KR102810211B1 - 심리스 전기 도관 - Google Patents

심리스 전기 도관 Download PDF

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Publication number
KR102810211B1
KR102810211B1 KR1020217043386A KR20217043386A KR102810211B1 KR 102810211 B1 KR102810211 B1 KR 102810211B1 KR 1020217043386 A KR1020217043386 A KR 1020217043386A KR 20217043386 A KR20217043386 A KR 20217043386A KR 102810211 B1 KR102810211 B1 KR 102810211B1
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KR
South Korea
Prior art keywords
electrical conduit
integral electrical
conductor
coupled
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
KR1020217043386A
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English (en)
Korean (ko)
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KR20220027091A (ko
Inventor
필립 앨런 크라우스
아난타 케이. 수브라마니
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20220027091A publication Critical patent/KR20220027091A/ko
Application granted granted Critical
Publication of KR102810211B1 publication Critical patent/KR102810211B1/ko
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/023—Alloys based on aluminium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/026—Alloys based on copper
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/06—Insulating conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/22—Sheathing; Armouring; Screening; Applying other protective layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/17—Protection against damage caused by external factors, e.g. sheaths or armouring
    • H01B7/18—Protection against damage caused by wear, mechanical force or pressure; Sheaths; Armouring
    • H01B7/1875—Multi-layer sheaths
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/42—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction
    • H01B7/421—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction for heat dissipation
    • H01B7/423—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction for heat dissipation using a cooling fluid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
    • H02G3/00—Installations of electric cables or lines or protective tubing therefor in or on buildings, equivalent structures or vehicles
    • H02G3/02—Details
    • H02G3/04—Protective tubing or conduits, e.g. cable ladders or cable troughs
    • H02G3/0406—Details thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/02—Disposition of insulation
    • H01B7/0208—Cables with several layers of insulating material
    • H01B7/0216—Two layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Structural Engineering (AREA)
  • Civil Engineering (AREA)
  • Architecture (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020217043386A 2019-06-07 2020-06-02 심리스 전기 도관 Active KR102810211B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962858738P 2019-06-07 2019-06-07
US62/858,738 2019-06-07
PCT/US2020/035709 WO2020247375A1 (en) 2019-06-07 2020-06-02 Seamless electrical conduit

Publications (2)

Publication Number Publication Date
KR20220027091A KR20220027091A (ko) 2022-03-07
KR102810211B1 true KR102810211B1 (ko) 2025-05-19

Family

ID=73651710

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217043386A Active KR102810211B1 (ko) 2019-06-07 2020-06-02 심리스 전기 도관

Country Status (7)

Country Link
US (1) US11368003B2 (https=)
JP (1) JP7696840B2 (https=)
KR (1) KR102810211B1 (https=)
CN (1) CN113994451B (https=)
SG (1) SG11202112708YA (https=)
TW (1) TWI870413B (https=)
WO (1) WO2020247375A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220049350A1 (en) * 2020-08-13 2022-02-17 Applied Materials, Inc. Apparatus design for photoresist deposition
US20240071729A1 (en) * 2022-08-26 2024-02-29 Applied Materials, Inc. Gas cooled high power connection rod

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JP2009049009A (ja) * 2007-08-22 2009-03-05 Commscope Inc Of North Carolina 同軸ケーブルコネクタ用の中空内部導体コンタクト
JP2009231683A (ja) * 2008-03-25 2009-10-08 Tokyo Electron Ltd プラズマ処理装置及び給電棒
US20120247678A1 (en) * 2005-06-22 2012-10-04 Tokyo Electron Limited Electrode assembly and plasma processing apparatus
JP2013543269A (ja) * 2010-10-22 2013-11-28 アプライド マテリアルズ インコーポレイテッド 対称給電構造を有する基板サポート
JP2016058670A (ja) * 2014-09-12 2016-04-21 株式会社日立ハイテクノロジーズ プラズマ処理装置

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US3336563A (en) * 1964-04-13 1967-08-15 Amphenol Corp Coaxial connectors
US3871735A (en) * 1973-08-23 1975-03-18 Amp Inc Shielded high voltage connector
US3982059A (en) * 1974-12-26 1976-09-21 The Machlett Laboratories, Incorporated Flexible cable termination
US4046451A (en) * 1976-07-08 1977-09-06 Andrew Corporation Connector for coaxial cable with annularly corrugated outer conductor
US4479702A (en) * 1982-07-06 1984-10-30 Olin Corporation Method and apparatus for assembling a compact multi-conductor optical fiber communication cable
US4426127A (en) * 1981-11-23 1984-01-17 Omni Spectra, Inc. Coaxial connector assembly
US4485266A (en) * 1982-07-29 1984-11-27 The United States Of America As Represented By The United States Department Of Energy Termination for a superconducting power transmission line including a horizontal cryogenic bushing
US4603023A (en) * 1983-12-01 1986-07-29 International Business Machines Corporation Method of making a hybrid dielectric probe interposer
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US5574815A (en) * 1991-01-28 1996-11-12 Kneeland; Foster C. Combination cable capable of simultaneous transmission of electrical signals in the radio and microwave frequency range and optical communication signals
US5167533A (en) * 1992-01-08 1992-12-01 Andrew Corporation Connector for coaxial cable having hollow inner conductors
US5302780A (en) * 1992-06-29 1994-04-12 Hughes Aircraft Company Split coaxial cable conductor and method of fabrication
KR19980071012A (ko) * 1997-01-24 1998-10-26 조셉 제이. 스위니 고온 및 고 증착율의 티타늄 막을 증착하기 위한 방법 및 장치
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JP3962661B2 (ja) * 2002-08-30 2007-08-22 三菱重工業株式会社 静電チャック支持機構及び支持台装置及びプラズマ処理装置
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005347620A (ja) * 2004-06-04 2005-12-15 Tokyo Electron Ltd プラズマ処理装置及びプラズマ処理装置の載置台ユニット
US20120247678A1 (en) * 2005-06-22 2012-10-04 Tokyo Electron Limited Electrode assembly and plasma processing apparatus
JP2009049009A (ja) * 2007-08-22 2009-03-05 Commscope Inc Of North Carolina 同軸ケーブルコネクタ用の中空内部導体コンタクト
JP2009231683A (ja) * 2008-03-25 2009-10-08 Tokyo Electron Ltd プラズマ処理装置及び給電棒
JP2013543269A (ja) * 2010-10-22 2013-11-28 アプライド マテリアルズ インコーポレイテッド 対称給電構造を有する基板サポート
JP2016058670A (ja) * 2014-09-12 2016-04-21 株式会社日立ハイテクノロジーズ プラズマ処理装置

Also Published As

Publication number Publication date
TWI870413B (zh) 2025-01-21
US11368003B2 (en) 2022-06-21
SG11202112708YA (en) 2021-12-30
JP2022534804A (ja) 2022-08-03
JP7696840B2 (ja) 2025-06-23
TW202113909A (zh) 2021-04-01
WO2020247375A1 (en) 2020-12-10
CN113994451B (zh) 2025-09-12
KR20220027091A (ko) 2022-03-07
US20200388998A1 (en) 2020-12-10
CN113994451A (zh) 2022-01-28

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