mm, but is not limited to the values listed, and other values not listed in this range are equally applicable.
Preferably, the outer diameter of the stainless steel circular ring in the step (2) is consistent with that of the low-carbon steel pipe.
Preferably, the inner diameter of the stainless steel circular ring in the step (2) is consistent with the inner diameter of the stainless steel pipe.
Preferably, said welding in step (2) comprises sealing at each end with one said stainless steel ring.
Preferably, the welding mode comprises argon arc welding.
Preferably, the welding wire comprises a stainless steel wire.
Preferably, the stainless steel ring at either end of step (2) is perforated.
Preferably, the diameter of the holes in the stainless steel ring is 4.9-5.1mm, and may be, for example, 4.9mm, 4.95mm, 5.0mm, 5.05mm or 5.1mm, but is not limited to the values recited, and other values not recited in the range of values are also applicable.
Preferably, a degassing pipe is welded on the hole on the stainless steel circular ring.
Preferably, the degassing in step (3) comprises: and placing the sealed sleeve in a vacuum degassing device, and vacuumizing through the degassing pipe.
Preferably, the temperature of the evacuation is 100-300 ℃, and may be, for example, 100 ℃, 150 ℃, 200 ℃, 250 ℃ or 300 ℃, but is not limited to the recited values, and other values not recited within the range of values are equally applicable.
Preferably, the time period of the vacuum pumping is 4-6h, such as 4h, 4.5h, 5h, 5.5h or 6h, but not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the hot isostatic pressing in step (4) comprises holding and maintaining the temperature and pressure after raising the temperature.
Preferably, the temperature of the end point of the temperature rise is 250-500 ℃, for example, 250 ℃, 300 ℃, 350 ℃, 400 ℃, 450 ℃ or 500 ℃, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the incubation time is 3-8h, for example 3h, 4h, 5h, 6h, 7h or 8h, but not limited to the recited values, and other values not recited in this range are equally applicable.
Preferably, the pressure of the holding pressure is 80 to 150MPa, for example 80MPa, 90MPa, 100MPa, 110MPa, 120MPa, 130MPa, 140MPa or 150MPa, but not limited to the values listed, and other values not listed in the range of values are equally applicable.
In hot isostatic pressing, the temperature is preferably raised to 250-500 ℃, and the temperature is kept for 3-8h at 80-150MPa, so as to obtain a more tightly bonded aluminum rotary target material.
Preferably, the method further comprises step (5):
(5) and sequentially removing the stainless steel rings at the two ends and the outermost low-carbon steel pipe from the sleeve after the hot isostatic pressing, and processing to obtain the required finished product size.
Preferably, the removing of the stainless steel rings at both ends in the step (5) includes cutting off the stainless steel rings at both ends.
As a preferred embodiment of the present invention, the method comprises the steps of:
(1) threads are processed on the surface of a stainless steel pipe, a high-purity aluminum pipe with the pipe wall thickness of 6-8mm, a stainless steel pipe with the pipe wall thickness of 5-7mm and a low-carbon steel pipe with the pipe wall thickness of 3-5mm are assembled to obtain a sleeve, the sleeve is sequentially provided with the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe from inside to outside, gaps are reserved among the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe respectively, the width of each gap is 0.49-0.51mm independently, and a stainless steel skin with the thickness of 0.09-0.11mm is placed between the high-purity aluminum pipe and the low-carbon steel pipe;
(2) the two ends of the sleeve are welded and sealed through a stainless steel circular ring;
wherein the outer diameter of the stainless steel circular ring is consistent with the outer diameter of the low-carbon steel pipe, the inner diameter of the stainless steel circular ring is consistent with the inner diameter of the stainless steel pipe, a hole with the diameter of 4.9-5.1mm is punched on the stainless steel circular ring at any one end of the two ends, and a degassing pipe is welded on the hole;
(3) the welded and sealed sleeve is placed in a vacuum degassing device, and degassing is carried out through the degassing tube by vacuumizing at the temperature of 300 ℃ for 4-6 h;
(4) heating the degassed sleeve to 250-500 ℃, and preserving heat for 3-8h under 80-150MPa for hot isostatic pressing treatment;
(5) and sequentially cutting the stainless steel rings at two ends of the sleeve after the hot isostatic pressing, removing the outermost low-carbon steel pipe, and processing to the required finished product size.
