CN113493097B - Substrate loading and unloading device, substrate loading method and substrate unloading method - Google Patents

Substrate loading and unloading device, substrate loading method and substrate unloading method Download PDF

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Publication number
CN113493097B
CN113493097B CN202110903022.9A CN202110903022A CN113493097B CN 113493097 B CN113493097 B CN 113493097B CN 202110903022 A CN202110903022 A CN 202110903022A CN 113493097 B CN113493097 B CN 113493097B
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area
substrate
processed
driven
bearing device
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CN113493097A (en
Inventor
吴凝香
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Chaojie Semiconductor Equipment Shenzhen Co ltd
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Chaojie Semiconductor Equipment Shenzhen Co ltd
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Priority to CN202110903022.9A priority Critical patent/CN113493097B/en
Publication of CN113493097A publication Critical patent/CN113493097A/en
Priority to TW110145127A priority patent/TWI814161B/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/88—Separating or stopping elements, e.g. fingers
    • B65G47/8876—Separating or stopping elements, e.g. fingers with at least two stops acting as gates
    • B65G47/8884—Stops acting asynchronously, e.g. one stop open, next one closed or the opposite
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Abstract

The invention relates to the technical field of substrate conveying, in particular to a substrate loading and unloading device which comprises a conveying device, a first bearing device, a second bearing device, an upper plate area, a lower plate area, a first transfer processing area and a second transfer processing area. The invention also relates to a substrate feeding method, and the substrate feeding and discharging device adopting the substrate feeding and discharging method. The invention also relates to a substrate blanking method, and the substrate loading and unloading device is adopted. When the first bearing device moves out of the feeding area, the second bearing device can move to the feeding area, continuous feeding of the base material is achieved, and waiting time is saved.

