CN113994451B - 无缝电导管 - Google Patents

无缝电导管

Info

Publication number
CN113994451B
CN113994451B CN202080041800.1A CN202080041800A CN113994451B CN 113994451 B CN113994451 B CN 113994451B CN 202080041800 A CN202080041800 A CN 202080041800A CN 113994451 B CN113994451 B CN 113994451B
Authority
CN
China
Prior art keywords
conductor
electrical conduit
tube
coupled
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080041800.1A
Other languages
English (en)
Chinese (zh)
Other versions
CN113994451A (zh
Inventor
P·A·克劳斯
A·K·萨布莱曼尼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of CN113994451A publication Critical patent/CN113994451A/zh
Application granted granted Critical
Publication of CN113994451B publication Critical patent/CN113994451B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/023—Alloys based on aluminium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/026—Alloys based on copper
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/06—Insulating conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/22—Sheathing; Armouring; Screening; Applying other protective layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/17—Protection against damage caused by external factors, e.g. sheaths or armouring
    • H01B7/18—Protection against damage caused by wear, mechanical force or pressure; Sheaths; Armouring
    • H01B7/1875—Multi-layer sheaths
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/42—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction
    • H01B7/421—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction for heat dissipation
    • H01B7/423—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction for heat dissipation using a cooling fluid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
    • H02G3/00—Installations of electric cables or lines or protective tubing therefor in or on buildings, equivalent structures or vehicles
    • H02G3/02—Details
    • H02G3/04—Protective tubing or conduits, e.g. cable ladders or cable troughs
    • H02G3/0406—Details thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/02—Disposition of insulation
    • H01B7/0208—Cables with several layers of insulating material
    • H01B7/0216—Two layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Structural Engineering (AREA)
  • Civil Engineering (AREA)
  • Architecture (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN202080041800.1A 2019-06-07 2020-06-02 无缝电导管 Active CN113994451B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962858738P 2019-06-07 2019-06-07
US62/858,738 2019-06-07
PCT/US2020/035709 WO2020247375A1 (en) 2019-06-07 2020-06-02 Seamless electrical conduit

Publications (2)

Publication Number Publication Date
CN113994451A CN113994451A (zh) 2022-01-28
CN113994451B true CN113994451B (zh) 2025-09-12

Family

ID=73651710

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080041800.1A Active CN113994451B (zh) 2019-06-07 2020-06-02 无缝电导管

Country Status (7)

Country Link
US (1) US11368003B2 (https=)
JP (1) JP7696840B2 (https=)
KR (1) KR102810211B1 (https=)
CN (1) CN113994451B (https=)
SG (1) SG11202112708YA (https=)
TW (1) TWI870413B (https=)
WO (1) WO2020247375A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220049350A1 (en) * 2020-08-13 2022-02-17 Applied Materials, Inc. Apparatus design for photoresist deposition
US20240071729A1 (en) * 2022-08-26 2024-02-29 Applied Materials, Inc. Gas cooled high power connection rod

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7448906B1 (en) * 2007-08-22 2008-11-11 Andrew Llc Hollow inner conductor contact for coaxial cable connector

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US3336563A (en) * 1964-04-13 1967-08-15 Amphenol Corp Coaxial connectors
US3871735A (en) * 1973-08-23 1975-03-18 Amp Inc Shielded high voltage connector
US3982059A (en) * 1974-12-26 1976-09-21 The Machlett Laboratories, Incorporated Flexible cable termination
US4046451A (en) * 1976-07-08 1977-09-06 Andrew Corporation Connector for coaxial cable with annularly corrugated outer conductor
US4479702A (en) * 1982-07-06 1984-10-30 Olin Corporation Method and apparatus for assembling a compact multi-conductor optical fiber communication cable
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US4896939A (en) * 1987-10-30 1990-01-30 D. G. O'brien, Inc. Hybrid fiber optic/electrical cable and connector
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US5167533A (en) * 1992-01-08 1992-12-01 Andrew Corporation Connector for coaxial cable having hollow inner conductors
US5302780A (en) * 1992-06-29 1994-04-12 Hughes Aircraft Company Split coaxial cable conductor and method of fabrication
KR19980071012A (ko) * 1997-01-24 1998-10-26 조셉 제이. 스위니 고온 및 고 증착율의 티타늄 막을 증착하기 위한 방법 및 장치
US6231357B1 (en) * 1998-01-20 2001-05-15 Relight America, Inc. Waterproof high voltage connector
US6863835B1 (en) 2000-04-25 2005-03-08 James D. Carducci Magnetic barrier for plasma in chamber exhaust
US6581275B2 (en) * 2001-01-22 2003-06-24 Applied Materials Inc. Fabricating an electrostatic chuck having plasma resistant gas conduits
US6830939B2 (en) 2002-08-28 2004-12-14 Verity Instruments, Inc. System and method for determining endpoint in etch processes using partial least squares discriminant analysis in the time domain of optical emission spectra
JP3962661B2 (ja) * 2002-08-30 2007-08-22 三菱重工業株式会社 静電チャック支持機構及び支持台装置及びプラズマ処理装置
US7134189B2 (en) * 2002-09-12 2006-11-14 Andrew Corporation Coaxial cable connector and tool and method for connecting a coaxial cable
US6926555B2 (en) * 2003-10-09 2005-08-09 Radio Frequency Systems, Inc. Tuned radio frequency coaxial connector
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US7217155B2 (en) * 2004-07-16 2007-05-15 John Mezzalinaqua Associates, Inc. Compression connector for braided coaxial cable
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KR100941070B1 (ko) 2007-05-10 2010-02-09 세메스 주식회사 플라즈마를 이용하여 기판을 처리하는 장치
JP5222598B2 (ja) 2008-03-25 2013-06-26 東京エレクトロン株式会社 プラズマ処理装置及び給電棒
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Also Published As

Publication number Publication date
TWI870413B (zh) 2025-01-21
US11368003B2 (en) 2022-06-21
SG11202112708YA (en) 2021-12-30
JP2022534804A (ja) 2022-08-03
JP7696840B2 (ja) 2025-06-23
TW202113909A (zh) 2021-04-01
WO2020247375A1 (en) 2020-12-10
KR20220027091A (ko) 2022-03-07
US20200388998A1 (en) 2020-12-10
KR102810211B1 (ko) 2025-05-19
CN113994451A (zh) 2022-01-28

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