Compared with the prior art, the invention has the beneficial effects that:
(1) according to the hot isostatic pressing diffusion welding method for the aluminum rotary target, provided by the invention, the aluminum pipe and the stainless steel pipe can be better combined together by adopting a thread structure, degassing and hot isostatic pressing diffusion welding processes, the sizes of welding line gaps are all equal to 0, the bonding strength is more than or equal to 13.7MPa, and the problem that the end head of the aluminum pipe is easy to deform in a high-temperature environment is solved;
(2) the hot isostatic pressing diffusion welding method for the aluminum rotary target, provided by the invention, can meet the sputtering requirements of coating equipment under different conditions, can improve the sputtering efficiency of products, and can better realize the mass production of the products.
Drawings
FIG. 1 is a cross-sectional view of a sleeve before vacuum pumping in step (3) of a method for hot isostatic pressing diffusion bonding of an aluminum rotary target according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view of the sleeve after the hot isostatic pressing treatment in step (4) in the method for hot isostatic pressing diffusion bonding of an aluminum rotary target according to the embodiment of the present invention.
Wherein, 1, low carbon steel pipe; 2. a high-purity aluminum tube; 3. a stainless steel tube; 4. a stainless steel ring; 5. stainless steel sheet; 6. a void.
Detailed Description
For the purpose of facilitating an understanding of the present invention, the present invention will now be described by way of examples. It should be understood by those skilled in the art that the examples are only for the understanding of the present invention and should not be construed as the specific limitations of the present invention.
It is to be understood that the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit ly indicating a number of technical features being indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified. It should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "disposed," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
In one embodiment, the present invention provides a method of hot isostatic pressure diffusion welding of an aluminum rotary target, the method comprising the steps of:
(1) threads are processed on the surface of a stainless steel pipe, a high-purity aluminum pipe with the pipe wall thickness of 6-8mm, a stainless steel pipe with the pipe wall thickness of 5-7mm and a low-carbon steel pipe with the pipe wall thickness of 3-5mm are assembled to obtain a sleeve, the sleeve is sequentially provided with the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe from inside to outside, gaps are reserved among the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe respectively, the width of each gap is 0.49-0.51mm independently, and a stainless steel skin with the thickness of 0.09-0.11mm is placed between the high-purity aluminum pipe and the low-carbon steel pipe;
(2) the two ends of the sleeve are welded and sealed through a stainless steel circular ring;
the outer diameter of the stainless steel ring is consistent with the outer diameter of the low-carbon steel pipe, the inner diameter of the stainless steel ring is consistent with the inner diameter of the stainless steel pipe, a hole with the diameter of 4.9-5.1mm is punched in any one stainless steel ring, and a degassing pipe is welded on the hole;
(3) the welded and sealed sleeve is placed in a vacuum degassing device, and degassing is carried out through the degassing tube by vacuumizing at the temperature of 300 ℃ for 4-6 h;
(4) heating the degassed sleeve to 250-500 ℃, and preserving heat for 3-8h under 80-150MPa for hot isostatic pressing treatment;
(5) and sequentially cutting the stainless steel rings at two ends of the sleeve after the hot isostatic pressing, removing the outermost low-carbon steel pipe, and processing to the required finished product size.
It is understood that processes or substitutions and variations of conventional data provided by embodiments of the present invention are within the scope and disclosure of the present invention.
Fig. 1 is a cross-sectional view of a casing before evacuation, in which a stainless steel pipe 3 is positioned at the center, a screw thread is formed on the surface of the stainless steel pipe, the casing is completely assembled with an external high purity aluminum pipe 2, the casing is then placed in a low carbon steel pipe 1 serving as a sealed container, a gap 6 is reserved between the stainless steel pipe 3 and the high purity aluminum pipe 2, a layer of stainless steel skin 5 is wrapped between the high purity aluminum pipe 2 and the low carbon steel pipe 1, and the assembled stainless steel pipe 3, high purity aluminum pipe 2 and low carbon steel pipe 1 are welded and sealed at both ends by a stainless steel ring 4. Fig. 2 is a cross-sectional view of the sleeve after hot isostatic pressing, which differs from fig. 1 only in that after the degassing and cold isostatic pressing steps are completed, the voids 6 disappear, the stainless steel tube 3 is tightly bonded to the high purity aluminum tube 2, and no weld line gap is evident.
