CN112091401A - Titanium-aluminum alloy target material and welding method thereof - Google Patents
Titanium-aluminum alloy target material and welding method thereof Download PDFInfo
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- CN112091401A CN112091401A CN202010953029.7A CN202010953029A CN112091401A CN 112091401 A CN112091401 A CN 112091401A CN 202010953029 A CN202010953029 A CN 202010953029A CN 112091401 A CN112091401 A CN 112091401A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
- B23K20/026—Thermo-compression bonding with diffusion of soldering material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/14—Preventing or minimising gas access, or using protective gases or vacuum during welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K28/00—Welding or cutting not covered by any of the preceding groups, e.g. electrolytic welding
- B23K28/02—Combined welding or cutting procedures or apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K33/00—Specially-profiled edge portions of workpieces for making soldering or welding connections; Filling the seams formed thereby
Abstract
The invention provides a titanium-aluminum alloy target material and a welding method thereof, and the welding method of the titanium-aluminum alloy target material assembly reduces the difficulty of diffusion welding, improves the welding strength of the titanium-aluminum alloy target material and a back plate, reduces the cracking condition of the titanium-aluminum alloy target material in the welding process and has higher industrial application value by arranging a pure aluminum intermediate layer between the titanium-aluminum alloy target material and the back plate and arranging a pure aluminum cover plate on one side of the titanium-aluminum alloy target material, which is far away from the back plate.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to the technical field of target sputtering, and particularly relates to a titanium-aluminum alloy target and a welding method thereof.
Background
In the field of semiconductors, a target assembly is a common material, and the target assembly is formed by welding a target and a back plate together, so that a titanium-aluminum alloy target and the back plate need to be welded, and the target assembly has certain bonding strength. The titanium-aluminum alloy target material has poor toughness, if the titanium-aluminum alloy target material is directly subjected to hot isostatic pressing welding with a back plate, the titanium-aluminum alloy target material is easy to crack under high pressure, if the cracking risk of the titanium-aluminum alloy target material is reduced by reducing the pressure during welding, the bonding strength of the target material and the back plate is not high, and the target material assembly has the risk of desoldering and falling during sputtering on a sputtering machine.
Titanium-aluminum alloy targets are commonly used sputtering targets. CN111101105A discloses a preparation method of a titanium-aluminum alloy, which comprises a powder mixing step, a filling step, a cold isostatic pressing step, a welding sheath degassing step, a hot isostatic pressing step, a slitting step, an alloying diffusion heat treatment step and a machining finishing step.
However, the titanium-aluminum alloy target needs to be welded and combined with the back plate and then used for semiconductor sputtering, the titanium-aluminum alloy has poor toughness and is not easy to diffuse with metal materials, the titanium-aluminum alloy target and the aluminum alloy are not easy to diffuse directly during welding under the existing hot isostatic pressing diffusion welding technology, and cracking is easy to occur in the diffusion welding cooling stage due to different thermal expansion coefficients of the target and the back plate.
CN210506510U discloses a target assembly, which is characterized in that the surface area of the surface of one side of the surrounding area far away from the back plate in the target assembly is adjusted, and the surrounding area is provided with a special structure, so as to increase the adhesion area and adhesion force of the target in the surrounding area, thereby reducing the peeling of the film layer formed by sputtering the target in the surrounding area, and thus increasing the service life of the target. The target assembly does not address the problem of welding the target to the backing plate.
CN101648316A discloses a welding structure and method for a target and a back plate, wherein the method can tear the oxide layer on the surface of a titanium target by machining the titanium target into a thread shape, and can thin the oxide layer on the surface of an aluminum back plate by machining the aluminum back plate, so as to improve the bonding strength between the titanium target and the aluminum back plate. However, the method is not well applicable to welding the titanium-aluminum alloy target material and the back plate thereof.
Therefore, an effective welding method is needed, so that the titanium-aluminum alloy target material and the back plate are reliably combined, and the requirements of long-term stable production and target material use are met.
