CN113716520A - Multifunctional system and method for preparing two-dimensional material micro-nano device - Google Patents

Multifunctional system and method for preparing two-dimensional material micro-nano device Download PDF

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Publication number
CN113716520A
CN113716520A CN202111009419.XA CN202111009419A CN113716520A CN 113716520 A CN113716520 A CN 113716520A CN 202111009419 A CN202111009419 A CN 202111009419A CN 113716520 A CN113716520 A CN 113716520A
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multifunctional
fixing
substrate
dimensional
fixed
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王曾晖
梁亚春
朱健凯
肖飞
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Priority to CN202111009419.XA priority Critical patent/CN113716520A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0004—Apparatus specially adapted for the manufacture or treatment of nanostructural devices or systems or methods for manufacturing the same
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0042—Assembling discrete nanostructures into nanostructural devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0042—Assembling discrete nanostructures into nanostructural devices
    • B82B3/0047—Bonding two or more elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0042—Assembling discrete nanostructures into nanostructural devices
    • B82B3/0052—Aligning two or more elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Abstract

The application provides a multifunctional system and a method for preparing a two-dimensional material micro-nano device. Wherein, installation unable adjustment base can the whole multifunctional system of fixed support. The displacement module can independently move linearly along X, Y, Z three directions, which is convenient for realizing the positioning and alignment operation between the two-dimensional crystal material sample and the substrate. The multifunctional conversion module realizes the function switching between the two-dimensional crystal material transfer and the metal electrode deposition only under the condition of replacing the multifunctional conversion sheet. The substrate fixing and rotating module can fix the substrate and can also carry out rotating operation to adjust the relative angle between the two-dimensional crystal material or the metal deposition mask and the substrate, so that the system has better flexibility in material transfer and metal electrode deposition realization.

Description

Multifunctional system and method for preparing two-dimensional material micro-nano device
Technical Field
The invention relates to the technical field of key processes for preparing a two-dimensional material micro-nano device, relates to the technical field of dry transfer of a two-dimensional layered crystal material and metal electrode deposition of a micro-nano device, and particularly relates to a multifunctional system and a method for preparing the two-dimensional material micro-nano device.
Background
The atomic-level thickness two-position layered crystal material has abundant electrical, optical, magnetic and mechanical properties, so that the material attracts extensive research attention. The two-dimensional crystalline materials required for research are mainly obtained by chemical vapor synthesis (CVD) and tape mechanical stripping. The mechanical stripping of the two-dimensional crystal material by the adhesive tape has the advantages of convenient operation, high preparation efficiency, less sample pollution, high crystal quality and the like, and has a high position in research. The two-dimensional crystal material required by research needs to be transferred to Si/SiO by a certain method2And depositing a metal electrode on the substrate by a metal deposition method. Among them, the dry transfer technique is a common high-efficiency and flexible transfer method. Metal deposition is a commonly used metal preparation process in semiconductor processing. The mask and the mask aligning system are specially used, so that the related areas of the mask and the sample can be aligned in a high-quality mode, metal atoms to be deposited penetrate through the opening pattern area of the mask, and deposition of metal electrodes is achieved.
Two-dimensional crystal material dry transfer systems exist in the market at present, but the transfer systems have the defects of large volume, poor use environment compatibility, high price and the like. In the aspect of metal electrode deposition, a mask alignment system on the market also has the defects of high price, poor use environment compatibility and the like.
Disclosure of Invention
The invention aims to provide a multifunctional system which can realize dry transfer of a two-dimensional crystal material and alignment of a mask plate for metal electrode deposition. In addition, the system has the advantages of light structure, simple operation, low price, convenient modification and high compatibility.
In order to achieve the purpose, the invention provides the technical scheme that: a multifunctional system for preparing a two-dimensional material micro-nano device comprises a fixed part and a movable part, wherein the movable part can adjust the relative position between a two-dimensional crystal material and a substrate from multiple degrees of freedom.
