CN109911846A - A kind of device accurately shifted for two-dimensional material - Google Patents
A kind of device accurately shifted for two-dimensional material Download PDFInfo
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- CN109911846A CN109911846A CN201711315103.7A CN201711315103A CN109911846A CN 109911846 A CN109911846 A CN 109911846A CN 201711315103 A CN201711315103 A CN 201711315103A CN 109911846 A CN109911846 A CN 109911846A
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Abstract
The invention discloses a kind of devices accurately shifted for two-dimensional material, it include: optical microscopy, substrate locating platform and sample positioning platform, substrate locating platform includes: the first three-dimensional precise translation stage and the heated at constant temperature platform that is packed on the first three-dimensional precise translation stage, and a substrate is placed on heated at constant temperature platform；Optical microscopy is located at the top of substrate locating platform；Sample positioning platform includes: glass slide clamper, accurate oscillating platform, precision rotation platform and the second three-dimensional precise translation stage, second three-dimensional precise translation stage is located at the side of the first three-dimensional precise translation stage, precision rotation platform and accurate oscillating platform are packed in from bottom to up on the second three-dimensional precise translation stage, and glass slide clamper is packed on accurate oscillating platform.The device of the invention makes the selection and transfer process of sample, all completes in the visual field of optical microscopy, and manipulation accuracy is high.
Description
Technical field
The invention belongs to precision instrument technical fields, in particular to a kind of dress accurately shifted for two-dimensional material
It sets.
Background technique
Two-dimensional material refer to electronics only can on the non-nanosize of two dimensions free movement material.It can be by single layer
Or several atomic layer compositions, electronics only move in layer.This kind of material passes through stronger chemical bonding in atom layer plane,
And it is then coupled by weaker Van der Waals force between atomic layer.It is more better than traditional material that unique structure has two-dimensional material
Kind physical property, all has broad application prospects in fields such as interface science, nano electron device, lubriation materials.Common
Two-dimensional material has graphene, black phosphorus, molybdenum disulfide and two tungsten selenides etc..Wherein most representative is graphene, head in 2004
Secondary separated from graphite by Gaim and Novoselov obtains, and then because of its excellent machinery, electric property, causes section quickly
The extensive concern of educational circles.In the research of two-dimensional material, the synthesis and assembling of material are material property research and element manufacturing
Premise.Up to the present, it is applied to prepare single layer, multi-layer nano two-dimensional material there are many method.Under laboratory condition
Most common method is mechanical stripping method, the advantages of this method be it is easy to operate, it is at low cost, and the sample surfaces obtained are clean
Completely, sample quality is high, the disadvantage is that the size of sample and thickness are difficult to control accurately, randomness is big.Its operating process can be divided into
Three steps: one, separating two-dimensional material thin slice using adhesive tape from bulk material, and then two-dimentional material is thinned in multiple doubling adhesive tape
Material；Two, the two-dimensional material on adhesive tape is transferred to dimethyl silicone polymer (Polydimethylsiloxane, PDMS) film
On, and bond the another side of PDMS film and glass slide；Three, qualified two-dimensional material is chosen from PDMS film, so
The two-dimensional material chosen is transferred to the designated position of substrate afterwards.In above-mentioned steps, third step is the most complicated and crucial, third step
Detailed operating process are as follows: be attached on the two-dimensional material on PDMS film by optical microphotograph sem observation first, be screened out from it
Qualified sample；Then the top that the PDMS film for being stained with target material is placed on substrate by glass slide, and and base are moved
The target position at bottom is aligned, downward push glass slide, until PDMS film and substrate bond, keeps the two position constant, heating
Substrate a few minutes clock time is to reduce PDMS viscosity；Glass slide is finally lifted, two-dimensional material is just adsorbed onto the surface of substrate.
To realize the function in step 3, people have developed corresponding material transfer device.But existing transfer device
Mostly laboratory is temporarily built, and design and structure will lead to operating difficulties, transferring position there are in place of unreasonable, deficient improve
The problems such as precision is low.Existing transfer device is clamped glass slide one end using spring clip, and makes be stained with PDMS film one
End is hanging, when the one end for being stained with PDMS film on glass slide is pressed in substrate, since the chucking power of spring clip is insufficient, and meeting
It causes to press insufficient, is adsorbed in substrate so that two-dimensional material is more difficult.In addition to this, existing transfer device is in mobile example
When, positioning accuracy is low, poor repeatability, needs complicated operation to correct the position error of sample.
