CN112743217A - Welding structure and welding method of titanium-aluminum alloy target assembly - Google Patents
Welding structure and welding method of titanium-aluminum alloy target assembly Download PDFInfo
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- CN112743217A CN112743217A CN202011599464.0A CN202011599464A CN112743217A CN 112743217 A CN112743217 A CN 112743217A CN 202011599464 A CN202011599464 A CN 202011599464A CN 112743217 A CN112743217 A CN 112743217A
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- 238000003466 welding Methods 0.000 title claims abstract description 256
- 229910000838 Al alloy Inorganic materials 0.000 title claims abstract description 158
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 title claims abstract description 157
- 238000000034 method Methods 0.000 title claims abstract description 36
- 230000004888 barrier function Effects 0.000 claims abstract description 63
- 239000013077 target material Substances 0.000 claims abstract description 48
- 238000001513 hot isostatic pressing Methods 0.000 claims abstract description 22
- 238000007872 degassing Methods 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 19
- 229910052782 aluminium Inorganic materials 0.000 claims description 17
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 16
- 239000010935 stainless steel Substances 0.000 claims description 14
- 229910001220 stainless steel Inorganic materials 0.000 claims description 14
- 238000000429 assembly Methods 0.000 claims description 13
- 230000000712 assembly Effects 0.000 claims description 13
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 13
- 230000000903 blocking effect Effects 0.000 claims description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 10
- 238000001035 drying Methods 0.000 claims description 9
- 238000005498 polishing Methods 0.000 claims description 8
- 238000001291 vacuum drying Methods 0.000 claims description 8
- 239000012300 argon atmosphere Substances 0.000 claims description 7
- 238000011282 treatment Methods 0.000 claims description 5
- 238000011221 initial treatment Methods 0.000 claims description 2
- 230000000052 comparative effect Effects 0.000 description 14
- 238000002360 preparation method Methods 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 238000009694 cold isostatic pressing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000004021 metal welding Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/021—Isostatic pressure welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/14—Preventing or minimising gas access, or using protective gases or vacuum during welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/24—Preliminary treatment
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
Abstract
The invention provides a welding structure and a welding method of a titanium-aluminum alloy target assembly, wherein the welding structure comprises a first welding assembly and a second welding assembly which are symmetrically arranged; the first welding assembly and the second welding assembly respectively comprise a barrier layer, a titanium-aluminum alloy target material, an intermediate layer and a back plate which are sequentially arranged; the back plates of the first welding assembly and the second welding assembly are arranged close to each other, and an intermediate barrier layer is arranged between the back plate of the first welding assembly and the back plate of the second welding assembly; sequentially carrying out sheath welding, degassing and hot isostatic pressing on the welding structure to obtain a titanium-aluminum alloy target assembly; the welding method can improve the yield and the welding strength of the titanium-aluminum alloy target assembly, solve the problem of deformation of the titanium-aluminum alloy target assembly and improve the welding efficiency.
Description
Technical Field
The invention relates to the technical field of metal welding, in particular to a welding structure and a welding method of a titanium-aluminum alloy target assembly.
Background
With the rapid development of the semiconductor industry, the semiconductor material is both the base stone and the core. Each step and development of semiconductor technology places higher demands on materials, and each breakthrough in material technology and process also provides guarantees for new structures and new technologies of integrated circuits. The sputtering target material is applied to a physical vapor deposition process in the semiconductor industry, and is a key material for preparing special functional films such as semiconductor chips, display panels, optical devices, magnetic recording media and the like.
The titanium-aluminum alloy target material component is a key material in the semiconductor manufacturing process, is a product of combining a titanium-aluminum alloy sputtering material and a back plate, improves the welding bonding rate and the bonding strength of the titanium-aluminum alloy sputtering material and the back plate, is the requirement of a sputtering target material process, and can meet the requirements of a sputtering machine on the conductivity, the hardness and the like of the target material.
The titanium-aluminum alloy target and the aluminum back plate have poor bonding performance, and the welding is carried out by adopting a brazing method, so that the good welding bonding rate can not be ensured, and the high welding strength can not be achieved; the hot isostatic pressing diffusion welding is directly adopted, so that the target material is easy to deform in the welding process, the welding strength is low, and the target material is easy to be desoldered, so that the sputtering performance of the target material is influenced.
CN111101105B discloses a preparation method of a titanium-aluminum alloy target, which comprises the following steps: mixing titanium powder and aluminum powder, filling the titanium powder and the aluminum powder into a cold isostatic pressing sheath, sealing the cold isostatic pressing sheath, putting the cold isostatic pressing sheath into a cold isostatic pressing device, carrying out cold isostatic pressing on the mixed powder, and then sequentially carrying out degassing, hot isostatic pressing, slitting, alloying diffusion heat treatment and machining on the welding sheath.
