CN113493097A - Loading and unloading device, loading method and unloading method for base materials - Google Patents

Loading and unloading device, loading method and unloading method for base materials Download PDF

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Publication number
CN113493097A
CN113493097A CN202110903022.9A CN202110903022A CN113493097A CN 113493097 A CN113493097 A CN 113493097A CN 202110903022 A CN202110903022 A CN 202110903022A CN 113493097 A CN113493097 A CN 113493097A
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Prior art keywords
area
substrate
processed
bearing device
transfer processing
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CN202110903022.9A
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Chinese (zh)
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CN113493097B (en
Inventor
吴凝香
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Chaojie Semiconductor Equipment Shenzhen Co ltd
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Chaojie Semiconductor Equipment Shenzhen Co ltd
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Priority to CN202110903022.9A priority Critical patent/CN113493097B/en
Publication of CN113493097A publication Critical patent/CN113493097A/en
Priority to TW110145127A priority patent/TWI814161B/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/88—Separating or stopping elements, e.g. fingers
    • B65G47/8876—Separating or stopping elements, e.g. fingers with at least two stops acting as gates
    • B65G47/8884—Stops acting asynchronously, e.g. one stop open, next one closed or the opposite
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Abstract

The invention relates to the technical field of substrate conveying, in particular to a loading and unloading device for a substrate, which comprises a conveying device, a first bearing device, a second bearing device, an upper plate area, a lower plate area, a first transfer processing area and a second transfer processing area, wherein the processing device comprises a loading area and a unloading area, the substrate to be processed is sequentially conveyed from the upper plate area to the loading area through the first transfer processing area by the first bearing device and the second bearing device for processing, and the processed substrate is sequentially conveyed from the unloading area to the lower plate area through the second transfer processing area by the first bearing device and the second bearing device. The invention also relates to a base material feeding method, and the feeding and discharging device adopting the base material. The invention also relates to a base material blanking method, and the base material loading and unloading device is adopted. When the first bearing device is moved out of the feeding area, the second bearing device can move to the feeding area, continuous feeding of the base materials is achieved, and waiting time is saved.

Description

Loading and unloading device, loading method and unloading method for base materials
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of substrate conveying, in particular to a loading and unloading device, a loading method and an unloading method for substrates.
[ background of the invention ]
In the conventional method for transporting substrates, the substrates are generally transported from the loading area to the processing device and from the processing device to the unloading area by the transport mechanism, and when the substrates are transported from the loading area to the processing device, the latter transport mechanism needs to be moved to the processing device after the former transport mechanism is moved from the processing device to the original position, so as to increase the waiting time of the substrates during the transportation process; similarly, when the substrate is transferred from the processing apparatus to the unloading area, the latter transfer mechanism needs to be moved to the unloading area for unloading processing after the former transfer mechanism is moved from the unloading area to the home position, and the waiting time of the substrate during the transfer process is also increased.
Therefore, the prior art is not sufficient and needs to be improved.
[ summary of the invention ]
The invention provides a loading and unloading device, a loading method and an unloading method for base materials, aiming at solving the technical problem that the waiting time of the base materials in the loading and unloading process is too long.
The technical scheme of the invention is to provide a loading and unloading device for a substrate, which comprises a conveying device, a first bearing device, a second bearing device, an upper plate area, a lower plate area, a first transfer processing area and a second transfer processing area, wherein the processing device comprises a loading area and a unloading area, the substrate to be processed is sequentially conveyed to the loading area from the upper plate area through the first transfer processing area by the first bearing device and the second bearing device for processing, and the processed substrate is sequentially conveyed to the lower plate area from the unloading area through the second transfer processing area by the first bearing device and the second bearing device.