In addition, PDMS film and substrate are generally placed in parallel by existing apparatus, two on PDMS film during the pressing process
Dimension material can contact simultaneously with substrate, be easy to produce bubble, influence transfer effect, and it is this be placed in parallel mode and be unable to control connect
The size of contacting surface can only allow PDMS film all to contact with the part that substrate is overlapped, this will cause two except excessive target
Dimension material is transferred in substrate, is unfavorable for the follow-up study to target two-dimensional material.
In addition to this, requirement of the existing transfer device to substrate is also relatively stringenter, when substrate has certain inclination or surface
When having larger protrusion, the transfer for completing two-dimensional material will be unable to.
Summary of the invention
In view of the deficiencies of the prior art, the purpose of the present invention is to provide a kind of dresses accurately shifted for two-dimensional material
It sets, which uses the selection and transfer process of optical microphotograph sem observation and guiding material.
For this purpose, technical scheme is as follows:
A kind of device accurately shifted for two-dimensional material, comprising: optical microscopy, substrate locating platform and Sample location
Platform, wherein
The substrate locating platform includes: the first three-dimensional precise translation stage and is packed in the first three-dimensional precise translation stage
On heated at constant temperature platform, be placed with a substrate on the heated at constant temperature platform；
The optical microscopy is located at the top of the substrate locating platform, for observing the substrate；
The sample positioning platform includes: glass slide clamper, accurate oscillating platform, precision rotation platform and the second three-dimensional essence
Close translation stage, the second three-dimensional precise translation stage are located at the side of the first three-dimensional precise translation stage, the precision rotation
Platform and accurate oscillating platform are packed in from bottom to up on the second three-dimensional precise translation stage, and the glass slide clamper is packed in
On the precision oscillating platform, wherein
The glass slide clamper includes: rotating arm and compact heap, the rotating arm close to the optical microscopy one
End is formed with a cavity, is formed with a through-hole on the top of the cavity, and the compact heap is located in the cavity, a high head rolling
The lower end of flower screw stretches in the cavity from the through-hole and is fixedly mounted with the compact heap, the high head milled screw and institute
The inner thread connection of through-hole is stated, the cavity is formed with opening far from the side of the accurate oscillating platform, so that glass slide
One end stretch in cavity from the opening and be fixedly mounted with by compact heap compression, the lower surface of the glass slide other side is viscous
It is connected to PDMS film；
The precision oscillating platform is for driving the glass slide to tilt down, so that the glass slide and horizontal plane form one
5~10 ° of angle；
The precision rotation platform is for driving the rotating arm to rotate in the horizontal direction.
In the above-mentioned technical solutions, the substrate locating platform and sample positioning platform are packed on a pedestal.
In the above-mentioned technical solutions, the substrate is bonded on the heated at constant temperature platform by High temperature-resistanadhesive adhesive tape.
In the above-mentioned technical solutions, one first connector is fixed between the accurate oscillating platform and precision rotation platform.
In the above-mentioned technical solutions, one second is fixed between the precision rotation platform and the second three-dimensional precise translation stage
Connector.
In the above-mentioned technical solutions, a rubber pad is installed under the bottom end of the compact heap.
In the above-mentioned technical solutions, it is formed with lightening hole on the rotating arm, for mitigating the weight of the rotating arm.
Compared with the prior art, the device of the invention has the beneficial effect that
1. the selection and transfer process of sample, are all completed in the visual field of optical microscopy, manipulation accuracy is high.
2. glass slide installation and removal are convenient, firm grip.
3. selecting precision rotation platform, is provided when rotating sample and accurately turn to positioning.
4. accurate oscillating table provides sample being angled downward relative to substrate, sample is enable to be more easier and accurately shift
To the specified region of sample, and expand the scope of application to substrate.
5. compact-sized, mechanical wear is small, and long-time service still ensures that higher accuracy.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the device that the present invention is accurately shifted for two-dimensional material；
Fig. 2 is the partial enlarged view in Fig. 1 in circular frame；
Fig. 3 is the schematic perspective view for the device that the present invention is accurately shifted for two-dimensional material；
Fig. 4 is the schematic perspective view of glass slide clamper in apparatus of the present invention；
Fig. 5 is the cross-sectional view of glass slide clamper in apparatus of the present invention.