CN101113513C discloses a composite titanium-aluminum alloy target and a preparation method thereof, the preparation method comprises: cleaning a titanium-aluminum alloy target surface in an ultrasonic cleaner, coating a metallization material on the surface of the titanium-aluminum alloy, then putting the titanium-aluminum alloy target surface into a vacuum furnace, preserving heat for a certain time at a temperature higher than the melting point of the alloy, and then cooling to room temperature; cleaning Al, Cu, Mo or their alloy back target in ultrasonic cleaning process; the titanium-aluminum alloy target surface and the back target are clamped with solder for assembly and welded in a vacuum furnace or atmosphere according to sputtering process conditions, but the method has the problems of low welding strength and easy deformation.
CN104480444A discloses a titanium-aluminum alloy target material and a preparation method thereof, the preparation method comprises: mixing titanium powder and aluminum powder, placing the mixture into a steel sheath, and sequentially performing sheath welding, degassing, sheath welding, hot isostatic pressing treatment, cooling and sheath removing.
Therefore, a preparation method which can ensure high welding yield, high welding strength, difficult deformation and high efficiency of the titanium-aluminum alloy target and the back plate is needed to be developed, and the preparation method has a wide application prospect.
Disclosure of Invention
In view of the problems in the prior art, the invention provides a welding structure of a titanium-aluminum alloy target assembly, which comprises a structure that back plates in a first welding assembly and a second welding assembly are close to and symmetrically arranged, and intermediate layers are added between the titanium-aluminum alloy target and the back plates in the first welding assembly and the second welding assembly; the welding structure is subjected to sheath welding, degassing, hot isostatic pressing, sheath removing, barrier layer removing and middle barrier layer removing in sequence to obtain the titanium-aluminum alloy target assembly.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the invention provides a welding structure of a titanium-aluminum alloy target assembly, which comprises a first welding assembly and a second welding assembly which are symmetrically arranged; the first welding assembly and the second welding assembly respectively comprise a barrier layer, a titanium-aluminum alloy target material, an intermediate layer and a back plate which are sequentially arranged; the back plate in the first welding assembly and the second welding assembly is close to the first welding assembly and the second welding assembly, and an intermediate barrier layer is arranged between the back plate of the first welding assembly and the back plate of the second welding assembly.
The welding structure comprises the first welding assembly and the second welding assembly which are symmetrically arranged, so that the problem of deformation of the target material can be effectively solved, and the welding efficiency can be improved; the first welding assembly and the second welding assembly respectively comprise a blocking layer, a titanium-aluminum alloy target material, an intermediate layer and a back plate which are sequentially arranged, the intermediate layer is arranged between the titanium-aluminum alloy target material and the back plate, the yield and the welding strength of the titanium-aluminum alloy target material assembly can be improved, and the blocking layer is arranged to facilitate the separation of the welding assembly and a sheath after the sheath is welded; the back plates in the first welding assembly and the second welding assembly are arranged close to each other, and the middle barrier layer is arranged between the back plate of the first welding assembly and the back plate of the second welding assembly, so that the target assemblies can be prevented from being welded together, and the step of removing the sheath is convenient to follow.
Preferably, the material of the barrier layer comprises stainless steel.
Preferably, the thickness of the barrier layer is 0.1 to 5mm, and may be, for example, 0.1mm, 0.5mm, 1mm, 1.5mm, 2mm, 2.5mm, 3mm, 3.5mm, 4mm, 4.5mm, or 5 mm.
The thickness of the barrier layer is 0.1-5 mm, so that the subsequent sheath removal can be facilitated, and the welding effect in hot isostatic pressing can be prevented from being influenced.
Preferably, the thickness of the titanium-aluminum alloy target is 5 to 20mm, and may be, for example, 5mm, 6mm, 8mm, 10mm, 12mm, 14mm, 16mm, 18mm, or 20 mm.
Preferably, the mass fraction of aluminum in the titanium-aluminum alloy target material is 5 to 80 wt%, and may be, for example, 5 wt%, 10 wt%, 20 wt%, 30 wt%, 40 wt%, 50 wt%, 60 wt%, 70 wt%, or 80 wt%.
Preferably, the thickness of the intermediate layer is 1-7 mm, and may be 1mm, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm, or the like, for example.
The thickness of the middle layer is 1-7 mm, so that the welding bonding rate between the titanium-aluminum alloy target and the back plate can be guaranteed, and the influence on subsequent sputtering can be avoided.
Preferably, the material of the intermediate layer comprises aluminum.
Preferably, the aluminum purity of the intermediate layer is 99.9 wt% or more, and may be, for example, 99.9 wt%, 99.99 wt%, 99.999 wt%, 100 wt%, or the like.
Preferably, the material of the intermediate layer includes a 1060.
Preferably, the material of the back plate comprises aluminum.
Preferably, a groove is provided in the back plate.
Preferably, the groove is internally provided with the intermediate layer and the titanium-aluminum alloy target material in sequence.
Preferably, the diameter of the groove in the back plate is 0.3-1 mm larger than the diameter of the titanium-aluminum alloy target, and may be, for example, 0.3mm, 0.4mm, 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, or 1 mm.