Disclosure of Invention
In view of the problems in the prior art, the invention provides the titanium-aluminum alloy target material and the welding method thereof, and the welding method of the titanium-aluminum alloy target material component reduces the difficulty of diffusion welding, improves the welding strength of the titanium-aluminum alloy target material and the back plate, reduces the cracking of the titanium-aluminum alloy target material in the welding process, and has higher industrial application value.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the present invention provides a method of welding a titanium aluminium alloy target assembly, the method comprising the steps of:
(1) arranging a pure aluminum intermediate layer between a titanium-aluminum alloy target material and a back plate, arranging a pure aluminum cover plate on one side of the titanium-aluminum alloy target material, which is far away from the back plate, forming an assembly component, placing the assembly component into a jacket, and performing jacket welding;
(2) and (3) degassing the sheath, and performing diffusion welding to obtain the titanium-aluminum alloy target assembly.
According to the method for welding the titanium-aluminum alloy target assembly, the pure aluminum intermediate layer is arranged between the titanium-aluminum alloy target and the back plate, and the pure aluminum cover plate is arranged on the side, away from the back plate, of the titanium-aluminum alloy target, wherein the pure aluminum intermediate layer can relieve the problem that the titanium-aluminum alloy and the hardened back plate are difficult to diffuse, the difficulty of diffusion welding is reduced, the welding strength of the titanium-aluminum alloy target and the back plate is improved, the titanium-aluminum alloy target can be coated inside the pure aluminum material due to the arrangement of the pure aluminum cover plate, a buffering effect is achieved in the welding process, and the condition that the titanium-aluminum alloy target is cracked is reduced.
Preferably, the mass fraction of aluminum in the titanium-aluminum alloy target material is 5 to 40 wt%, and may be, for example, 5 wt%, 10 wt%, 15 wt%, 20 wt%, 25 wt%, 30 wt%, 35 wt%, or 40 wt%.
Preferably, the back sheet comprises a copper alloy back sheet or an aluminum alloy back sheet.
The back plate of the present invention may be a copper alloy back plate, such as C46400, C18200 or TU1, or an aluminum alloy back plate, such as Al6061 or Al 3003.
Preferably, the welding surface of the titanium-aluminum alloy target in the step (1) is provided with a first thread.
The invention preferably arranges the screw thread on the welding surface of the titanium-aluminum alloy, thereby increasing the welding area and improving the welding strength.
Preferably, the pitch of the first thread is 0.35-0.55 mm, such as 0.35mm, 0.36mm, 0.37mm, 0.38mm, 0.40mm, 0.41mm, 0.42mm, 0.45mm, 0.48mm, 0.50mm, 0.52mm or 0.55 mm.
Preferably, the first thread has a depth of 0.1 to 0.25mm, and may be, for example, 0.1mm, 0.12mm, 0.15mm, 0.17mm, 0.18mm, 0.2mm, 0.21mm, 0.22mm, 0.23mm, or 0.25 mm.
Preferably, the welding surface of the back plate in the step (1) is provided with a second thread.
According to the invention, the welding surface of the back plate is preferably provided with the threads, so that the welding area is increased, and the welding strength is improved.
Preferably, the pitch of the second thread is 0.35-0.55 mm, such as 0.35mm, 0.36mm, 0.37mm, 0.38mm, 0.40mm, 0.41mm, 0.42mm, 0.45mm, 0.48mm, 0.50mm, 0.52mm or 0.55 mm.
Preferably, the depth of the second thread is 0.1-0.25 mm, such as 0.1mm, 0.12mm, 0.15mm, 0.17mm, 0.18mm, 0.2mm, 0.21mm, 0.22mm, 0.23mm, or 0.25 mm.
Preferably, the aluminum purity of the pure aluminum intermediate layer in step (1) is 99 wt% or more, and may be 99 wt%, 99.1 wt%, 99.2 wt%, 99.5 wt%, 99.9 wt%, 99.91 wt%, 99.92 wt%, 99.95 wt%, 99.97 wt%, 99.99 wt%, or the like, for example.