Wherein, 1 is optical microscopy, and 2 be substrate locating platform, and 2-1 is the first three-dimensional precise translation stage, and 2-2 is constant temperature
Warm table, 3 be sample positioning platform, and 3-1 is glass slide clamper, and 3-1-1 is rotating arm, and 3-1-2 is compact heap, and 3-1-3 is
High head milled screw, 3-1-4 are opening, and 3-2 is accurate oscillating platform, and 3-3 is the first connector, and 3-4 is precision rotation platform, 3-
5 be the second connector, and 3-6 is the second three-dimensional precise translation stage, and 4 be pedestal, and 5 be PDMS film, and 6 be glass slide, and 7 be substrate.
Specific embodiment
In a specific embodiment of the invention, optical microscopy 1 uses NAVITAR company ZOOM7000 compound lens mould
Block and the long reach object lens MPlan Apo 20 of three rich companies ×, operating distance 20mm, amplification factor 20.
First three-dimensional precise translation stage 2-1 uses the XYZ manual platform TSD-1005C, X, Y direction of Sigma Corporation
Stroke is ± 12.5mm, and Z-direction stroke is ± 10mm, and displacement resolving power is 2.5um.
Heated at constant temperature platform 2-2 uses the split type digital display heated at constant temperature platform of ANTAIX company, temperature range are as follows: 0~
250 DEG C, temperature resolving power is 0.1 DEG C.
Second three-dimensional precise translation stage 3-6 uses the XYZ manual platform TSD-655C, X, Y direction of Sigma Corporation
Stroke is ± 6.5mm, and Z-direction stroke is ± 5mm, and displacement resolving power is 2.5um.
Precision rotation platform 3-4 uses the horizontal revolving stage KSP-606M of Sigma Corporation, and stroke is 360 °, angular resolution
It is 55.8 ".
Accurate oscillating platform 3-2 uses the oscillating platform GOHT-40A-S of Sigma Corporation, and angular range is ± 11 °,
Screw pitch is 0.9 °.
Technical solution of the present invention is further illustrated in the following with reference to the drawings and specific embodiments.
As shown in Fig. 1~5, comprising: optical microscopy 1, substrate locating platform 2 and sample positioning platform 3, wherein substrate
Locating platform 2 and sample positioning platform 3 are packed on a pedestal 4.
Substrate locating platform 2 includes: the first three-dimensional precise translation stage 2-1 and is packed in the first three-dimensional precise translation stage
Heated at constant temperature platform 2-2 on 2-1, is bonded with a substrate 7 by High temperature-resistanadhesive adhesive tape on heated at constant temperature platform 2-2；
Optical microscopy 1 is located at the top of substrate locating platform 2, for observing substrate 7；Wherein, the first three-dimensional fine work is flat
Moving stage drives heated at constant temperature platform and substrate thereon to move relative to optical microscopy 1, realizes observation, positioning and mesh to substrate
The functions such as the selection of cursor position.
Sample positioning platform 3 includes: glass slide clamper 3-1, accurate oscillating platform 3-2, precision rotation platform 3-4 and second
Three-dimensional precise translation stage 3-6, the second three-dimensional precise translation stage 3-6 are located at the side of the first three-dimensional precise translation stage 2-1, precision rotation
Turntable 3-4 and precision oscillating platform 3-2 are packed in from bottom to up on the second three-dimensional precise translation stage 3-6, glass slide clamper 3-1
It is packed on accurate oscillating platform 3-2, the second three-dimensional precise translation stage drives precision rotation platform, accurate oscillating table and glass slide folder
Holder is moved relative to optical microscopy 1, realizes the functions such as the observation, screening and positioning of sample.Wherein, glass slide clamper 3-
1 includes: rotating arm 3-1-1 and compact heap 3-1-2, and rotating arm 3-1-1 is formed with a cavity close to one end of optical microscopy 1,
It is formed with a through-hole on the top of cavity, compact heap 3-1-2 is within the cavity, and the lower end of a height milled screw 3-1-3 is from logical
Hole stretches in cavity and is fixedly mounted with compact heap 3-1-2, the inner thread connection of high head milled screw 3-1-3 and through-hole, cavity
Side far from precision oscillating platform 3-2 is formed with opening 3-1-4, so that one end of glass slide 6 stretches to chamber from opening 3-1-4
In vivo and be compacted block 3-1-2 compression be fixedly mounted with, the lower surface bonds of 6 other side of glass slide have PDMS film 5.
