CN113948402A - 包封针翅型功率模块的模具以及制造功率模块的方法 - Google Patents

包封针翅型功率模块的模具以及制造功率模块的方法 Download PDF

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CN113948402A
CN113948402A CN202110789168.5A CN202110789168A CN113948402A CN 113948402 A CN113948402 A CN 113948402A CN 202110789168 A CN202110789168 A CN 202110789168A CN 113948402 A CN113948402 A CN 113948402A
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power module
dbc
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柳伟
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14065Positioning or centering articles in the mould
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/0001Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor characterised by the choice of material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/1701Component parts, details or accessories; Auxiliary operations using a particular environment during moulding, e.g. moisture-free or dust-free
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/561Batch processing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/50Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14065Positioning or centering articles in the mould
    • B29C2045/14139Positioning or centering articles in the mould positioning inserts having a part extending into a positioning cavity outside the mould cavity
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C2045/14852Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles incorporating articles with a data carrier, e.g. chips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C2045/1784Component parts, details or accessories not otherwise provided for; Auxiliary operations not otherwise provided for
    • B29C2045/1785Movement of a part, e.g. opening or closing movement of the mould, generating fluid pressure in a built-in fluid pressure generator
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C2791/00Shaping characteristics in general
    • B29C2791/004Shaping under special conditions
    • B29C2791/006Using vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2063/00Use of EP, i.e. epoxy resins or derivatives thereof, as moulding material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof
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Abstract

本发明公开了一种用树脂包封针翅型功率模块的模具,该功率模块包括DBC或IMS、功率芯片、设置在DBC或IMS的第一表面上的多个端子、以及设置在DBC或IMS的第二表面上的针翅结构,该模具进一步包括:腔体,该腔体用于容纳功率模块;多个端子保护元件,该多个端子保护元件分别对应于端子,每个端子保护元件用于接纳端子的至少一部分;注入孔,该注入孔设置在模具的底部上或模具的侧壁上,其中,当功率模块放置在腔体中时,第一表面面向模具的底部,并且注入孔位于第一表面下方。在传递模制过程期间,端子和翅片受到良好保护以免受树脂的影响。本发明还公开了一种制造功率模块的方法。