Preferably, the diameter of the groove in the back plate is 0.3-1 mm larger than the diameter of the intermediate layer, for example, 0.3mm, 0.4mm, 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm or 1 mm.
Preferably, the material of the intermediate barrier layer comprises stainless steel.
Preferably, the thickness of the intermediate barrier layer is 0.1 to 5mm, and may be, for example, 0.1mm, 0.5mm, 1mm, 1.5mm, 2mm, 2.5mm, 3mm, 3.5mm, 4mm, 4.5mm, or 5 mm.
The thickness of the intermediate barrier layer is 0.1-5 mm, so that the isolation between the target material assembly and the target material assembly can be ensured, the target material assembly and the target material assembly are prevented from being welded together, and the welding effect in hot isostatic pressing can be avoided from being influenced.
In a second aspect, the present invention provides a welding method for a titanium-aluminum alloy target assembly, which employs the welded structure of the titanium-aluminum alloy target assembly described in the first aspect.
According to the invention, the welding structure of the titanium-aluminum alloy target assembly is adopted for welding, so that the yield and the welding strength of the titanium-aluminum alloy target assembly can be improved, the deformation problem of the titanium-aluminum alloy target assembly is effectively solved, and the welding efficiency is improved.
Preferably, the welding method includes: and putting the titanium-aluminum alloy target assembly with the welding structure into a sheath, and sequentially carrying out sheath welding, degassing, hot isostatic pressing, sheath removal, barrier layer removal and intermediate barrier layer removal to obtain the titanium-aluminum alloy target assembly.
Preferably, the titanium-aluminum alloy target, the intermediate layer and the back plate in the titanium-aluminum alloy target assembly are all subjected to primary treatment before welding.
Preferably, the preliminary treatment includes polishing treatment, washing, and drying in this order.
The titanium-aluminum alloy target, the intermediate layer and the back plate are polished, so that the subsequent welding process is facilitated, and the cleaning and drying are carried out to ensure that the welding joint surface is clean and free of impurities so as to ensure a good welding effect.
Preferably, the cleaning comprises ultrasonic cleaning.
Preferably, the power of the ultrasonic cleaning is 300-500W, for example, 300W, 320W, 340W, 360W, 380W, 400W, 420W, 440W, 460W, 480W, 500W, etc.
Preferably, the cleaning solution for ultrasonic cleaning comprises isopropyl alcohol and/or ethanol.
Preferably, the cleaning time is 10-200 min, for example, 10min, 20min, 40min, 60min, 80min, 100min, 120min, 140min, 160min, 180min or 200 min.
Preferably, the drying comprises vacuum drying.
Preferably, the drying temperature is 90-150 ℃, for example, 90 ℃, 100 ℃, 110 ℃, 120 ℃, 130 ℃, 140 ℃ or 150 ℃.
Preferably, the drying time is 1-5 h, for example, 1h, 1.5h, 2h, 2.5h, 3h, 3.5h, 4h, 4.5h or 5 h.
Preferably, the material of the sheath comprises aluminum or stainless steel.
Preferably, the thickness of the sheath is 1-5 mm, for example, 1mm, 1.5mm, 2mm, 2.5mm, 3mm, 3.5mm, 4mm, 4.5mm, or 5 mm.
Preferably, the welding of the sheath is performed under an argon atmosphere.
Preferably, the degassing temperature is 100 ~ 500 ℃, for example can be 100 degrees, 150 degrees, 200 degrees, 250 degrees, 300 degrees, 350 degrees, 400 degrees, 450 degrees or 500 degrees C.
Preferably, the degassing time is 2-48 h, for example, 2h, 5h, 10h, 15h, 20h, 25h, 30h, 35h, 40h, 45h or 48 h.
Preferably, the degree of vacuum after degassing is less than or equal to 0.003Pa, and may be, for example, 0.003Pa, 0.0025Pa, 0.002Pa, 0.0015Pa, 0.001Pa, 0.0005Pa, or 0.0002 Pa.
Preferably, the hot isostatic pressing temperature is 200 to 600 ℃, and may be, for example, 200 ℃, 240 ℃, 280 ℃, 320 ℃, 360 ℃, 400 ℃, 440 ℃, 480 ℃, 520 ℃, 560 ℃, or 600 ℃.
Preferably, the hot isostatic pressing pressure is 50 to 200MPa, and may be, for example, 50MPa, 70MPa, 90MPa, 100MPa, 120MPa, 140MPa, 160MPa, 180MPa, 200MPa, or the like.
Preferably, the hot isostatic pressing time is 3-48 h, for example, 3h, 8h, 10h, 15h, 20h, 25h, 30h, 35h, 40h, 45h or 48 h.