Further, the multifunctional system for preparing the two-dimensional material micro-nano device comprises a fixed part and a movable part, wherein the fixed part comprises a mounting and fixing base, and the movable part comprises a displacement module, a multifunctional conversion module and a substrate fixing and rotating module. The mounting and fixing base belongs to a supporting part of equipment and is used for fixing the whole multifunctional system; or the multifunctional system is fixedly arranged in the metal deposition instrument, so that different devices and functions can be flexibly and efficiently switched and used. The displacement module comprises X, Y axis movement in a horizontal plane and Z axis movement in a vertical direction, each axial displacement has high precision, the requirement of sample movement under different requirements can be met, and positioning and alignment in the process of transferring the two-dimensional crystal material or positioning and alignment between a mask plate for metal electrode deposition and a sample are conveniently realized. The multifunctional conversion module can realize the switching of the system between the alignment functions of the two-dimensional crystal material transfer or the deposition mask. The module not only can play a role in fixing the two-dimensional crystal material or the mask for deposition, but also can conveniently adjust the inclination angle or the levelness between the two-dimensional crystal material or the mask and the substrate in the transfer alignment or mask alignment process, thereby improving the transfer success rate or the appearance and the quality of the deposited metal electrode. The substrate fixing and rotating module can fix a substrate for device preparation, can rotate the substrate at the same time, and can adjust the relative angle between the two-dimensional crystal material or the deposition mask and the substrate.
Furthermore, the mounting and fixing base is located at the bottom end of the whole multifunctional system, and comprises 4 screw holes for fixing the whole multifunctional system. The mounting and fixing base is provided with a rectangular hole with a larger size in the middle, and the rectangular hole is used for lowering the multifunctional conversion module to a position low enough to ensure that two-dimensional crystal materials in the transfer process or mask plates positioned and aligned in metal electrode deposition can be in close and enough contact with the substrate.
Further, the displacement module comprises 3 uniaxial displacement tables with different axial directions (X, Y, Z). The displacement table is directly fixed on the mounting and fixing base and horizontally moves along the X-axis direction, the displacement table is fixed on the X-axis displacement table and horizontally moves along the Y-axis direction, and the displacement table in the Z-axis direction is fixed on the Y-axis displacement table through the adapter plate. The displacement tables in different directions can realize high-precision X, Y, Z direction movement through the adjusting shaft and the screw rod.
Furthermore, the single-shaft displacement table comprises a lower panel, an upper panel, an adjusting shaft, a screw rod fixing sleeve, a screw rod ejection column, a guide rail and an extension spring; the adjusting shaft is connected with the screw rod, and the screw rod is driven to rotate by rotating the adjusting shaft; the screw rod is fixed in the screw rod fixing sleeve, and the screw rod linearly moves through internal threads by rotating the adjusting shaft; scales are marked on the screw rod fixing sleeve and used for high-precision adjustment of the single-shaft displacement table, and the screw rod fixing sleeve is arranged on the side edge of the lower panel; the foremost end of the screw rod is contacted with a screw rod top column; the screw rod support pillar is fixed on the side edge of the upper panel and used for pushing the upper panel of the single-shaft displacement table to linearly move under the condition that the screw rod linearly moves; one end of the extension spring is fixed in the guide rail on the lower panel, the other end of the extension spring is fixed in the upper panel, and the extension spring generates a pulling force opposite to the linear moving direction of the screw rod. The guide rail is fixed on the upper surface of the lower panel and used for limiting the movement direction of the extension spring and supporting the movement of the upper panel.
Furthermore, the multifunctional conversion module comprises an L-shaped fixing support, a first fixing screw, a multifunctional conversion sheet, a second fixing screw, a fixing sheet, a telescopic spring and a third fixing screw; the side edge of the L-shaped fixed support is fixed on the uniaxial displacement table board along the Z direction through a first fixing screw, and the bottom edge of the L-shaped fixed support plays a role in supporting and fixing; the multifunctional conversion sheet can fix two-dimensional crystal materials or metal deposition masks to be transferred and aligned; the fixing piece plays a role in fixing the multifunctional conversion piece and is fixed through a second fixing screw; the telescopic springs can be independently compressed and adjusted, so that the inclination angle or the levelness of the fixing piece can be adjusted, and further the inclination angle or the levelness of the multifunctional conversion piece can be adjusted; the third fixing screw can fix the telescopic spring between the bottom edge of the L-shaped fixing support and the fixing piece.
Further, the multifunctional conversion sheet can be replaced. The multifunctional conversion sheet can be replaced between a material transfer function and a metal electrode deposition function.