Preferably, the thickness of the pure aluminum intermediate layer is 2-4 mm, and may be, for example, 2mm, 2.1mm, 2.2mm, 2.4mm, 2.5mm, 2.8mm, 2.9mm, 3mm, 3.2mm, 3.5mm, 3.8mm, or 4 mm.
According to the invention, the thickness of the pure aluminum intermediate layer is preferably controlled to be 2-4 mm, so that the transition welding between the titanium aluminum alloy and the back plate can be ensured, and the influence on subsequent sputtering caused by the excessively thick thickness of the intermediate layer can be avoided.
Preferably, in step (1), a groove is provided in the back plate.
Preferably, the diameter of the titanium-aluminum alloy target is smaller than that of the groove.
Preferably, the pure aluminum cover plate comprises an upper plate matched with the upper surface of the titanium-aluminum alloy target material and a peripheral side plate matched with the peripheral side of the titanium-aluminum alloy target material.
Preferably, the outer diameter of the peripheral side plate in the pure aluminum cover plate is matched with the inner diameter of the groove of the back plate.
Preferably, the inner diameter of the middle peripheral side plate of the pure aluminum cover plate is matched with the diameter of the titanium-aluminum alloy target material.
The matching of the invention is not required to be completely consistent, and the invention can meet the requirement that the pure aluminum cover plate is arranged in the inner diameter of the back plate and can cover the titanium-aluminum alloy target material, and the matching gap is less than or equal to 0.01 mm.
Preferably, the aluminum purity of the pure aluminum cover plate is equal to or greater than 99 wt%, and may be, for example, 99 wt%, 99.1 wt%, 99.2 wt%, 99.5 wt%, 99.9 wt%, 99.91 wt%, 99.92 wt%, 99.95 wt%, 99.97 wt%, 99.99 wt%, or the like.
Preferably, the thickness of the upper plate of the pure aluminum cover plate is more than or equal to 9mm, and can be 9mm, 10mm, 10.5mm, 11mm, 11.5mm, 11.8mm, 12mm, 12.2mm, 12.5mm, 12.8mm or 13mm, for example.
The thickness of the upper cover plate is controlled to be more than or equal to 9mm, the buffer of the pressure welding process is effectively provided, and the titanium-aluminum alloy target material is prevented from cracking.
Preferably, the sheath in the step (1) is made of pure aluminum.
Preferably, the weld of the jacket comprises: and welding the sheath by argon arc welding.
Preferably, the degree of vacuum for degassing the sheath in step (2) is less than or equal to 0.02Pa, and may be, for example, 0.02Pa, 0.018Pa, 0.017Pa, 0.015Pa, 0.012Pa, 0.01Pa, etc.
Preferably, the degassing temperature of the jacket is 250 to 450 ℃, for example, 250 ℃, 260 ℃, 280 ℃, 290 ℃, 300 ℃, 320 ℃, 340 ℃, 350 ℃, 360 ℃, 380 ℃, 400 ℃, 420 ℃ or 450 ℃.
Preferably, the degassing time of the sheath is 2-5 h, for example, 2h, 2.2h, 2.3h, 2.4h, 2.5h, 2.8h, 3h, 3.2h, 3.4h, 3.5h, 4h, 4.5h or 5 h.
Preferably, the means for diffusion welding in step (2) is a hot isostatic press.
Preferably, the temperature of the diffusion welding is 400-590 ℃, for example, 400 ℃, 420 ℃, 430 ℃, 450 ℃, 470 ℃, 480 ℃, 500 ℃, 520 ℃, 530 ℃, 540 ℃, 550 ℃, 560 ℃ or 590 ℃ and the like.
The temperature of diffusion welding is controlled to be 400-590 ℃, the titanium-aluminum alloy target can be successfully welded with the back plate, and the problem that the effect of the intermediate transition layer is lost due to melting of pure aluminum is solved.