As a preferred embodiment of the present invention, the welding method includes the steps of:
(1) sequentially polishing a titanium-aluminum alloy target material with the thickness of 5-20 mm, a middle layer with the thickness of 1-7 mm and a back plate, performing ultrasonic cleaning with the power of 300-500W in isopropanol and/or ethanol for 10-200 min, and performing vacuum drying at 90-150 ℃ for 1-5 h, wherein the mass fraction of aluminum in the titanium-aluminum alloy target material is 5-80 wt%, grooves are arranged in the back plate, and the diameter of the grooves in the back plate is 0.3-1 mm larger than that of the titanium-aluminum alloy target material and 0.3-1 mm larger than that of the middle layer;
after the intermediate layer and the titanium-aluminum alloy target material are sequentially placed into the groove of the back plate, a blocking layer with the thickness of 0.1-5 mm is arranged on one surface of the back plate, which is exposed out of the titanium-aluminum alloy target material, so that a welding assembly is formed;
(2) selecting two welding assemblies which are respectively a first welding assembly and a second welding assembly, arranging the back plates of the first welding assembly and the second welding assembly close to each other, and arranging an intermediate barrier layer with the thickness of 0.1-5 mm between the back plate of the first welding assembly and the back plate of the second welding assembly to form a welding structure of the titanium-aluminum alloy target assembly;
(3) placing the welding structure of the titanium-aluminum alloy target assembly into a sheath with the thickness of 1-5 mm, performing sheath welding in an argon atmosphere, degassing at 100-500 ℃ for 2-48 h until the vacuum degree is less than or equal to 0.003Pa, performing hot isostatic pressing at 200-600 ℃ and under the pressure of 50-200 MPa for 3-48 h, and removing the sheath, the barrier layer and the intermediate barrier layer to obtain the titanium-aluminum alloy target assembly.
In a third aspect, the invention provides a titanium-aluminum alloy target assembly, which is obtained by welding the titanium-aluminum alloy target assembly according to the second aspect.
The titanium-aluminum alloy target assembly does not deform in the welding process, and meanwhile, the welding yield and the welding strength are improved.
Compared with the prior art, the invention has at least the following beneficial effects:
(1) according to the welding structure of the titanium-aluminum alloy target assembly, the middle layer is arranged between the titanium-aluminum alloy target and the back plate, so that the welding effect of the titanium-aluminum alloy target assembly can be improved, the yield is not less than 85%, and the yield can reach 100% under the optimal condition;
(2) the welding structure of the titanium-aluminum alloy target assembly comprises a first welding assembly and a second welding assembly which are symmetrically arranged, and the welding structure is placed in the jacket for welding, so that the deformation problem of the titanium-aluminum alloy target assembly is effectively solved;
(3) the welding method of the titanium-aluminum alloy target assembly provided by the invention is simple and easy to operate, and has high welding efficiency;
(4) the titanium-aluminum alloy target assembly provided by the invention has high welding strength, the welding strength of the titanium-aluminum alloy target assembly is more than or equal to 50.1MPa, and the welding strength is more than or equal to 64.3MPa under the optimal condition, so that the titanium-aluminum alloy target assembly can be well applied to sputtering.
Drawings
FIG. 1 is a schematic view of a welded structure of a titanium-aluminum alloy target assembly in example 1 of the present invention.
In the figure: 1-a back plate; 2-an intermediate layer; 3-titanium aluminum alloy target material; 4-a barrier layer; 5-an intermediate barrier layer.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
The present invention is described in further detail below. The following examples are merely illustrative of the present invention and do not represent or limit the scope of the claims, which are defined by the claims.
First, an embodiment
Example 1
The present embodiment provides a welding structure of a titanium-aluminum alloy target assembly, as shown in fig. 1, the welding structure includes a first welding assembly and a second welding assembly that are symmetrically arranged; the first welding assembly and the second welding assembly respectively comprise a barrier layer 4 with the thickness of 2.5mm, a titanium-aluminum alloy target 3 with the thickness of 10mm, an intermediate layer 2 with the thickness of 4mm and a back plate 1 which are sequentially arranged; the backboard 1 in the first welding assembly and the second welding assembly is arranged close to each other, a middle barrier layer 5 with the thickness of 3mm is arranged between the backboard 1 of the first welding assembly and the backboard 1 of the second welding assembly, the mass fraction of aluminum in the titanium aluminum alloy target 3 is 25 wt%, a groove is arranged in the backboard 1, and the diameter of the groove in the backboard 1 is 0.5mm larger than that of the titanium aluminum alloy target 3 and 0.5mm larger than that of the middle layer 2.