Further, the substrate fixing and rotating module is an R-direction rotating device, and the R-direction rotating device can be adjusted in a high-precision range of 360 degrees; further, the substrate fixing and rotating module comprises a base, a gear, a shell and a shell handle; the gear is connected to the upper surface of the base and can rotate for 360 degrees; the lower surface of the shell comprises internal teeth matched with the gear, and the shell can be arranged on the gear through the internal teeth. The shell handle can drive the shell to rotate, and the shell drives the gear to rotate through the internal teeth, so that the rotation of the substrate fixing module is realized.
In a second aspect, the application also relates to a method for preparing a two-dimensional material micro-nano device, which is to clean Si/SiO2The substrate is fixed on a substrate fixing and rotating module of the multifunctional system, and PDMS adhered with the two-dimensional crystal material is fixed on the lower surface of a multifunctional conversion sheet of the multifunctional system; under the observation of a microscope, adjusting the displacement module of the multifunctional system and the levelness or the inclination angle of the multifunctional conversion sheet; adjusting two-dimensional crystal material and Si/SiO by substrate fixing and rotating module2The relative angle between the substrates; adjusting two-dimensional crystal material and Si/SiO2Relative position and distance between the substrates, and the two-dimensional crystal material and Si/SiO2The substrates approach until the two are in close contact; after the two-dimensional crystal material is completely and tightly contacted with the substrate, the two-dimensional crystal material is tightly adhered to the Si/SiO layer by virtue of Van der Waals force2Moving the upper surface of the substrate, and moving the displacement module of the multifunctional system in the Z-axis direction to make the multifunctional conversion sheet and the PDMS and Si/SiO fixed below the multifunctional conversion sheet2The two-dimensional crystalline material on the substrate separates.
Further, transferring the Si/SiO of the two-dimensional crystal material2The substrate is continuously fixed on the substrate fixing and rotating module of the multifunctional system, only the multifunctional conversion sheet is replaced, and the mask plate for deposition is fixed below the multifunctional conversion sheet; under the observation of a microscope, the multifunctional adjusting deviceThe displacement module of the system and the levelness or inclination angle of the multifunctional conversion sheet; adjusting the relative angle between the deposition mask and the transferred two-dimensional crystal material by using a substrate fixing and rotating module; adjusting the relative position and distance between the deposition mask and the two-dimensional crystal material to be transferred, and enabling the deposition mask and the two-dimensional crystal material to be close to each other until the deposition mask and the two-dimensional crystal material are in close contact; placing the whole system into a metal deposition device for metal electrode deposition; after the metal deposition is finished, the displacement module of the multifunctional system is moved along the Z-axis direction, so that the multifunctional conversion sheet, the deposition mask plate and the Si/SiO solid below the multifunctional conversion sheet are fixed2The transferred two-dimensional crystalline material on the substrate separates.
The invention has the beneficial effects that: the two-dimensional crystal material has abundant electrical, optical, magnetic and mechanical properties. Through a certain dry transfer technical means, a heterojunction device based on a two-dimensional crystal material or a two-dimensional crystal material can be prepared, and the method becomes a hotspot of research.
In the actual market, two-dimensional crystal material dry transfer systems exist, but the transfer systems are often large in size, poor in compatibility, high in price and the like. The invention realizes the miniaturization design of the two-dimensional crystal material dry transfer system for the first time, and the system has the advantages of good compatibility, convenient modification, complete performance, low price and the like. The multifunctional system can be used under most microscopes to complete the dry transfer of the two-dimensional crystal material.
Furthermore, after the material is transferred, extra complicated steps are not needed, the multifunctional system can be used for directly and efficiently carrying out mask plate alignment operation of metal electrode deposition, and the metal electrode deposition can be carried out after the alignment operation is finished. At the same time, the multifunctional system is compatible with most metal deposition devices. Therefore, multifunctional multiplexing of key processes in preparation of the two-dimensional material micro-nano device is efficiently and continuously realized.