The invention also provides a feeding method of the base material, which adopts the feeding and discharging device of the base material, and comprises the following steps:
step S11: the first bearing device is driven to the upper plate area by the conveying device and loads a first substrate to be processed;
step S12: the first bearing device is driven by the conveying device and conveys the first substrate to be processed to the first transfer processing area from the upper plate area, and the second bearing device is driven by the conveying device to the upper plate area and loads the second substrate to be processed;
step S13: the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the feeding area, and the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the upper plate area to the first transfer processing area;
step S14: the first bearing device is driven to the upper plate area by the conveying device, and the second bearing device is driven by the conveying device and conveys the second to-be-processed substrate to the feeding area from the first transfer processing area to finish one-time feeding.
Preferably, in step S12, the substrate loading and unloading device includes a first stopping mechanism, when the first carrier is carried by the conveyor and transports the first substrate to be processed from the loading area to the first transfer processing area, the first stopping mechanism is operated to prevent the second carrier from entering the first transfer processing area before the first carrier leaves the first transfer processing area.
Preferably, in step S13, when the first carrier is carried by the conveyor and transports the first substrate to be processed from the first intermediate transfer processing area to the loading area, the first stopping mechanism stops working, and the second carrier is released from being transported to the first intermediate transfer processing area.
Preferably, the first substrate to be processed is loaded to the first carrying device by being clamped or adsorbed by the first carrying device; and the second substrate to be processed is loaded to the second bearing device in a mode of being clamped or absorbed by the second bearing device.
Preferably, the first substrate to be processed and the second substrate to be processed are copper clad laminates or printed circuit boards.
The invention also provides a feeding method of the base material, which adopts the feeding and discharging device of the base material, and comprises the following steps:
step S21: the first bearing device is driven by the conveying device to the blanking area and loads the first processed substrate;
step S22: the first bearing device is driven by the conveying device and conveys the first processed base material to the second transfer processing area from the blanking area, and the second bearing device is driven by the conveying device to the blanking area and loads the second processed base material;
step S23: the first bearing device is driven by the conveying device and conveys the first processed substrate from the second transfer processing area to the lower plate area, and the second bearing device is driven by the conveying device and moves the second processed substrate from the lower plate area to the second transfer processing area;
step S24: the first bearing device is driven by the conveying device to the blanking area, and the second bearing device is driven by the conveying device and conveys the second processed substrate from the second transfer processing area to the lower plate area to finish primary blanking.
Preferably, in step S22, the substrate loading and unloading device includes a second stopping mechanism, and when the first carrier is carried by the conveyor and transports the first processed substrate from the loading area to the second transfer processing area, the second stopping mechanism is operated to prevent the second carrier from entering the second transfer processing area before the first carrier leaves the second transfer processing area.
Preferably, in step S23, the substrate loading and unloading device includes a third stopping mechanism, when the first carrier is driven by the conveyor and transports the first processed substrate from the second transfer processing area to the lower board area, the second stopping mechanism stops working to release the second carrier from being transported to the second transfer processing area, and the third stopping mechanism works to prevent the second carrier from entering the lower board area before the first carrier leaves the lower board area.
Preferably, in the step S24, when the first carrier is carried to the blanking region by the conveyor, the third stopping mechanism stops working, and the stop of the second carrier from being conveyed to the lower plate region is released.
Compared with the prior art, the loading and unloading device, the loading method and the unloading method for the base material have the following advantages:
when the first bearing device is moved out of the feeding area, the second bearing device can be moved to the feeding area, continuous feeding of the base material can be achieved without waiting for the first bearing device to move to the upper plate area, waiting time of the base material in the feeding process is saved, the base material processing efficiency is increased, and enterprise production benefits are enlarged.
When the first bearing device is moved out of the lower plate area, the second bearing device can be moved to the lower plate area, the base material can be continuously obtained without waiting for the first bearing device to move to the blanking area, the waiting time of the base material in the blanking process is saved, the total required time of the base material in the processing process is reduced, and the enterprise production benefit is favorably enlarged.