Example 1
The present embodiment provides a method of hot isostatic pressure diffusion welding of an aluminum rotary target, the method comprising the steps of:
(1) machining threads with the depth of 0.5mm and the length of 1mm on the surface of a stainless steel pipe, assembling a high-purity aluminum pipe with the pipe wall thickness of 7mm and the aluminum content of 99.999 wt% with a stainless steel pipe with the pipe wall thickness of 6mm and a low-carbon steel pipe with the pipe wall thickness of 4mm to obtain a sleeve, wherein the sleeve is sequentially a stainless steel pipe, a high-purity aluminum pipe and a low-carbon steel pipe from inside to outside, gaps are reserved among the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe respectively, the gap widths are 0.5mm respectively, and a stainless steel skin with the thickness of 0.1mm is placed between the high-purity aluminum pipe and the low-carbon steel pipe;
(2) the two ends of the sleeve are welded and sealed through a stainless steel circular ring;
the outer diameter of the stainless steel circular ring is consistent with the outer diameter of the low-carbon steel pipe, the inner diameter of the stainless steel circular ring is consistent with the inner diameter of the stainless steel pipe, a hole with the diameter of 5mm is drilled in any one stainless steel circular ring, and a degassing pipe is welded on the hole;
(3) the welded and sealed sleeve is placed in a vacuum degassing device, and degassing is carried out by vacuumizing at 200 ℃ for 5 hours through a degassing pipe;
(4) heating the degassed sleeve to 300 ℃, and preserving heat for 5 hours under 100MPa for hot isostatic pressing treatment;
(5) and sequentially cutting the stainless steel rings at two ends of the sleeve after the hot isostatic pressing, removing the outermost low-carbon steel pipe, and processing to the required finished product size.
Example 2
The present embodiment provides a method of hot isostatic pressure diffusion welding of an aluminum rotary target, the method comprising the steps of:
(1) machining a thread with the depth of 0.49mm and the length of 1.2mm on the surface of a stainless steel pipe, assembling a high-purity aluminum pipe with the pipe wall thickness of 8mm and the aluminum content of 99.999 wt% with a stainless steel pipe with the pipe wall thickness of 7mm and a low-carbon steel pipe with the pipe wall thickness of 4mm to obtain a sleeve, wherein the sleeve is sequentially provided with the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe from inside to outside, gaps are reserved among the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe respectively, the width of each gap is 0.49mm independently, and a stainless steel skin with the thickness of 0.11mm is placed between the high-purity aluminum pipe and the low-carbon steel pipe;
(2) the two ends of the sleeve are welded and sealed through a stainless steel circular ring;
the outer diameter of the stainless steel ring is consistent with the outer diameter of the low-carbon steel pipe, the inner diameter of the stainless steel ring is consistent with the inner diameter of the stainless steel pipe, a hole with the diameter of 4.9mm is drilled in any one stainless steel ring, and a degassing pipe is welded on the hole;
(3) the welded and sealed sleeve is placed in a vacuum degassing device, and degassing is carried out through the degassing tube by vacuumizing for 6 hours at 100 ℃;
(4) heating the degassed sleeve to 500 ℃, and preserving heat for 8 hours at 130MPa for hot isostatic pressing treatment;
(5) and sequentially cutting the stainless steel rings at two ends of the sleeve after the hot isostatic pressing, removing the outermost low-carbon steel pipe, and processing to the required finished product size.
