SG11202112708YA - Seamless electrical conduit - Google Patents

Seamless electrical conduit

Info

Publication number
SG11202112708YA
SG11202112708YA SG11202112708YA SG11202112708YA SG11202112708YA SG 11202112708Y A SG11202112708Y A SG 11202112708YA SG 11202112708Y A SG11202112708Y A SG 11202112708YA SG 11202112708Y A SG11202112708Y A SG 11202112708YA SG 11202112708Y A SG11202112708Y A SG 11202112708YA
Authority
SG
Singapore
Prior art keywords
electrical conduit
seamless electrical
seamless
conduit
electrical
Prior art date
Application number
SG11202112708YA
Inventor
Philip Allan Kraus
Anantha K Subramani
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG11202112708YA publication Critical patent/SG11202112708YA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/02—Disposition of insulation
    • H01B7/0208—Cables with several layers of insulating material
    • H01B7/0216—Two layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/023—Alloys based on aluminium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/026—Alloys based on copper
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/06—Insulating conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/22—Sheathing; Armouring; Screening; Applying other protective layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/17—Protection against damage caused by external factors, e.g. sheaths or armouring
    • H01B7/18—Protection against damage caused by wear, mechanical force or pressure; Sheaths; Armouring
    • H01B7/1875—Multi-layer sheaths
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/42—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction
    • H01B7/421—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction for heat dissipation
    • H01B7/423—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction for heat dissipation using a cooling fluid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
    • H02G3/00—Installations of electric cables or lines or protective tubing therefor in or on buildings, equivalent structures or vehicles
    • H02G3/02—Details
    • H02G3/04—Protective tubing or conduits, e.g. cable ladders or cable troughs
    • H02G3/0406—Details thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Structural Engineering (AREA)
  • Civil Engineering (AREA)
  • Architecture (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG11202112708YA 2019-06-07 2020-06-02 Seamless electrical conduit SG11202112708YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201962858738P 2019-06-07 2019-06-07
PCT/US2020/035709 WO2020247375A1 (en) 2019-06-07 2020-06-02 Seamless electrical conduit

Publications (1)

Publication Number Publication Date
SG11202112708YA true SG11202112708YA (en) 2021-12-30

Family

ID=73651710

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202112708YA SG11202112708YA (en) 2019-06-07 2020-06-02 Seamless electrical conduit

Country Status (7)

Country Link
US (1) US11368003B2 (en)
JP (1) JP2022534804A (en)
KR (1) KR20220027091A (en)
CN (1) CN113994451A (en)
SG (1) SG11202112708YA (en)
TW (1) TW202113909A (en)
WO (1) WO2020247375A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220049350A1 (en) * 2020-08-13 2022-02-17 Applied Materials, Inc. Apparatus design for photoresist deposition
US20240071729A1 (en) * 2022-08-26 2024-02-29 Applied Materials, Inc. Gas cooled high power connection rod

Family Cites Families (32)