[ description of the drawings ]
FIG. 1 is a block diagram of a substrate loading and unloading apparatus and a substrate processing apparatus according to an embodiment of the present invention.
FIG. 2 is a schematic flow chart of a method for loading a substrate according to the present invention.
FIG. 3 is a schematic view of a specific process for blanking a substrate according to the present invention.
FIG. 4 is a schematic view of a substrate of the present invention during the loading and unloading process.
Description of reference numerals:
11. a first carrying device; 12. a second carrying device; 13. a conveying device; 15. a top plate region; 16. a lower plate region; 17. a first transfer processing area; 18. a second transfer processing area; 19. a processing device; 20. a feeding area; 21. a blanking area.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The terms "comprising" and "having," and any variations thereof, in the description and claims of this invention and the description of the above figures, are intended to cover non-exclusive inclusions. The terms "first," "second," and the like in the description and in the claims, or in the drawings, are used for distinguishing between different objects and not necessarily for describing a particular sequential order.
Referring to fig. 1, the present invention provides a loading and unloading apparatus for a substrate, for providing the substrate to a processing apparatus 19 for processing and retrieving the processed substrate, comprising a control portion (not shown), a conveying apparatus 13 electrically connected to the control portion, a first carrying apparatus 11, a second carrying apparatus 12, an upper board area 15, a lower board area 16, a first transfer processing area 17, and a second transfer processing area 18, wherein the processing apparatus 19 comprises a loading area 20 and a unloading area 21, the first carrying apparatus 11 and the second carrying apparatus 12 are respectively connected to the conveying apparatus 13 and can be driven by the conveying apparatus 13 to move, under the control of the control portion, the substrate to be processed is sequentially conveyed by the first carrying apparatus 11 and the second carrying apparatus 12 from the upper board area 15 to the loading area 17 through the first transfer processing area 17 for the processing apparatus 19 to process the substrate, the processed substrate is sequentially conveyed by the first carrying apparatus 11, the second carrying apparatus 12 to the loading area 20 through the first transfer processing area 17, and the processed substrate is processed by the first carrying apparatus 11, The second carrier 12 is sequentially transported from the blanking section 21 to the lower plate section 16 through the second intermediate processing section 18 under the control of the control section to complete the unloading of the substrate.
Furthermore, the loading and unloading device for the substrate further comprises a first stopping mechanism, a second stopping mechanism and a third stopping mechanism (not shown) which are electrically connected with the control part, the first stopping mechanism is arranged in the upper plate area 15, the second stopping mechanism is arranged in the blanking area 21, the third stopping mechanism is arranged in the second transfer processing area 18, and the first stopping mechanism and the second stopping mechanism are used for stopping the bearing devices positioned in the first stopping mechanism during working so as to prevent collision between the bearing devices.
Referring to fig. 2, further, the present invention provides a method for loading a substrate, which uses the loading and unloading apparatus for a substrate, including the following steps:
step S11: the first bearing device is driven to the upper plate area by the conveying device and loads a first substrate to be processed.
In this step, the first carrying device may assist the loading of the first substrate to be processed by an external device or a worker.
Step S12: the first bearing device is driven by the conveying device and conveys the first substrate to be processed to the first transfer processing area from the upper plate area, and the second bearing device is driven by the conveying device to the upper plate area and loads the second substrate to be processed.
Preferably, the first substrate to be processed and the second substrate to be processed are copper clad laminates or printed circuit boards, and can be specifically set according to the actual situation.
Preferably, the first substrate to be processed is loaded to the first carrying device by being clamped or adsorbed by the first carrying device; the second substrate to be processed is loaded to the second carrying device in a manner of being clamped or absorbed by the second carrying device. The first and second carrying devices may also be configured to carry the substrate by screwing, and the like, which may be set according to the actual situation.
In step S12, when the first carrier is carried by the conveyor and transports the first to-be-processed substrate from the loading area to the first transfer processing area, the first stopping mechanism is operated to stop the second carrier from entering the first transfer processing area before the first carrier leaves the first transfer processing area.