Drawings
FIG. 1 is a schematic structural diagram of a multifunctional system for preparing a two-dimensional material micro-nano device according to the present invention;
FIG. 2 is a schematic view of a single axis displacement table according to the present invention;
FIG. 3 is a schematic diagram of the multifunctional conversion module of the present invention;
FIG. 4 is a schematic view of the substrate holding and rotating module according to the present invention;
FIG. 5 shows a two-dimensional crystal material and Si/SiO of the present invention2A positioning alignment schematic diagram of the substrate;
FIG. 6 shows a two-dimensional crystal material and Si/SiO of the present invention2Positioning the substrate to align with the front view;
FIG. 7 shows a two-dimensional crystal material and Si/SiO of the present invention2Substrate close contact schematic;
FIG. 8 shows the multifunctional conversion plate and PDMS slowly separated from Si/SiO2A schematic view of a substrate surface;
FIG. 9 shows the adhesion of the two-dimensional crystalline material of the present invention to Si/SiO2A schematic view of a substrate surface;
FIG. 10 is a schematic view of the positioning alignment of a reticle and a two-dimensional crystalline material according to the present invention;
FIG. 11 is a front view of the present invention mask and two-dimensional crystal material in alignment;
FIG. 12 shows a mask blank of the present invention and Si/SiO2Substrate close contact schematic;
FIG. 13 is a schematic illustration of the metal electrode deposition of the present invention;
FIG. 14 is a reticle off Si/SiO2A schematic view of a substrate surface;
FIG. 15 is a schematic view showing the completion of the deposition of the metal electrode.
Description of reference numerals: the device comprises an installation fixing base 1, a displacement module 2, an adapter plate 3, a multifunctional conversion module 4, a substrate fixing and rotating module 5, a screw hole 6, a lower panel 7, a screw rod top column 8, an adjusting shaft 90, a screw rod 91, a screw rod fixing sleeve 10, a guide rail 11, an extension spring 12, an upper panel 13, an L-shaped fixing support 14, a first fixing screw 15, a second fixing screw 16, a fixing piece 17, a multifunctional conversion piece 18, an extension spring 19, a third fixing screw 20, a base 21, a gear 22, a shell 23, a shell handle 24, a two-dimensional crystal material 25, PDMS 26, Si/SiO2Substrate 27, reticle 28, metal electrode 29.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings.
Example one
As shown in fig. 1, the present invention provides a multifunctional system for preparing a two-dimensional material micro-nano device. The multifunctional system comprises a fixed base 1, a displacement module 2, an adapter plate 3, a multifunctional conversion module 4, a substrate fixed rotating module 5 and a screw hole 6.
As shown in fig. 2, the single-axis displacement table includes a lower panel 7, an upper panel 13, an adjusting shaft 90, a lead screw 91, a lead screw fixing sleeve 10, a lead screw jack 8, a guide rail 11, and an extension spring 12. Each uniaxial displacement table can independently realize X, Y, Z-direction linear movement. The rotary adjusting shaft 90 can drive the screw rod 91 to move, and the screw rod 91 can be pushed to move by moving the screw rod jack so as to drive the single-shaft displacement bench top panel to move. The extension spring generates a force which is opposite to the movement direction of the upper panel and is balanced, so that the upper panel moves at a constant speed.
As shown in fig. 3, the multifunctional conversion module includes an L-shaped fixing bracket 14, a first fixing screw 15, a multifunctional conversion sheet 18, a second fixing screw 16, a fixing sheet 17, a telescopic spring 19, and a third fixing screw 20. The two-dimensional crystal material sample or the metal deposition mask is fixed on the lower surface of the multifunctional conversion sheet of the multifunctional conversion module, so that the two-dimensional crystal material sample or the metal deposition mask can be positioned and aligned in a dry method. Meanwhile, the requirement of adjusting the levelness or the inclination angle of the multifunctional conversion piece is met by independently adjusting the telescopic degree of the telescopic spring.
As shown in fig. 4, the substrate fixing and rotating module includes a base 21, a gear 22, a housing 23, and a housing handle 24. The rotation of the housing 23 can be achieved by pushing the housing handle 24.
As shown in fig. 5-9, a flow diagram of a two-dimensional material transfer process using the multi-functional system is shown.
As shown in fig. 10-15, a schematic diagram of a metal electrode deposition process using the multi-functional system is shown.
Example two
First, dry transfer of a two-dimensional crystalline material is performed.