Preferably, the pressure of the diffusion welding is 80MPa or more, and may be, for example, 80MPa, 82MPa, 85MPa, 88MPa, 90MPa, 92MPa, 95MPa, 100MPa, 105MPa, 110MPa or the like.
Preferably, the time for heat preservation and pressure holding in the diffusion welding is 2-5 h, for example, 2h, 2.2h, 2.4h, 2.5h, 2.8h, 3h, 3.2h, 3.3h, 3.5h, 4h, 4.5h, 4.8h or 5h, etc.
As a preferred technical scheme of the invention, the method comprises the following steps:
(1) arranging a pure aluminum intermediate layer with the thickness of 2-4 mm between a titanium aluminum alloy target material and a back plate, arranging a pure aluminum cover plate on one side of the titanium aluminum alloy target material, which is far away from the back plate, forming an assembly component, placing the assembly component into a pure aluminum sheath, and performing sheath welding by argon arc welding;
the welding surface of the titanium-aluminum alloy target is provided with first threads, the thread pitch of the first threads is 0.35-0.55 mm, and the depth of the first threads is 0.1-0.25 mm; the welding surface of the back plate is provided with second threads, the thread pitch of the second threads is 0.35-0.55 mm, and the depth of the second threads is 0.1-0.25 mm;
the outer diameter of the pure aluminum cover plate is matched with the inner diameter of the back plate, the inner diameter of the pure aluminum cover plate is matched with the outer diameter of the titanium-aluminum alloy target material, and the pure aluminum cover plate comprises an upper plate matched with the upper surface of the titanium-aluminum alloy target material and a peripheral side plate matched with the peripheral side of the titanium-aluminum alloy target material;
the titanium-aluminum alloy target is arranged on the back plate, the diameter of the titanium-aluminum alloy target is smaller than that of the groove, the pure aluminum cover plate comprises an upper plate matched with the upper surface of the titanium-aluminum alloy target and a peripheral side plate matched with the peripheral side of the titanium-aluminum alloy target, the outer diameter of the peripheral side plate in the pure aluminum cover plate is matched with the diameter of the groove of the back plate, the inner diameter of the peripheral side plate in the pure aluminum cover plate is matched with the diameter of the titanium-aluminum alloy target, and the thickness of the upper plate of the pure aluminum cover plate is larger than or equal to 9 mm;
(2) degassing the sheath in the step (1) for 2-5 h under the conditions that the vacuum degree is less than or equal to 0.02Pa and the temperature is 250-450 ℃, then placing the sheath into a hot isostatic pressing machine, and carrying out heat preservation and pressure maintenance for 2-5 h at the temperature of 400-590 ℃ and the pressure of more than or equal to 80MPa for diffusion welding to obtain the titanium-aluminum alloy target assembly.
In a second aspect, the invention provides a titanium-aluminum alloy target assembly, which is obtained by welding the titanium-aluminum alloy target assembly according to the first aspect.
The titanium-aluminum alloy target assembly provided by the invention has the advantages of firm welding, high welding strength and difficult cracking of the target, and can be better applied to the sputtering process.
Compared with the prior art, the invention has at least the following beneficial effects:
(1) the method for welding the titanium-aluminum alloy target assembly provided by the invention adopts the pure aluminum intermediate layer for transition, and the welding strength is high;
(2) according to the method for welding the titanium-aluminum alloy target assembly, the pure aluminum cover plate is added, so that the cracking condition of the titanium-aluminum alloy target is reduced;
(3) the titanium-aluminum alloy target material assembly provided by the invention is firm in welding, high in welding strength which is not less than 20MPa, not less than 58MPa under a better condition, and not easy to crack, and can be better applied to a sputtering process.
Drawings
Fig. 1 is a schematic view of a welding structure in a method for welding a titanium-aluminum alloy target assembly according to embodiment 1 of the present invention.