Description

包封针翅型功率模块的模具以及制造功率模块的方法
技术领域
本发明涉及一种包封针翅型功率模块的模具以及一种制造针翅型功率模块的方法。
背景技术
参考图1,公开了一种封装前的常规功率模块。在DBC(直接覆铜)或IMS(绝缘化金属基板)1的前表面上设置有诸如IGBT或SiC器件的功率芯片2,以及逆变器的诸如AC连接器和DC连接器的端子31、32。用于散热的金属块4联接至DBC或IMS 1的后表面。凝胶或树脂通常用于包封功率芯片2、端子31、32以及DBC或IMS的前表面。如果使用环氧树脂,则可以通过传递模制(transfer molding)过程来包封功率模块。参考图2,下模具51设置有注入孔511,下模具51和上模具52限定了用于容纳图1所示结构的腔体50。环氧树脂经由注入孔511向上注射,并且腔体50将填充以特定压力下的环氧树脂。金属块4可以在传递模制过程期间提供良好的支撑。移除下模具和上模具后,形成由环氧树脂封装的功率模块6,如图3所示。然而,除了功率芯片2之外,端子31、32也完全被环氧树脂6包封。由于需要暴露端子以进行电连接,因此需要额外的钻孔过程。
此外,为了提高散热能力,使用针翅结构(Pin-Fin structure)代替金属块。如图4所示,针翅结构联接至DBC或IMS 1的后表面,并且包括金属板41和金属板41上的多个翅片42。在功率芯片的快速开关过程中产生的热量可以通过翅片42快速消散。如图5和图6所示,如果将具有针翅结构的功率模块放置在由下模具51和上模具52形成的腔体50中,两个相邻的翅片之间的间隙也会填充以环氧树脂,这是不可接受的。
发明内容
为了避免翅片和端子被树脂包封,本发明提供了一种用树脂包封针翅型功率模块的模具。该功率模块包括DBC或IMS、功率芯片、设置在DBC或IMS的第一表面上的多个端子以及设置在DBC或IMS的与第一表面相对的第二表面上的针翅结构。该模具进一步包括:腔体,该腔体用于容纳功率模块;多个端子保护元件,该多个端子保护元件分别对应于端子,每个端子保护元件用于接纳端子的至少一部分;注入孔,该注入孔设置在模具的底部上或模具的侧壁上,其中,当功率模块放置在腔体中时,第一表面面向模具的内部底表面,并且注入孔位于第一表面下方。
在优选实施例中,端子保护元件是设置在模具的内部底表面上的凹部。
在另一个优选实施例中,凹部包裹对应端子的至少一部分。例如,凹部包裹对应端子的顶部。
在另一个优选实施例中,凹部的深度比对应端子的高度浅。因此,在传递模制过程期间,每个端子的未被凹部接纳的部分浸入树脂中,并且在树脂固化之后,每个端子的未被凹部接纳的部分被包封。同时,每个端子的被凹部接纳的部分从固化的树脂突出,因此不需要额外的钻孔过程来形成电连接。
在另一个优选实施例中,凹部的内壁是弹性的。优选地,凹部的内壁被弹性层(诸如橡胶层)覆盖。
在另一个优选实施例中,针翅结构包括联接至DBC或IMS的金属板以及设置在金属板上的翅片,该金属板包括设置有翅片的中心区域和未设置有翅片的边缘区域,该边缘区域在中心区域周围。当向上注入树脂时,边缘区域可以防止翅片在传递模制过程中受到树脂的影响。
在另一个优选实施例中,台阶部分设置在模具的内部底表面上、用于支撑第一表面的周边。
在另一个优选实施例中,模具由上模具和下模具组装而成,腔体由上模具的内壁和下模具的内壁形成,端子保护元件和注入孔设置在下模具上。
根据本发明的另一方面,还公开了一种制造针翅型功率模块的方法。一种使用上述模具制造功率模块的方法,该方法包括:将功率模块放置在下模具中,其中,每个端子的至少一部分由对应的端子保护元件接纳;组装上模具和下模具,经由注入孔注入环氧树脂,使得第一表面包封有环氧树脂,移除上模具和下模具。
在另一个优选实施例中,在注入环氧树脂之前,将腔体排空。
从以下结合附图的详细描述中,实施例的其他方面和优点将变得显而易见,附图通过举例的方式展示了所描述的实施例的原理。
附图说明
通过结合附图参考以下描述,可以最好地理解所描述的实施例及其优点。这些附图决不限制本领域技术人员在不脱离所述实施例的精神和范围的情况下对所述实施例在形式和细节上进行的任何改变。
图1展示了封装前的常规功率模块的截面视图。
图2展示了用于包封如图1所示的功率模块的常规模具的截面视图。
图3展示了现有技术中移除模具后由树脂包封的功率模块的截面视图。
图4展示了封装前的具有针翅结构的功率模块的截面视图。
图5展示了现有技术中放置在模具中的图4所示功率模块的截面视图。
图6展示了现有技术中移除模具后的具有针翅结构的树脂包封功率模块的截面视图。
图7展示了根据本发明的实施例的用于包封具有针翅结构的功率模块的模具的截面视图。
图8展示了放置在图7的模具中的具有针翅结构的功率模块的截面视图。
图9展示了图8中移除模具后已包封的功率模块的截面视图。
图10展示了根据本发明的另一个实施例的用于包封具有针翅结构的功率模块的下模具的截面视图。
图11展示了放置在图10的下模具中的具有针翅结构的功率模块的截面视图。
图12展示了根据本发明的另一个实施例的下模具的透视图。
具体实施方式
现在参考附图,详细描述本发明的实施例。参考图4、图7至图9,详细描述了用树脂包封针翅型功率模块的模具和制造针翅型功率模块的方法。如图4所示,功率模块包括DBC或IMS 1、功率芯片2、设置在DBC或IMS 1的第一表面上的多个端子31、32,以及设置在DBC或IMS 1的与第一表面相对的第二表面上的针翅结构。功率芯片(诸如SiC器件)以及诸如AC连接器和DC连接器的端子焊接在DBC或IMS上。针翅结构包括联接至DBC或IMS 1的金属板41和设置在金属板41上的翅片42。金属板41通过热胶联接至DBC或IMS,使得在功率芯片开关过程中产生的热量传递至浸入冷却剂中的翅片42。
参考图7和图8,模具包括下模具501和上模具502。用于容纳如图4所示的功率模块的腔体500由下模具501和上模具502形成。在下模具501的内部底表面上,设置有分别与端子31、32对应的多个端子保护元件5011、5012,每个端子保护元件用于接纳端子的至少一部分。凹部的深度比对应端子的高度浅。每个端子保护元件是具有弹性层的凹部。因此,当将功率模块以翅片42向上且端子向下的方式放置在腔体500中时,由于每个端子的一部分、例如每个端子的顶部被每个凹部的弹性层包裹,所以每个端子都得到良好的保护。
下模具501进一步包括设置在模具底部上的注入孔5013,其中,当功率模块放置在腔体中时,DBC或IMS的第一表面面向模具的底部,并且注入孔处于第一表面下方。环氧树脂经由注入孔5013注入到腔体500中。
不同于具有平面底部的常规模具,功率模块以倒置的方式放置,其中端子得到良好的保护。端子的未被端子保护元件接纳的部分暴露于经由注入孔5013注入的环氧树脂。而且两个相邻的翅片之间的间隙421也不会填充有环氧树脂。
本发明进一步提供了一种使用上述模具制造功率模块的方法,该方法包括:将功率模块放置在下模具中,其中每个端子的顶部由对应的端子保护元件接纳;组装上模具和下模具以形成腔体500;经由注入孔5013向上注入环氧树脂,在注入环氧树脂的过程中,随着环氧树脂的流动,功率芯片和暴露的端子被浸入环氧树脂中。在环氧树脂固化后,移除模具,从而形成如图9所示的包封功率模块。在端子保护元件的保护下,每个端子31、32的顶部311、321没有被环氧树脂包封而因此暴露,与使用常规模具的传递模制过程相比,这是电连接所期望的,并且不需要额外的钻孔过程。
现在参考图10和图11,公开了另一个优选实施例。金属板包括设置有翅片的中心区域和在中心区域周围未设置有翅片的边缘区域401。当向上注入树脂时,边缘区域可以防止翅片在传递模制过程中受到树脂的影响。
在此实施例中,台阶部分7设置在下模具501的内部底表面上、用于支撑第一表面的周边,并且注入孔设置在下模具的侧壁上。如图11所示,台阶部分7防止环氧树脂影响金属板的侧壁和翅片42。
现在参考图12,展示了根据本发明的另一个优选实施例的下模具501。此实施例与图10和图11所示的实施例类似,台阶部分7设置在下模具501的内部底表面上、用于支撑第一表面的周边。在下模具的底板上设置有具有内部橡胶元件的多个端子保护元件5011、5012,并且注入孔5013设置在下模具的侧壁上。当功率模块放置在腔体中时,注入孔的最高位置处于第一表面下方。
对于优选实施例,已经提出了多个替代性的结构性元件和处理步骤。因此,尽管已经参考特定实施例描述了本发明,但是本说明书是对本发明的说明,而不应被解释为对本发明的限制。在不脱离由所附权利要求限定的本发明的真实精神和范围的情况下,本领域技术人员可以想到多个不同的修改和应用。