The embodiment provides a welding method of a welding structure of a titanium-aluminum alloy target assembly, and the welding method comprises the following steps:
(1) sequentially polishing a titanium-aluminum alloy target material 3 with the thickness of 10mm, an intermediate layer 2 with the thickness of 4mm and a back plate 1, carrying out ultrasonic cleaning with the power of 400W in isopropanol for 100min and carrying out vacuum drying at 130 ℃ for 3 h;
after the intermediate layer 2 and the titanium-aluminum alloy target 3 are sequentially placed in the groove of the backboard 1, a blocking layer 4 with the thickness of 2.5mm is arranged on one surface of the backboard 1, which is exposed out of the titanium-aluminum alloy target 3, so as to form a welding assembly;
(2) selecting two welding assemblies which are respectively a first welding assembly and a second welding assembly, arranging the back plates 1 of the first welding assembly and the second welding assembly close to each other, and arranging a middle blocking layer 5 with the thickness of 3mm between the back plate 1 of the first welding assembly and the back plate 1 of the second welding assembly to form a welding structure of the titanium-aluminum alloy target assembly;
(3) and (3) putting the welding structure of the titanium-aluminum alloy target assembly into a sheath with the thickness of 3mm, performing sheath welding in an argon atmosphere, degassing at 300 ℃ for 25h until the vacuum degree reaches 0.002Pa, performing hot isostatic pressing at 400 ℃ and under the pressure of 125MPa for 25h, and removing the sheath, the barrier layer 4 and the intermediate barrier layer 5 to obtain the titanium-aluminum alloy target assembly.
In this embodiment, the type of the back plate 1 is Al1060, the material of the intermediate layer 2 is Al1060, the material of the barrier layer 4 is stainless steel, the material of the intermediate barrier layer 4 is stainless steel, and the material of the sheath is stainless steel.
Example 2
The embodiment provides a welding structure of a titanium-aluminum alloy target assembly, which comprises a first welding assembly and a second welding assembly which are symmetrically arranged; the first welding assembly and the second welding assembly respectively comprise a barrier layer with the thickness of 0.1mm, a titanium-aluminum alloy target with the thickness of 5mm, a middle layer with the thickness of 1mm and a back plate which are sequentially arranged; the back plates in the first welding assembly and the second welding assembly are arranged close to each other, a middle blocking layer with the thickness of 0.1mm is arranged between the back plate of the first welding assembly and the back plate of the second welding assembly, the mass fraction of aluminum in the titanium aluminum alloy target material is 80 wt%, a groove is arranged in the back plate, the diameter of the groove in the back plate is 0.3mm larger than that of the titanium aluminum alloy target material, and the diameter of the groove in the back plate is 0.3mm larger than that of the middle layer.
The embodiment provides a welding method of a welding structure of a titanium-aluminum alloy target assembly, and the welding method comprises the following steps:
(1) sequentially polishing the titanium-aluminum alloy target material with the thickness of 5mm, the intermediate layer with the thickness of 1mm and the back plate, carrying out ultrasonic cleaning with the power of 300W in ethanol for 10min and carrying out vacuum drying at 90 ℃ for 5 h;
after the intermediate layer and the titanium-aluminum alloy target material are sequentially placed into the groove of the back plate, a blocking layer with the thickness of 0.1mm is arranged on one surface of the back plate, which is exposed out of the titanium-aluminum alloy target material, so that a welding assembly is formed;
(2) selecting two welding assemblies which are respectively a first welding assembly and a second welding assembly, arranging the back plates of the first welding assembly and the second welding assembly close to each other, and arranging an intermediate barrier layer with the thickness of 0.1mm between the back plate of the first welding assembly and the back plate of the second welding assembly to form a welding structure of the titanium-aluminum alloy target assembly;
(3) and putting the welding structure of the titanium-aluminum alloy target assembly into a sheath with the thickness of 1mm, performing sheath welding in an argon atmosphere, degassing at 100 ℃ for 48h until the vacuum degree reaches 0.003Pa, performing hot isostatic pressing at 200 ℃ and the pressure of 50MPa for 48h, and removing the sheath, the barrier layer and the intermediate barrier layer to obtain the titanium-aluminum alloy target assembly.
In this embodiment, the back plate is Al1050, the middle layer is Al1060, the barrier layer is made of stainless steel, the middle barrier layer is made of stainless steel, and the sheath is made of stainless steel.
Example 3
The embodiment provides a welding structure of a titanium-aluminum alloy target assembly, which comprises a first welding assembly and a second welding assembly which are symmetrically arranged; the first welding assembly and the second welding assembly respectively comprise a barrier layer with the thickness of 5mm, a titanium-aluminum alloy target with the thickness of 20mm, a middle layer with the thickness of 7mm and a back plate which are sequentially arranged; the back plates in the first welding assembly and the second welding assembly are arranged close to each other, a middle blocking layer with the thickness of 5mm is arranged between the back plate of the first welding assembly and the back plate of the second welding assembly, the mass fraction of aluminum in the titanium aluminum alloy target material is 5 wt%, a groove is arranged in the back plate, the diameter of the groove in the back plate is 1mm larger than that of the titanium aluminum alloy target material, and the diameter of the groove in the back plate is 1mm larger than that of the middle layer.