Description

Substrate loading and unloading device, substrate loading method and substrate unloading method
[ field of technology ]
The invention relates to the technical field of substrate conveying, in particular to a substrate loading and unloading device, a substrate loading method and a substrate unloading method.
[ background Art ]
In the conventional substrate transportation mode, the substrate is usually transported from the loading area to the processing device directly by a transportation mechanism, and is transported from the processing device to the unloading area directly, and when the substrate is transported from the loading area to the processing device, the latter transportation mechanism needs to wait for the former transportation mechanism to move from the processing device to the original position before moving to the processing device, so that the waiting time of the substrate in the transportation process is increased; similarly, when the substrate is transported from the processing device to the unloading area, the latter transporting mechanism needs to wait for the former transporting mechanism to move from the unloading area to the original position before moving to the unloading area for unloading processing, and the waiting time of the substrate in the transporting process is increased.
Accordingly, the prior art has shortcomings and needs improvement.
[ invention ]
The invention provides a substrate loading and unloading device, a substrate loading and unloading method and a substrate unloading method, and aims to solve the technical problem that the waiting time of a substrate in the loading and unloading process is too long.
The technical problem to be solved by the invention is to provide a substrate loading and unloading device, which comprises a conveying device, a first bearing device, a second bearing device, an upper plate area, a lower plate area, a first transfer processing area and a second transfer processing area, wherein the processing device comprises a loading area and a unloading area, the substrate to be processed is conveyed to the loading area from the upper plate area to be processed by the first bearing device and the second bearing device in sequence, and the processed substrate is conveyed to the lower plate area from the unloading area to the second transfer processing area by the first bearing device and the second bearing device in sequence.
The invention also provides a substrate feeding method, which adopts the substrate feeding and discharging device and comprises the following steps:
step S11: the first bearing device is driven by the conveying device to the upper plate area and loads a first substrate to be processed;
step S12: the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the upper plate area to the first transfer treatment area, and the second bearing device is driven by the conveying device to the upper plate area and loads the second substrate to be processed;
step S13: the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the feeding area, and the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the upper plate area to the first transfer processing area;
step S14: the first bearing device is driven by the conveying device to the upper plate area, the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the first transfer treatment area to the feeding area, and one-time feeding is completed.
Preferably, in the step S12, the loading and unloading device for the substrate includes a first stopping mechanism, and when the first carrying device is driven by the conveying device and conveys the first substrate to be processed from the upper plate area to the first transferring area, the first stopping mechanism works to prevent the second carrying device from entering the first transferring area before the first carrying device leaves the first transferring area.
Preferably, in the step S13, when the first carrying device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the feeding area, the first stopping mechanism stops working, and stops conveying the second carrying device to the first transfer processing area.
Preferably, the first substrate to be processed is loaded at the first bearing device in a manner of being clamped or absorbed by the first bearing device; the second substrate to be processed is loaded to the second bearing device in a mode of being clamped or absorbed by the second bearing device.
Preferably, the first to-be-processed substrate and the second to-be-processed substrate are copper clad laminates or printed circuit boards.
The invention also provides a substrate feeding method, which adopts the substrate feeding and discharging device and comprises the following steps:
step S21: the first bearing device is driven by the conveying device to the blanking area and loads a first processed substrate;
step S22: the first bearing device is driven by the conveying device and conveys the first processed substrate from the blanking area to the second transfer processing area, and the second bearing device is driven by the conveying device to the blanking area and loads the second processed substrate;
step S23: the first bearing device is driven by the conveying device and conveys and puts the first processed substrate from the second transfer processing area to the lower plate area, and the second bearing device is driven by the conveying device and moves the second processed substrate from the blanking area to the second transfer processing area;
step S24: the first bearing device is driven by the conveying device to the blanking area, the second bearing device is driven by the conveying device and conveys the second processed base material from the second transfer processing area to the lower plate area, and one-time blanking is completed.
Preferably, in the step S22, the loading and unloading device for the substrate includes a second stopping mechanism, where when the first carrying device is driven by the conveying device and conveys the first processed substrate from the unloading area to the second transferring area, the second stopping mechanism works to prevent the second carrying device from entering the second transferring area before the first carrying device leaves the second transferring area.
Preferably, in the step S23, the loading and unloading device for the substrate includes a third stopping mechanism, and when the first carrying device is driven by the conveying device and conveys the first processed substrate from the second transfer processing area to the lower plate area, the second stopping mechanism stops working, and releases the second carrying device from being conveyed to the second transfer processing area, and at the same time, the third stopping mechanism works to prevent the second carrying device from entering the lower plate area before the first carrying device leaves the lower plate area.
Preferably, in the step S24, when the first carrying device is driven to the blanking area by the conveying device, the third stopping mechanism stops working, and stops the second carrying device from being conveyed to the blanking area.
Compared with the prior art, the substrate loading and unloading device, the substrate loading method and the substrate unloading method have the following advantages:
when the first bearing device moves out of the feeding area, the second bearing device can move to the feeding area without waiting for the first bearing device to move to the upper plate area, so that continuous feeding of the base material can be realized, waiting time of the base material in the feeding process is saved, the processing efficiency of the base material is improved, and the production benefit of enterprises is enlarged.