The arrangement of the first stopping mechanism can effectively prevent the possibility that the structure is damaged due to the contact between the second bearing device and the first bearing device, and is beneficial to prolonging the service life of the first bearing device and the service life of the second bearing device.
Step S13: the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the feeding area, and the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the upper plate area to the first transfer processing area.
In step S13, when the first carrier is carried by the conveyor and transports the first substrate to be processed from the first transfer processing area to the loading area, the first stopping mechanism stops working to release the stop of the second carrier from being transported to the first transfer processing area.
Step S14: the first bearing device is driven to the upper plate area by the conveying device, and the second bearing device is driven by the conveying device and conveys the second to-be-processed substrate to the feeding area from the first transfer processing area to finish one-time feeding.
Referring to fig. 3, further, the present invention provides a method for blanking a substrate, which uses the above-mentioned loading and unloading device for a substrate, and comprises the following steps:
step S21: the first bearing device is driven by the conveying device to the blanking area and loads the first processed substrate;
step S22: the first bearing device is driven by the conveying device and conveys the first processed base material to the second transfer processing area from the blanking area, and the second bearing device is driven by the conveying device to the blanking area and loads the second processed base material.
Preferably, the first processed substrate and the second processed substrate are copper clad laminates or printed circuit boards, and the first processed substrate and the second processed substrate can be arranged according to actual conditions.
Preferably, the first processed substrate is loaded to the first carrying device by being clamped or absorbed by the first carrying device; the second processed substrate is loaded to the second carrying device by being clamped or absorbed by the second carrying device. The first and second carrying devices may also be configured to carry the substrate by screwing, and the like, which may be set according to the actual situation.
In step S22, when the first carrier is carried by the conveyor and transports the first processed substrate from the feeding area to the second transfer area, the second stopping mechanism is operated to stop the second carrier from entering the second transfer area before the first carrier leaves the second transfer area.
The arrangement of the second stopping mechanism can effectively prevent the possibility that the structure is damaged due to the contact between the first bearing device and the second bearing device, and is beneficial to prolonging the service life of the first bearing device and the service life of the second bearing device.
Step S23: the first bearing device is driven by the conveying device and conveys the first processed substrate from the second transfer processing area to the lower plate area, and the second bearing device is driven by the conveying device and moves the second processed substrate from the lower plate area to the second transfer processing area.
Step S23 further includes the steps of:
in step S23, when the first carrier is driven by the conveyor and transports the first processed substrate from the second transfer processing area to the lower board area, the second stopping mechanism stops working to release the stop of the second carrier from being transported to the second transfer processing area, and the third stopping mechanism works to stop the second carrier from entering the lower board area before the first carrier leaves the lower board area.
Through the backstop effect of third backstop structure, can prevent effectively that first load bearing device and second from bearing the contact of device in lower plate district, be favorable to preventing first load bearing device and second and bear the probability that the device leads to damaging because of taking place the contact, be favorable to promoting life.
Step S24: the first bearing device is driven by the conveying device to the blanking area, and the second bearing device is driven by the conveying device and conveys the second processed substrate from the second transfer processing area to the lower plate area to finish primary blanking.
In step S24, when the first carrier is carried to the blanking region by the conveyor, the third stopping mechanism stops working, and the second carrier is released from being conveyed to the lower plate region.