Example 3
The present embodiment provides a method of hot isostatic pressure diffusion welding of an aluminum rotary target, the method comprising the steps of:
(1) machining a thread with the depth of 0.51mm and the length of 0.8mm on the surface of a stainless steel pipe, assembling a high-purity aluminum pipe with the pipe wall thickness of 6mm and the aluminum content of 99.999 wt% with a stainless steel pipe with the pipe wall thickness of 5mm and a low-carbon steel pipe with the pipe wall thickness of 3mm to obtain a sleeve, wherein the sleeve is sequentially provided with the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe from inside to outside, gaps are reserved among the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe respectively, the gap width is 0.51mm independently, and a stainless steel skin with the thickness of 0.09mm is placed between the high-purity aluminum pipe and the low-carbon steel pipe;
(2) the two ends of the sleeve are welded and sealed through a stainless steel circular ring;
the outer diameter of the stainless steel ring is consistent with the outer diameter of the low-carbon steel pipe, the inner diameter of the stainless steel ring is consistent with the inner diameter of the stainless steel pipe, a hole with the diameter of 5.1mm is drilled in any one stainless steel ring, and a degassing pipe is welded on the hole;
(3) the welded and sealed sleeve is placed in a vacuum degassing device, and degassing is carried out through the degassing tube by vacuumizing at 500 ℃ for 6 hours;
(4) heating the degassed sleeve to 250 ℃, and preserving heat for 5 hours under 90MPa for hot isostatic pressing treatment;
(5) and sequentially cutting the stainless steel rings at two ends of the sleeve after the hot isostatic pressing, removing the outermost low-carbon steel pipe, and processing to the required finished product size.
Example 4
Essentially the same as in example 1 except that the degassed sleeve was heated to 300 ℃ in hot isostatic pressing and held at 50MPa for 5 h.
Example 5
Essentially the same as in example 1, except that the degassed sleeve was heated to 150 ℃ in hot isostatic pressing and held at 90MPa for 5 h.
Comparative example 1
Basically the same procedure as in example 1 was followed, except that the surface of the stainless steel pipe was not threaded, and the stainless steel pipe was directly assembled with a high purity aluminum pipe and a low carbon steel pipe.
Comparative example 2
Essentially the same as the process of example 1 except that there was no vacuum degassing of step (3) prior to hot isostatic pressing.
Cutting a sample of about 20 multiplied by 14mm from the hot isostatic pressed pipes of the examples 1-5 and the comparative examples 1-2 by wire cutting, polishing the joint position of the aluminum pipe and the stainless steel pipe by using sand paper of 240 meshes, 600 meshes, 1000 meshes and 2000 meshes, polishing by using diamond polishing paste, placing the pipe in a beaker filled with ethanol after polishing, carrying out ultrasonic treatment for about 10min by ultrasonic waves, cleaning by using deionized water, drying and drying, observing the joint position by using a metallographic microscope, wherein the magnification is 100 and 200X, and if the gap of a welding line at the joint position is more than 0.05mm, the joint effect of the aluminum pipe and the stainless steel is poor; if the gap of the welding line at the combination position is less than or equal to 0.05mm, the combination effect of the aluminum pipe and the stainless steel is good, and the combination performance of the aluminum pipe and the stainless steel needs to be judged by combining the combination strength of the aluminum pipe and the stainless steel.
Examples 1-5 and comparative examples 1-2 were tested for bond strength by the following specific procedure: cutting a small sample with the size of about 20 multiplied by 14mm from a pipe subjected to cold isostatic pressing by wire cutting, polishing the combination position of the aluminum pipe and the stainless steel pipe by using abrasive paper with the size of 240 meshes, 600 meshes, 1000 meshes and 2000 meshes, placing the polished pipe in a beaker filled with ethanol, carrying out ultrasonic treatment for about 10min, washing by using deionized water, drying, carrying out an experiment by using a small universal stretcher, clamping the aluminum pipe at one end, clamping the stainless steel at one end, stretching, and if the tensile strength of the aluminum pipe and the stainless steel is more than or equal to 10MPa, indicating that the aluminum pipe and the stainless steel pipe are tightly combined to meet the performance requirement of a product; if the tensile strength of the aluminum pipe and the stainless steel is less than 10MPa, the aluminum pipe and the stainless steel pipe are not tightly combined, and the performance requirement of the product is not met.
The bound high-purity aluminum rotary targets obtained in the examples 1 to 5 and the comparative examples 1 to 2 are subjected to metallographic microscope observation on the size of a welding line gap and small universal drawing machine test on the bonding strength of an aluminum pipe and stainless steel to judge whether the performance of the product after cold isostatic pressing welding meets the requirements, and the obtained properties are shown in table 1.