In the figure: 1-titanium aluminum alloy target material; a 2-aluminum alloy backing plate; 3-a pure aluminum intermediate layer; 4-pure aluminum cover plate.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
The present invention is described in further detail below. The following examples are merely illustrative of the present invention and do not represent or limit the scope of the claims, which are defined by the claims.
First, an embodiment
Example 1
The embodiment provides a method for welding a titanium-aluminum alloy target assembly, which comprises the following steps:
(1) as shown in fig. 1, a pure aluminum intermediate layer (Al1060) with a thickness of 3mm is arranged between a titanium-aluminum alloy target (titanium: 80 wt%; aluminum: 20 wt%) and an aluminum alloy back plate (model: Al6061), and a pure aluminum cover plate (Al1060) is arranged on one side of the titanium-aluminum alloy target away from the back plate to form an assembly component, which is put into a pure aluminum sheath and sheathed and welded by argon arc welding;
the welding surface of the titanium-aluminum alloy target is provided with first threads, the thread pitch of the first threads is 0.4mm, and the depth of the first threads is 0.2 mm; a second thread is arranged on the welding surface of the back plate, the thread pitch of the second thread z is 0.4mm, and the depth of the second thread z is 0.2 mm;
the titanium-aluminum alloy target is arranged in the back plate, the diameter of the titanium-aluminum alloy target is smaller than that of the groove, the pure aluminum cover plate comprises an upper plate matched with the upper surface of the titanium-aluminum alloy target and a peripheral side plate matched with the peripheral side of the titanium-aluminum alloy target, the outer diameter of the peripheral side plate in the pure aluminum cover plate is matched with the diameter of the groove of the back plate, the inner diameter of the peripheral side plate in the pure aluminum cover plate is matched with the diameter of the titanium-aluminum alloy target, and the thickness of the upper plate of the pure aluminum cover plate is 12 mm;
(2) degassing the sheath in the step (1) for 4 hours at the vacuum degree of 0.018Pa and the temperature of 350 ℃, then placing the sheath into a hot isostatic pressing machine, and carrying out diffusion welding at the temperature of 450 ℃ and the pressure of 85MPa for 3.5 hours to obtain the titanium-aluminum alloy target assembly.
Example 2
The embodiment provides a method for welding a titanium-aluminum alloy target assembly, which comprises the following steps:
(1) arranging a pure aluminum intermediate layer (Al1060) with the thickness of 2mm between a titanium-aluminum alloy target material (titanium: 60 wt%, aluminum: 40 wt%) and an aluminum alloy backboard (model: Al6061), arranging a pure aluminum cover plate (Al1060) on one side of the titanium-aluminum alloy target material, which is far away from the backboard, forming an assembly component, putting the assembly component into a pure aluminum sheath, and performing sheath welding by argon arc welding;
the welding surface of the titanium-aluminum alloy target is provided with first threads, the thread pitch of the first threads is 0.35mm, and the depth of the first threads is 0.1 mm; a second thread is arranged on the welding surface of the back plate, the thread pitch of the second thread is 0.35mm, and the depth of the second thread is 0.1 mm;
the titanium-aluminum alloy target is arranged in the back plate, the diameter of the titanium-aluminum alloy target is smaller than that of the groove, the pure aluminum cover plate comprises an upper plate matched with the upper surface of the titanium-aluminum alloy target and a peripheral side plate matched with the peripheral side of the titanium-aluminum alloy target, the outer diameter of the peripheral side plate in the pure aluminum cover plate is matched with the diameter of the groove of the back plate, the inner diameter of the peripheral side plate in the pure aluminum cover plate is matched with the diameter of the titanium-aluminum alloy target, and the thickness of the upper plate of the pure aluminum cover plate is 11 mm;
(2) degassing the sheath in the step (1) for 5 hours under the conditions of vacuum degree of 0.02Pa and 250 ℃, then placing the sheath into a hot isostatic pressing machine, and carrying out diffusion welding under the conditions of heat preservation and pressure maintenance of 400 ℃ and 80MPa for 5 hours to obtain the titanium-aluminum alloy target material assembly.