Accurate oscillating platform 3-2 for driving glass slide 6 to tilt down so that the glass slide 6 and horizontal plane form 1~
10 ° of angle can accurately adjust inclination angle when sample and substrate on PDMS5 film contact.Precision rotation platform 3-4 is used for
Driving rotating arm 3-1-1 rotates in the horizontal direction, can be accurately by sample into and out the visual field of optical microscopy 1.
When glass slide is installed, high head milled screw is unclamped first, moves up compact heap, glass slide easily can not had into sample
Between one end insertion compact heap of product and the upper surface of cavity lower end, high head milled screw is then tightened, compact heap is moved down, it will
Glass slide is fixedly pressed against in rotating arm.The installation or removal of glass slide can be completed by rotating high head milled screw.
Preferably, being equipped with a rubber pad under the bottom end of compact heap 3-1-2, rubber pad can effectively prevent glass slide 6
It is pressed from both sides bad and is scratched.
Preferably, being formed with lightening hole (not shown) on rotating arm 3-1-1, mechanical performance can not influenced
Under conditions of effectively reduce the weight of rotating arm 3-1-1.
Preferably, being fixed with one first connector 3-3 between precision oscillating platform 3-2 and precision rotation platform 3-4.
Preferably, being fixed with one second connector between precision rotation platform 3-4 and the second three-dimensional precise translation stage 3-6
3-5。
The application method of apparatus of the present invention, comprising:
Step 1, the PDMS film for being stained with two-dimensional material is sticked to one end of glass slide, then consolidates the other end of glass slide
It is scheduled on glass slide clamper, and makes to be stained with the one of two-dimensional material down.
Precision rotation platform horizontally rotates, so that PDMS film enters the visual field of optical microscopy 1.Accurate oscillating table is adjusted,
Make sample levels, to facilitate screening.The second three-dimensional precise translation stage is adjusted, suitable material is found on PDMS film, after finding
Rotation precision rotation platform is moved out visual field.
Step 2, the first three-dimensional precise translation stage is controlled, the substrate on heated at constant temperature platform is made to enter the view of optical microscopy
, select in substrate suitable position as goal displacement position and adjusts it and arrive field of view center.It is flat to control the first three-dimensional precise
Moving stage, makes the downward out focal plane of substrate, and horizontal direction remains stationary.
Step 3, precision rotation platform is rotated, so that sample (two-dimensional material) comes back under visual field and adjusts it into visual field
The heart, adjusting accurate oscillating table makes sample and substrate 4 have 5~10 ° or so is angled downward.The first three-dimensional precise is controlled later
Translation stage slowly rises, and substrate is made to move closer to sample.It will appear substrate under optical microscopy visual field to be overlapped with the fuzzy of sample
Picture, and start the bonding boundary for PDMS film and substrate occur.Boundary can be gradually extended to that the sample chosen is completely covered, at this time
Stop the lifting of the first three-dimensional precise translation stage and it is made to keep this height.
Step 4, heated at constant temperature platform is opened, is heated substrate five minutes or so at 50~60 DEG C, to reduce PDMS film
Viscosity.Lift glass slide later, and rotated out of the visual field of optical microscopy, then observe substrate on sample whether by
Success is adsorbed.
Apparatus of the present invention are compact-sized, under the supplementary observation of optical microscopy, can efficiently complete the essence of two-dimensional material
Really transfer.
Illustrative description has been done to the present invention above, it should explanation, the case where not departing from core of the invention
Under, any simple deformation, modification or other skilled in the art can not spend the equivalent replacement of creative work equal
Fall into protection scope of the present invention.