The results of the performance test and the strength test obtained by the above test methods are shown in table 1.
TABLE 1
From the data in table 1 we can see that:
(1) in the aluminum rotary target obtained by binding in the methods of examples 1 to 3, the size of the welding line gap is 0, which proves that the aluminum pipe and the stainless steel pipe with good bonding effect are obtained by adopting the thread structure for processing the stainless steel pipe and the cold isostatic pressing process, the bonding strength is not less than 13.7MPa, and further, the bonding strength of the aluminum rotary target and the stainless steel rotary target is better;
(2) it can be seen from the combination of examples 1 and 4-5 that, compared with example 1, in examples 4 and 5, the temperature is raised to 300 ℃ or kept at 90MPa in the hot isostatic pressing process, respectively, the high-purity aluminum rotary target material obtained has a weld line gap of 0.15mm and a weld line gap of 0.2mm, and the bonding strength is only 6.2MPa and 5.0MPa, respectively, thereby indicating that the hot isostatic pressing process is carried out in reasonable temperature and pressure ranges to obtain the aluminum rotary target material with strong bonding force;
(3) by combining example 1 and comparative example 1, it can be seen that comparative example 1 omits the step of machining threads on the stainless steel tube compared to example 1, resulting in a weld line gap of the aluminum rotary target material obtained in comparative example 1 of up to 0.5mm, and no bonding of the aluminum tube and the stainless steel tube; therefore, the aluminum rotary target material obtained by the method for machining the threads on the stainless steel pipe has no obvious welding line and good bonding strength;
(4) by combining example 1 and comparative example 2, it can be seen that comparative example 2 omits the vacuum degassing step before hot isostatic pressing compared to example 1, the weld line gap of the aluminum rotary target material obtained in comparative example 2 is 0.5mm, and the aluminum tube and the stainless steel tube are not bonded; therefore, the vacuum degassing step is carried out before the hot isostatic pressing, so that the obvious welding line can be further reduced, and the bonding strength of the aluminum rotary target material is improved.
In conclusion, the hot isostatic pressing diffusion welding method for the aluminum rotary target provided by the invention adopts the steps of thread processing and hot isostatic pressing, can improve the bonding strength of the aluminum pipe and the stainless steel pipe, the bonded aluminum rotary target has no obvious welding line, is suitable for the sputtering requirements under different coating equipment conditions, and can better realize the batch production of products.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. A method of hot isostatic pressure diffusion welding of an aluminum rotary target, comprising the steps of:
(1) threads are machined on the surface of the stainless steel pipe, the high-purity aluminum pipe, the stainless steel pipe and the low-carbon steel pipe are assembled to obtain a sleeve, the sleeve is sequentially provided with the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe from inside to outside, and gaps are reserved among the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe respectively;
(2) the sleeve is welded by a stainless steel ring to seal two ends;
(3) degassing the welded and sealed sleeve;
(4) and carrying out hot isostatic pressing treatment on the degassed sleeve to obtain the aluminum rotary target and the stainless steel pipe which are welded and combined.
2. The method according to claim 1, wherein the high purity aluminum pipe in step (1) is processed from a high purity aluminum ingot;
preferably, the content of aluminum in the high-purity aluminum ingot is 99.9985-99.9995 wt%;
preferably, the tube wall thickness of the high-purity aluminum tube is 6-8 mm;
preferably, the high-purity aluminum ingot processing comprises forging, extruding, boring, straightening and boring a high-purity aluminum ingot to obtain the high-purity aluminum pipe;
preferably, the surface thread of the stainless steel pipe has a depth of 0.49-0.51 mm;
preferably, the length of the surface thread of the stainless steel pipe is 0.8-1.2 mm;
preferably, the wall thickness of the stainless steel pipe is 5-7 mm;
preferably, the thickness of the pipe wall of the low-carbon steel pipe is 3-5 mm;
preferably, the width of the gap between the stainless steel pipe and the high purity aluminum pipe is 0.49-0.51 mm;
preferably, the width of the gap between the high-purity aluminum pipe and the low-carbon steel pipe is 0.49-0.51 mm.