* Cited by examiner, † Cited by third party
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US2762025A (en) * 1953-02-11 1956-09-04 Erich P Tilenius Shielded cable connectors
US3336563A (en) * 1964-04-13 1967-08-15 Amphenol Corp Coaxial connectors
US3871735A (en) * 1973-08-23 1975-03-18 Amp Inc Shielded high voltage connector
US3982059A (en) * 1974-12-26 1976-09-21 The Machlett Laboratories, Incorporated Flexible cable termination
US4046451A (en) * 1976-07-08 1977-09-06 Andrew Corporation Connector for coaxial cable with annularly corrugated outer conductor
US4426127A (en) * 1981-11-23 1984-01-17 Omni Spectra, Inc. Coaxial connector assembly
US4479702A (en) * 1982-07-06 1984-10-30 Olin Corporation Method and apparatus for assembling a compact multi-conductor optical fiber communication cable
US4603023A (en) * 1983-12-01 1986-07-29 International Business Machines Corporation Method of making a hybrid dielectric probe interposer
US4896939A (en) * 1987-10-30 1990-01-30 D. G. O'brien, Inc. Hybrid fiber optic/electrical cable and connector
US5574815A (en) * 1991-01-28 1996-11-12 Kneeland; Foster C. Combination cable capable of simultaneous transmission of electrical signals in the radio and microwave frequency range and optical communication signals
US5167533A (en) * 1992-01-08 1992-12-01 Andrew Corporation Connector for coaxial cable having hollow inner conductors
US6231357B1 (en) * 1998-01-20 2001-05-15 Relight America, Inc. Waterproof high voltage connector
US6863835B1 (en) 2000-04-25 2005-03-08 James D. Carducci Magnetic barrier for plasma in chamber exhaust
US6830939B2 (en) 2002-08-28 2004-12-14 Verity Instruments, Inc. System and method for determining endpoint in etch processes using partial least squares discriminant analysis in the time domain of optical emission spectra
JP3962661B2 (en) * 2002-08-30 2007-08-22 三菱重工業株式会社 Electrostatic chuck support mechanism, support base device, and plasma processing apparatus
US7134189B2 (en) * 2002-09-12 2006-11-14 Andrew Corporation Coaxial cable connector and tool and method for connecting a coaxial cable
US6926555B2 (en) * 2003-10-09 2005-08-09 Radio Frequency Systems, Inc. Tuned radio frequency coaxial connector
US7556718B2 (en) 2004-06-22 2009-07-07 Tokyo Electron Limited Highly ionized PVD with moving magnetic field envelope for uniform coverage of feature structure and wafer
US7217155B2 (en) * 2004-07-16 2007-05-15 John Mezzalinaqua Associates, Inc. Compression connector for braided coaxial cable
US20060254801A1 (en) * 2005-05-27 2006-11-16 Stevens Randall D Shielded electrical transmission cables and methods for forming the same
WO2008134446A1 (en) * 2007-04-27 2008-11-06 Applied Materials, Inc. Annular baffle
KR100941070B1 (en) 2007-05-10 2010-02-09 세메스 주식회사 Apparatus treating a substrate using plasma
US7448906B1 (en) * 2007-08-22 2008-11-11 Andrew Llc Hollow inner conductor contact for coaxial cable connector
US9123762B2 (en) * 2010-10-22 2015-09-01 Applied Materials, Inc. Substrate support with symmetrical feed structure
US9088074B2 (en) * 2011-07-14 2015-07-21 Nuvotronics, Llc Hollow core coaxial cables and methods of making the same
JP5969840B2 (en) * 2012-06-29 2016-08-17 オリンパス株式会社 Photoelectric composite connector
JP6478748B2 (en) * 2015-03-24 2019-03-06 東京エレクトロン株式会社 Microwave plasma source and plasma processing apparatus
US10049862B2 (en) * 2015-04-17 2018-08-14 Lam Research Corporation Chamber with vertical support stem for symmetric conductance and RF delivery
US20170040140A1 (en) 2015-08-06 2017-02-09 Seagate Technology Llc Magnet array for plasma-enhanced chemical vapor deposition
US9805963B2 (en) * 2015-10-05 2017-10-31 Lam Research Corporation Electrostatic chuck with thermal choke
JP6697346B2 (en) * 2016-07-20 2020-05-20 株式会社ディスコ Adsorption confirmation method, desorption confirmation method, and decompression treatment device
JP6394721B2 (en) * 2017-03-03 2018-09-26 日立金属株式会社 coaxial cable

Also Published As

Publication number Publication date
TW202113909A (en) 2021-04-01
WO2020247375A1 (en) 2020-12-10
CN113994451A (en) 2022-01-28
US20200388998A1 (en) 2020-12-10
KR20220027091A (en) 2022-03-07
US11368003B2 (en) 2022-06-21
JP2022534804A (en) 2022-08-03

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