Example 3
The embodiment provides a method for welding a titanium-aluminum alloy target assembly, which comprises the following steps:
(1) arranging a pure aluminum intermediate layer (Al1060) with the thickness of 4mm between a titanium-aluminum alloy target material (95 wt% of titanium and 5 wt% of aluminum) and an aluminum alloy backboard (model: Al6061), arranging a pure aluminum cover plate (Al1060) on one side of the titanium-aluminum alloy target material, which is far away from the backboard, forming an assembly component, putting the assembly component into a pure aluminum sheath, and performing sheath welding by argon arc welding;
the welding surface of the titanium-aluminum alloy target is provided with first threads, the thread pitch of the first threads is 0.55mm, and the depth of the first threads is 0.25 mm; a second thread is arranged on the welding surface of the back plate, the thread pitch of the second thread is 0.55mm, and the depth of the second thread is 0.25 mm;
the titanium-aluminum alloy target is arranged in the back plate, the diameter of the titanium-aluminum alloy target is smaller than that of the groove, the pure aluminum cover plate comprises an upper plate matched with the upper surface of the titanium-aluminum alloy target and a peripheral side plate matched with the peripheral side of the titanium-aluminum alloy target, the outer diameter of the peripheral side plate in the pure aluminum cover plate is matched with the diameter of the groove of the back plate, the inner diameter of the peripheral side plate in the pure aluminum cover plate is matched with the diameter of the titanium-aluminum alloy target, and the thickness of the upper plate of the pure aluminum cover plate is 10 mm;
(2) degassing the sheath in the step (1) for 2h under the conditions of vacuum degree of 0.02Pa and 450 ℃, then placing the sheath into a hot isostatic pressing machine, and carrying out heat preservation and pressure maintenance for 2h at 550 ℃ and 90MPa for diffusion welding to obtain the titanium-aluminum alloy target assembly.
Example 4
This example provides a method for welding a titanium-aluminum alloy target assembly, which is the same as in example 1 except that neither the welding surface of the titanium-aluminum alloy target nor the welding surface of the backing plate is threaded in step (1).
Example 5
This example provides a method for welding a titanium-aluminum alloy target assembly, which is the same as in example 1 except that the thickness of the pure aluminum intermediate layer in step (1) is 1.5 mm.
Example 6
This example provides a method for welding a titanium-aluminum alloy target assembly, which is the same as in example 1 except that the thickness of the pure aluminum intermediate layer in step (1) is 5 mm.
Example 7
This example provides a method for welding a titanium-aluminum alloy target assembly, which is the same as that of example 1 except that the thickness of the upper layer of the pure aluminum cover plate in step (1) is 9 mm.
Example 8
The embodiment provides a method for welding a titanium-aluminum alloy target assembly, which is the same as the method in the embodiment 1 except that the step (2) is replaced by the step of performing diffusion welding by maintaining the temperature and the pressure at 450 ℃ and 85MPa for 3.5h, and maintaining the temperature and the pressure at 380 ℃ and 85MPa for 3.5 h.
Example 9
The embodiment provides a method for welding a titanium-aluminum alloy target assembly, which is the same as the method in the embodiment 1 except that the step (2) is replaced by the step of performing diffusion welding by maintaining the temperature and the pressure at 450 ℃ and 85MPa for 3.5h, and maintaining the temperature and the pressure at 590 ℃ and 85MPa for 3.5 h.
Second, comparative example
Comparative example 1
This comparative example provides a method for welding a titanium-aluminum alloy target assembly, which is the same as in example 1 except that no pure aluminum intermediate layer is provided in step (1).
Comparative example 2
This comparative example provides a method for welding a titanium-aluminum alloy target assembly, which is the same as in example 1 except that no pure aluminum cover plate is provided in step (1).