3. The method according to claim 1 or 2, wherein the stainless steel pipe, the high purity aluminum pipe and the low carbon steel pipe are cleaned before the assembling in the step (1);
preferably, the clean area comprises the inner and outer surfaces of stainless steel tubing, high purity aluminum tubing, and low carbon steel tubing;
preferably, the cleaning detergent comprises ethanol and/or acetone;
preferably, a stainless steel sheet is placed between the high-purity aluminum pipe and the low-carbon steel pipe;
preferably, the thickness of the stainless steel sheet is 0.09-0.11 mm.
4. The method according to any one of claims 1 to 3, wherein the outer diameter of the stainless steel circular ring is consistent with the outer diameter of the mild steel pipe in the step (2);
preferably, the inner diameter of the stainless steel circular ring is consistent with the inner diameter of the stainless steel pipe.
5. The method of any one of claims 1-4, wherein said welding in step (2) comprises sealing with one said stainless steel ring at each end;
preferably, the welding mode comprises argon arc welding;
preferably, the welding wire comprises a stainless steel wire.
6. The method according to any one of claims 1 to 5, wherein the stainless steel ring at either end of the two ends in step (2) is perforated;
preferably, the diameter of the hole on the stainless steel circular ring is 4.9-5.1 mm;
preferably, a degassing pipe is welded on the hole on the stainless steel circular ring.
7. The method according to any one of claims 1 to 6, wherein the degassing in step (3) comprises: placing the sealed sleeve in a vacuum degassing device, and vacuumizing through a degassing pipe;
preferably, the temperature of the vacuum pumping is 100-300 ℃;
preferably, the vacuumizing time is 4-6 h.
8. The process according to any one of claims 1 to 7, wherein the hot isostatic pressing in step (4) comprises holding at elevated temperature and pressure;
preferably, the temperature rise end temperature is 250-500 ℃;
preferably, the heat preservation time is 3-8 h;
preferably, the pressure of the pressure holding is 80-150 MPa.
9. The method according to any one of claims 1 to 8, characterized in that the method further comprises step (5):
(5) the hot isostatic pressed sleeve pipe is sequentially processed to the required finished product size by removing the stainless steel rings at the two ends and the low-carbon steel pipe at the outermost layer;
preferably, the removing of the stainless steel rings at both ends in the step (5) includes cutting off the stainless steel rings at both ends.
10. Method according to any of claims 1-9, characterized in that the method comprises the steps of:
(1) threads are processed on the surface of a stainless steel pipe, a high-purity aluminum pipe with the pipe wall thickness of 6-8mm, a stainless steel pipe with the pipe wall thickness of 5-7mm and a low-carbon steel pipe with the pipe wall thickness of 3-5mm are assembled to obtain a sleeve, the sleeve is sequentially provided with the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe from inside to outside, gaps are reserved among the stainless steel pipe, the high-purity aluminum pipe and the low-carbon steel pipe respectively, the width of each gap is 0.49-0.51mm independently, and a stainless steel skin with the thickness of 0.09-0.11mm is placed between the high-purity aluminum pipe and the low-carbon steel pipe;
(2) the two ends of the sleeve are welded and sealed through a stainless steel circular ring;
wherein the outer diameter of the stainless steel circular ring is consistent with the outer diameter of the low-carbon steel pipe, the inner diameter of the stainless steel circular ring is consistent with the inner diameter of the stainless steel pipe, a hole with the diameter of 4.9-5.1mm is punched on the stainless steel circular ring at any one end of the two ends, and a degassing pipe is welded on the hole;
(3) the welded and sealed sleeve is placed in a vacuum degassing device, and degassing is carried out through the degassing tube by vacuumizing at the temperature of 300 ℃ for 4-6 h;
(4) heating the degassed sleeve to 250-500 ℃, and preserving heat for 3-8h under 80-150MPa for hot isostatic pressing treatment;
(5) and sequentially cutting the stainless steel rings at two ends of the sleeve after the hot isostatic pressing, removing the outermost low-carbon steel pipe, and processing to the required finished product size.
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