Claims (7)
1. a kind of device accurately shifted for two-dimensional material characterized by comprising optical microscopy (1), substrate positioning are flat
Platform (2) and sample positioning platform (3), wherein
The substrate locating platform (2) includes: the first three-dimensional precise translation stage (2-1) and to be packed in first three-dimensional precise flat
Heated at constant temperature platform (2-2) in moving stage (2-1) is placed with a substrate (7) on the heated at constant temperature platform (2-2)；
The optical microscopy (1) is located at the top of the substrate locating platform (2), for observing the substrate (7)；
The sample positioning platform (3) includes: glass slide clamper (3-1), accurate oscillating platform (3-2), precision rotation platform (3-
4) it is located at first three-dimensional precise with the second three-dimensional precise translation stage (3-6), the second three-dimensional precise translation stage (3-6) and puts down
The side of moving stage (2-1), the precision rotation platform (3-4) and accurate oscillating platform (3-2) are packed in described second from bottom to up
On three-dimensional precise translation stage (3-6), the glass slide clamper (3-1) is packed on the accurate oscillating platform (3-2),
In,
The glass slide clamper (3-1) includes: rotating arm (3-1-1) and compact heap (3-1-2), the rotating arm (3-1-1)
One end close to the optical microscopy (1) is formed with a cavity, is formed with a through-hole, the compression on the top of the cavity
Block (3-1-2) is located in the cavity, and the lower end of a high milled screw (3-1-3) stretches in the cavity from the through-hole
And be fixedly mounted with the compact heap (3-1-2), the high head milled screw (3-1-3) connect with the inner thread of the through-hole, institute
State cavity and be formed with opening (3-1-4) far from the side of the accurate oscillating platform (3-2) so that one end of glass slide (6) from
The opening (3-1-4) stretches in cavity and is fixedly mounted with by the compact heap (3-1-2) compression, glass slide (6) other side
Lower surface bonds have PDMS film (5)；
The precision oscillating platform (3-2) is for driving the glass slide (6) to tilt down, so that the glass slide (6) and level
Face forms one 5~10 ° of angle；
The precision rotation platform (3-4) is for driving the rotating arm (3-1-1) to rotate in the horizontal direction.
2. the apparatus according to claim 1, which is characterized in that the substrate locating platform (2) and sample positioning platform (3)
It is packed on a pedestal (4).
3. the apparatus of claim 2, which is characterized in that the substrate (7) is bonded in described by High temperature-resistanadhesive adhesive tape
On heated at constant temperature platform (2-2).
4. device according to claim 3, which is characterized in that the precision oscillating platform (3-2) and precision rotation platform (3-
4) one first connector (3-3) is fixed between.
5. device according to claim 4, which is characterized in that in the precision rotation platform (3-4) and the second three-dimensional precise
One second connector (3-5) is fixed between translation stage (3-6).
6. device according to claim 5, which is characterized in that be equipped with one under the bottom end of the compact heap (3-1-2)
Rubber pad.
7. device according to claim 6, which is characterized in that be formed with lightening hole on the rotating arm (3-1-1), use
In the weight for mitigating the rotating arm (3-1-1).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711315103.7A CN109911846A (en) | 2017-12-12 | 2017-12-12 | A kind of device accurately shifted for two-dimensional material |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711315103.7A CN109911846A (en) | 2017-12-12 | 2017-12-12 | A kind of device accurately shifted for two-dimensional material |
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ID=66957336
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| CN201711315103.7A Pending CN109911846A (en) | 2017-12-12 | 2017-12-12 | A kind of device accurately shifted for two-dimensional material |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110470441A (en) * | 2019-08-13 | 2019-11-19 | 天津大学 | The methods and applications of force application structure and the normal direction elastic constant based on its measurement atomic force microscope probe |
| CN110470442A (en) * | 2019-08-13 | 2019-11-19 | 天津大学 | The lossless caliberating device of normal direction elastic constant needle point and application method of atomic force microscope probe |
| CN111717887A (en) * | 2020-07-01 | 2020-09-29 | 福建师范大学 | Micron-sized fixed-point positioning nano material transfer method |
| CN112578669A (en) * | 2020-11-27 | 2021-03-30 | 西安交通大学 | Two-dimensional material transfer method and intelligent transfer system |
| CN114171362A (en) * | 2022-02-09 | 2022-03-11 | 之江实验室 | Particle transfer device and application |
| CN114225839A (en) * | 2022-01-06 | 2022-03-25 | 南京工业大学 | Method for preparing specific corner two-dimensional heterojunction material |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110470441A (en) * | 2019-08-13 | 2019-11-19 | 天津大学 | The methods and applications of force application structure and the normal direction elastic constant based on its measurement atomic force microscope probe |
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| CN114225839A (en) * | 2022-01-06 | 2022-03-25 | 南京工业大学 | Method for preparing specific corner two-dimensional heterojunction material |
| CN114171362A (en) * | 2022-02-09 | 2022-03-11 | 之江实验室 | Particle transfer device and application |
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