Third, test and results
The method provided by the embodiment and the comparative example is adopted to weld the titanium-aluminum alloy target and the aluminum alloy backboard, the strength test method of the GB/T11363-.
The test results of the above examples and comparative examples are shown in table 1.
TABLE 1
From table 1, the following points can be seen:
(1) it can be seen from the comprehensive examples 1 to 9 that the method for welding the titanium-aluminum alloy target assembly provided by the invention greatly improves the welding bonding rate of the titanium-aluminum alloy target and the back plate by arranging the pure aluminum intermediate layer and the pure aluminum cover plate, can realize that the welding strength is not less than 20MPa under the condition of ensuring that the product is not cracked, and under the better condition, the welding strength is not less than 58MPa, the welding effect is good, the product is not cracked, and the yield is high;
(2) compared with the comparative example 1 in which a pure aluminum intermediate layer is not arranged and the comparative example 2 in which a pure aluminum cover plate is not arranged, the pure aluminum intermediate layer and the pure aluminum cover plate are simultaneously arranged in the example 1, the welding bonding rate is as high as 64.3MPa, and the product is not cracked, but the welding bonding rate is low in the comparative examples 1 and 2, and the product basically cracks and cannot be used, so that the pure aluminum intermediate layer and the pure aluminum cover plate are adopted, the welding bonding strength is improved, and the cracking condition of the product is greatly reduced;
(3) compared with the case that the welding surface is not provided with the threads in the embodiment 4, the welding surface in the embodiment 1 is provided with the threads, and the welding strength is 64.3MPa and is much higher than 20.6MPa in the embodiment 4, so that the welding strength is greatly improved by additionally arranging the threads on the welding surface;
(4) compared with the pure aluminum intermediate layers of the embodiment 5 and the embodiment 6, which have the thicknesses of 1.5mm and 5mm respectively, the pure aluminum intermediate layer of the embodiment 1 has the thickness of 3mm, and the welding strength is higher than that of the embodiment 5-6, so that the welding strength of the target and the back plate is improved by controlling the thickness of the pure aluminum intermediate layer within a specific range;
(5) the diffusion bonding temperatures of example 1 and example 9 were 450 ℃ and 590 ℃, respectively, and the bonding strengths thereof were higher than those of example 8, compared to 380 ℃ in example 8, which indicates that the present invention improves the bonding strength between the target and the backing plate by controlling the diffusion bonding temperature within a specific range.
In conclusion, the method for welding the titanium-aluminum alloy target assembly can better weld and combine the titanium-aluminum alloy target and the back plate, reduces the difficulty of diffusion welding, has the welding strength of more than or equal to 20MPa, does not crack the product, can be well applied to the sputtering process, and has higher industrial application value.
The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must be implemented depending on the above detailed structural features. It should be understood by those skilled in the art that any modifications of the present invention, equivalent substitutions of selected components of the present invention, additions of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.
Claims (10)
1. A method of welding a titanium aluminum alloy target assembly, the method comprising the steps of:
(1) arranging a pure aluminum intermediate layer between a titanium-aluminum alloy target material and a back plate, arranging a pure aluminum cover plate on one side of the titanium-aluminum alloy target material, which is far away from the back plate, forming an assembly component, placing the assembly component into a jacket, and performing jacket welding;
(2) and (3) degassing the sheath, and performing diffusion welding to obtain the titanium-aluminum alloy target assembly.
2. The method according to claim 1, wherein the welding surface of the titanium-aluminum alloy target material in the step (1) is provided with a first thread;
preferably, the thread pitch of the first threads is 0.35-0.55 mm;
preferably, the depth of the first thread is 0.1-0.25 mm.
3. The method of claim 1 or 2, wherein the welding surface of the backing plate in step (1) is provided with a second thread;
preferably, the thread pitch of the second threads is 0.35-0.55 mm;
preferably, the depth of the second thread is 0.1-0.25 mm.