The embodiment provides a welding method of a welding structure of a titanium-aluminum alloy target assembly, and the welding method comprises the following steps:
(1) sequentially polishing the titanium-aluminum alloy target material with the thickness of 20mm, the intermediate layer with the thickness of 7mm and the back plate, carrying out ultrasonic cleaning with the power of 500W in isopropanol for 200min and carrying out vacuum drying at 150 ℃ for 1 h;
after the intermediate layer and the titanium-aluminum alloy target material are sequentially placed in the groove of the back plate, a blocking layer with the thickness of 5mm is arranged on one surface of the back plate, which is exposed out of the titanium-aluminum alloy target material, so that a welding assembly is formed;
(2) selecting two welding assemblies which are respectively a first welding assembly and a second welding assembly, arranging the back plates of the first welding assembly and the second welding assembly close to each other, and arranging a middle barrier layer with the thickness of 5mm between the back plate of the first welding assembly and the back plate of the second welding assembly to form a welding structure of the titanium-aluminum alloy target assembly;
(3) and putting the welding structure of the titanium-aluminum alloy target assembly into a sheath with the thickness of 5mm, performing sheath welding in an argon atmosphere, degassing at 500 ℃ for 2h until the vacuum degree reaches 0.001Pa, performing hot isostatic pressing at 600 ℃ and under the pressure of 200MPa for 3h, and removing the sheath, the barrier layer and the intermediate barrier layer to obtain the titanium-aluminum alloy target assembly.
In this embodiment, the back plate is Al1060, the middle layer is Al1060, the barrier layer is stainless steel, the middle barrier layer is stainless steel, and the sheath is Al 1050.
Example 4
This example provides a welded structure of a titanium-aluminum alloy target assembly, which is different from example 1 only in that the thickness of the intermediate layer is 0.5mm, and the rest is the same as example 1.
Example 5
This example provides a welded structure of a titanium-aluminum alloy target assembly, which is different from example 1 only in that the thickness of the intermediate layer is 8mm, and the rest is the same as example 1.
Example 6
This example provides a welded structure of a titanium-aluminum alloy target assembly, which is different from example 1 only in that the barrier layer has a thickness of 0.05mm, and is otherwise the same as example 1.
Example 7
This example provides a welded structure of a titanium-aluminum alloy target assembly, which is different from example 1 only in that the barrier layer has a thickness of 6mm, and the rest is the same as example 1.
Example 8
This example provides a welded structure of a titanium-aluminum alloy target assembly, which is different from example 1 only in that the thickness of the intermediate barrier layer is 0.05mm, and the rest is the same as example 1.
Example 9
This example provides a welded structure of a titanium-aluminum alloy target assembly, which is different from example 1 only in that the thickness of the intermediate barrier layer is 6mm, and the rest is the same as example 1.
Second, comparative example
Comparative example 1
This comparative example provides a welded structure of a titanium-aluminum alloy target assembly, which is different from example 1 only in that no intermediate layer is interposed, and the rest is the same as example 1.
Correspondingly, the welding method comprises the following steps (1):
(1) sequentially polishing the titanium-aluminum alloy target material with the thickness of 10mm and the back plate, carrying out ultrasonic cleaning in isopropanol for 100min and carrying out vacuum drying at 130 ℃ for 3 h;
after the titanium-aluminum alloy target material is sequentially placed into the groove of the back plate, a blocking layer with the thickness of 2.5mm is arranged on one surface of the back plate, which is exposed out of the titanium-aluminum alloy target material, so that a welding assembly is formed.
Comparative example 2
This comparative example provides a welded structure of a titanium-aluminum alloy target assembly, which is different from example 1 only in that two welded assemblies are not symmetrically arranged, and the rest is the same as example 1.
Correspondingly, the welding method does not perform step (2).
Third, test and results
The method for testing the welding strength of the titanium-aluminum alloy target assembly comprises the following steps: a strength test method of a GB/T11363-2008 braze welding joint is adopted.
The test results of the above examples and comparative examples are shown in table 1.
