CN113667940B - 一种ar膜、af膜镀膜方法 - Google Patents

一种ar膜、af膜镀膜方法 Download PDF

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CN113667940B
CN113667940B CN202110778726.8A CN202110778726A CN113667940B CN 113667940 B CN113667940 B CN 113667940B CN 202110778726 A CN202110778726 A CN 202110778726A CN 113667940 B CN113667940 B CN 113667940B
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周伟杰
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Abstract

本发明公开了一种AR膜、AF膜镀膜方法,所述镀膜方法采用两个机台,在第一机台镀完AR膜以及保护用AF膜,在第二机台镀完AF膜,其中在第一机台镀保护用AF膜时,采用低浓度AF药液,在第二机台镀AF膜时,采用高浓度AF药液。本发明镀膜方法采用两机台,先在第一机台镀AR,同时在表面镀一层保护用AF膜;然后下料,进入第二机台镀AF膜。保护用AF膜采用低浓度AF镀制,具有一定的抗污效果但成本不贵,在第一机台向第二机台转移过程中起到保护AR膜不受污染的作用,第二机台被镀产品装载量大,利用率高,这种镀膜方法可以大大降低AF的成本,从而降低产品的镀膜成本,提高市场竞争力。

Description

一种AR膜、AF膜镀膜方法
技术领域
本发明属于镀膜技术领域,具体涉及一种AR膜、AF膜镀膜方法。
背景技术
多层光学减反薄膜(AR膜)广泛用于各行各业,比如用于显示触控盖板:在表面镀多层光学薄膜(高低折射率交替堆叠的膜层,7~10层,厚度在200~500nm之间),可以实现表面低于1%的反射率。同时,抗污防指纹涂层(AF膜)也需要镀在AR膜表面,以实现比较好的抗污防指纹效果。目前,常规的AR膜、AF膜制作方法,是在同一个真空镀膜机内先镀完AR膜,再镀制AF膜。虽然AR膜、AF膜在同一台镀膜内完成,效率高;但是AF膜往往需要采用昂贵的原液(20%-25%固含量的AF液体),并且装载的被镀产品数量较少,在镀制过程中,容易造成AF材料的浪费,AF材料利用率较低,导致产品的AF材料成本非常高。
发明内容
本发明需要解决的技术问题是提供一种低成本的AR膜、AF膜镀膜方法。
为解决上述问题,本发明所采取的技术方案是:
一种AR膜、AF膜镀膜方法,所述镀膜方法采用两个机台,在第一机台镀完AR膜以及保护用AF膜,在第二机台镀完AF膜,其中在第一机台镀保护用AF膜时,采用低浓度AF药液,在第二机台镀AF膜时,采用高浓度AF药液。
进一步的,在第二机台镀AF膜时,先利用第二机台的等离子破坏第一机台镀制的保护用AF膜,然后再镀AF膜。
进一步的,在第一机台镀保护用AF膜时,所述保护用AF膜镀到水滴角大于90°即可。
进一步的,所述低浓度AF药液为AF药液原液经4-8倍稀释后所得,所述AF药液原液为20%-25%固含量的AF药液。
进一步的,所述高浓度AF药液为20%-25%固含量的AF药液。
进一步的,所述第一机台为蒸发溅射两用真空镀膜机,兼具真空溅射镀膜功能以及真空蒸发AF镀膜功能。
进一步的,所述第二机台为设有离子源的AF镀膜机。
更进一步的,所述第二机台的被镀产品装载量是第一机台的5-7.5倍,第二机台AF用量为第一机台的两倍以下。
更进一步的,所述第二机台镀制的AF膜的均匀性和光学要求远低于第一机台。
优选的,所述AR膜为7-10层高低折射率交替堆叠的膜层,其与AF膜相接的膜层为低折射率膜层,所述AF膜层厚度为10-15nm。
采用上述技术方案所产生的有益效果在于:
本发明镀膜方法采用两机台,先在第一机台镀AR,同时在表面镀一层保护用AF膜;然后下料,进入第二机台镀AF膜。保护用AF膜采用浓度AF镀制,具有一定的抗污效果但成本不贵,在第一机台向第二机台转移过程中起到保护AR膜不受污染的作用,第二机台被镀产品装载量大,但AF材料用量小,利用率高,这种镀膜方法可以大大降低AF的成本,从而降低产品的镀膜成本,提高市场竞争力。
具体实施方式
下面对本发明做进一步详细描述:
本发明是一种AR、AF膜的镀膜方法,与目前常用的在同一真空镀膜机内完成AR、AF镀膜相比,本发明为了降低产品成本,提高市场竞争力,采用AR、AF分开在不同镀膜机制作的方法。先在第一机台镀完AR膜以及保护用AF膜,再在第二机台镀完AF膜。
术语说明:
AR:anti reflection,中文意思为抗反射增透。
AF:anti fingerprint,中文意思为抗指纹。
实施例1
本实施例的镀膜方法采用两个机台在第一机台镀AR膜以及保护用AF膜,在第二机台镀AF膜,即可完成AR、AF的镀制。其中保护用AF膜是在AR膜镀制完成后镀制的,之所以镀制保护用AF膜是为了防止被镀产品由第一机台向第二机台转移时被污染。由于采用两个机台,被镀产品在第一机台镀完AR后,需要转移到第二机台镀制AF,在被镀产品转移到第二机台的时候,一系列的搬迁动作很容易污染到刚刚镀制完成的AR膜,进而导致生产良率不高。为了解决这个问题,本实施例在第一机台镀完AR膜后,还要继续镀保护用AF膜,在镀制该保护用AF膜时,AF药液的浓度可以稀释到一定程度后镀制,即采用低浓度AF药液镀制,所述低浓度AF药液为AF药液原液经4倍稀释后所得,所述AF药液原液为20%-25%固含量的AF药液。该保护用AF膜镀制时只要镀到水滴角大于90°即可,这样在镀制保护用AF膜时,用到的AF材料很少,成本也很低。但该保护用AF膜,在搬迁过程中,却能起到表面抗污作用,保护AR膜不被污染,进而大大提升产品良率。
在本实施例中,第二机台的被镀产品装载量是第一机台的5倍,在镀制时,采用高浓度AF药液,所述高浓度AF药液为20%-25%固含量的AF药液。虽然在第二机台镀制时,采用高浓度AF药液,但其AF用量却仅为第一机台的两倍。AF利用率高,单个被镀产品的AF用量显著减少(与同一机台镀制同样厚度相比),降低了材料成本,进而使被镀产品成本降低。
为了满足镀制要求,本实施例所述的第一机台为蒸发溅射两用真空镀膜机,兼具真空溅射镀膜功能以及真空蒸发镀膜功能。所述的第二机台为设有离子源的AF镀膜机。并且所述第二机台镀制AF膜的均匀性和光学要求远低于第一机台。ICP离子源用于生产等离子,在镀制AF膜之前,先利用第二机台的等离子破坏第一机台镀制的保护用AF膜,然后再镀AF膜。
本实施例镀制的AR膜为7-10层高低折射率交替堆叠的膜层,其与AF膜相接的膜层为低折射率膜层,AF膜层厚度为1-15nm。与采用同一机台镀制AR膜、AF膜的方法相比,本发明单个被镀产品的AF用量减少了40%,成本降低40%。
实施例2
本实施例与实施例1不同的是:所述低浓度AF药液为AF药液原液经6倍稀释后所得,第二机台的被镀产品装载量是第一机台的5.5倍,在镀制时,采用高浓度AF药液,所述高浓度AF药液为20%-25%固含量的AF药液。其AF用量却仅为第一机台的2倍。与采用同一机台镀制AR膜、AF膜的方法相比,本发明单个被镀产品的AF用量减少了55%,成本降低55%。
实施例3
本实施例与实施例1不同的是:所述低浓度AF药液为AF药液原液经8倍稀释后所得,第二机台的被镀产品装载量是第一机台的7.5倍,在镀制时,采用高浓度AF药液,所述高浓度AF药液为20%-25%固含量的AF药液。其AF用量却仅为第一机台的2倍。与采用同一机台镀制AR膜、AF膜的方法相比,本发明单个被镀产品的AF用量减少了60%,成本降低60%。