As shown in FIGS. 5 to 6, the cleaned Si/SiO2The substrate is fixed on the substrate fixing and rotating module of the multifunctional system, and the PDMS adhered with the two-dimensional crystal material is fixed on the lower surface of the multifunctional conversion sheet of the multifunctional system. Under the observation of a microscope, adjusting the levelness or the inclination angle of a displacement module (comprising the X, Y, Z direction of a single-axis displacement platform) and a multifunctional conversion sheet of the multifunctional system; substrate fixed rotary module capable of adjusting two-dimensional crystal material and Si/SiO2The relative angle between the substrates; under the above operation, the two-dimensional crystal material and Si/SiO are adjusted2Relative position and distance between the substrates, and the two-dimensional crystal material and Si/SiO2Approaching the substrate; as shown in fig. 7, the relative position and distance between the two-dimensional crystal material and the substrate are adjusted, and the two-dimensional crystal material and the substrate are brought into close contact until the two are in close contact; as shown in FIG. 8, the two-dimensional crystal material is in complete close contact with the substrate, and the two-dimensional crystal material is tightly adhered to Si/SiO by Van der Waals force2Moving the upper surface of the substrate, and moving the displacement module of the multifunctional system in the Z-axis direction to make the multifunctional conversion sheet and the PDMS and Si/SiO fixed below the multifunctional conversion sheet2The two-dimensional crystalline material on the substrate separates. As shown in FIG. 9, the two-dimensional crystal material is tightly adhered to Si/SiO2Above the substrate. By the steps, the dry transfer process of the two-dimensional crystal material is completed by the multifunctional system, and preparation is also made for the next metal electrode deposition.
The metal electrode deposition is then carried out according to a similar process flow.
As shown in fig. 10-11, no additional process steps are required after the material transfer is complete. Transferring the two-dimensional crystal material to the Si/SiO2The substrate is continuously fixed on the substrate fixing and rotating module of the multifunctional system, only the multifunctional conversion sheet is replaced, and the mask plate for deposition is fixed below the multifunctional conversion sheet. Under the observation of a microscope, adjusting the levelness or the inclination angle of a displacement module (comprising the X, Y, Z direction of a single-axis displacement platform) and a multifunctional conversion sheet of the multifunctional system; substrate fixed rotary module capable of adjusting mask plate for deposition and transferring two-dimensional crystalThe relative angle between the materials; under the operation, adjusting the relative position and distance between the deposition mask and the transferred two-dimensional crystal material, and enabling the deposition mask to be close to the transferred two-dimensional crystal material; as shown in fig. 12, the relative position and distance between the deposition mask and the transferred two-dimensional crystalline material are adjusted, and the deposition mask and the transferred two-dimensional crystalline material are brought into close proximity until they are in close contact. As shown in fig. 13, the whole system is placed in a metal deposition device for metal electrode deposition; as shown in FIGS. 14-15, after the metal deposition is completed, the Z-axis direction of the displacement module of the multi-function system is moved to make the multi-function conversion plate and the deposition mask plate and Si/SiO fixed below the multi-function conversion plate2The transferred two-dimensional crystalline material on the substrate is separated so that a high quality deposited metal electrode can be seen on top of the transferred two-dimensional crystalline material.
While the present invention has been particularly shown and described with reference to the preferred embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (9)

1. A multifunctional system for preparing a two-dimensional material micro-nano device is characterized by comprising a fixed part and a movable part, wherein the movable part can adjust the relative position between a two-dimensional crystal material and a substrate from multiple degrees of freedom.
2. The multifunctional system for preparing the two-dimensional material micro-nano device according to claim 1, wherein the fixed part comprises a mounting and fixing base (1), and the movable part comprises a displacement module (2), a multifunctional conversion module (4) and a substrate fixing and rotating module (5);
the displacement module (2) is fixed on the mounting and fixing base (1) and is used for driving the multifunctional conversion module (4) to move;
the multifunctional conversion module (4) is arranged on the displacement module (2) and is used for driving the two-dimensional crystal material to move;
the substrate fixing and rotating module (5) is used for fixing the substrate and can adjust the relative angle between the two-dimensional crystal material and the substrate.