TABLE 1
| Welding strength (MPa) | Yield (%) | |
| Example 1 | 68.5 | 100 |
| Example 2 | 67.2 | 100 |
| Example 3 | 64.3 | 100 |
| Example 4 | 50.1 | 90 |
| Example 5 | 54.6 | 95 |
| Example 6 | 51.3 | 85 |
| Example 7 | 57.4 | 90 |
| Example 8 | 52.4 | 85 |
| Example 9 | 53.4 | 85 |
| Comparative example 1 | 34.9 | 55 |
| Comparative example 2 | 45.2 | 60 |
From table 1, the following points can be seen:
(1) the invention provides a welding structure of a titanium-aluminum alloy target assembly, which comprises a structure that back plates in a first welding assembly and a second welding assembly are close to and symmetrically arranged, wherein an intermediate layer is added between the titanium-aluminum alloy target assembly and the back plates in the first welding assembly and the second welding assembly; the welding structure is subjected to sheath welding, degassing, hot isostatic pressing, sheath removing, barrier layer removing and middle barrier layer removing in sequence to obtain the titanium-aluminum alloy target assembly, the welding method can improve the yield and welding strength of the titanium-aluminum alloy target assembly, effectively solves the deformation problem of the titanium-aluminum alloy target assembly, and improves the welding efficiency, specifically, in the embodiments 1-9, the yield of the titanium-aluminum alloy target assembly is not less than 85%, the welding strength is not less than 50.1MPa, the yield can reach 100% under the optimal condition, and the welding strength is not less than 64.3 MPa;
(2) by combining the embodiment 1 and the embodiments 4 to 5, it can be seen that the thickness of the intermediate layer in the embodiment 1 is 4mm, the yield of the titanium-aluminum alloy target assembly in the embodiment 1 is 100% and the welding strength is 68.5MPa compared with the thickness of the intermediate layer in the embodiments 4 to 5 being 0.5mm and 8mm, respectively, the yield of the titanium-aluminum alloy target assembly in the embodiments 4 to 5 is 90% and 95% respectively, and the welding strength is 50.1MPa and 54.6MPa respectively, and thus the invention can improve the yield and the welding strength of the titanium-aluminum alloy target assembly by controlling the thickness of the intermediate layer within a certain range;
(3) by combining the example 1 and the examples 6 to 7, it can be seen that the thickness of the barrier layer in the example 1 is 2.5mm, the yield of the titanium-aluminum alloy target assembly in the example 1 is 100% and the welding strength is 68.5MPa, the yield of the titanium-aluminum alloy target assembly in the examples 6 to 7 is 85% and 90% and the welding strength is 51.3MPa and 57.4MPa, respectively, compared with the thicknesses of the barrier layers in the examples 6 to 7 of 0.05mm and 6mm, respectively, and thus the yield and the welding strength of the titanium-aluminum alloy target assembly can be improved by controlling the thickness of the barrier layer within a certain range;
(4) by combining the example 1 and the examples 8 to 9, it can be seen that the thickness of the intermediate barrier layer in the example 1 is 3mm, and compared with the thicknesses of the intermediate barrier layers in the examples 8 to 9 of 0.05mm and 6mm, respectively, the yield of the titanium-aluminum alloy target assembly in the example 1 is 100%, the welding strength is 68.5MPa, the yields of the titanium-aluminum alloy target assemblies in the examples 8 to 9 are 85%, and the welding strengths are 52.4MPa and 53.4MPa, respectively, and thus the invention can improve the yield and the welding strength of the titanium-aluminum alloy target assembly by controlling the thickness of the intermediate barrier layer within a certain range;
(5) by combining the embodiment 1 and the comparative example 1, it can be seen that the intermediate layer is placed in the groove of the back plate in the embodiment 1, compared with the comparative example 1 in which the intermediate layer is not placed in the groove of the back plate, the yield of the titanium-aluminum alloy target assembly in the embodiment 1 is 100%, the welding strength is 68.5MPa, the yield of the titanium-aluminum alloy target assembly in the comparative example 1 is 55%, and the welding strength is 34.9MPa, and thus, the yield and the welding strength of the titanium-aluminum alloy target assembly can be improved by placing the intermediate layer in the groove of the back plate;
(6) it can be seen from the combination of example 1 and comparative example 2 that, in example 1, two welding assemblies are symmetrically arranged, and compared with comparative example 1 in which two welding assemblies are not symmetrically arranged, the yield of the titanium-aluminum alloy target assembly in example 1 is 100%, the welding strength is 68.5MPa, the yield of the titanium-aluminum alloy target assembly in comparative example 2 is 60%, and the welding strength is 45.2MPa, and thus, the present invention can improve the yield and the welding strength of the titanium-aluminum alloy target assembly by symmetrically arranging two welding assemblies.
In summary, according to the welding structure of the titanium-aluminum alloy target assembly provided by the invention, the barrier layer, the titanium-aluminum alloy target material, the intermediate layer and the back plate are sequentially arranged to form the welding assembly, the two welding assemblies are symmetrically arranged, the intermediate barrier layer is arranged between the back plates of the two welding assemblies to obtain the welding structure of the titanium-aluminum alloy target assembly, and the welding structure is sequentially subjected to sheath welding, degassing and hot isostatic pressing to obtain the titanium-aluminum alloy target assembly.
The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must be implemented depending on the above detailed structural features. It should be understood by those skilled in the art that any modifications of the present invention, equivalent substitutions of selected components of the present invention, additions of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.
Claims (10)
1. The welding structure of the titanium-aluminum alloy target assembly is characterized by comprising a first welding assembly and a second welding assembly which are symmetrically arranged;
the first welding assembly and the second welding assembly respectively comprise a barrier layer, a titanium-aluminum alloy target material, an intermediate layer and a back plate which are sequentially arranged;
the back plate in the first welding assembly and the second welding assembly is close to the first welding assembly and the second welding assembly, and an intermediate barrier layer is arranged between the back plate of the first welding assembly and the back plate of the second welding assembly.