Claims (7)

1.一种AR膜、AF膜镀膜方法,其特征在于: 所述镀膜方法采用两个机台,在第一机台镀完AR膜以及保护用AF膜,在第二机台镀完AF膜,其中在第一机台镀保护用AF膜时,采用低浓度AF药液,在第二机台镀AF膜时,采用高浓度AF药液;
所述第二机台为设有离子源的AF镀膜机;
所述第二机台的被镀产品装载量是第一机台的5-7.5倍,第二机台AF用量为第一机台的两倍以下;
所述第二机台镀制的AF膜的均匀性和光学要求远低于第一机台。
2.根据权利要求1所述的一种AR膜、AF膜镀膜方法,其特征在于:在第二机台镀AF膜时,先利用第二机台的等离子破坏第一机台镀制的保护用AF膜,然后再镀AF膜。
3.根据权利要求2所述的一种AR膜、AF膜镀膜方法,其特征在于:在第一机台镀保护用AF膜时,所述保护用AF膜镀到水滴角大于90°即可。
4.根据权利要求1-3任一项所述的一种AR膜、AF膜镀膜方法,其特征在于:所述低浓度AF药液为AF药液原液经4-8倍稀释后所得,所述AF药液原液为20%-25%固含量的AF药液。
5.根据权利要求1-3任一项所述的一种AR膜、AF膜镀膜方法,其特征在于:所述高浓度AF药液为20%-25%固含量的AF药液。
6.根据权利要求1-3任一项所述的一种AR膜、AF膜镀膜方法,其特征在于:所述第一机台为蒸发溅射两用真空镀膜机,兼具真空溅射镀膜功能以及真空蒸发AF镀膜功能。
7.根据权利要求1所述的一种AR膜、AF膜镀膜方法,其特征在于:所述AR膜为7-10层高低折射率交替堆叠的膜层,其与AF膜相接的膜层为低折射率膜层,所述AF膜层厚度为10-15nm。
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JP4595354B2 (ja) * 2004-03-05 2010-12-08 旭硝子株式会社 光学多層膜の製造方法
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