Referring to fig. 4, when the loading and unloading device for the substrate of the present invention works through the loading method and the unloading method for the substrate, during loading: the first bearing device is driven by the conveying device to the upper plate area and loads a first substrate to be processed, then the first bearing device is conveyed to the first transfer processing area from the upper plate area, the second bearing device is driven by the conveying device to the upper plate area and loads a second substrate to be processed, the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the feeding area, then the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the upper plate area to the first transfer processing area, the first bearing device is driven by the conveying device to the upper plate area, the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the first transfer processing area to the feeding area, and one-time feeding is completed; the processing device is used for processing the base material to be processed in the feeding area, and the first bearing device and the second bearing device always bear the first base material to be processed and the second base material to be processed in the processing process; when blanking: the first bearing device is driven by the conveying device to the blanking area and loads a first processed substrate, then the first bearing device is driven by the conveying device and conveys the first processed substrate to the second transfer processing area from the blanking area, the second bearing device is driven by the conveying device to the blanking area and loads a second processed substrate, then the first bearing device is driven by the conveying device and conveys the first processed substrate to the lower plate area from the second transfer processing area, the second bearing device is driven by the conveying device and moves the second processed substrate to the second transfer processing area from the blanking area, finally the first bearing device is driven to the blanking area by the conveying device, the second bearing device is driven by the conveying device and conveys the second processed substrate to the lower plate area from the second transfer processing area, and one-time blanking is completed. The first bearing device and the second bearing device are driven by the conveying device to continuously carry out feeding and discharging operations on the processing device.
It can be understood that the first bearing device and the second bearing device are only used for distinguishing the sequence of loading and unloading, and are not used for limiting the number of the bearing devices on the conveying device, and the number of the bearing devices may be multiple, and the specific number may be set according to the actual situation.
As a specific embodiment, when the first carrying device is transported to the next station from one station by the transporting device, the transporting device drives the second carrying device located at the next station behind the first carrying device to move towards the station where the first carrying device originally is located, so that when the first carrying device moves to the next station, the second carrying device moves to the station where the first carrying device originally is located, and compared with the case where the first carrying device completely moves to the next station, the first carrying device is driven by the transporting device to move, which is beneficial to improving the transporting efficiency and the production efficiency of the substrate. Specifically, when the first carrying device moves from one station to one third of the next station, the second carrying device starts to move, including but not limited to, the first carrying device and the second carrying device may move synchronously, or when the first carrying device moves to a position between one station and the next station, the second carrying device starts to move as long as the second carrying device moves to the station where the first carrying device originally located when the first carrying device moves to the next station.
Compared with the prior art, the loading and unloading device, the loading method and the unloading method for the base material have the following advantages:
when the first bearing device is moved out of the feeding area, the second bearing device can be moved to the feeding area, continuous feeding of the base material can be achieved without waiting for the first bearing device to move to the upper plate area, waiting time of the base material in the feeding process is saved, the base material processing efficiency is increased, and enterprise production benefits are enlarged.
When the first bearing device is moved out of the lower plate area, the second bearing device can be moved to the lower plate area, the base material can be continuously obtained without waiting for the first bearing device to move to the blanking area, the waiting time of the base material in the blanking process is saved, the total required time of the base material in the processing process is reduced, and the enterprise production benefit is favorably enlarged.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and any modifications, equivalents, improvements, etc. made within the spirit of the present invention should be included in the scope of the present invention.

Claims (10)

1. A loading and unloading device for a substrate is used for providing the substrate to a processing device for processing and retrieving the processed substrate, and is characterized in that: the feeding and discharging device for the substrates comprises a conveying device, a first bearing device, a second bearing device, a feeding area, a discharging area, a first transfer processing area and a second transfer processing area, wherein the processing device comprises a feeding area and a discharging area, the substrates to be processed are sequentially conveyed to the feeding area from the feeding area through the first transfer processing area by the first bearing device and the second bearing device for processing, and the processed substrates are sequentially conveyed to the discharging area through the second transfer processing area from the discharging area through the first bearing device and the second bearing device for processing.