Claims (10)

1.一种用树脂包封针翅型功率模块的模具,所述功率模块包括DBC或IMS、功率芯片、设置在所述DBC或IMS的第一表面上的多个端子、以及设置在所述DBC或IMS的第二表面上的针翅结构,所述第二表面与所述第一表面相对,所述模具进一步包括:
腔体,所述腔体用于容纳所述功率模块;
多个端子保护元件,所述多个端子保护元件分别对应于所述端子,每个端子保护元件用于接纳端子的至少一部分;
注入孔,所述注入孔设置在所述模具的底部上或所述模具的侧壁上,其中,当所述功率模块放置在所述腔体中时,所述第一表面面向所述模具的内部底表面,并且所述注入孔位于所述第一表面下方。
2.如权利要求1所述的模具,其中,所述端子保护元件是设置在所述模具的内部底表面上的凹部。
3.如权利要求2所述的模具,其中,所述凹部包裹所述对应端子的至少一部分。
4.如权利要求2所述的模具,其中,所述凹部的深度比所述对应端子的高度浅。
5.如权利要求2所述的模具,其中,所述凹部的内壁由弹性材料制成。
6.如权利要求1至5中任一项所述的模具,其中,所述针翅结构包括联接至所述DBC或IMS的金属板,所述金属板包括设置有所述翅片的中心区域和在所述中心区域周围未设置有所述翅片的边缘区域。
7.如权利要求1至5中任一项所述的模具,其中,台阶部分设置在所述模具的内部底表面上、用于支撑所述第一表面的周边。
8.如权利要求1至5中任一项所述的模具,其中,所述模具由上模具和下模具组装而成,所述腔体由所述上模具的内壁和所述下模具的内壁形成,所述端子保护元件和所述注入孔设置在所述下模具上。
9.一种使用权利要求8所述的模具制造功率模块的方法,所述方法包括:
将所述功率模块放置在所述下模具中,其中,每个端子的至少一部分由所述对应的端子保护元件接纳;
组装所述上模具和所述下模具,
经由所述注入孔注入环氧树脂,使得所述第一表面包封有环氧树脂,
移除所述上模具和所述下模具。
10.如权利要求9所述的方法,其中,在注入环氧树脂之前,将所述腔体排空。
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