TWI870413B - 用於腔室的統一電氣導管，及形成其之方法 - Google Patents

用於腔室的統一電氣導管，及形成其之方法 Download PDF

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Publication number
TWI870413B
TWI870413B TW109118724A TW109118724A TWI870413B TW I870413 B TWI870413 B TW I870413B TW 109118724 A TW109118724 A TW 109118724A TW 109118724 A TW109118724 A TW 109118724A TW I870413 B TWI870413 B TW I870413B
Authority
TW
Taiwan
Prior art keywords
conductor
tube
electrical conduit
coupled
flange
Prior art date
Application number
TW109118724A
Other languages
English (en)
Chinese (zh)
Other versions
TW202113909A (zh
Inventor
菲利浦亞倫 克勞司
安納薩Ｋ 沙布藍尼
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TW202113909A publication Critical patent/TW202113909A/zh
Application granted granted Critical
Publication of TWI870413B publication Critical patent/TWI870413B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/023—Alloys based on aluminium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H01B1/026—Alloys based on copper
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/06—Insulating conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/22—Sheathing; Armouring; Screening; Applying other protective layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/17—Protection against damage caused by external factors, e.g. sheaths or armouring
    • H01B7/18—Protection against damage caused by wear, mechanical force or pressure; Sheaths; Armouring
    • H01B7/1875—Multi-layer sheaths
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/42—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction
    • H01B7/421—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction for heat dissipation
    • H01B7/423—Insulated conductors or cables characterised by their form with arrangements for heat dissipation or conduction for heat dissipation using a cooling fluid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
    • H02G3/00—Installations of electric cables or lines or protective tubing therefor in or on buildings, equivalent structures or vehicles
    • H02G3/02—Details
    • H02G3/04—Protective tubing or conduits, e.g. cable ladders or cable troughs
    • H02G3/0406—Details thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00—Insulated conductors or cables characterised by their form
    • H01B7/02—Disposition of insulation
    • H01B7/0208—Cables with several layers of insulating material
    • H01B7/0216—Two layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Structural Engineering (AREA)
  • Civil Engineering (AREA)
  • Architecture (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW109118724A 2019-06-07 2020-06-04 用於腔室的統一電氣導管，及形成其之方法 TWI870413B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201962858738P 2019-06-07 2019-06-07
US62/858,738 2019-06-07

Publications (2)

Publication Number Publication Date
TW202113909A TW202113909A (zh) 2021-04-01
TWI870413B true TWI870413B (zh) 2025-01-21

Family

ID=73651710

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109118724A TWI870413B (zh) 2019-06-07 2020-06-04 用於腔室的統一電氣導管，及形成其之方法

Country Status (7)

Country Link
US (1) US11368003B2 (https=)
JP (1) JP7696840B2 (https=)
KR (1) KR102810211B1 (https=)
CN (1) CN113994451B (https=)
SG (1) SG11202112708YA (https=)
TW (1) TWI870413B (https=)
WO (1) WO2020247375A1 (https=)

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* Cited by examiner, † Cited by third party
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US20220049350A1 (en) * 2020-08-13 2022-02-17 Applied Materials, Inc. Apparatus design for photoresist deposition
US20240071729A1 (en) * 2022-08-26 2024-02-29 Applied Materials, Inc. Gas cooled high power connection rod

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CN101257159A (zh) * 2007-01-31 2008-09-03 应用材料公司 到至少一个耗电设备的电压馈电器
US7448906B1 (en) * 2007-08-22 2008-11-11 Andrew Llc Hollow inner conductor contact for coaxial cable connector
TW201227870A (en) * 2010-10-22 2012-07-01 Applied Materials Inc Substrate support with symmetrical feed structure
TW201440142A (zh) * 2007-04-27 2014-10-16 應用材料股份有限公司 環形擋板
WO2015047722A1 (en) * 2013-09-26 2015-04-02 Applied Materials, Inc. Rotatable substrate support having radio frequency applicator

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* Cited by examiner, † Cited by third party
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TW368701B (en) * 1997-01-24 1999-09-01 Applied Materials Inc A high temperature, high deposition rate process and apparatus for depositing titanium layers
CN101257159A (zh) * 2007-01-31 2008-09-03 应用材料公司 到至少一个耗电设备的电压馈电器
TW201440142A (zh) * 2007-04-27 2014-10-16 應用材料股份有限公司 環形擋板
US7448906B1 (en) * 2007-08-22 2008-11-11 Andrew Llc Hollow inner conductor contact for coaxial cable connector
TW201227870A (en) * 2010-10-22 2012-07-01 Applied Materials Inc Substrate support with symmetrical feed structure
WO2015047722A1 (en) * 2013-09-26 2015-04-02 Applied Materials, Inc. Rotatable substrate support having radio frequency applicator

Also Published As

Publication number Publication date
US11368003B2 (en) 2022-06-21
SG11202112708YA (en) 2021-12-30
JP2022534804A (ja) 2022-08-03
JP7696840B2 (ja) 2025-06-23
TW202113909A (zh) 2021-04-01
WO2020247375A1 (en) 2020-12-10
CN113994451B (zh) 2025-09-12
KR20220027091A (ko) 2022-03-07
US20200388998A1 (en) 2020-12-10
KR102810211B1 (ko) 2025-05-19
CN113994451A (zh) 2022-01-28

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