When the first bearing device moves out of the lower plate area, the second bearing device can move to the lower plate area without waiting for the first bearing device to move to the blanking area, so that the continuous running of the base material can be realized, the waiting time of the base material in the blanking process is saved, the total time required by the base material in the processing process is reduced, and the production benefit of enterprises is favorably enlarged.
[ description of the drawings ]
FIG. 1 is a schematic block diagram of a system for loading and unloading a substrate and a processing apparatus according to the present invention.
FIG. 2 is a schematic flow chart of the substrate feeding method of the present invention.
FIG. 3 is a schematic flow chart of the substrate blanking method of the present invention.
FIG. 4 is a schematic view of the substrate of the present invention during loading and unloading.
Reference numerals illustrate:
11. a first carrying device; 12. a second carrying device; 13. a transfer device; 15. an upper plate area; 16. a lower plate region; 17. a first transfer processing zone; 18. a second transfer processing zone; 19. a processing device; 20. a feeding area; 21. and a blanking area.
[ detailed description ] of the invention
The present invention will be described in further detail with reference to the accompanying drawings and examples of implementation in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
The terms "comprising" and "having" and any variations thereof in the description of the invention and the claims and the description of the drawings above are intended to cover a non-exclusive inclusion. The terms first, second and the like in the description and in the claims or in the above-described figures, are used for distinguishing between different objects and not necessarily for describing a sequential or chronological order.
Referring to fig. 1, the present invention provides a substrate loading and unloading device for providing a substrate to a processing device 19 for processing and retrieving the processed substrate, which includes a control portion (not shown), a conveying device 13 electrically connected to the control portion, a first carrying device 11, a second carrying device 12, an upper plate 15, a lower plate 16, a first transferring region 17, and a second transferring region 18, wherein the processing device 19 includes a loading region 20 and a unloading region 21, the first carrying device 11 and the second carrying device 12 are respectively connected to the conveying device 13 and can be driven by the conveying device 13 to move, the substrate to be processed is sequentially conveyed from the upper plate 15 to the loading region 20 by the first transferring region 17 by the first carrying device 11 and the second carrying device 12 under the control of the control portion for the processing device 19 to process the substrate, and the processed substrate is sequentially conveyed from the unloading region 21 to the lower plate 16 by the first carrying device 11 and the second carrying device 12 under the control of the control portion so as to complete unloading of the substrate.
Further, the loading and unloading device of the substrate further comprises a first stopping mechanism, a second stopping mechanism and a third stopping mechanism (not shown) which are electrically connected with the control part, wherein the first stopping mechanism is arranged in the upper plate area 15, the second stopping mechanism is arranged in the unloading area 21, the third stopping mechanism is arranged in the second transfer processing area 18, and the first stopping mechanism and the second stopping mechanism are used for stopping the bearing device positioned in the first stopping mechanism and the second stopping mechanism when working so as to prevent collision between the bearing devices.
Referring to fig. 2, the present invention further provides a method for feeding a substrate, which adopts the above-mentioned feeding and discharging device for the substrate, comprising the following steps:
step S11: the first bearing device is driven by the conveying device to the upper plate area and loads the first substrate to be processed.
In this step, the first carrying device can assist the loading of the first substrate to be processed by an external device or a worker.
Step S12: the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the upper plate area to the first transfer processing area, and the second bearing device is driven by the conveying device to the upper plate area and loads the second substrate to be processed.
Preferably, the first to-be-processed substrate and the second to-be-processed substrate are copper clad laminates or printed circuit boards, and can be specifically set according to actual practice.
Preferably, the first substrate to be processed is loaded at the first carrying device in a manner of being clamped or absorbed by the first carrying device; the second substrate to be processed is loaded to the second bearing device in a mode of being clamped or absorbed by the second bearing device. The first bearing device and the second bearing device can also realize the loading of the base materials by screwing and the like, and the base materials can be specifically arranged according to the actual implementation.
In step S12, when the first carrying device is driven by the conveying device and conveys the first substrate to be processed from the upper plate area to the first transfer processing area, the first stopping mechanism works to prevent the second carrying device from entering the first transfer processing area before the first carrying device leaves the first transfer processing area.
The first stop mechanism can effectively prevent the possibility of damage to the structure of the second bearing device caused by contact with the first bearing device, and is beneficial to prolonging the service lives of the first bearing device and the second bearing device.
Step S13: the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the feeding area, and the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the upper plate area to the first transfer processing area.
In step S13, when the first carrying device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the loading area, the first stopping mechanism stops working, and stops conveying the second carrying device to the first transfer processing area.
Step S14: the first bearing device is driven by the conveying device to the upper plate area, the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the first transfer treatment area to the feeding area, and one-time feeding is completed.
Referring to fig. 3, the present invention further provides a substrate feeding method, which adopts the substrate feeding and discharging device, comprising the following steps:
step S21: the first bearing device is driven by the conveying device to the blanking area and loads a first processed substrate;
step S22: the first bearing device is driven by the conveying device and conveys the first processed substrate from the blanking area to the second transferring processing area, and the second bearing device is driven by the conveying device to the blanking area and loads the second processed substrate.
Preferably, the first processed substrate and the second processed substrate are copper clad laminates or printed circuit boards, and can be specifically set according to practical implementation.
Preferably, the first processed substrate is loaded at the first carrier by being held or adsorbed by the first carrier; the second processed substrate is loaded onto the second carrier by being held or adsorbed by the second carrier. The first bearing device and the second bearing device can also realize the loading of the base materials by screwing and the like, and the base materials can be specifically arranged according to the actual implementation.