2. The welded structure of claim 1, wherein the barrier layer comprises stainless steel;
preferably, the thickness of the barrier layer is 0.1-5 mm;
preferably, the thickness of the titanium-aluminum alloy target is 5-20 mm;
preferably, the mass fraction of aluminum in the titanium-aluminum alloy target is 5-80 wt%.
3. The welded structure according to claim 1 or 2, wherein the thickness of the intermediate layer is 1 to 7 mm;
preferably, the material of the intermediate layer comprises aluminum;
preferably, the aluminum purity of the intermediate layer is more than or equal to 99.9 wt%;
preferably, the material of the intermediate layer includes a 1060.
4. The welded structure according to any one of claims 1 to 3, wherein the material of the backing plate comprises aluminum;
preferably, a groove is arranged in the back plate;
preferably, the middle layer and the titanium-aluminum alloy target material are sequentially arranged in the groove;
preferably, the diameter of the groove in the back plate is 0.3-1 mm larger than that of the titanium-aluminum alloy target;
preferably, the diameter of the groove in the back plate is 0.3-1 mm larger than that of the middle layer;
preferably, the material of the intermediate barrier layer comprises stainless steel;
preferably, the thickness of the middle barrier layer is 0.1-5 mm.
5. A method of welding a titanium-aluminum alloy target assembly, characterized in that the welding method employs the welded structure of the titanium-aluminum alloy target assembly according to any one of claims 1 to 4.
6. The welding method of claim 5, comprising: and putting the titanium-aluminum alloy target assembly with the welding structure into a sheath, and sequentially carrying out sheath welding, degassing, hot isostatic pressing, sheath removal, barrier layer removal and intermediate barrier layer removal to obtain the titanium-aluminum alloy target assembly.
7. The welding method according to claim 5 or 6, wherein the titanium-aluminum alloy target, the intermediate layer and the back plate in the titanium-aluminum alloy target assembly are subjected to preliminary treatment before welding;
preferably, the primary treatment comprises polishing treatment, cleaning and drying in sequence;
preferably, the cleaning comprises ultrasonic cleaning;
preferably, the power of the ultrasonic cleaning is 300-500W;
preferably, the cleaning solution for ultrasonic cleaning comprises isopropyl alcohol and/or ethanol;
preferably, the cleaning time is 10-200 min;
preferably, the drying comprises vacuum drying;
preferably, the drying temperature is 90-150 ℃;
preferably, the drying time is 1-5 h.
8. The welding method according to any one of claims 5 to 7, wherein the material of the sheath comprises aluminum or stainless steel;
preferably, the thickness of the sheath is 1-5 mm;
preferably, the sheath welding is performed under an argon atmosphere;
preferably, the degassing temperature is 100-500 ℃;
preferably, the degassing time is 2-48 h;
preferably, the vacuum degree after degassing is less than or equal to 0.003 Pa;
preferably, the hot isostatic pressing temperature is 200-600 ℃;
preferably, the pressure of the hot isostatic pressing is 50-200 MPa;
preferably, the hot isostatic pressing time is 3-48 h.
9. Welding method according to any one of claims 5-8, characterized in that it comprises the steps of:
(1) sequentially polishing a titanium-aluminum alloy target material with the thickness of 5-20 mm, a middle layer with the thickness of 1-7 mm and a back plate, performing ultrasonic cleaning with the power of 300-500W in isopropanol and/or ethanol for 10-200 min, and performing vacuum drying at 90-150 ℃ for 1-5 h, wherein the mass fraction of aluminum in the titanium-aluminum alloy target material is 5-80 wt%, grooves are arranged in the back plate, and the diameter of the grooves in the back plate is 0.3-1 mm larger than that of the titanium-aluminum alloy target material and 0.3-1 mm larger than that of the middle layer;
after the intermediate layer and the titanium-aluminum alloy target material are sequentially placed into the groove of the back plate, a blocking layer with the thickness of 0.1-5 mm is arranged on one surface of the back plate, which is exposed out of the titanium-aluminum alloy target material, so that a welding assembly is formed;
(2) selecting two welding assemblies which are respectively a first welding assembly and a second welding assembly, arranging the back plates of the first welding assembly and the second welding assembly close to each other, and arranging an intermediate barrier layer with the thickness of 0.1-5 mm between the back plate of the first welding assembly and the back plate of the second welding assembly to form a welding structure of the titanium-aluminum alloy target assembly;
(3) placing the welding structure of the titanium-aluminum alloy target assembly into a sheath with the thickness of 1-5 mm, performing sheath welding in an argon atmosphere, degassing at 100-500 ℃ for 2-48 h until the vacuum degree is less than or equal to 0.003Pa, performing hot isostatic pressing at 200-600 ℃ and under the pressure of 50-200 MPa for 3-48 h, and removing the sheath, the barrier layer and the intermediate barrier layer to obtain the titanium-aluminum alloy target assembly.
10. A titanium-aluminum alloy target assembly is characterized in that the titanium-aluminum alloy target assembly is obtained by welding according to the welding method of the titanium-aluminum alloy target assembly of any one of claims 5-9.
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