3. The multifunctional system for preparing the two-dimensional material micro-nano device according to claim 2, wherein the displacement module (2) comprises three single-axis displacement tables, namely a displacement table for controlling X-direction movement, a displacement table for controlling Y-direction movement and a displacement table for controlling Z-direction movement;
the displacement table for controlling the X-direction movement is fixed on the mounting and fixing base (1), the displacement table for controlling the Y-direction movement is fixed on the displacement table for controlling the X-direction movement, and the displacement table for controlling the Z-direction movement is fixed on the displacement table for controlling the Y-direction movement through the adapter plate (3).
4. The multifunctional system for the preparation of the two-dimensional material micro-nano device according to claim 3, wherein the single-axis displacement table comprises a lower panel (7), an upper panel (13), an adjusting shaft (90), a screw (91), a screw fixing sleeve (10), a screw jack post (8), a guide rail (11) and an extension spring (12);
the adjusting shaft (90) is connected with the screw rod (91), and the screw rod (91) is driven to rotate by rotating the adjusting shaft (90); the screw rod (91) is fixed in the screw rod fixing sleeve (10), and the screw rod (91) linearly moves through threads by rotating the adjusting shaft (90); scales are marked on the screw rod fixing sleeve (10) and used for high-precision adjustment of the single-shaft displacement table, and the screw rod fixing sleeve (10) is arranged on the side face of the lower panel (7); the foremost end of the screw rod (91) is contacted with the screw rod jack post (8); the screw rod jacking column (8) is fixed on the side surface of the upper panel (13) and is used for pushing the upper panel (13) of the single-shaft displacement table to linearly move under the condition that the screw rod (91) linearly moves; one end of the extension spring (12) is fixed in the guide rail (11), the other end of the extension spring is fixed with the upper panel (13), and the extension spring (12) generates a pulling force opposite to the linear moving direction of the screw rod (91); the guide rail (11) is fixed on the upper surface of the lower panel (7) and is used for guiding the movement direction of the extension spring (12) and supporting the movement of the upper panel (13).
5. The multifunctional system for preparing the two-dimensional material micro-nano device according to claim 2, wherein the multifunctional conversion module (4) comprises an L-shaped fixing support (14), a first fixing screw (15), a multifunctional conversion sheet (18), a second fixing screw (16), a fixing sheet (17), a telescopic spring (19) and a third fixing screw (20);
the side surface of the L-shaped fixed support (14) is fixed on a single-shaft displacement table moving along the Z direction through a first fixing screw (15), and the bottom edge of the L-shaped fixed support (14) plays a role in fixing and supporting; the multifunctional conversion sheet (18) can fix two-dimensional crystal materials to be transferred and aligned or a mask plate for deposition; the fixing piece (17) plays a role in fixing the multifunctional conversion piece (18), and the multifunctional conversion piece (18) is fixed through a second fixing screw (16); the telescopic springs (19) can be independently adjusted in a telescopic mode, the inclination angle and the levelness of the fixing piece (17) can be adjusted, and the inclination angle and the levelness of the multifunctional conversion piece (18) can be further adjusted; the third fixing screw (20) can fix the expansion spring (19) between the bottom edge of the L-shaped fixing bracket (14) and the fixing piece (17).
6. The multifunctional system for the preparation of two-dimensional material micro-nano devices according to claim 2, wherein the substrate fixing and rotating module (5) comprises a base (21), a gear (22), a shell (23) and a shell handle (24);
the base (21) is connected with a gear (22), and the gear (22) can rotate for 360 degrees; the internal teeth of the housing (23) are meshed with the external teeth of the gear (22); the shell handle (24) can drive the shell (23) to rotate, and the shell (23) drives the gear (22) to rotate, so that the rotation of the substrate fixing module (5) is realized.
7. The multifunctional system for the preparation of the two-dimensional material micro-nano device according to any one of claims 2 to 6, wherein the multifunctional conversion sheet can be replaced between a material transfer function and a metal electrode deposition function.