In step S22, when the first carrying device is driven by the conveying device and conveys the first processed substrate from the blanking area to the second transfer processing area, the second stopping mechanism works to prevent the second carrying device from entering the second transfer processing area before the first carrying device leaves the second transfer processing area.
The second stop mechanism can effectively prevent the possibility of structural damage caused by contact between the first bearing device and the second bearing device, and is beneficial to prolonging the service lives of the first bearing device and the second bearing device.
Step S23: the first bearing device is driven by the conveying device and conveys and puts the first processed substrate from the second transfer processing area to the lower plate area, and the second bearing device is driven by the conveying device and moves the second processed substrate from the blanking area to the second transfer processing area.
Step S23 further includes the steps of:
in step S23, when the first carrying device is driven by the conveying device and conveys the first processed substrate from the second transfer processing area to the lower plate area, the second stopping mechanism stops working, and releases the second carrying device from being conveyed to the second transfer processing area, and at the same time, the third stopping mechanism works, so that the second carrying device is prevented from entering the lower plate area before the first carrying device leaves the lower plate area.
Through the backstop effect of third backstop structure, can prevent effectively that first carrier and second carrier from contacting in the hypoplastron district, be favorable to preventing first carrier and second carrier and lead to the probability of damage because of taking place to contact, be favorable to promoting life.
Step S24: the first bearing device is driven by the conveying device to the blanking area, the second bearing device is driven by the conveying device and conveys the second processed base material from the second transfer processing area to the lower plate area, and one-time blanking is completed.
In the step S24, when the first carrying device is driven by the conveying device to the discharging area, the third stopping mechanism stops working, and stops the second carrying device from being conveyed to the lower plate area.
Referring to fig. 4, when the feeding and discharging device of the substrate of the present invention works by the feeding method and the discharging method of the substrate, during feeding: the first bearing device is driven by the conveying device to the upper plate area and loads a first substrate to be processed, then the first bearing device is conveyed from the upper plate area to the first transfer processing area, the second bearing device is driven by the conveying device to the upper plate area and loads a second substrate to be processed, the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the feeding area, then the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the upper plate area to the first transfer processing area, the first bearing device is driven by the conveying device to the upper plate area, and the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the first transfer processing area to the feeding area, so that one-time feeding is completed; the processing device is used for processing the substrate to be processed, which is positioned in the feeding area, and in the processing process, the first bearing device and the second bearing device bear the first substrate to be processed and the second substrate to be processed all the time; during blanking: the first bearing device is driven by the conveying device to the blanking area and loads the first processed substrate, then the first bearing device is driven by the conveying device and conveys the first processed substrate from the blanking area to the second transfer processing area, the second bearing device is driven by the conveying device to the blanking area and loads the second processed substrate, then the first bearing device is driven by the conveying device and conveys the first processed substrate from the second transfer processing area to the lower plate area, the second bearing device is driven by the conveying device and moves the second processed substrate from the blanking area to the second transfer processing area, finally the first bearing device is driven by the conveying device to the blanking area, and the second bearing device is driven by the conveying device and conveys the second processed substrate from the second transfer processing area to the lower plate area, so that one-time blanking is completed. The first bearing device and the second bearing device are driven by the conveying device to continuously feed and discharge the processing device.
It can be understood that the first carrying device and the second carrying device are only used for distinguishing the sequence of loading and unloading, and are not used for limiting the number of carrying devices on the conveying device, and a plurality of carrying devices can be arranged, and the specific number can be set according to actual practice.
As a specific embodiment, when the first carrying device is transported from one station to the next station by the transporting device, the transporting device drives the second carrying device located at the position of the next station behind the first carrying device to move towards the station where the first carrying device is originally located, so that when the first carrying device moves to the next station, the second carrying device moves to the station where the first carrying device is originally located, compared with when the first carrying device moves to the next station completely, the first carrying device is driven by the transporting device to move, which is beneficial to improving the transporting efficiency and the production efficiency of the base material. Specifically, when the first carrying device moves from one station to one third of the next station, the second carrying device starts to move, including but not limited to, the first carrying device and the second carrying device may move synchronously, or when the first carrying device moves to a certain position between the one station and the next station, the second carrying device starts to move, so long as the first carrying device moves to the station where the first carrying device is originally located when moving to the next station.
Compared with the prior art, the substrate loading and unloading device, the substrate loading method and the substrate unloading method have the following advantages:
when the first bearing device moves out of the feeding area, the second bearing device can move to the feeding area without waiting for the first bearing device to move to the upper plate area, so that continuous feeding of the base material can be realized, waiting time of the base material in the feeding process is saved, the processing efficiency of the base material is improved, and the production benefit of enterprises is enlarged.
When the first bearing device moves out of the lower plate area, the second bearing device can move to the lower plate area without waiting for the first bearing device to move to the blanking area, so that the continuous running of the base material can be realized, the waiting time of the base material in the blanking process is saved, the total time required by the base material in the processing process is reduced, and the production benefit of enterprises is favorably enlarged.
The foregoing description of the preferred embodiments of the invention is not intended to limit the scope of the invention, but is intended to cover any modifications, equivalents, and improvements within the spirit of the invention.

