CN113490844A - 异物检查装置及异物检查方法 - Google Patents

异物检查装置及异物检查方法 Download PDF

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Publication number
CN113490844A
CN113490844A CN201980061509.8A CN201980061509A CN113490844A CN 113490844 A CN113490844 A CN 113490844A CN 201980061509 A CN201980061509 A CN 201980061509A CN 113490844 A CN113490844 A CN 113490844A
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China
Prior art keywords
foreign matter
inspection object
inspection
light source
imaging
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Pending
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CN201980061509.8A
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English (en)
Chinese (zh)
Inventor
佐野荣一
中村瑞树
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Fk Optical Research Institute Co ltd
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Fk Optical Research Institute Co ltd
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Publication of CN113490844A publication Critical patent/CN113490844A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN201980061509.8A 2019-02-21 2019-02-21 异物检查装置及异物检查方法 Pending CN113490844A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/006548 WO2020170389A1 (ja) 2019-02-21 2019-02-21 異物検査装置及び異物検査方法

Publications (1)

Publication Number Publication Date
CN113490844A true CN113490844A (zh) 2021-10-08

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CN201980061509.8A Pending CN113490844A (zh) 2019-02-21 2019-02-21 异物检查装置及异物检查方法

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JP (1) JP7125576B2 (ja)
CN (1) CN113490844A (ja)
WO (1) WO2020170389A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022009490A1 (ja) * 2020-07-07 2022-01-13 コニカミノルタ株式会社 検査装置
EP4043870A1 (de) * 2021-02-16 2022-08-17 sun-X GmbH Vorrichtung und verfahren zur ermittlung des verschmutzungsgrades einer oberfläche eines solarmoduls

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067845A (ja) * 1983-09-26 1985-04-18 Nippon Kogaku Kk <Nikon> 異物検査装置
JPH08292021A (ja) * 1995-04-24 1996-11-05 Matsushita Electric Ind Co Ltd 異物検査装置
JP2007119115A (ja) * 2005-10-25 2007-05-17 Shimadzu Corp Ｔｆｔアレイ検査装置
CN1979136A (zh) * 2005-12-08 2007-06-13 群康科技(深圳)有限公司 薄膜缺陷检查方法
CN101981683A (zh) * 2008-03-27 2011-02-23 东京毅力科创株式会社 缺陷分类方法、计算机存储介质以及缺陷分类装置
CN102473663A (zh) * 2009-07-22 2012-05-23 克拉-坦科股份有限公司 用环形照射的暗场检查系统
CN104094104A (zh) * 2012-02-07 2014-10-08 肖特公开股份有限公司 用于识别透明片体内的缺陷部位的装置和方法以及该装置的使用
CN106030291A (zh) * 2014-02-26 2016-10-12 克朗斯股份公司 用于检查容器的设备和方法
CN107635677A (zh) * 2015-05-18 2018-01-26 费南泰克控股有限公司 检查方法和检查系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI422814B (zh) * 2010-08-23 2014-01-11 Delta Electronics Inc 基板內部缺陷檢查裝置及方法
JP2014038045A (ja) 2012-08-17 2014-02-27 Sony Corp 検査装置、照明、検査方法、プログラム及び基板の製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067845A (ja) * 1983-09-26 1985-04-18 Nippon Kogaku Kk <Nikon> 異物検査装置
JPH08292021A (ja) * 1995-04-24 1996-11-05 Matsushita Electric Ind Co Ltd 異物検査装置
JP2007119115A (ja) * 2005-10-25 2007-05-17 Shimadzu Corp Ｔｆｔアレイ検査装置
CN1979136A (zh) * 2005-12-08 2007-06-13 群康科技(深圳)有限公司 薄膜缺陷检查方法
CN101981683A (zh) * 2008-03-27 2011-02-23 东京毅力科创株式会社 缺陷分类方法、计算机存储介质以及缺陷分类装置
CN102473663A (zh) * 2009-07-22 2012-05-23 克拉-坦科股份有限公司 用环形照射的暗场检查系统
CN104094104A (zh) * 2012-02-07 2014-10-08 肖特公开股份有限公司 用于识别透明片体内的缺陷部位的装置和方法以及该装置的使用
CN106030291A (zh) * 2014-02-26 2016-10-12 克朗斯股份公司 用于检查容器的设备和方法
CN107635677A (zh) * 2015-05-18 2018-01-26 费南泰克控股有限公司 检查方法和检查系统

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JP7125576B2 (ja) 2022-08-25
JPWO2020170389A1 (ja) 2021-03-11
WO2020170389A1 (ja) 2020-08-27

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