4. The method according to any one of claims 1 to 3, wherein the aluminum purity of the pure aluminum intermediate layer in the step (1) is more than or equal to 99 wt%;
preferably, the thickness of the pure aluminum intermediate layer is 2-4 mm.
5. The method according to any one of claims 1 to 4, wherein in step (1), a groove is arranged in the back plate;
preferably, the diameter of the titanium-aluminum alloy target is smaller than that of the groove;
preferably, the pure aluminum cover plate comprises an upper plate matched with the upper surface of the titanium-aluminum alloy target material and a peripheral side plate matched with the peripheral side of the titanium-aluminum alloy target material;
preferably, the outer diameter of the middle peripheral side plate of the pure aluminum cover plate is matched with the diameter of the groove of the back plate;
preferably, the inner diameter of the middle peripheral side plate of the pure aluminum cover plate is matched with the diameter of the titanium-aluminum alloy target material;
preferably, the aluminum purity of the pure aluminum cover plate is more than or equal to 99 wt%;
preferably, the thickness of the upper plate of the pure aluminum cover plate is more than or equal to 9 mm.
6. The method according to any one of claims 1 to 5, wherein the material of the sheath in the step (1) is pure aluminum;
preferably, the weld of the jacket comprises: and welding the sheath by argon arc welding.
7. The method according to any one of claims 1 to 6, wherein the vacuum degree of degassing of the sheath in the step (2) is less than or equal to 0.02 Pa;
preferably, the degassing temperature of the sheath is 250-450 ℃;
preferably, the degassing heat preservation time of the sheath is 2-5 h.
8. The method of any one of claims 1 to 7, wherein the means for diffusion welding in step (2) is a hot isostatic press;
preferably, the temperature of the diffusion welding is 400-590 ℃;
preferably, the pressure of the diffusion welding is more than or equal to 80 MPa;
preferably, the time for heat preservation and pressure maintaining in the diffusion welding is 2-5 h.
9. A method according to any one of claims 1 to 8, characterized in that the method comprises the steps of:
(1) arranging a pure aluminum intermediate layer with the thickness of 2-4 mm between a titanium aluminum alloy target material and a back plate, arranging a pure aluminum cover plate on one side of the titanium aluminum alloy target material, which is far away from the back plate, forming an assembly component, placing the assembly component into a pure aluminum sheath, and performing sheath welding by argon arc welding;
the welding surface of the titanium-aluminum alloy target is provided with first threads, the thread pitch of the first threads is 0.35-0.55 mm, and the depth of the first threads is 0.1-0.25 mm; the welding surface of the back plate is provided with second threads, the thread pitch of the second threads is 0.35-0.55 mm, and the depth of the second threads is 0.1-0.25 mm;
the titanium-aluminum alloy target is arranged on the back plate, the diameter of the titanium-aluminum alloy target is smaller than that of the groove, the pure aluminum cover plate comprises an upper plate matched with the upper surface of the titanium-aluminum alloy target and a peripheral side plate matched with the peripheral side of the titanium-aluminum alloy target, the outer diameter of the peripheral side plate in the pure aluminum cover plate is matched with the diameter of the groove of the back plate, the inner diameter of the peripheral side plate in the pure aluminum cover plate is matched with the diameter of the titanium-aluminum alloy target, and the thickness of the upper plate of the pure aluminum cover plate is larger than or equal to 9 mm;
(2) degassing the sheath in the step (1) for 2-5 h under the conditions that the vacuum degree is less than or equal to 0.02Pa and the temperature is 250-450 ℃, then placing the sheath into a hot isostatic pressing machine, and carrying out heat preservation and pressure maintenance for 2-5 h at the temperature of 400-590 ℃ and the pressure of more than or equal to 80MPa for diffusion welding to obtain the titanium-aluminum alloy target assembly.
10. A titanium-aluminum alloy target assembly is characterized in that the titanium-aluminum alloy target assembly is obtained by welding according to the method for welding the titanium-aluminum alloy target assembly in any one of claims 1-9.
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