Claims (10)

1. The utility model provides a last unloader of substrate for provide the substrate and handle and retrieve the substrate after handling device handles, its characterized in that: the substrate loading and unloading device comprises a conveying device, a first bearing device, a second bearing device, an upper plate area, a lower plate area, a first transfer treatment area and a second transfer treatment area, wherein the treatment device comprises a loading area and a unloading area, the substrate to be processed is conveyed to the loading area from the upper plate area to be processed through the first transfer treatment area by the first bearing device and the second bearing device in sequence, and the processed substrate is conveyed to the lower plate area from the unloading area to the second transfer treatment area by the first bearing device and the second bearing device in sequence.
2. A method for feeding a substrate, which adopts the feeding and discharging device for the substrate according to claim 1, characterized in that: the substrate feeding method comprises the following steps:
step S11: the first bearing device is driven by the conveying device to the upper plate area and loads a first substrate to be processed;
step S12: the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the upper plate area to the first transfer treatment area, and the second bearing device is driven by the conveying device to the upper plate area and loads the second substrate to be processed;
step S13: the first bearing device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the feeding area, and the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the upper plate area to the first transfer processing area;
step S14: the first bearing device is driven by the conveying device to the upper plate area, the second bearing device is driven by the conveying device and conveys the second substrate to be processed from the first transfer treatment area to the feeding area, and one-time feeding is completed.
3. The method of loading a substrate according to claim 2, wherein: in the step S12, the loading and unloading device for the substrate includes a first stopping mechanism, and when the first carrying device is driven by the conveying device and conveys the first substrate to be processed from the upper plate area to the first transferring area, the first stopping mechanism works to prevent the second carrying device from entering the first transferring area before the first carrying device leaves the first transferring area.
4. A method of loading a substrate according to claim 3, wherein: in the step S13, when the first carrying device is driven by the conveying device and conveys the first substrate to be processed from the first transfer processing area to the feeding area, the first stopping mechanism stops working, and the second carrying device is released from being conveyed to the first transfer processing area.
5. The method of loading a substrate according to claim 2, wherein: the first substrate to be processed is loaded to the first bearing device in a mode of being clamped or absorbed by the first bearing device; the second substrate to be processed is loaded to the second bearing device in a mode of being clamped or absorbed by the second bearing device.
6. The method of loading a substrate according to claim 2, wherein: the first to-be-processed base material and the second to-be-processed base material are copper clad laminates or printed circuit boards.
7. A method for blanking a substrate, which adopts the loading and blanking device of the substrate according to claim 1, characterized in that: the substrate blanking method comprises the following steps:
step S21: the first bearing device is driven by the conveying device to the blanking area and loads a first processed substrate;
step S22: the first bearing device is driven by the conveying device and conveys the first processed substrate from the blanking area to the second transfer processing area, and the second bearing device is driven by the conveying device to the blanking area and loads the second processed substrate;
step S23: the first bearing device is driven by the conveying device and conveys and puts the first processed substrate from the second transfer processing area to the lower plate area, and the second bearing device is driven by the conveying device and moves the second processed substrate from the blanking area to the second transfer processing area;
step S24: the first bearing device is driven by the conveying device to the blanking area, the second bearing device is driven by the conveying device and conveys the second processed base material from the second transfer processing area to the lower plate area, and one-time blanking is completed.
8. The method of blanking a substrate according to claim 7, wherein: in the step S22, the loading and unloading device for the substrate includes a second stopping mechanism, where when the first carrying device is driven by the conveying device and conveys the first processed substrate from the unloading area to the second transferring area, the second stopping mechanism works to prevent the second carrying device from entering the second transferring area before the first carrying device leaves the second transferring area.
9. The method of blanking a substrate according to claim 8, wherein: in the step S23, the loading and unloading device for the substrate includes a third stopping mechanism, and when the first carrying device is driven by the conveying device and conveys the first processed substrate from the second transfer processing area to the lower plate area, the second stopping mechanism stops working, so as to release the second carrying device from being conveyed to the second transfer processing area, and meanwhile, the third stopping mechanism works to prevent the second carrying device from entering the lower plate area before the first carrying device leaves the lower plate area.
10. The method of blanking a substrate according to claim 9, wherein: in the step S24, when the first carrying device is driven by the conveying device to the discharging area, the third stopping mechanism stops working, and stops the second carrying device from being conveyed to the lower plate area.
CN202110903022.9A 2021-08-06 2021-08-06 Substrate loading and unloading device, substrate loading method and substrate unloading method Active CN113493097B (en)

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CN202110903022.9A CN113493097B (en) 2021-08-06 2021-08-06 Substrate loading and unloading device, substrate loading method and substrate unloading method
TW110145127A TWI814161B (en) 2021-08-06 2021-12-03 Substrate loading and unloading device, loading method, and unloading method

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