8. A method for preparing a two-dimensional material micro-nano device is characterized in that,
cleaning the cleaned Si/SiO2The substrate is fixed on a substrate fixing and rotating module (5) of the multifunctional system, and PDMS (26) adhered with a two-dimensional crystal material (25) is fixed on the lower surface of a multifunctional conversion sheet (18) of the multifunctional system;
under the observation of a microscope, the levelness or the inclination angle of a displacement module (2) and a multifunctional conversion sheet (18) of the multifunctional system is adjusted;
adjusting two-dimensional crystal material (25) and Si/SiO by substrate fixing and rotating module (5)2The relative angle between the substrates;
adjusting the two-dimensional crystal material (25) and Si/SiO2Relative position and distance between the substrates, and the two-dimensional crystal material (25) and Si/SiO2The substrates approach until the two are in close contact;
after the two-dimensional crystal material (25) is completely and tightly contacted with the substrate, the two-dimensional crystal material (25) is tightly adhered to the Si/SiO by virtue of Van der Waals force2The upper surface of the substrate is moved in the Z-axis direction of the displacement module (2) of the multifunctional system, so that the multifunctional conversion sheet and PDMS (26) and Si/SiO fixed below the multifunctional conversion sheet are used2The two-dimensional crystalline material (25) on the substrate is separated.
9. The method for preparing a two-dimensional material micro-nano device according to claim 8, wherein the Si/SiO after transferring the two-dimensional crystal material (25)2The substrate is continuously fixed on the substrate fixing and rotating module (5) of the multifunctional system, only the multifunctional conversion sheet (18) is replaced, and the deposition mask plate (28) is fixed below the multifunctional conversion sheet (18); under the observation of a microscope, adjusting a displacement module (2) of the multifunctional system; and the levelness or inclination angle of the multifunctional conversion sheet (18); adjusting a relative angle between a deposition mask plate (28) and a two-dimensional crystal material (25) by using a substrate fixing and rotating module (5); adjusting the phase between a deposition mask (28) and a two-dimensional crystal material (25)The position and distance are aligned, and the deposition mask (28) is brought into close proximity with the two-dimensional crystalline material (25) until the two are in intimate contact; placing the whole system into a metal deposition device for metal electrode deposition; after the metal deposition is finished, the displacement module (2) of the multifunctional system is moved along the Z-axis direction, so that the multifunctional conversion sheet (18) and the deposition mask (28) and Si/SiO fixed below the multifunctional conversion sheet2The two-dimensional crystalline material (25) on the substrate is separated.
CN202111009419.XA 2021-08-31 2021-08-31 Multifunctional system and method for preparing two-dimensional material micro-nano device Pending CN113716520A (en)

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JPH10270353A (en) * 1997-03-27 1998-10-09 Hoya Corp Transfer mask, its manufacture, and pattern transferring method
US20090130427A1 (en) * 2007-10-22 2009-05-21 The Regents Of The University Of California Nanomaterial facilitated laser transfer
CN204390749U (en) * 2014-12-31 2015-06-10 广州隆润光学仪器有限公司 A kind of high precision micro-positioning regulators structure
US20170320234A1 (en) * 2016-05-06 2017-11-09 The Provost, Fellows, Foundation Scholars, & the Other Members of Board, of The College of the Holy Method for structuring, patterning, and actuating devices using two-dimensional materials
CN109065493A (en) * 2018-09-10 2018-12-21 复旦大学 A kind of device for assisting hard vias masks version and sample to be precisely aligned
CN109052315A (en) * 2018-08-01 2018-12-21 南方科技大学 A kind of transfer system of two-dimensional material
CN111312594A (en) * 2020-03-10 2020-06-19 西北工业大学 Two-dimensional material transfer assembly system and method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10270353A (en) * 1997-03-27 1998-10-09 Hoya Corp Transfer mask, its manufacture, and pattern transferring method
US20090130427A1 (en) * 2007-10-22 2009-05-21 The Regents Of The University Of California Nanomaterial facilitated laser transfer
CN204390749U (en) * 2014-12-31 2015-06-10 广州隆润光学仪器有限公司 A kind of high precision micro-positioning regulators structure
US20170320234A1 (en) * 2016-05-06 2017-11-09 The Provost, Fellows, Foundation Scholars, & the Other Members of Board, of The College of the Holy Method for structuring, patterning, and actuating devices using two-dimensional materials
CN109052315A (en) * 2018-08-01 2018-12-21 南方科技大学 A kind of transfer system of two-dimensional material
CN109065493A (en) * 2018-09-10 2018-12-21 复旦大学 A kind of device for assisting hard vias masks version and sample to be precisely aligned
CN111312594A (en) * 2020-03-10 2020-06-19 西北工业大学 Two-dimensional material transfer assembly system and method

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