2. A method for loading and unloading a substrate, which uses the loading and unloading device for a substrate as claimed in claim 1, wherein: the base material feeding method comprises the following steps:
step S11: the first bearing device is driven to the upper plate area by the conveying device and loads a first substrate to be processed;
step S12: the first bearing device is driven by the conveying device and conveys the first substrate to be processed to the first transfer processing area from the upper plate area, and the second bearing device is driven by the conveying device to the upper plate area and loads the second substrate to be processed;
step S13: the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the feeding area, and the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the upper plate area to the first transfer processing area;
step S14: the first bearing device is driven to the upper plate area by the conveying device, and the second bearing device is driven by the conveying device and conveys the second to-be-processed substrate to the feeding area from the first transfer processing area to finish one-time feeding.
3. A method of loading a substrate according to claim 2, wherein: in step S12, the loading and unloading device for the substrate includes a first stopping mechanism, and when the first carrier is driven by the conveyor and transports the first substrate to be processed from the loading area to the first transfer processing area, the first stopping mechanism works to prevent the second carrier from entering the first transfer processing area before the first carrier leaves the first transfer processing area.
4. A method of loading a substrate according to claim 3, wherein: in step S13, when the first carrier is carried by the conveyor and transports the first substrate to be processed from the first transfer processing area to the loading area, the first stopping mechanism stops working to release the stop of the second carrier from being transported to the first transfer processing area.
5. A method of loading a substrate according to claim 2, wherein: the first base material to be processed is loaded to the first bearing device in a mode of being clamped or absorbed by the first bearing device; and the second substrate to be processed is loaded to the second bearing device in a mode of being clamped or absorbed by the second bearing device.
6. A method of loading a substrate according to claim 2, wherein: the first to-be-processed substrate and the second to-be-processed substrate are copper-clad plates or printed circuit boards.
7. A method for blanking a substrate, which uses the loading and unloading device for the substrate as claimed in claim 1, and is characterized in that: the blanking method of the base material comprises the following steps:
step S21: the first bearing device is driven by the conveying device to the blanking area and loads the first processed substrate;
step S22: the first bearing device is driven by the conveying device and conveys the first processed base material to the second transfer processing area from the blanking area, and the second bearing device is driven by the conveying device to the blanking area and loads the second processed base material;
step S23: the first bearing device is driven by the conveying device and conveys the first processed substrate from the second transfer processing area to the lower plate area, and the second bearing device is driven by the conveying device and moves the second processed substrate from the lower plate area to the second transfer processing area;
step S24: the first bearing device is driven by the conveying device to the blanking area, and the second bearing device is driven by the conveying device and conveys the second processed substrate from the second transfer processing area to the lower plate area to finish primary blanking.
8. The method of blanking a substrate according to claim 7, wherein: in step S22, the loading and unloading device of the substrate includes a second stopping mechanism, and when the first carrier is driven by the conveyor and transports the first processed substrate from the unloading area to the second transfer processing area, the second stopping mechanism works to prevent the second carrier from entering the second transfer processing area before the first carrier leaves the second transfer processing area.
9. The method of blanking a substrate according to claim 8, wherein: in step S23, the substrate loading and unloading device includes a third stopping mechanism, when the first carrier is driven by the conveyor and transports the first processed substrate from the second transfer processing area to the lower board area, the second stopping mechanism stops working to release the second carrier from being transported to the second transfer processing area, and the third stopping mechanism works to prevent the second carrier from entering the lower board area before the first carrier leaves the lower board area.
10. The method of blanking a substrate according to claim 9, wherein: in step S24, when the first carrier is carried to the blanking region by the conveyor, the third stopping mechanism stops working, and the second carrier is released from being conveyed to the lower plate region.
CN202110903022.9A 2021-08-06 2021-08-06 Substrate loading and unloading device, substrate loading method and substrate unloading method Active CN113493097B (en)

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CN202110903022.9A CN113493097B (en) 2021-08-06 2021-08-06 Substrate loading and unloading device, substrate loading method and substrate unloading method
TW110145127A TWI814161B (en) 2021-08-06 2021-12-03 Substrate loading and unloading device, loading method, and unloading method

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Citations (5)

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